Mitutoyo - Mikroskopy Pomiarowe MF I MF-U - E14003 (3) - 2015 EN
Mitutoyo - Mikroskopy Pomiarowe MF I MF-U - E14003 (3) - 2015 EN
Mitutoyo - Mikroskopy Pomiarowe MF I MF-U - E14003 (3) - 2015 EN
MF/MF-U Series
Optical Measuring
3
Lineup
High accuracy measurement, improved operability and a choice of models to suit practically any application. Lineup
now includes motor-driven Z-axis models.
Mitutoyo's quick release mechanism on the X and Y axes allows fast stage movement and easy positioning
Standard models
Stage operation for the X and Y axes is unchanged but the motorized Z-axis provides comfortable operation and enables
dynamic up/down operation with a jog shuttle as well as accurate fine-focusing control.
Motor-Driven Z-axis Models
Motorized X, Y, and Z axes allows easy stage movement and focus adjustment and eliminates operator fatigue.
Motor-Driven X/Y/Z-axes Models
4
CONTENTS
5
In Pursuit of Optical Performance — The Essence of Microscopy —
These microscopes use an optical design for the optical tube and objective to reduce flare within
the optical system as much possible and so enable the clear display of subtle details of inspected
objects. With this series, even the surface of black resin can also be clearly observed in high
contrast. The MF-U Series is equipped with the proven FS optical system metal microscope head
and displays clear images with high color reproducibility in which the three prime colors are
corrected. (The plan apochromat specifications are used for the objective*.)
For the MF and MF-U Series, an LED- or halogen-based lighting system can be used. Higher
lighting efficiency and sufficient illuminance within the optical system provide an environment
for high-magnification measurement and bright-field and dark-field observation in which you can
work efficiently without getting tired.
* Specifications according to which aberrations across the image surface and chromatic aberrations in the wave length
range of the three primary colors (blue, yellow and red ) are corrected.
Example
X and Y axes: (2.2+0.02L)µm or less Measuring
Error
Measuring range
A measuring microscope must have high level optical performance and overall measuring accuracy. The MF
and MF-U Series realizes the measuring accuracy stipulated by the above standards for every stage size*.
This series is useful for any measurement because it offers both long stroke measurement and high accuracy
at the same time.
*Conforms to the JIS B 7153 measurement method for the X and Y axes. The above measuring accuracy graph is an example and does
not represent all main unit accuracies.
The digital scale built into the microscope is a photoelectric type transmission linear encoder with a maximum
response speed of 50m/min. This highly accurate encoder was developed in an underground laboratory
where the world’s best scale accuracy evaluation technique is available.
Mitutoyo was the first manufacturer to acquire ISO/IEC 17025(JCSS) accreditation for calibrating line
standards (standard scales up to 500mm long) in Japan.
To establish and maintain the traceability of measuring tools National Metrology Institute of Japan, National Institute of
and instruments, Mitutoyo uses length standards traceable National standard
Advanced Industrial Science and Technology
(NMIJ/AIST)
to the national standards in Japan to calibrate the standard The atomic clock synchronized to UTC and the optical frequency comb
6
Solutions Provided by Measuring Microscopes
MF-UB1010D + QM-Data200
7
Measuring Microscopes MF Series
Universal Measuring Microscopes MF-U Series
New optional sliding nosepiece allows one of two objectives to be quickly moved into position
to change the magnification, and a circular illuminator to be fitted. Operability has improved
in this series by allowing freedom of mounting position for the digital display.
Sliding Nosepiece New
design
(Factory-set option of MF D)
Sliding nosepiece with two objectives mounted. Dedicated LED circular illuminator mounted on the sliding nosepiece.
8
High Visibility Digital Display New
design
(Common to MF D and MF-U D)
Because the resolution can be switched to 1μm, 0.5μm, or 0.1μm for the
digital display (two or three axes), which is a standard accessory for all
models, high-discrimination measurement can be performed. The zeroset,
direction changeover, and smoothing functions are also standard.
(Zero can be set using the switch near the X or Y handwheels.)
The display is low-profile but has large digits and can be mounted in the
position most convenient for the operator.
The digital display can be installed on the left or right side of the column.
Because the general-purpose RS-232C format is adopted for data transfer,
data can be output to a standard printer or personal computer. It is also
possible to output the display readings to spreadsheet software.
9
Measuring Microscopes MF Series
Universal Measuring Microscopes MF-U Series
Height Measurement with a High Focus Repeatability Wide-Field Observation
(Option on MF D / factory-set option on MF-U D) For details, see page 42. (Common to MF D and MF-U D)
Focus repeatability is important when measuring a vertical step or other element
using the microscope.
In particular, measurement errors due to the depth of focus of the objective are
inevitable. The MF and MF-U Series measuring microscopes have a focus pilot,
which enhances focus repeatability. The focus pilot is mounted on the TV camera
port section in the main unit as an add-on unit and enables focusing position
detection with high accuracy and repeatability. This realizes higher repeatability
than a visual check and decreases variation in measured values caused by human
error.
Two types of focus patterns are available, either of which can be selected
according to the size of the part to be focused on or the surface state, material,
or other properties of the inspected object. A clear, bright, high-intensity LED The best-in-class eyepiece field number* of 24mm (for WF10X)
(green or red) is employed as the light source. The focus pattern, for which offers a wide viewing field that helps prevent extended observation
or measurement from affecting your eyes or causing fatigue. The 24mm
brightness can be steplessly adjusted, can be checked on the eyepiece or TV
monitor. This substantially improves measurement throughput. WF10X eyepiece has wider diopter adjustment ranges on the left
MF
and right sides than older products.
* Width of an inspected object that can be seen across the whole viewing field when a 1X objective
is used
(1)
LED and Halogen Light Options for Transmitted and
Reflected Illumination
(Options common and essential to MF D/MF-U D)
(1)
(2)
(2)
Transmitted LED illumination unit Reflected LED illumination unit Reflected LED illumination unit
(Common to MF/MF-U Series) (for MF Series) (for MF-U Series)
An LED or halogen light can be selected for the coaxial illumination in the main
unit. While the conventional halogen light can be used for observation and
measurement, the LED light can also be selected if you want to reduce the time
lost to replace a failed halogen bulb with a new one and need high intensity
illumination that quickly responds to brightness adjustment.
The LED light has a long working life*1 and will not suddenly fail.
In addition, the visibility, brightness and coloration are constant because, unlike
fluorescent tubes, the LED light is free from glare and changes in color temperature.
This means less eye fatigue after extended observation. Because the LED consumes
little power and emits little heat radiation, measurement is economical and produces
less heat-induced effects on inspected objects*2. In addition, this light source is impact
resistant and does not contain environmental toxins.
All the models in the MF and MF-U Series have transmitted and reflected
illumination aperture-diaphragms as standard to enable observation and
measurement with less light diffraction.
*1: The working life will be shorter if the maximum illuminance is always used.
*2: The LED light for MF/MF-U D Series incorporates a quiet cooling fan to further reduce heat effects.
10
220mm
Quick Release Mechanism*1 and Zero-set Switch Stage Variations Including Long Stroke
Incorporated*2 (Common to MF D and MF-U D) (Common to MF D and MF-U D)
300mm
m
220m
Z axis
220mm
220mm
0m
30
Zero set Y axis
button
200mm
300mm
X axis 400mm
MF-B4020D
The stage movement can be switched between extremely coarse and fine (FREE Inspected objects vary in size.
and LOCK) by using the quick release handles on the X and Y handles. Widely used in every industry, this series provides many measurement stroke
These handles are useful for freeing the stage when the distance to the variations.
measurement position is long or you want to quickly return to a reference This series offers a stage for long stroke measurement of 400×200×220mm in X,
position. Y and Z. This is useful when measuring printed circuit boards, shafts, knife tools
Because this mechanism uses the twist roller method, switching causes little and other objects. Although the standard model has a Z-axis range of 220mm,
impact and enables smooth movement. Because the display zero-set switches are the Z axis can be extended with a column upgrade.
located near the handles*2, you can focus on the eyepiece during measurement A swivel rotation mechanism* is also provided as standard. This mechanism
and keep your hand near the handle almost all the time except when adjusting is useful when fixing an inspected object in parallel with the table movement
the focus. direction.
*1: Patent registered in Japan *Only for models with a Y-axis range of 170mm or longer
*2: The zero-set buttons are located on the X and Y axes, not the Z axis.
