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"A Gas Medium Approach To Sensitivity Improvement Of MEMS-Based Thermal ..."
Wenhan Chang et al. (2019)
- Wenhan Chang, Zhe Li, Shengzhan Cheng, Shoule Sun, Chengchen Gao, Yilong Hao:
A Gas Medium Approach To Sensitivity Improvement Of MEMS-Based Thermal Acoustic Particle Velocity Sensors. ICICDT 2019: 1-4
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