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"Design of a Levitating Nano-Positioning Stage with Arc-Edged Permanent ..."
Junwei Chen et al. (2015)
- Junwei Chen, Le-tong Ma, Bo Zhang, Han Ding:
Design of a Levitating Nano-Positioning Stage with Arc-Edged Permanent Magnet Halbach Arrays. ICIRA (2) 2015: 577-586
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