Z-Axis Handles Provided on Both Sides Tilting Optical Tube of Highly Rigid Column Base
of Standard Model (MF D and MF-U D) Standard Model (MF-U D) (Common to MF D and MF-U D)
MF D
11
Measuring Microscopes
MF Series
MF-B1010D MF-B2010D
* The binocular tube (eyepiece) and illumination * The binocular tube (eyepiece) and illumination
unit are optional accessories. unit are optional accessories.
Features
■ Observation with a clear and flare-less erect image and a wide field of view
■ Measuring accuracy that is the highest in its class (and conforms to JIS B 7153)
■ ML series, high-NA objectives that are specially designed for the MF series (long working distance type)
■ Illumination unit (reflected/transmitted) selectable from a high-intensity LED or halogen bulb (required)
■ Variable aperture diaphragm (reflected/transmitted) allows adjustment for contrast and resolution
■ Variety of standardized stages in sizes up to 400×200mm
■ Quick-release mechanism useful for moving the stage quickly when measuring workpieces that are large in size or quantity
■ Coarse/fine feed handles equipped as standard on both sides allow precise focus and observation measurement regardless of
handedness
■ High-magnification eyepiece observation up to 2000X
■ Standard measuring microscope that has a wide variety of optional accessories including a Vision Unit and various digital CCD cameras
■ Low-noise design
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MF-B2017D MF-B3017D MF-B4020D
* The binocular tube (eyepiece) and * The binocular tube (eyepiece) and * The binocular tube (eyepiece) and
illumination unit are optional accessories. illumination unit are optional accessories. illumination unit are optional accessories.
Specifications
Without Model No. MF-A1010D MF-A2010D MF-A2017D MF-A3017D MF-A4020D
Z-axis scale Order No. 176-861* 176-862* 176-863* 176-864* 176-865*
With Model No. MF-B1010D MF-B2010D MF-B2017D MF-B3017D MF-B4020D
Z-axis scale Order No. 176-866* 176-867* 176-868* 176-869* 176-870*
Monocular or binocular (angle of column: 25°)
Optical tube (eyepiece(s) required) Standard TV camera port for all models, reticle (broken cross-hair, line width: 5μm), optical path switching
(observation/TV camera = 50/50)
Observation image Erect image
Observation method Bright-field observation
10X (eyepiece field number: 24), 15X, 20X
Eyepiece (optional) Adjustable diopter
Note: Monocular - one 10X eyepiece provided as standard; Binocular - two 10X eyepieces provided as standard
Objective (optional) ML objective 3X (provided as standard), 1X, 5X, 10X, 20X, 50X, 100X
Max. workpiece height 150mm 220mm
Z axis
Feed mechanism Coaxial coarse and fine feed, handles on both sides (coarse: 30mm/rotation, fine: 0.2mm/rotation)
Illumination unit LED or halogen is required.
Illumination filter One GIF filter is provided as standard (and mountable for both transmitted and reflected illumination)
Measurement range 100×100mm 200×100mm 200×170mm 300×170mm 400×200mm
Tabletop size 280×280mm 350×280mm 410×342mm 510×342mm 610×342mm
Effective stage glass size 180×180mm 250×150mm 270×240mm 370×240mm 440×240mm
Stage Swiveling angle — ±5° (left) ±3° (left)
Maximum table loading 10kg 20kg 15kg
Quick-release mechanism Provided as standard for the X and Y axes
Zero-set button Provided as standard for the X and Y axes (and for the Z axis only for the MF-B type)
Measurement system High-accuracy digital scale
Measuring accuracy*1
(2.2+0.02L)μm, L: measuring length(mm)
(X and Y axes, when not loaded)
Minimum reading 1/0.5/0.1μm switchable
Digital display Display axes X and Y (or X, Y, and Z only for the MF-B type)
Functions Zero-setting, direction switching, RS232C output, USB output (specific to QSPAK)
Main unit dimensions (WxDxH) 562×730×667mm 624×745×667mm 632×892×782mm 682×892×782mm 757×907×782mm
Main unit mass 67kg 71kg 148kg 156kg 162kg
Control unit dimensions and mass 114(W×360(D×96(H)mm LED: 3.5kg/Halogen: 4kg
Maximum power consumption
LED: 45W Halogen bulb: 160W
(with the illumination unit)
* The following suffixes are added to the order No. (e.g.: 176-861-10) to specify the User Manual's language: -10 for English; -11 for Chinese; No suffix for Japanese.
*1 Measured in conformance with JIS B 7153
13
Universal Measuring Microscopes
MF-U Series
MF-UB1010D MF-UB2010D
* The turret, objectives and illumination unit are * The turret, objectives and illumination unit are
optional accessories. optional accessories.
Features
■ Observation with a clear and flare-less erect image and a wide field of view
■ Measuring accuracy that is the highest in its class (and conforms to JIS B 7153)
■ Proven M Plan Apo/BD Plan Apo/G Plan Apo series, high-NA objectives from the FS optical system (long working distance type)
■ Integration of metallurgical and measurement microscope functions provides a high-resolution observation and high-accuracy measurement
solution
■ Illumination unit (reflected/transmitted) selectable from a high-intensity LED or halogen bulb (required)
* Only the halogen light source for transmitted illumination is provided as standard accessory. A seperate light source for transmitted illumination must be ordered additionally as optional accessory.
■ Variable aperture diaphragm (reflected/transmitted) allows adjustment for contrast and resolution
■ Variety of standardized stages in sizes up to 400×200mm
■ Quick-release mechanism useful for moving the stage quickly when measuring workpieces that are large in size or quantity
■ Coarse/fine feed handles equipped as standard on both sides allow precise focus and observation measurement regardless of handedness
■ High-magnification eyepiece observation up to 4000X (when using M Plan Apo SL200X)
■ Standard measuring microscope that has a wide variety of optional accessories including a Vision Unit and various digital CCD cameras
■ Low-noise design
14
MF-UB2017D MF-UB3017D MF-UB4020D
* The turret, objectives and illumination unit are optional * The turret, objectives and illumination unit are optional * The turret, objectives and illumination unit are optional
accessories. accessories. accessories.
Specifications
Without Model No. MF-UA1010D MF-UA2010D MF-UA2017D MF-UA3017D MF-UA4020D
BF Z-axis scale Order No. 176-871* 176-872* 176-873* 176-874* 176-875*
(bright-
With Model No. MF-UB1010D MF-UB2010D MF-UB2017D MF-UB3017D MF-UB4020D
field)
Z-axis scale Order No. 176-876* 176-877* 176-878* 176-879* 176-880*
Without Model No. MF-UC1010D MF-UC2010D MF-UC2017D MF-UC3017D MF-UC4020D
BD Z-axis scale Order No. 176-881* 176-882* 176-883* 176-884* 176-885*
(bright-field/
Model No. MF-UD1010D MF-UD2010D MF-UD2017D MF-UD3017D MF-UD4020D
dark-field) With
Z-axis scale Order No. 176-886* 176-887* 176-888* 176-889* 176-890*
Tilting trinocular tube (angle of column: 0 to 30°), Siedentoph type (pupil distance adjustment: 51 to 76mm), built-in 1X tube lens, reticle (broken cross-
Optical tube
hair, line width: 5μm), optical path switching (observation/TV camera = 50/50)
Observation image Erect image
Observation method BF, DF (only for MF-UC and UD types), simple polarization, differential interference
Eyepiece (optional) Adjustable diopter 10X (eyepiece field number: 24, two eyepieces provided as standard), 15X, 20X
Turret Bright-field (BF) Adjustable manual turret or adjustable power turret (Select one.)
(required) Bright-field/dark-field (BD) Adjustable manual turret or adjustable power turret (Select one.)
Objective Bright-field (BF) All lenses including the M Plan Apo, M Plan Apo SL, and G Plan Apo series
(optional) Bright-field/dark-field (BD) All lenses including the BD Plan Apo and BD plan Apo L series
Max. workpiece height 150mm 220mm
Z axis
Feed mechanism Coaxial coarse and fine feed, handles on both sides (coarse: 10mm/rotation, fine: 0.1mm/rotation)
Illumination unit LED or halogen is required.
