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"UV Nanoimprint Lithography Using an Elementwise Embossed Stamp."

Jun-ho Jeong et al. (2004)

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DOI: 10.1109/ICMENS.2004.1508952

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  persistent URL:
  - https://dblp.org/rec/conf/icmens/JeongSSL04
Jun-ho Jeong, Young-suk Sim, Hyonkee Sohn, Eung-sug Lee:
UV Nanoimprint Lithography Using an Elementwise Embossed Stamp. ICMENS 2004: 233-236

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