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"An IoT Solution for Condition Monitoring of a Lithography Coater Tool in a ..."

Yvonne Bergmann et al. (2022)

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DOI: 10.1109/ICPS51978.2022.9817007

access: closed

type: Conference or Workshop Paper

metadata version: 2022-08-03

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  - conf/icphys/BergmannLKKJRKW22
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  - https://dblp.org/rec/conf/icphys/BergmannLKKJRKW22
Yvonne Bergmann, Michael Leippert, Juergen Kuehnle, Johannes Kristan, Sven Erik Jeroschewski, Lukas Römer, Paul Knaus, Axel Wogawa:
An IoT Solution for Condition Monitoring of a Lithography Coater Tool in a Semiconductor Fab. ICPS 2022: 1-6

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