Illumination filter One GIF filter is provided as standard (and mountable for both transmitted and reflected illumination)
Measuring range 100×100mm 200×100mm 200×170mm 300×170mm 400×200mm
Tabletop size 280×280mm 350×280mm 410×342mm 510×342mm 610×342mm
Effective stage glass size 180×180mm 250×150mm 270×240mm 370×240mm 440×240mm
Stage Swiveling angle — ±5° (left) ±3° (left)
Maximum table loading 10kg 20kg 15kg
Quick-release mechanism Provided as standard for the X and Y axes
Zero-set button Provided as standard for the X and Y axes (and for the Z axis only for the MF-UB and -UD types)
Measurement system High-accuracy digital scale
Measuring accuracy*1
(2.2+0.02L)μm, L: measuring length(mm)
(X and Y axes, when not loaded)
Minimum reading 1/0.5/0.1μm switchable
Digital display Display axes X and Y (or X, Y, and Z only for the MF-UB and -UD types)
Functions Zero-setting, direction switching, RS232C output, USB output (specific to QSPAK)
Main unit dimensions (WxDxH) 562×730×667mm 624×745×667mm 632×892×782mm 682×892×782mm 757×907×782mm
Main unit mass 67kg 71kg 148kg 156kg 162kg
Control unit dimensions and mass 114(W)×360(D)×96(H) mm LED/Halogen:3.5kg
Maximum power consumption
LED: 55W Halogen bulb: 90W*2
(with the illumination unit)
* The following suffixes are added to the order No. (e.g.: 176-861-10) to specify the User Manual's language: -10 for English; -11 for Chinese; No suffix for Japanese.
*1: Measured in conformance with JIS B 7153 *2: The value only in a transmitted illumination
Replacement halogen bulb Standard: 513667 (12V/50W) Replacement halogen bulb (reflected)
For details, see p.30.
(transmitted) Long life: 12BAB345 (12V/50W) (separate light source)
15
Measuring Microscopes
MF Series The LED illumination unit is shown on the drawings below.
Dimensions The control unit is placed to the side of the microscope or directly attached to the rear of the column
The cable for connecting the control unit and microscope main unit is 600mm in length.
MF D Unit: mm
MF-B1010D MF-B2010D
259 96 259 96
327 327
249 78 249 78
360
360
79
79
667
667
422
417
205
200
MF-B2017D MF-B3017D
259 96 259 96
327 327
249 78 249 78
360
360
79
79
782
782
464
464
247
247
MF-B4020D
259 96
327
249 78
360
79
782
464
247
16
Universal Measuring Microscopes
MF-U Series The LED illumination unit is shown on the drawings below.
Dimensions The control unit is placed to the side of the microscope or directly attached to the rear of the column
The cable for connecting the control unit and microscope main unit is 600mm in length.
MF-U D Unit: mm
MF-UB1010D MF-UB2010D
360
360
171
171
667
667
565
570
200
205
168 168 210 215 16 168 168 210 215 16
114 360 551 121 114 360 551 121
234+50 300+50 727+50 269+100 355+100 742+50
MF-UB2017D MF-UB3017D
259 96 259 96
356 356
231 125 231 125
360
360
171
171
782
782
612
612
247
247
MF-UB4020D
259 96
356
231 125
360
171
782
612
247
17
Measuring Microscopes MF Series
Optional Accessories
System Diagrams
15X eyepiece
378-857 (two)/378-857-5 (one)
External reflected illumination
20X eyepiece 100W External illumination filter
378-858 (two)/378-858-5 (one)
10X protractor eyepiece
MF D Twin fiber optics illuminator (100W)
176-343*1
GIF filter (for light source)
12AAG806
375-043*1
Ring fiber optics illuminator (100W) LB80 filter (for light source)
10X digital protractor eyepiece 176-366*1 12AAG807
176-313
LED ring illuminator (white)
Various reticles 176-367-2*1 (external brightness adjuster) External light source control cable
* Refer to Page 46 for details. 12AAD128
Connection to a Vision unit
External light source control cable
12AAG888 * Refer to Page 40 for details.
Rotary table with fine feed wheel (A) Stage adapter B Stage adapter
176-305 176-310 176-304
Objective
Sliding Nosepiece ML objectives
176-370-1 (factory installed option) 3X ML objective
Holder with cramp Swivel center support Holder with cramp Swivel center support
176-107 172-197 176-107 172-197 176-370-2 (factory installed option) 375-037-1
V-block with cramp V-block with cramp
172-378 172-378
Various ML objectives
Rotary table with fine feed wheel (B) * Refer to Page 37 for details.
176-306
18
Universal Measuring Microscopes MF-U Series
Optional Accessories
System Diagrams
Optical tube
Focus detection
10X eyepiece
378-866 (two)/378-866-5 (one) Focus pilot
15X eyepiece
MF-U D 375-067*1 (green)/375-068*1 (red)
Note: Factory installed option.
378-857 (two)/378-857-5 (one)
20X eyepiece
378-858 (two)/378-858-5 (one)
Various rectiles
* Refer to Page 46 for details.
Revolver/objective
Turret 4 holes (BD) Objectives
Polarization/ 176-211
differential Objectives for BD
interference Differential interference unit
Bright-field/ BD Plan Apo Series
378-080… 5X, 10X dark-field Motor turret 4 holes (BD)
BD Plan Apo SL Series
378-079… 20X (BD) 176-212*1
378-078… 50X, SL20X
RS232C (crossing) cable
378-076… 100X, SL50X, Objectives for BF
12AAA807 M Plan Apo Series
SL80X
Adjustable turret (BF) M Plan Apo SL Series
378-018 Note: D-sub 9-pin female-female cable. G Plan Apo Series
Polarization unit
378-092 Bright-field Aligning motor driver 5 holes (BF) * Refer to Page 37 for
(BF) 378-216*1 details.
Peripheral device
for stage
1010 Size 2010 Size 2017/3017/4020 Size
Rotary table with fine feed wheel (A) Stage adapter B Stage adapter
176-305 176-310 176-304
Holder with cramp Swivel center support Holder with cramp Swivel center support
176-107 172-197 176-107 172-197
V-block with cramp V-block with cramp
172-378 172-378
Refer to the corresponding page for details.
Rotary table with fine feed wheel (B)
176-306 Required.
Standard accessory.
19
Motor-Driven Z-axis Measuring Microscopes
MF Series/MF-U Series
Stage operation for X and Y axes are not changed, but motorized Z axis on the measuring
microscope provides improved operability. High-speed Image Auto Focus (AF) is enabled by
using the image detection unit (option).
20
MF-J2017D MF-UJ2017D
* The binocular tube, eyepieces, and LED illumination unit * The turret, objectives, and LED illumination unit are optional
are optional accessories. accessories.
* A separate LED control unit and control unit are included. * A separate LED control unit and control unit are included.
Features
■ The measuring microscope's Z-axis is now motor driven to improve operability.
A jog shuttle is used to operate the Z axis, thus realizing a natural feeling when handling the equipment.
Furthermore, these microscopes are equipped with a stop that you can use to set the lower limit of the Z-axis movement, which
enables you to prevent the objective from colliding with the workpiece.
■ The operator is relieved from fatigue resulting from repeated handle-turning.
■ A quick-release mechanism is fitted in the X and Y axes for rapid positioning during measurement of large workpieces or
multipoint measurement.
■ Using with a vision unit (option) makes it possible to perform vision AF (auto focus).*1
■ The model lineup includes large stage sizes ranging from 200×170mm to 400×200mm.
■ The buttons on the remote control box, which is used to perform operations, have been placed to provide operations that feel
natural.
■ The remote control box is equipped as standard with a data output button, coarse- and fine-feed switching button (only for Z
axis), and speed-adjustment function (only for Z axis).
21
Motor-Driven Z-axis Measuring Microscopes
MF Series/MF-U Series
Motor Driven Z-axis Remote BOX
Reset button Z-axis speed-adjustment
Data Processor
The Z axis is motor driven. Operations during Z-axis measurement can be
performed from the Z-axis jog shuttle of the remote control box. Vision Unit
This eliminates the conventional handle-turning and focusing operations,
reducing fatigue for the operator.
Furthermore, the change to a motor-driven Z axis enables you to use the new
vision AF function with the optional vision unit.*1
*1 A vision AF cable (No. 12AAN358) is required.
Zero set
button Auto Focus
Vision AF (Common Option)
The optional vision unit provides a valuable auto focus function by enabling
QSPAK software control of the head position to detect the image with the
highest contrast, and hence sharpest focus. This operation can be conducted
The stage movement can be switched between extremely coarse and fine (FREE faster than carrying out focusing with the naked eye and so contributes to a
and LOCK) position adjustment by using the quick-release rings adjacent to the reduction in operation time and operator fatigue.
X and Y handles. These rings are useful for freeing the stage when the distance
to the measurement position is considerable or you want to return quickly to a
reference position.
Because this mechanism uses the twist roller method, switching causes little
position shift and enables smooth movement. Because the display zero-set
switches are located near the handles*3, you can concentrate on the eyepiece
during measurement and keep your hands on the handles almost all the time
except when adjusting the focus.
