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"Identifying Combination of Defects and Unknown Defects on Semiconductor ..."

Ankit Gupta et al. (2022)

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DOI: 10.1109/VLSID2022.2022.00039

access: closed

type: Conference or Workshop Paper

metadata version: 2022-09-29

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  - conf/vlsid/GuptaBDJLOKK22
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  - https://dblp.org/rec/conf/vlsid/GuptaBDJLOKK22
Ankit Gupta, Adrita Barari, Damini, Keerthi Kiran Jagannathachar, Seungwoo Lee, Janghoon Oh, Jungha Kim, Min-Joo Kim:
Identifying Combination of Defects and Unknown Defects on Semiconductor Wafers using Deep Learning and Hierarchical Reclustering. VLSID 2022: 150-155

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