default search action

combined dblp search
author search
venue search
publication search

ask others

"Symbiotic Simulation Control in Semiconductor Manufacturing."

Heiko Aydt et al. (2008)

> Home

Details and statistics

DOI: 10.1007/978-3-540-69389-5_5

access: open

type: Conference or Workshop Paper

metadata version: 2024-05-07

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - conf/iccS/AydtTCLLG08
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/iccS/AydtTCLLG08
Heiko Aydt, Stephen John Turner, Wentong Cai, Malcolm Yoke Hean Low, Peter Lendermann, Boon-Ping Gan:
Symbiotic Simulation Control in Semiconductor Manufacturing. ICCS (3) 2008: 26-35

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.