*2: Patent registered in Japan
*3: The zero-set buttons are located on the X and Y axes, not the Z axis.
22
Motor-Driven Z-axis Measuring Microscopes
MF Series
Specifications for MF D
Model No. MF-J2017D MF-J3017D MF-J4020D
Order No. 176-891* 176-892* 176-893*
Monocular or binocular (angle of column: 25°)
Optical tube (eyepiece(s) required)
Standard TV camera port for all models, reticle (broken cross-hair, line width: 5μm), observation/TV camera = 50/50
Observation image Erect image
Observation method Bright-field observation
10X (eyepiece field number: 24), 15X, 20X Note: Monocular - one 10X eyepiece provided as standard;
Eyepiece (optional) Adjustable diopter
Binocular - two 10X eyepieces provided as standard
Objective (optional) ML objective 3X (provided as standard), 1X, 5X, 10X, 20X, 50X, 100X
Max. workpiece height 220mm
Z axis
Feed mechanism Motordrive (Maximum measuring speed: 20mm/s)
Transmitted: Telecentric, built-in aperture diaphragm, white LED light source, stepless brightness adjustment,
equipped with cooling fan
LED
Reflected: Kohler illumination with adjustable aperture diaphragm, white LED light source, stepless brightness adjustment Control unit:
Illumination unit Power switch (main switch), AC power supply input connector (100 to 240V)
(required) Transmitted: Telecentric, built-in aperture diaphragm, 12V/50W halogen lamp, stepless brightness adjustment, with cooling fan
Reflected: Kohler illumination with adjustable aperture diaphragm, 12V50W halogen lamp,
Halogen
stepless brightness adjustment with cooling fan
Control unit: Power switch (main switch), AC power supply input connector (100 to 240V)
Illumination filter One GIF filter is provided as standard (and mountable for both transmitted and reflected illumination)
Measurement range 200×170mm 300×170mm 400×200mm
Tabletop size 410×342mm 510×342mm 610×342mm
Effective stage glass size 270×240mm 370×240mm 440×240mm
Stage Swiveling angle ±5° ±3°
Maximum table loading 20kg 15kg
Quick release mechanism Fitted to X and Y axes
Zero set switch Fitted to X and Y axes
Measurement system High-accuracy digital scale
Measuring accuracy*1
(2.2 + 0.02L)μm, L: measuring length (mm)
(X and Y axes, when not loaded)
Minimum reading 1/0.5/0.1μm switchable
Digital display Display axes X, Y and Z axes
Functions Zero-setting, direction switching
Speed adjustment (X,Y and Z axes), coarse/fine adjustment button (X, Y and Z axes)
Jog shuttle (Z axis drive), limit setting (Z axis), emergency stop switch, power source preliminary switch
Remote BOX
AF button (vision auto focus): effective when connecting to vision unit (optional)
Reset button (X, Y and X axes counter), data output button
Main unit dimensions (WxDxH) 632×892×782mm 682×892×782mm 757×907×782mm
Main unit mass 150kg 158kg 164kg
Control unit dimensions 355×364×106.5mm
Main unit mass 7kg
Dimensions for control unit for illumination unit
114×365×96mm
(WxDxH)
Mass for control unit for illumination unit LED: 3.5kg, halogen: 4kg
Maximum power consumption 230W
* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.
*1: Measured in conformance with JIS B 7153.
23
Motor-Driven Z-axis Measuring Microscopes
MF-U Series
Specifications for MF-UD
BF Model No. MF-UJ2017D MF-UJ3017D MF-UJ4020D
(brightfield) Order No. 176-894* 176-895* 176-896*
BD Model No. MF-UK2017D MF-UK3017D MF-UK4020D
(brightfield/darkfield) Order No. 176-897* 176-898* 176-899*
Tilting trinocular tube (angle of column: 0 to 30°), Siedentoph type (pupil distance adjustment: 51 to 76mm),
Optical tube (eyepiece: required)
Built-in 1X tube lens, reticle (broken cross-hair, line width: 5μm), observation TV camera = 50/50
Observation image Erect image
Observation method BF, DF (only for MF-UH and UF types), simple polarization, differential interference
Eyepiece (optional) Adjustable diopter 10X (eyepiece field number: 24, two eyepieces provided as standard), 15X, 20X
Bright-field (BF) Adjustable manual turret or adjustable power turret (Select one.)
Turret (required)
Bright-field/dark-field (BD) Manual turret or power turret (Select one.)
Bright-field (BF) M Plan Apo, M Plan Apo SL, G Plan Apo series
Objective (optional)
Bright-field/dark-field (BD) BD Plan Apo, BD Plan Apo SL series
Max. workpiece height 220mm
Z axis
Feed mechanism Motor drive (measuring speed: max. 20mm/s)
Transmitted: Telecentric, built-in aperture diaphragm, white LED light source,
stepless brightness adjustment, equipped with cooling fan
LED Reflected: Kohler illumination with adjustable aperture diaphragm, white LED light source,
stepless brightness adjustment , equipped with cooling fan
Illumination unit Control unit: Power switch (main switch), AC power supply input connector (100 to 240V)
(required)
Transmitted: Telecentric, built-in aperture diaphragm, 12V/50W halogen lamp, stepless brightness adjustment, with cooling fan
Reflected: BF/BD Kohler illumination with adjustable aperture diaphragm, 12V100W or 12V15W halogen lamp (selectable), external fiber
Halogen
illumination, stepless brightness adjustment
Control unit: Power switch (main switch), AC power supply input connector (100 to 240 V)
Illumination filter One GIF filter is provided as standard (and mountable for both transmitted and reflected illumination)
Measuring range 200×170mm 300×170mm 400×200mm
Tabletop size 410×342mm 510×342mm 610×342mm
Effective stage glass size 270×240mm 370×240mm 440×240mm
Stage Swiveling angle ±5° ±3°
Maximum table loading 20kg 15kg
Quick release mechanism Fitted to X and Y axes
Zero set switch Fitted to X and Y axes
Measurement system High-accuracy digital scale
Measuring accuracy*1
(2.2 + 0.02L)μm, L: measuring length (mm)
(X and Y axes, when not loaded)
Minimum reading 1/0.5/0.1μm switchable
Digital display Display axes X, Y and Z
Functions Zero-setting, direction switching
Speed adjustment (X,Y and Z axes), coarse/fine adjustment button (X, Y and Z axes)
Jog shuttle (Z axis drive), limit setting (Z axis), emergency stop switch, power source preliminary switch
Remote BOX AF button (vision auto focus): effective when connecting to vision unit (optional)
AF button (vision auto focus) effective when connecting to vision unit (optional),
Reset button (X, Y and X axes counter), data output button
Laser auto focus (LAF) — — —
Main unit dimensions (WxDxH) 632×892×782mm 682×892×782mm 757×907×782mm
Main unit mass 150kg 158kg 164kg
Dimensions for control unit for illumination unit
355×364×106.5mm
(mm)
Main unit mass 7kg
Dimensions for control unit for illumination unit
114×365×96mm
(WxDxH)
Mass for control unit for illumination unit LED: 3.5kg, halogen: 3.5kg
Maximum power consumption 230W
* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.
*1: Measured in conformance with JIS B 7153.
24
Motor-Driven Z-axis Measuring Microscopes
MF Series/MF-U Series The LED illumination unit is shown on the drawings below.
Dimensions The control unit is placed to the side of the microscope or directly attached to the rear of the column
The cable for connecting the control unit and microscope main unit is 600mm in length.
MF D Unit: mm
MF-J2017D MF-J3017D
259 96 259 96
249 249
360
360
782
782
464∼684
464∼684
247
247
168 168 270 255 16 168 168 270 255 16
114 360 215 114 360 215
621 121 621 121
281+100 351+100 281+150 401+150 889+85
889+85
MF-J4020D
259 96
249
360
782
464∼684
247
MF-U D Unit: mm
MF-UJ2017D MF-UJ3017D
259 96 259 96
231 231
360
360
782
782
612∼832
612∼832
247
247
231
360
782
612∼832
247
25
Motor-Driven Measuring Microscopes
MF Series/MF-U Series
Motorized X, Y and Z axes on the measuring microscope provide improved operability.
High-speed Image Auto Focus (AF) is enabled by using the image detection unit (option).
26
MF-G2017D MF-UG4020D MF-UE2017D
* The binocular tube, eyepieces, and LED illumination unit are * The turret, objectives, and LED illumination unit are optional * The turret, objectives, and LED illumination unit are optional
optional accessories. accessories. accessories.
