002851351 001__ 2851351 002851351 005__ 20230302222406.0 002851351 0248_ $$aoai:cds.cern.ch:2851351$$pcerncds:FULLTEXT 002851351 037__ $$aATL-ITK-SLIDE-2022-694 002851351 041__ $$aeng 002851351 088__ $$9ATL-COM-ITK-2022-037 002851351 100__ $$0AUTHOR|(CDS)2088398$$0AUTHOR|(SzGeCERN)748687$$aAbidi, Haider$$msyed.haider.abidi@cern.ch$$uBrookhaven National Laboratory (US) 002851351 110__ $$aThe ATLAS collaboration 002851351 245__ $$aSpecifications and Pre-Production of n+-in-p Large-format Strip Sensors fabricated in 6-inch Silicon Wafers, ATLAS18, for Inner Tracker of ATLAS Detector for High-Luminosity Large Hadron Collider 002851351 260__ $$c2023 002851351 269__ $$aGeneva$$bCERN$$c01 Mar 2023 002851351 300__ $$a1 p 002851351 520__ $$aThe full volume of the inner tracker of the ATLAS experiment will be replaced with new all-Silicon detectors for HL-LHC. The strip detectors, in the radial extent of 40 to 100 cm, are made of four layers of cylindrical-structures in the barrel and six layers of disk-structures in the endcap section with 2 layers of strip sensors for stereo-viewing in each layer-structure. The corresponding area of strip sensors, at 165 m^2, will be covered with 10976 barrel and 6912 endcap sensors. A new approach is adopted to use p-type material to be more radiation-tolerant, making the readout in n-strips, so-called n+-in-p sensors, to cope with the fluence of 9.7×10^14 (1.6×10^15) 1-MeV neutron-equivalent (neq)/cm^2 and ionizing dose of 44 (66) Mrad at the maximum in the barrel (endcap in the parenthesis) section, for its lifetime including a safety factor of 1.5. The readout is AC-coupled and the strips are biased via Polysilicon resistors for all sensors. In the barrel sensors, the geometry is square, 9.8×9.8 cm^2, to have the largest area of sensor possible from a 6-inch wafer. The strips are laid out in parallel with a strip pitch of 75.5 µm and 4 or 2 rows of strip segments in two types of sensors, "short strips (SS)" for the inner 2 layers and "long strips (LS)" for the outer 2, respectively. In the endcap, we have designed roughly trapezoidal sensors with built-in stereo angle, curved edges along the circumference, and in 6 unique shapes in each radial extent, R0 to R5. The strips are in fan geometry, with a mean pitch of approximately 75 µm and 4 or 2 rows of strip segments. The sensors of this specification are labelled as "ATLAS18xx" where xx stands for SS, LS, Rx (x=0 to 5). With the specifications of mechanical features and electrical performance, CAD files for processing were laid out by following successful designs of ATLAS07, ATLAS12 and ATLAS17LS of the barrel sensors, and ATLAS12EC/R0 of the R0 endcap sensors, together with a number of optimizations. "Pre-Production" amount of 1041 wafers were fabricated and delivered with the tests carried out by vendor. The quality of the sensors was reviewed through the data as provided by the vendor. These sensors were used for establishing and exercising acceptance procedures, and subsequently to be used for pre-production of strip modules and layer structures. 