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"Finite element simulation of SMFBAR based sensor."

Chi-Jung Cheng, Massood Zandi Atashbar (2009)

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DOI: 10.1109/EIT.2009.5189609

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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Chi-Jung Cheng, Massood Zandi Atashbar:
Finite element simulation of SMFBAR based sensor. EIT 2009: 190-195

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