* A separate LED control unit and control unit are included. * A separate LED control unit and control unit are included. * A separate LED control unit and control unit are included.
Features
■ The measuring microscope's X, Y, and Z axes are now motor driven, and the stage can be operated from a remote control box.
A joystick is used to operate the X and Y axes, and a jog shuttle is used to operate the Z axis, thus realizing a natural feeling when
handling the equipment.
Furthermore, these microscopes are equipped with a Z limit that you can use to set the lower limit of the Z-axis movement, which
enables you to prevent the objective from colliding with the workpiece.
■ The operator is relieved from fatigue resulting from repeated handle-turning.
■ Installing a vision unit makes it possible to perform vision AF (auto focus).*1
For the MF-U power type and MF-U power LAF type, selecting the power turret makes it possible for the microscope to automatically
recognize the position of the objective in the vision unit.*2
■ A power model lineup with large stage sizes ranging from 200×170mm to 400×200mm
■ A button for coarse and fine feed switching and speed-adjustment function that are highly useful during long stroke sliding and fine
positioning, are provided as standard equipment.
■ The buttons on the remote control box, which is used to perform operations, have been placed to provide operations that feel natural.
■ The remote control box is standard equipped with a data output button and counter reset buttons for the X, Y, and Z axes, which
enables you to perform a variety of operations remotely.
■ Products equipped with LAF (laser auto focus) are also included in the lineup of MF-U power products, which improves the efficiency
of the focusing operation.
Models that have LAF are equipped not only with the normal Just Focus (JF) function, but also with the Tracking Focus (TF) function
that maintains the focus as the stage moves.
These functions cater to focusing requirements in a variety of situations, reducing the amount of work that the operator has to
perform.
27
Motor-Driven Measuring Microscopes
MF Series/MF-U Series
Motor Driven Calculation Processor
QM-Data200
The X, Y, and Z axes are all motor driven. A joystick is used to operate the X
and Y axes, and a jog shuttle is used to operate the Z axis, so operations during Vision Unit
measurement can be performed from the remote control box.
This eliminates the conventional handle-turning and focusing operations,
reducing fatigue for the operator.
The X and Y axes are driven with a maximum feed speed of 40mm/s and the Z
axis with a maximum feed speed of 20mm/s. The lineup includes models that
have large stages with sizes ranging from 200×170mm to 400×200mm.
Furthermore, the change to a motor-driven Z axis enables you to use the new
vision AF function, provided you also use the optional vision unit.*1
*1: A separate vision AF cable (No. 12AAN358) must be connected.
リモートBOX
* Combination of the MF-G2017D, the 10D vision unit, and a vision AF cable
Reset button X/Y/Z-axes speed-adjustment Motor-driven measuring microscopes can be equipped with the “QMData200”
two-dimensional data processing unit and the “Vision Unit” manual image
XY軸ロックボタン measurement system that detects edges with its installed digital camera.
It is now possible to perform vision AF by using a vision AF cable together with
a vision unit, thanks to the new motor drive.
Auto Focus
Vision AF (Common Option)
XY軸操作ジョイスティック AF button*2 Z-axis jog shuttle
Data output button By using an optional vision unit and vision AF cable, you can perform vision AF.
In the vision unit software QSPAK, the position in the acquired image data with
*2 Usable only if the Vision Unit (option) is fitted. the highest contrast is detected and the auto focus operation performed. This
operation can be conducted faster than carrying out focusing with the naked
eye, which contributes to reduction in operation time and operator fatigue.
28
Motor Driven (Option for MF-U Power Product and MF-U Power LAF Product)
A turret must be selected for the MF-U power product and MF-U power LAF product.
By selecting the power turret and equipping the measuring microscope with an
optional vision unit, it is possible to change and detect the turret position.*1
This is a new function that is available in the QSPAK VUE version 4.1 and
subsequent versions of the 10D vision unit software.
You can use the software to change and automatically detect the turret position,
so there is no longer any need to handle the turret. Furthermore, this also fixes
the problem of forgetting to change calibration values when you change the
magnification, thereby providing you with a system that is more reliable and easy
to use.
*1: A separate RS-232C cable (No. 12AAA807) is required.
*This image corresponds to 4-hole power turrets and 4-hole turrets with sensors.
29
Motor-Driven Measuring Microscopes
MF Series/MF-U Series
Specifications for MF D
Model No. MF-G2017D MF-G3017D MF-G4020D
Order No. 176-781* 176-782* 176-783*
Monocular or binocular (angle of column: 25°)
Optical tube (eyepiece(s) required)
Standard TV camera port for all models, reticle (broken cross-hair, line width: 5μm), observation/TV camera = 50/50
Observation image Erect image
Observation method Bright-field observation
10X (eyepiece field number: 24), 15X, 20X Note: Monocular - one 10X eyepiece provided as standard;
Eyepiece (optional) Adjustable diopter
Binocular - two 10X eyepieces provided as standard
Objective (optional) ML objective 3X (provided as standard), 1X, 5X, 10X, 20X, 50X, 100X
Max. workpiece height 220mm
Z axis
Feed mechanism Motordrive (Maximum measuring speed: 20mm/s)
Transmitted: Telecentric, built-in aperture diaphragm, white LED light source, stepless brightness adjustment,
equipped with cooling fan
LED
Reflected: Kohler illumination with adjustable aperture diaphragm, white LED light source, stepless brightness adjustment Control unit:
Illumination unit Power switch (main switch), AC power supply input connector (100 to 240V)
(required) Transmitted: Telecentric, built-in aperture diaphragm, 12V/50W halogen lamp, stepless brightness adjustment, with cooling fan
Reflected: Kohler illumination with adjustable aperture diaphragm, 12V50W halogen lamp,
Halogen
stepless brightness adjustment with cooling fan
Control unit: Power switch (main switch), AC power supply input connector (100 to 240V)
Illumination filter One GIF filter is provided as standard (and mountable for both transmitted and reflected illumination)
Measurement range 200×170mm 300×170mm 400×200mm
Tabletop size 410×342mm 510×342mm 610×342mm
Stage Effective stage glass size 270×240mm 370×240mm 440×240mm
Swiveling angle ±5° ±3°
Maximum table loading 20kg 15kg
Measurement system High-accuracy digital scale
Measuring accuracy*1
(2.2 + 0.02L)μm, L: measuring length (mm)
(X and Y axes, when not loaded)
Minimum reading 1/0.5/0.1μm switchable
Digital display Display axes X, Y and Z axes
Functions Zero-setting, direction switching
Joystick (X and Y axes drive), lock button (X and Y axes), speed adjustment (X,Y and Z axes), coarse/fine adjustment button (X, Y and Z axes)
Jog shuttle (Z axis drive), limit setting (Z axis), emergency stop switch, power source backup switch
Remote BOX
AF button (vision auto focus): effective when connecting to vision unit (optional)
Reset button (X, Y and X axes counter), data output button
Main unit dimensions (WxDxH) 632×892×782mm 682×892×782mm 757×907×782mm
Main unit mass 150kg 158kg 164kg
Control unit dimensions 355×364×106.5mm
Main unit mass 7kg
Dimensions for control unit for illumination unit
114×365×96mm
(WxDxH)
Mass for control unit for illumination unit LED: 3.5kg, halogen: 4kg
Maximum power consumption 230W
* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.
*1: Measured in conformance with JIS B 7153.
