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"Basic Study on Analysis and Suppression of Inverse Response Caused by ..."
Takumi Hayashi et al. (2021)
- Takumi Hayashi, Hiroshi Fujimoto, Yoshihiro Isaoka, Yuki Terada:
Basic Study on Analysis and Suppression of Inverse Response Caused by Feedforward Friction Compensation of Ball-screw-driven Stage. ICM 2021: 1-6
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