| ATLAS Slides | |
| Report number | ATL-ITK-SLIDE-2022-694 |
| Title | Specifications and Pre-Production of n+-in-p Large-format Strip Sensors fabricated in 6-inch Silicon Wafers, ATLAS18, for Inner Tracker of ATLAS Detector for High-Luminosity Large Hadron Collider |
| Author(s) |
Abidi, Haider (Brookhaven National Laboratory (US)) ; Affolder, Tony (University of California,Santa Cruz (US)) ; Affolder, Kirsten (University of California,Santa Cruz (US)) ; Allport, Philip Patrick (University of Birmingham (GB)) ; Beaupre, Scott Lee (Simon Fraser University (CA)) ; Beck, Graham (University of London (GB)) ; Bernabeu Verdu, Jose (Univ. of Valencia and CSIC (ES)) ; Bevan, Adrian (University of London (GB)) ; Chisholm, Andrew Stephen (University of Birmingham (GB)) ; Ciungu, Bianca Monica (University of Toronto (CA)) ; Dawson, Ian (University of London (GB)) ; Dowling, Andrew Jay (University of California,Santa Cruz (US)) ; Fadeyev, Vitaliy (University of California,Santa Cruz (US)) ; Federicova, Pavla (Czech Academy of Sciences (CZ)) ; Fernandez-Tejero, Xavi (Simon Fraser University (CA)) ; Fleta Corral, Celeste (Consejo Superior de Investigaciones Cientificas (CSIC) (ES)) ; Fournier, Andrew Curtis (Simon Fraser University (CA)) ; Gignac, Matthew (University of California,Santa Cruz (US)) ; Gonella, Laura (University of Birmingham (GB)) ; Greig, Graham George (Simon Fraser University (CA)) ; Gunnell, Jane Frances ; Hara, Kazuhiko (University of Tsukuba (JP)) ; Hirose, Shigeki (University of Tsukuba (JP)) ; Hommels, Bart (University of Cambridge (GB)) ; Ishii, Tatsuya (High Energy Accelerator Research Organization (JP)) ; Jessiman, Callan (Carleton University (CA)) ; Johnson, Jacob Wayne (University of California,Santa Cruz (US)) ; Jones, Dominic (University of Cambridge (GB)) ; Kachiguine, Serguei (University of California,Santa Cruz (US)) ; Kang, Nathan Jihoon (University of California,Santa Cruz (US)) ; Keller, John Stakely (Carleton University (CA)) ; Klein, Christoph Thomas (Carleton University (CA)) ; Koffas, Thomas (Carleton University (CA)) ; Kopsalis, Ioannis (University of Birmingham (GB)) ; Kroll, Jiri (Czech Academy of Sciences (CZ)) ; Kvasnicka, Jiri (Czech Academy of Sciences (CZ)) ; Lacasta Llacer, Carlos (Univ. of Valencia and CSIC (ES)) ; Latonova, Vera (Czech Academy of Sciences (CZ)) ; Lomas, Joshua David (University of Birmingham (GB)) ; Mikestikova, Marcela (Czech Academy of Sciences (CZ)) ; Miyagawa, Paul (University of London (GB)) ; Orr, Robert (University of Toronto (CA)) ; Poley, Anne-Luise (Simon Fraser University (CA)) ; Rousso, David (University of Cambridge (GB)) ; Shah, Aashaq (University of London (GB)) ; Solaz Contell, Carles (Univ. of Valencia and CSIC (ES)) ; Soldevila Serrano, Urmila (Univ. of Valencia and CSIC (ES)) ; Staats, Ezekiel (Carleton University (CA)) ; Stack, Tynan Louis (Simon Fraser University (CA)) ; Stelzer, Bernd (SFU Simon Fraser University (CA)) ; Ullan, Miguel (Consejo Superior de Investigaciones Cientificas (CSIC) (ES)) ; Unno, Yoshinobu (High Energy Accelerator Research Organization (JP)) ; Zenz, Seth (University of London (GB)) |
| Corporate author(s) | The ATLAS collaboration |
| Submitted by | yoshinobu.unno@cern.ch on 01 Mar 2023 |
| Subject category | Particle Physics - Experiment |
| Accelerator/Facility, Experiment | CERN LHC ; ATLAS |
| Free keywords | silicon strip sensor ; ITk ; HL-LHC |
| Abstract | The full volume of the inner tracker of the ATLAS experiment will be replaced with new all-Silicon detectors for HL-LHC. The strip detectors, in the radial extent of 40 to 100 cm, are made of four layers of cylindrical-structures in the barrel and six layers of disk-structures in the endcap section with 2 layers of strip sensors for stereo-viewing in each layer-structure. The corresponding area of strip sensors, at 165 m^2, will be covered with 10976 barrel and 6912 endcap sensors. A new approach is adopted to use p-type material to be more radiation-tolerant, making the readout in n-strips, so-called n+-in-p sensors, to cope with the fluence of 9.7×10^14 (1.6×10^15) 1-MeV neutron-equivalent (neq)/cm^2 and ionizing dose of 44 (66) Mrad at the maximum in the barrel (endcap in the parenthesis) section, for its lifetime including a safety factor of 1.5. The readout is AC-coupled and the strips are biased via Polysilicon resistors for all sensors. In the barrel sensors, the geometry is square, 9.8×9.8 cm^2, to have the largest area of sensor possible from a 6-inch wafer. The strips are laid out in parallel with a strip pitch of 75.5 µm and 4 or 2 rows of strip segments in two types of sensors, "short strips (SS)" for the inner 2 layers and "long strips (LS)" for the outer 2, respectively. In the endcap, we have designed roughly trapezoidal sensors with built-in stereo angle, curved edges along the circumference, and in 6 unique shapes in each radial extent, R0 to R5. The strips are in fan geometry, with a mean pitch of approximately 75 µm and 4 or 2 rows of strip segments. The sensors of this specification are labelled as "ATLAS18xx" where xx stands for SS, LS, Rx (x=0 to 5). With the specifications of mechanical features and electrical performance, CAD files for processing were laid out by following successful designs of ATLAS07, ATLAS12 and ATLAS17LS of the barrel sensors, and ATLAS12EC/R0 of the R0 endcap sensors, together with a number of optimizations. "Pre-Production" amount of 1041 wafers were fabricated and delivered with the tests carried out by vendor. The quality of the sensors was reviewed through the data as provided by the vendor. These sensors were used for establishing and exercising acceptance procedures, and subsequently to be used for pre-production of strip modules and layer structures. |
Record created 2023-03-01, last modified 2023-03-02
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