30
Specifications for MF-UD
Motorized Motorized LAF
BF Model No. MF-UG2017D MF-UG3017D MF-UG4020D MF-UE2017D MF-UE3017D MF-UE4020D
(brightfield) Order No. 176-784* 176-785* 176-786* 176-790* 176-791* 176-792*
BD Model No. MF-UH2017D MF-UH3017D MF-UH4020D MF-UF2017D MF-UF3017D MF-UF4020D
(brightfield/darkfield) Order No. 176-787* 176-788* 176-789* 176-793* 176-794* 176-795*
Tilting trinocular tube (angle of column: 0 to 30°), Siedentoph type (pupil distance adjustment: 51 to 76mm),
Optical tube (eyepiece: required)
Built-in 1X tube lens, reticle (broken cross-hair, line width: 5μm), observation TV camera = 50/50
Observation image Erect image
Observation method BF, DF (only for MF-UH and UF types), simple polarization, differential interference
Eyepiece (optional) Adjustable diopter 10X (eyepiece field number: 24, two eyepieces provided as standard), 15X, 20X
Bright-field (BF) Adjustable manual turret or adjustable power turret (Select one.) Manual turret with BF sensor, adjustable power turret*1
Turret (required)
Bright-field/dark-field (BD) Manual turret or power turret (Select one.) Manual turret with BD sensor, power turret*1
Bright-field (BF) M Plan Apo, M Plan Apo SL, G Plan Apo series
Objective (optional)
Bright-field/dark-field (BD) BD Plan Apo, BD Plan Apo SL series
Max. workpiece height 220mm
Z axis
Feed mechanism Motor drive (measuring speed: max. 20mm/s)
Transmitted: Telecentric, built-in aperture diaphragm, white LED light source,
stepless brightness adjustment, equipped with cooling fan
LED Reflected: Kohler illumination with adjustable aperture diaphragm, white LED light source,
stepless brightness adjustment , equipped with cooling fan
Illumination unit Control unit: Power switch (main switch), AC power supply input connector (100 to 240V)
(required)
Transmitted: Telecentric, built-in aperture diaphragm, 12V/50W halogen lamp, stepless brightness adjustment, with cooling fan
Reflected: BF/BD Kohler illumination with adjustable aperture diaphragm, 12V100W or 12V15W halogen lamp (selectable), external fiber
Halogen
illumination, stepless brightness adjustment
Control unit: Power switch (main switch), AC power supply input connector (100 to 240 V)
Illumination filter One GIF filter is provided as standard (and mountable for both transmitted and reflected illumination)
Measuring range 200×170mm 300×170mm 400×200mm 200×170mm 300×170mm 400×200mm
Tabletop size 410×342mm 510×342mm 610×342mm 410×342mm 510×342mm 610×342mm
Stage Effective stage glass size 270×240mm 370×240mm 440×240mm 270×240mm 370×240mm 440×240mm
Swiveling angle ±5° ±3° ±5° ±3°
Maximum table loading 20kg 15kg 20kg 15kg
Measurement system High-accuracy digital scale
Measuring accuracy*2
(2.2 + 0.02L)μm, L: measuring length (mm)
(X and Y axes, when not loaded)
Minimum reading 1/0.5/0.1μm switchable
Digital display Display axes X, Y and Z
Functions Zero-setting, direction switching
Joystick (X and Y axes drive), lock button (X and Y axes), speed adjustment (X,Y and Z axes), coarse/fine adjustment button (X, Y and Z axes)
Jog shuttle (Z axis drive), limit setting (Z axis), emergency stop switch, power source backup switch
Remote BOX AF button (vision auto focus): effective when connecting to vision unit (optional)
LAF button (laser auto focus): effective only for LAF models, just focus (JF), tracking focus (TF)
Reset button (X, Y and X axes counter), data output button
Laser auto focus (LAF) — — — ✓ ✓ ✓
Main unit dimensions (WxDxH) 632×892×782mm 682×892×782mm 757×907×782mm 608×790×846mm 658×790×846mm 733×790×846mm
Main unit mass 150kg 158kg 164kg 155kg 163kg 169kg
Dimensions for control unit for illumination unit
355×364×106.5mm
(mm)
Main unit mass 7kg
Dimensions for control unit for illumination unit
114×365×96mm
(WxDxH)
Mass for control unit for illumination unit LED: 3.5kg, halogen: 3.5kg
Maximum power consumption 230W
* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.
*1: Make sure that you use RS-232C cable (No. 12AAA807) to connect a LAF model and a power turret.
*2: Measured in conformance with JIS B 7153.
31
Motor-Driven Measuring Microscopes
MF Series/MF-U Series
The LED illumination unit is shown on the drawings below.
Dimensions The control unit is placed to the side of the microscope or directly attached to the rear of the column
The cable for connecting the control unit and microscope main unit is 600mm in length.
MF D Unit: mm
MF-G2017D MF-G3017D
330∼244 96 330∼244 96
249 249
360
360
210.5∼430.5
210.5∼430.5
782
782
247
247
168 168 270 255 16 168 168 270 255 16
114 360 215 114 360 215
280 280 85 48 621 120.3
100 205 328 100 85 48 621 120.3
150 255 378 150
MF-G4020D
330∼244 96
249
360
210.5∼430.5
782
247
MF-UG2017D MF-UG3017D
330∼244 96
231 330∼244 96
231
360
360
261∼481 105
261∼481 105
782
782
75
247
25
247
32
The LED illumination unit is shown on the drawings below.
The control unit is placed to the side of the microscope or directly attached to the rear of the column
The cable for connecting the control unit and microscope main unit is 600mm in length.
MF-UF2017D MF-UF3017D
313∼227 313∼227
96 96
231 188 231 188
105
360
360
105
323∼543
323∼543
846
846
75
25
247
247
MF-UF4020D
313∼227
313∼227 96 313∼227
231 188 231 188 231 188
360
105
105
105
323∼543
323∼543
323∼543
846
846
846
247
247
247
313∼227
231 188
105
323∼543
846
247
360 215
200 305 428 200 100 48 621 120.3
33
Motor-Driven Z-axis/Motor-Driven
Measuring Microscopes MF Series/MF-U Series
Optional Accessories
System Diagrams
Main unit Data calculation processing
illumination
(reflected + Filters for main unit transmitted illumination
transmitted) RS232C (crossing) cable
GIF filter ND2 filter 12AAA807
12AAA645 12AAA643 Thermal printer DPU-414*1
Note: D-sub 9-pin female-female cable (with connecting cable)
LB80 filter ND8 filter
12AAA646 12AAA644 QM-Data200 Foot switch (high rigidity type):
QM-Data200 12AAJ088
264-155*1
LED illumination unit Halogen illumination unit Vision AF cable
176-445*1 176-447*1 12AAN358
Focus detection Vision unit
Vision unit 10D Foot switch (highly rigid type)
Focus pilot 12AAJ088
Main unit 375-057*1 (green)/375-058*1 (red) 359-763
Calibration chart
Monocular unit (with one 10X eyepiece) QSPAK VUE 02AKN020
176-392
PC is required. Calibration chart (with holder)
Binocular unit (with two 10X eyepieces) 02ATN695
176-393
QS Calibration chart (with holder)
02AKW001
Optical tube
20X eyepiece
378-858 (two)/378-858-5 (one) MF D Z Motorized
10X protractor eyepiece
375-043*1
MF D Motorized External reflected illumination
100W External illumination filter
Twin fiber optics illuminator (100W)
10X digital protractor eyepiece 176-343*1 GIF filter (for light source)
176-313 12AAG806
Ring fiber optics illuminator (100W)
Various rectiles 176-366*1 LB80 filter (for light source)
12AAG807
* Refer to Page 46 for details. LED ring illuminator (white)
176-367-2*1 (external brightness adjuster)
External light source control cable
12AAD128
Peripheral device Connection to a Vision unit
for stage
External light source control cable * Refer to Page 40 for details.
12AAG888
Rotary table with fine feed wheel (B) Stage adapter LED ring illumination unit (white)
176-306 176-304 176-371 (with external brightness adjuster)
(Specific to Sliding Nosepiece)
34
Connection to a Vision unit Data calculation processing
External light source control cable External light source control cable * Refer to Page 40 for details.
RS232C (crossing) cable
12AAG888 12AAD128 12AAA807
Note: D-sub 9-pin female- Thermal printer DPU414*1
Main unit illumination Remote box female cable
(reflected + transmitted) (with connecting cable)
Control unit
Optical tube Remote BOX Control unit
Remote box
10X eyepiece
378-866 (two)/378-866-5 (one) MF DDZZMotorized
MF-U Motorized Focus detection
15X eyepiece
378-857 (two)/378-857-5 (one)
MF DDMotorized
MF-U Motorized Focus pilot
375-067*1 (green)/375-068*1 (red)
Note: Factory installed option.
20X eyepiece
378-858 (two)/378-858-5 (one)
Various rectiles
* Refer to Page 46 for details.
Polarization/ Revolver/objective
differential
interference Differential interference unit
378-080… 5X, 10X Motorized
378-079… 20X Motorized LAF
378-078… 50X, SL20X (only for MF U D Motorized type)
378-076… 100X, SL50X,
SL80X Turret 4 holes (BD) Objectives
176-211 Objectives for BD
Polarization unit Bright-field/ Motor turret 4 holes (BD) BD Plan Apo Series
378-092 dark-field 176-212*1 BD Plan Apo SL Series
(BD)
Manual turret with sensor (BD) Objectives for BF
176-412 M Plan Apo Series
RS232C (crossing) cable
Peripheral 12AAA807 M Plan Apo SL Series
device for Adjustable turret (BF) G Plan Apo Series
stage 378-018 Note: D-sub 9-pin female-female cable.
