TCAD
TCAD
TCAD
CAD
(including Lecture-Tutorial-Laboratory
Modules)
Steps for
Development of RealTIME
Measurement-based Internet Laboratory
Design of Experiment
Remote Operation of the
Instruments
(via LabVIEW, IC/CV lite, Easy Expert, VEE etc)
Launching on the
Head
Capital Equipment
FE Comp.
1st
Rs.
2nd
80.00 -
Consumable stores
Rs.
Software/License Fee
3rd
Total
80.00
Rs.
nil
nil
nil
Manpower (JPA/RS/Eqv.)
24.00
Rs.
7.00
8.00
9.00
Rs.
3.00
4.00
5.00
Contingencies/Accessories
39.00
Rs.
110.00
35.00
Course Description
Text Book: G. A. Armstrong and C. K. Maiti, "TCAD for Si,
SiGe and GaAs Integrated Circuits, The Institution of
Engineering and Technology (IET), UK, 2008.
Device
level
simulation
challenges;
Introducing
new
device
models;
Heterojunction
device
modeling;
Simulation of silicon germanium (SiGe)
HBTs; Simulation of heterostructure FETs
(HFETs); Simulation of AlGaAs/GaAs
devices; Virtual Wafer Fabrication (VWF)
automation tools; Example of VWF
methodology; Extraction of DC and SPICE
model parameters; Small signal AC
analysis for CMOS
and bipolar transistors; Application of
mixed-mode simulation; TCAD calibration
procedure;
Process
compact
model,
(TCAD)
Rising Technological
Gate insulator
Gate
Complexity
SiO2/HiK
Channel
Raised S/D
Work function
Leakage
Trapping
Depletion
Mobility
Material
Activation
Diffusion
S/D extension
Activation
Junction (USJ)
TCAD Simulations
Manufacturing
PCM
Generate
new data
Visual querying &
Visual optimization
Yield analysis
Devicespec limits
Some Strained-Engineered
Devices
Hardware facilities
Network Analyzer
Noise Figure Analyzer
AFM Setup
Agilent Semiconductor Test
Software facilities
Instrument Control software
LabVIEW, VEE, VSA, IC-CAP, IC/C-V
light, EasyExpert, Microsoft Inst.,
etc.
TCAD software
SILVACO, Sentaurus, MEDICI,
TSupreme, Taurus, Monte Carlo,
HSPICE, Nanosim, PCM studio,
PARAMOS, etc.
Requirements: List of
Equipment
1. Four Probe Resistivity Meter (25 lakhs)
2. Mask Aligner (75 lakhs)
3. Clean Air station (20 lakhs)
4. Rapid Thermal Annealing System (45 lakhs)
5. Semiconductor Test System (35 lakhs)
6. Microwave/ECR Plasma System (55 lakhs)
7. DC/RF Sputtering System (45 lakhs)
8. Probe station (50 lakhs)
9. Programmable power supply (20 Lakhs)
10. Thickness Measurement system (30 lakhs)
11. AFM/STM (30 lakhs)
12. Spectrum analyzer (10 Lakhs)
13. LCR Meter (10 lakhs)
14. Semiconductor Parameter Analyzer (50 lakhs)
15. Noise Figure Analyzer (55 lakhs)
16. Network Analyzer up to 26 GHz with calibration kits (200
lakhs)
17. Parameter extraction and device/process modeling software
tools (45 lakhs)
Book Published
1. Applications of Silicon-Germanium
Heterostructure Devices, Institute of Physics
Publishing (IOP), UK, 2001.
2. Silicon Heterostructures: Materials and Devices,
Institute of Electrical Engineers (IEE), UK, 2001.
3. Selected Works of Professor Herbert Kroemer,
Edited, World Scientific, Singapore 2008.
4. Strained-Si Heterostructure Field-Effect Devices,
CRC Press, London, 2007.
5.
Currently Available
Experiments via INTERNET
from IIT-KHARAGPUR
(RealTIME Online Measurement-based)
1.
2.
3.
4.
5.
6.
7.
8.
9.
NetLAB Webpage
Partner/USER
Institutions
Our Current Partners are
VIT, Vellore
NIST, Berhampur
Short Term
Course/Workshop
AICTE/MHRD sponsored SUMMER SCHOOL at IIT
KHARAGPUR
Applications of
ICT for
Hardware
List of Participating
Institutions
VIT University, Vellore
NIST, Berhampur
West Bengal University of Technology, Kolkata
University of Calcutta
Inst. of Radiophysics and Electronics
North Bengal University, Siliguri
NIT, Durgapur
Bengal Engg. and Science University, Shibpur
Tezpur (Central) University, Tezpur
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