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"Surface orientation dependence of ion bombardment damage during plasma ..."

Yukimasa Okada, Koji Eriguchi, Kouichi Ono (2015)

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DOI: 10.1109/ICICDT.2015.7165902

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Yukimasa Okada, Koji Eriguchi, Kouichi Ono:
Surface orientation dependence of ion bombardment damage during plasma processing. ICICDT 2015: 1-5

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