Note: Make sure that you select this cable for electric LAF. * Refer to Page 37 for details.
Rotary table with fine feed wheel (B) Stage adapter Bright-field Aligning motor driver 5 holes (BF)
176-306 176-304 (BF) 378-216*1
Manual turret with sensor (BF)
176-410
Holder with cramp Swivel center
support Note: Objectives and turrets for LAF are factory-installed options. Select objectives with 5X or larger magnification for LAF models.
176-107 172-197
V-block with cramp
172-378 *1 Order No. depends on the destination.
35
Optional Accessories
Lenses
Our eyepieces provide a wide field of view (with field number 24 when using 10X magnification) to enable easy observation and measurement of objects. The
standard objectives provide a bright image with a long working distance and less flare. For both the bright-field and dark-field FS objectives, plan apochromat
specifications are used. We think that being able to observe and measure objects without fatigue, even for long periods of time, is very important.
Eyepieces
Eyepieces Fixed
index line Rotating
WF10X/24 WF15X/16 WF20X/12 scale line
Order No. Vernier scale
378-866-5 378-857-5 378-858-5
(1 piece)
Order No. Main
378-866 378-857 378-858
(2 pieces) scale
Main scale/31˚ >31˚35´ Digital Protractor Eyepiece
Magnification 10X 15X 20X Vernier/35˚
Order No. 176-313*1
Field number 24 16 12 Magnification 10X
Applicable Field number 22
MF D / MF-U D Protractor Eyepiece
model Line width: 5µm for both 90°
Order No. 375-043 Eyepiece Reticle solid lines and 45° chain lines
· Only the 10X model includes the eye shade. detector
Magnification 10X unit Degrees: 0.00° to ± 369.99°
· If using a measuring microscope older than the MF B series Measuring range
Arc-minutes: 0° 00´ to ± 369° 59´
with a binocular eyepiece, select Order No. 378-866. Field
21 Detection method Electrostatic capacitance encoder
number
External dimensions (mm) ø120×140(D)
Scale 360° 5´ Minimum reading 0.01° (degree) or 1´ (arc-minute)
Applicable Zero-set ABS*/INC selection, degree
MF D
model Digital Function or arc-minute selection, data output
counter (with foot switch 12AAJ088)
(standard Output RS-232C
equipment) External dimensions (mm) 143(W)×112(D)×57(H)
Supports CE Power supply AC100~120V
MF D (fixable to the top surface
Applicable model
of the counter)
*This measurement system does not always supply power to the
internal scale to display absolute values. The system measures
coordinates from any fixed origin.
*1 Order No. depends on the destination.
Optical Tubes
36
For inspection or observation using a microscope, high resolution and an ultra-long working distance are important factors for objective usability. Also, using
the apochromat specifications (for correction of the red, blue, and yellow wavelengths) to correct chromatic aberration over a wide range of wavelengths and
the plan specifications to correct distortion in the image surface, and point aberrations, is also important for getting a clear image across the whole field of view.
Mitutoyo's high quality FS objectives have these characteristics, which expands the range of applications for a microscope and greatly improves its usability. These
objectives are also helpful when installed in a measuring microscope. The M Plan Apo series and BD Plan Apo series are provided for bright-field observation.
The SL (super long) specifications are available for when a long working distance is required. The G Plan Apo series is available corrected for observation through
glass of thickness 3.5mm (or 2 to 5mm to special order).
For observation and measurement using a bright-field or dark-field (BD) Numerical Working Resolving Depth of Focus
Model No. Order No. Magnifi-
cation Aperture Distance Power ± D.F.(µm)
(NA) (mm) (μm)
BD Plan Apo 2X 378-831-7 2X 0.055 34.0 5.0 91
BD Plan Apo 5X 378-832-7 5X 0.14 34.0 2.0 14
BD Plan Apo 7.5X 378-830-7 7.5X 0.21 34.0 1.3 6.2
BD Plan Apo 10X 378-833-7 10X 0.28 34.0 1.0 3.5
BD Plan Apo 20X 378-834-7 20X 0.42 20.0 0.7 1.6
BD Plan Apo 50X 378-835-7 50X 0.55 13.0 0.5 0.9
BD Plan Apo 100X 378-836-7 100X 0.70 6.0 0.4 0.6
BD Plan Apo SL 20X 378-840-7 20X 0.28 30.5 1.0 3.5
BD Plan Apo SL 50X 378-841-7 50X 0.42 20.0 0.7 1.6
BD Plan Apo SL 80X 378-842-7 80X 0.50 13.0 0.6 1.1
* Refer to Catalog No. E4191 "MICROSCOPE UNITS AND OBJECTIVES" for details. BD Plan Apo SL 100X 378-843-7 100X 0.55 13.0 0.5 0.9
BD Plan Apo HR 50X 378-845-7 50X 0.75 5.2 0.4 0.49
BD Plan Apo HR 100X 378-846-7 100X 0.90 1.3 0.3 0.34
Lens set D1 378-931 A set including BD plan Apo 10X, 20X, 50X, and 100X
Lens set D2 378-932 A set including BD plan Apo 2X, 5X, and SL20X
Lens set D3 378-933 A set including BD plan Apo 5X, 10X, 20X, and 50X
37
Optional Accessories
Illumination
How illumination (a light source) is used is important for observing and measuring various inspected objects such as semiconductors, electronic or electric
components, automobile precision components, resin moldings, tools, medical products, and printed materials with clarity and high contrast. Select the best
illumination according to the shape, surface conditions, color, and materials in the inspected object.
(1) (2)
(2) (3)
38
B C
Dual swan-neck light pipe (External Light Source) Fiber-Optic Ring Light (External Light Source)
Order No. 176-343 Order No. 176-366
Fixed to the rear of the microscope column. Continuously variable brightness control
Continuously variable brightness control Includes a condenser lens
Includes a condenser lens Auto-brightness control can be used for the Vision Unit system (with external light
Auto-brightness control can be used for the Vision Unit system (with external light source control cable No. 12AAD128).
source control cable No. 12AAD128). 12V, 100W halogen lamp (No. 517181) Rated life: 1,000 hours
12V, 100W halogen lamp (No. 517181), rated life: 1,000 hours 12V, 100W high brightness halogen lamp (No. 12BAD602) Rated life: 50 hours
12V, 100W high brightness halogen lamp (No. 12BAD602), rated life: 50 hours LB80 filter (No. 12AAG807)
LB80 filter (No. 12AAG807) External 76(W)×235(D)×120(H): includes only the light source
External 76(W)×235(D)×120(H): includes only the light source dimensions Circular illumination unit: outside diameter: 60, inside diameter: 35
dimensions Fiber optics cable length: 700 (from the rear fixed portion to the front edge) (mm) Maximum fiber length: 1,000
(mm) Maximum fiber bending radius: 60 Applicable model MF D (ML objective 10X or lower model)
Applicable model MF D / MF-U D
C: Fiber-Optic Ring Light Image
A: Reflected and Transmitted Illumination Light piped from a standalone
The light is projected vertically halogen lamp unit and projected
downward onto the surface of from around the objective enables
an inspected object through an observation that is less affected
objective. An LED or halogen by shadows due to surface
lamp is selectable as the light irregularities and is suitable for
source. image measurement.
A
B
Image
D: LED Ring Light Image
B: Dual swan-neck light pipe Light from an LED array surrounding
Light piped from a standalone
halogen lamp unit and projected D the objective enables high contrast
observation of deeply colored resins,
from two heads is suitable for
three-dimensional observation.
C circuit boards, and small cylindrical
objects and is also suitable for
The condenser lens included as image measurement. In addition,
standard makes high brightness adjusting the brightness does not
spot lighting possible. The four images show the same portion of an inspected object. change the coloring.
Image
D D
LED Ring Light LED Ring Light (for FS Objectives)
Order No. 176-367-2 Order No. 176-367-2*/176-371 (Specific to Sliding Nosepiece)
Fixed to an objective and projects ring-shaped white LED light
Continuously variable brightness control Continuously variable brightness control
Auto-brightness control can be used for the Vision Unit system (with external Auto-brightness control can be used for the Vision Unit system (with external
light source control cable No. 12AAG888). light source control cable No. 12AAG888).