002851351 594__ $$aSLIDE 002851351 595__ $$aCERN CDS-Invenio WebSubmit 002851351 65017 $$2SzGeCERN$$aParticle Physics - Experiment 002851351 65027 $$2SzGeCERN$$aITK 002851351 6531_ $$9CERN$$asilicon strip sensor 002851351 6531_ $$9CERN$$aITk 002851351 6531_ $$9CERN$$aHL-LHC 002851351 690C_ $$aCERN 002851351 690C_ $$aINTNOTE 002851351 690C_ $$aPRIVATLAS 002851351 690C_ $$aPUBLATLASSLIDE 002851351 693__ $$aCERN LHC$$eATLAS 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00061029$$0AUTHOR|(SzGeCERN)608990$$0AUTHOR|(CDS)2072595$$aAffolder, Tony$$maffolder@ucsc.edu$$uUniversity of California,Santa Cruz (US) 002851351 700__ $$0AUTHOR|(CDS)2728158$$0AUTHOR|(SzGeCERN)616693$$aAffolder, Kirsten$$mkaffolder@ucsc.edu$$uUniversity of California,Santa Cruz (US) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00147775$$0AUTHOR|(SzGeCERN)369939$$0AUTHOR|(CDS)2073924$$aAllport, Philip Patrick$$mphilip.patrick.allport@cern.ch$$uUniversity of Birmingham (GB) 002851351 700__ $$0AUTHOR|(CDS)2289048$$0AUTHOR|(SzGeCERN)825605$$aBeaupre, Scott Lee$$mscott.lee.beaupre@cern.ch$$uSimon Fraser University (CA) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00211256$$0AUTHOR|(SzGeCERN)373479$$0AUTHOR|(CDS)2075283$$aBeck, Graham$$mg.beck@qmul.ac.uk$$uUniversity of London (GB) 002851351 700__ $$0AUTHOR|(CDS)2051391$$0AUTHOR|(SzGeCERN)374360$$aBernabeu Verdu, Jose$$mpepe.bernabeu@cern.ch$$uUniv. of Valencia and CSIC (ES) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00042361$$0AUTHOR|(SzGeCERN)443237$$0AUTHOR|(CDS)2081412$$aBevan, Adrian$$madrian.john.bevan@cern.ch$$uUniversity of London (GB) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00236049$$0AUTHOR|(SzGeCERN)684051$$0AUTHOR|(CDS)2081176$$aChisholm, Andrew Stephen$$mAndrew.Chisholm@cern.ch$$uUniversity of Birmingham (GB) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00655599$$0AUTHOR|(SzGeCERN)798479$$0AUTHOR|(CDS)2149970$$aCiungu, Bianca Monica$$mbianca.ciungu@cern.ch$$uUniversity of Toronto (CA) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00213091$$0AUTHOR|(SzGeCERN)385531$$0AUTHOR|(CDS)2068142$$aDawson, Ian$$mIan.Dawson@cern.ch$$uUniversity of London (GB) 002851351 700__ $$0AUTHOR|(CDS)2773855$$0AUTHOR|(SzGeCERN)853717$$aDowling, Andrew Jay$$mandrew.jay.dowling@cern.ch$$uUniversity of California,Santa Cruz (US) 002851351 700__ $$0AUTHOR|(CDS)2072888$$0AUTHOR|(SzGeCERN)574317$$aFadeyev, Vitaliy$$mfadeyev@ucsc.edu$$uUniversity of California,Santa Cruz (US) 002851351 700__ $$0AUTHOR|(CDS)2749247$$0AUTHOR|(SzGeCERN)851008$$aFedericova, Pavla$$mpavla.federicova@cern.ch$$uCzech Academy of Sciences (CZ) 002851351 700__ $$0AUTHOR|(CDS)2100810$$0AUTHOR|(SzGeCERN)783270$$aFernandez-Tejero, Xavi$$mxavi.fdez@cern.ch$$uSimon Fraser University (CA) 002851351 700__ $$0AUTHOR|(CDS)2077396$$0AUTHOR|(SzGeCERN)485407$$aFleta Corral, Celeste$$mceleste.fleta.corral@cern.ch$$uConsejo Superior de Investigaciones Cientificas (CSIC) (ES) 002851351 700__ $$0AUTHOR|(CDS)2773662$$0AUTHOR|(SzGeCERN)853658$$aFournier, Andrew Curtis$$mandrew.curtis.fournier@cern.ch$$uSimon Fraser University (CA) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00425540$$0AUTHOR|(SzGeCERN)739346$$0AUTHOR|(CDS)2085006$$aGignac, Matthew$$mmatthew.gignac@cern.ch$$uUniversity