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    Micro Electro Mechanical System

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    Tejes Nilankar
    MEMS is the integration of mechanical elements, sensors and actuators with electronics on a silicon chip through microfabrication. It combines microelectronics with micromechanical components between 1-100 micrometers in size. MEMS originated from the development of silicon pressure sensors in the 1970s and research into using silicon as a structural material. Today MEMS are used in automotive, industrial, military and consumer applications such as accelerometers, inkjet printers, lab-on-chip devices, and more. The global MEMS market has grown significantly from 2002-2007 across various device types.

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    Micro Electro Mechanical System

    Uploaded by

    Tejes Nilankar
    32 views19 pages
    MEMS is the integration of mechanical elements, sensors and actuators with electronics on a silicon chip through microfabrication. It combines microelectronics with micromechanical components between 1-100 micrometers in size. MEMS originated from the development of silicon pressure sensors in the 1970s and research into using silicon as a structural material. Today MEMS are used in automotive, industrial, military and consumer applications such as accelerometers, inkjet printers, lab-on-chip devices, and more. The global MEMS market has grown significantly from 2002-2007 across various device types.

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    mems ashwin

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    MEMS is the integration of mechanical elements, sensors and actuators with electronics on a silicon chip through microfabrication. It combines microelectronics with micromechanical components between 1-100 micrometers in size. MEMS originated from the development of silicon pressure sensors in the 1970s and research into using silicon as a structural material. Today MEMS are used in automotive, industrial, military and consumer applications such as accelerometers, inkjet printers, lab-on-chip devices, and more. The global MEMS market has grown significantly from 2002-2007 across various device types.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PPT, PDF, TXT or read online from Scribd
    Download as ppt, pdf, or txt
    32 views19 pages

    Micro Electro Mechanical System

    Uploaded by

    Tejes Nilankar
    MEMS is the integration of mechanical elements, sensors and actuators with electronics on a silicon chip through microfabrication. It combines microelectronics with micromechanical components between 1-100 micrometers in size. MEMS originated from the development of silicon pressure sensors in the 1970s and research into using silicon as a structural material. Today MEMS are used in automotive, industrial, military and consumer applications such as accelerometers, inkjet printers, lab-on-chip devices, and more. The global MEMS market has grown significantly from 2002-2007 across various device types.

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    of 19

    MICRO ELECTRO MECHANICAL SYSTEM

    .
    Introduction
    Micro-Electro-Mechanical Systems
    (MEMS) is the integration of
    mechanical elements, sensors, actuators,
    and electronics on a common silicon
    substrate through micro fabrication
    technology
    What Is MEMS?
    Micro: Small size, micro fabricated
    structures
    Electro: Electrical signal /control
    Mechanical: Mechanical functionality
    Systems: Structures, Devices
    History
     Richard Feynman: Tries to spur innovative
    miniature fabrication techniques for micromechanics
    Fails to generate a fundamentally new fabrication
    technique
     Bulk-etched silicon wafers used as pressure sensors
    in 1970’s
    Kurt Petersen published -Silicon as a Structural
    Material in 1982
     Early experiments in surface-micro machined
    polysilicon in 1980’s
    How MEMS Work?
    In MEMS technology microelectronic
    integrated circuits can be thought of as the
    “BRAIN" of a system and MEMS increases
    this decision-making capability with
    “EYES" & “ARMS”, to allow
    Microsystems to sense and control the
    environment.
    Multidisciplinary
    Total MEMS Revenue 2002-2007
    Share of MEMS Revenues by
    Device, 2002
    Share of MEMS Revenues by
    Device, 2007
    Applications
    AUTOMOTIVE APPLICATION
    OF MEMS
    MEMS used in pills
    Other Applications Of MEMS
    Accelerometers
     Accelerometers in modern cars for a large number of
    purposes including airbag deployment in collisions.
     Accelerometers used in consumer electronics devices such
    as game controllers personal media players / cell phones
    and a number of Digital Cameras.
     Also used in PCs to park the hard disk head when free-fall
    is detected, to prevent damage and data loss.

    Automotive market
     Vehicle security systems
     Headlight leveling
     Sensors &actuators
    Industrial market
     Earthquake detection and gas shut-off
     Machine health
     Shock and tilt sensing

    Military
     Tanks, planes
     Equipment for soldiers

    Consumer market
     Appliances
     Sports training devices
     Computer peripherals
     Car and personal navigation devices
    Blood Pressure Sensors:
     Micro machined pressure sensor dice with the smallest
    having dimensions 175 × 700 × 1000 µm

    Inkjet printers:
     Which use piezoelectric or thermal bubble ejection to
    deposit ink on paper.
    Bio-MEMS:
     This is applied in medical and health related technologies
    from Lab-On-Chip to Micro Total Analysis.
    World’s Smallest Car
    World’s Smallest Guitar
    Conclusion
     Enormous advances in fundamental
    aspects of micro and nanotechnology have
    occurred over the last decade.
     The potential is enormous – but many
    hurdles remain (Power, heat transfer, etc.)
     Knowledge of the microscopic world is a
    requirement for entry into this area!!
    Thank you

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