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"Position Sensing of Electrostatic MEMS Actuator."

Zdenek Kolka, Viera Biolková, Dalibor Biolek (2022)

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DOI: 10.1109/ICECS202256217.2022.9971110

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-23

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  dblp key:
  - conf/icecsys/KolkaBB22
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  - https://dblp.org/rec/conf/icecsys/KolkaBB22
Zdenek Kolka, Viera Biolková, Dalibor Biolek:
Position Sensing of Electrostatic MEMS Actuator. ICECS 2022 2022: 1-4

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