of California,Santa Cruz (US) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00001730$$0AUTHOR|(SzGeCERN)644697$$0AUTHOR|(CDS)2072820$$aGonella, Laura$$mlaura.gonella@cern.ch$$uUniversity of Birmingham (GB) 002851351 700__ $$0AUTHOR|(CDS)2152612$$0AUTHOR|(SzGeCERN)800559$$aGreig, Graham George$$mggreig@sfu.ca$$uSimon Fraser University (CA) 002851351 700__ $$0AUTHOR|(CDS)2316874$$0AUTHOR|(SzGeCERN)830334$$aGunnell, Jane Frances$$mjagunnel@cern.ch 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00300064$$0AUTHOR|(SzGeCERN)399121$$0AUTHOR|(CDS)2073865$$aHara, Kazuhiko$$mhara@hep.px.tsukuba.ac.jp$$uUniversity of Tsukuba (JP) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00397535$$0AUTHOR|(SzGeCERN)723556$$0AUTHOR|(CDS)2286850$$aHirose, Shigeki$$mshigeki.hirose@cern.ch$$uUniversity of Tsukuba (JP) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00027571$$0AUTHOR|(SzGeCERN)477920$$0AUTHOR|(CDS)2075271$$aHommels, Bart$$mhommels@hep.phy.cam.ac.uk$$uUniversity of Cambridge (GB) 002851351 700__ $$0AUTHOR|(CDS)2764856$$0AUTHOR|(SzGeCERN)852365$$aIshii, Tatsuya$$mtatsuya.ishii@cern.ch$$uHigh Energy Accelerator Research Organization (JP) 002851351 700__ $$0AUTHOR|(CDS)2707011$$0AUTHOR|(SzGeCERN)845946$$aJessiman, Callan$$mcallan.jessiman@cern.ch$$uCarleton University (CA) 002851351 700__ $$0AUTHOR|(CDS)2714414$$0AUTHOR|(SzGeCERN)847108$$aJohnson, Jacob Wayne$$mjacob.wayne.johnson@cern.ch$$uUniversity of California,Santa Cruz (US) 002851351 700__ $$0AUTHOR|(CDS)2691633$$0AUTHOR|(SzGeCERN)843531$$aJones, Dominic$$mdominic.matthew.jones@cern.ch$$uUniversity of Cambridge (GB) 002851351 700__ $$0AUTHOR|(CDS)2088143$$0AUTHOR|(SzGeCERN)748333$$aKachiguine, Serguei$$mserguei.kachiguine@cern.ch$$uUniversity of California,Santa Cruz (US) 002851351 700__ $$0AUTHOR|(CDS)2271924$$0AUTHOR|(SzGeCERN)822806$$aKang, Nathan Jihoon$$mnathan.jihoon.kang@cern.ch$$uUniversity of California,Santa Cruz (US) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00334458$$0AUTHOR|(SzGeCERN)678890$$0AUTHOR|(CDS)2073557$$aKeller, John Stakely$$mjohn.stakely.keller@cern.ch$$uCarleton University (CA) 002851351 700__ $$0AUTHOR|(CDS)2089920$$0AUTHOR|(SzGeCERN)753761$$aKlein, Christoph Thomas$$mchristoph.klein@cern.ch$$uCarleton University (CA) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00218105$$0AUTHOR|(SzGeCERN)405583$$0AUTHOR|(CDS)2070426$$aKoffas, Thomas$$mThomas.Koffas@cern.ch$$uCarleton University (CA) 002851351 700__ $$0AUTHOR|(CDS)2308276$$0AUTHOR|(SzGeCERN)828841$$aKopsalis, Ioannis$$mioannis.kopsalis@cern.ch$$uUniversity of Birmingham (GB) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00524985$$0AUTHOR|(SzGeCERN)710113$$0AUTHOR|(CDS)2080604$$aKroll, Jiri$$mJiri.Kroll@cern.ch$$uCzech Academy of Sciences (CZ) 002851351 700__ $$0AUTHOR|(CDS)2075524$$0AUTHOR|(SzGeCERN)693713$$aKvasnicka, Jiri$$mJiri.Kvasnicka@cern.ch$$uCzech Academy of Sciences (CZ) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00099524$$0AUTHOR|(SzGeCERN)407046$$0AUTHOR|(CDS)2070981$$aLacasta Llacer, Carlos$$mcarlos.lacasta@cern.ch$$uUniv. of Valencia and CSIC (ES) 002851351 700__ $$0AUTHOR|(CDS)2242425$$0AUTHOR|(SzGeCERN)818655$$aLatonova, Vera$$mvera.latonova@cern.ch$$uCzech Academy of Sciences (CZ) 002851351 700__ $$0AUTHOR|(CDS)2782116$$0AUTHOR|(SzGeCERN)855429$$aLomas, Joshua David$$mjosh.lomas@cern.ch$$uUniversity of Birmingham (GB) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00220462$$0AUTHOR|(SzGeCERN)438302$$0AUTHOR|(CDS)2075518$$aMikestikova, Marcela$$gPresenter of the poster in the conferece$$mMarcela.Mikestikova@cern.ch$$uCzech Academy of Sciences (CZ) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00049051$$0AUTHOR|(SzGeCERN)589261$$0AUTHOR|(CDS)2077499$$aMiyagawa, Paul$$mPaul.Miyagawa@cern.ch$$uUniversity of London (GB) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00113411$$0AUTHOR|(SzGeCERN)419625$$0AUTHOR|(CDS)2072461$$aOrr, Robert$$morr@physics.utoronto.ca$$uUniversity of Toronto (CA) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00407830$$0AUTHOR|(SzGeCERN)716020$$0AUTHOR|(CDS)2081391$$aPoley, Anne-Luise$$mAnne-Luise.Poley@cern.ch$$uSimon Fraser University (CA) 002851351 700__ $$0AUTHOR|(CDS)2691645$$0AUTHOR|(SzGeCERN)843530$$aRousso, David$$mdavid.rousso@cern.ch$$uUniversity of Cambridge (GB) 002851351 700__ $$0AUTHOR|(CDS)2092901$$0AUTHOR|(SzGeCERN)761631$$aShah, Aashaq$$maashaq.shah@cern.ch$$uUniversity of London (GB) 002851351 700__ $$0AUTHOR|(CDS)2090770$$0AUTHOR|(SzGeCERN)756100$$aSolaz Contell, Carles$$mcarles.solaz.contell@cern.ch$$uUniv. of Valencia and CSIC (ES) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00232570$$0AUTHOR|(SzGeCERN)693241$$0AUTHOR|(CDS)2079898$$aSoldevila Serrano, Urmila$$murmila.soldevila.serrano@cern.ch$$uUniv. of Valencia and CSIC (ES) 002851351 700__ $$0AUTHOR|(CDS)2637960$$0AUTHOR|(SzGeCERN)833670$$aStaats, Ezekiel$$me.staats@cern.ch$$uCarleton University (CA) 002851351 700__ $$0AUTHOR|(CDS)2624901$$0AUTHOR|(SzGeCERN)831789$$aStack, Tynan Louis$$mtynan.louis.stack@cern.ch$$uSimon Fraser University (CA) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00040738$$0AUTHOR|(SzGeCERN)678663$$0AUTHOR|(CDS)2070368$$aStelzer, Bernd$$mBernd.Stelzer@cern.ch$$uSFU Simon Fraser University (CA) 002851351 700__ $$0AUTHOR|(CDS)2070637$$0AUTHOR|(SzGeCERN)484190$$aUllan, Miguel$$mmiguel.ullan@cern.ch$$uConsejo Superior de Investigaciones Cientificas (CSIC) (ES) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00133014$$0AUTHOR|(SzGeCERN)437347$$0AUTHOR|(CDS)2072544$$aUnno, Yoshinobu$$gCorresponding author$$myoshinobu.unno@cern.ch$$uHigh Energy Accelerator Research Organization (JP) 002851351 700__ $$0AUTHOR|(INSPIRE)INSPIRE-00015971$$0AUTHOR|(SzGeCERN)611344$$0AUTHOR|(CDS)2075715$$aZenz, Seth$$mSeth.Zenz@cern.ch$$uUniversity of London (GB) 002851351 710__ $$5PH-EP 002851351 710__ $$gATLAS Collaboration 002851351 8564_ $$uhttps://cds.cern.ch/record/2812514$$yOriginal Communication (restricted to ATLAS) 002851351 859__ $$fyoshinobu.unno@cern.ch 002851351 8564_ $$82430177$$s3363751$$uhttps://cds.cern.ch/record/2851351/files/ATL-ITK-SLIDE-2022-694.pdf 002851351 916__ $$sn$$w202370 002851351 960__ $$a91 002851351 963__ $$aPUBLIC 002851351 970__ $$a000778311CER 002851351 980__ $$aPUBLATLASSLIDE 002851351 980__ $$aSlides