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"A Novel Chamber Scheduling Method in Etching Tools Using Adaptive Neural ..."

Hua Xu, Peifa Jia, Xuegong Zhang (2005)

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DOI: 10.1007/11427469_144

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-19

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  dblp key:
  - conf/isnn/XuJZ05a
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  - https://dblp.org/rec/conf/isnn/XuJZ05a
Hua Xu, Peifa Jia, Xuegong Zhang:
A Novel Chamber Scheduling Method in Etching Tools Using Adaptive Neural Networks. ISNN (3) 2005: 908-913

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