External 75(W)×150(D)×90(H): only the control part External 75(W)×150(D)×90(H): only the control part
dimensions Ring LED part: outside diameter: 70, height: 68 to 93 dimensions Ring LED part: outside diameter: 70, height: 65 to 80
(mm) LED cable length: 1,500 (mm) LED cable length: 1,500
Applicable model MF D (ML objective 10X or lower model) Applicable model MF-D (FS objective M plan Pro 10X or lower model)
39
Optional Accessories
Manual Image Measurement
Vision Unit
The Vision Unit turns your measuring microscope into a high-performance vision measuring system capable of significantly increasing productivity in quality assurance
operations. Vision measurement simply involves generating enough points from the edges of workpiece features to ensure accuracy and then letting powerful PC-based
software calculate the measurement results. An image measuring model that aligns edges during image measurement and a dedicated electronic model that can be
used for general purposes are available. Both models can print out the measurement results or output them to spreadsheet software or inspection tables.
Features
■ Auto edge detection tool and various macro icons make measurement straightforward
■ Easy-to-use graphics and measurement navigation
■ Enables measurement results to be output to MS-Excel*1 and an inspection table created
on the same PC
■ Enables tolerance zone analysis for measurement and calculation
results, and various types of statistical processing for each item
■ Auto-brightness control that precisely duplicates an illumination setting
(when using the measuring microscopes MF-D and MF-UD together)
■ Enables measurement within one screen
■ Images can be input or saved (in BMP or JPEG format). Foot switch No.12AAJ088
Typical system
For details, see Catalog No. E14008 ■ Motor-Driven Z-axis Measuring Microscopes MF Series/MF-U Series (refer to page 22)
Image AF is possible when using the motorized measuring microscope MF series/MF-U
series (refer to page 28).
*1. MS-Excel is a Microsoft product. For details, see Catalog No. E14008
Specifications
Vision Unit 10D
Order No. 359-763
Magnification of optical system 0.5X: when a microscope is attached (0.5X: when using a TV adapter)
Image detection High sensitivity 1/2-inch CMOS color camera with 300 million pixels
Resolution 0.1μm
Measuring accuracy for each axis
Depends on measuring microscope
(in a 20°C environment)
Depends on measuring microscope
Reference: when using a 3X ML objective (performing an inspection using our standard sample)
Accuracy (in a 20°C environment)
Screen-internal measuring accuracy: ±2.5μm or less
Screen-internal repeatability (2s): ±1μm or less
PC system* Windows 7
Software* QSPAK Vision Unit
Applicable model MF D / MF-U D
* Software (QSPAK) and calculation processor are required separately.
Contour tolerancing
40
Optional Accessories
2-D Data Processing Unit
QM-Data 200
Features
■ Displays high contrast color graphics on a large, backlit, LCD screen
■ Enables frequently-performed complex measurement (such as measuring the distance between
two circles) to be performed by pressing just one button
■ Teaching function for measuring procedure
Efficient measurement by performing measuring point navigation in the repeat mode
■ Eliminates the need to switch measuring command keys through AI-based measurement (which
automatically determines the measured element)
■ Includes a user menu in which you can individually register measuring commands or part programs
■ Enables tolerance zone measurement for measurement and calculation results, and various types
of statistical processing for each item
Typical system ■ Enables measurement results to be output to the MS-Excel*1 PC spreadsheet software in CSV
format
■ Enables part programs and measurement results to be stored in USB memory*2
■ A stand that can be tilted to adjust the angle to an easily viewable position
■ Enables measurement during printing
*1. MS-Excel is a Microsoft product.
Foot switch No. 12AAJ088 *2. Not all commercially available USB memory is supported.
Specifications
QM-DATA 200 (Stand Type)
Order No. 264-155*
Switched among 16 languages (Japanese, English, French, German, Italian, Spanish,
Displayed language Portuguese, Czech, Chinese (traditional), Chinese (simplified), Korean, Turkish, Swedish,
Polish, Dutch and Hungarian
Unit of measurement Length: mm, angle: degree/degree-minute-second (switchable)
Resolution 0.1µm
Program function Creating, performing, and editing measuring procedures
Statistical processing
The measured item, number of data items, maximum value, minimum value, average value,
standard deviation, range, histogram, and statistics for each measuring function (statistics for External dimensions (unit: mm)
each command)
Display field Color TFT LCD (with a backlight)
Tilt feature Available
XYZ: for linear scale input ... up to 3 axes
RS-232C ➀: for connecting a PC (measuring result)
RS-232C ➁: for connecting the counter of the measuring machine main unit
I/O connector FS: for connecting a foot switch
PRINTER: for connecting a receipt or external printer (measuring result)
USB-FDD: for connecting a USB-FDD (measuring result file, measuring procedure file)
USB-MEMORY: for connecting USB memory (measuring result file, measuring procedure file)
File output of measuring result RS-232C output (CSV format, MUX-10 format)
Power supply 100V to 240V AC
Maximum power consumption 17W (without including options)
External dimensions (mm) Approximately 260×242×310mm (including a stand)
Weight Approximately 2.9kg
Applicable model MF D / MF-U D
* Order No. depends on the destination.
Thermal printer
DPU-414 Manufactured by SII
Specifications
Thermal Printer DPU-414 Printout example
Connected to QM-Data
Please contact with your local Mitutoyo sales office.
Order 200
No. Please contact with your local Mitutoyo sales office.
Counter display printing
Note: Combined use with footswitch No. 12AAJ088
Printing method Dot-matrix thermosensitive
Number of printing digits 40 digits (9 normal characters (7 dot matrix)
Printing speed Maximum 52.5 normal characters/s
External dimensions 160mm(W)×170mm(D)×65.5mm(H) (printer)
Standard accessories Printer cable, printing paper (1 roll), AC adapter (for 100V)
Spare
Printing paper (5 rolls) No. 908353 (5 rolls)
goods
41
Optional Accessories
We offer various optional accessories designed to increase microscope usability. These optional accessories, which have all been well received by customers, include
the focus pilot, which can reduce focal point variation; a power turret and power focusing unit, which can be used to change the focus or magnification by under
precise power control and a rotary table, which has a fine-adjustment knob for comfortably rotating objects under inspection. You can also select the polarization
and differential interference contrast unit to support microscopic observation, the TV port adapter to attach a camera, which is required by many people during
simultaneous analysis and evaluation, and other optional accessories as required.
42
Optional Accessories
Rotary Table with Fine Feed Wheel (A) Rotary Table with Fine Feed Wheel (B) Rotary Table with Fine Feed Wheel (with Scale)
Order No. 176-305 Order No. 176-306 Order No. 172-198
280(W)×280(D)×23.7(H)mm 342(W)×342(D)×23.2(H)mm 240(W)×172(D)×19.7(H)mm
External External
Tabletop: ø240mm, 360° rotation, no Tabletop: ø270mm, 360° rotation, no External T-groove pitch of the tabletop: 120
dimensions dimensions
angle scale angle scale dimensions Tabletop: ø270mm, 360° rotation,
Mass 5.5kg Mass 6.5kg minimum angle adjustment: vernier 2'
Effective glass Effective glass Mass 2.4kg
182mm 238mm
diameter diameter Effective glass
96mm
Applicable model Size 1010, 2010 (MF D / MF-U D) Applicable model Size 2017, 3017, 4020 (MF D / MF-U D) diameter
Note: The V-block with Clamp, Swivel Center Support and Note: The V-block with Clamp, Swivel Center Support and MF D / MF-U D
Holder with Clamp can be mounted on the table. Holder with Clamp can NOT be mounted on the table. Note: Size 2010 is used with stage adapter B
Applicable model
Sizes 2017, 3017, and 4020 are used with
280 2-ø7 hole,
Lip: ø14, counter sink depth: 4
stage adapter
30 220 Clamp screws (2)
ter)
31
Note: The V-block with Clamp, Swivel Center Support and
iame
7
r)
29˚ 37˚ 0
ete
iam
ide d
Clamp
outs
gla
screws (2)
ge
120 240
sta
24
lass
eter)
ive
ø1 220
˚
ge g
ect
88
(eff
(s
diam
5 (sta
tag
82
160 150
140
170
las me
130
ø 24
inside
180
256
280
ø184
120
220
so dia
uts ø 240
19 0
0 11
ss ø 270 )
ide gla eter
20
0
10
0
(table
iam
(103.945)
dia ge d
sta
210
342
90
282
me lass
ø 97
ive eg
ø2
ter
0
220
80
) ect ø 100 stag
ø5
ø 96 ctive
41
eff
230
(96.361)
8(
70
(stag
(tab
23 e gla (effe
172
240
ss ou
60
ø
le in
tside
62
250
diam
50
side
ø ete r)
40
2-M6 depth 8 (103.945)
dia
12
Turning knob
me
30
ø28
13 10.5(0.2)
ter)
28
20
0
13
19 13
29
0 10
22.5
23.7
58
300 0
310
13
350
C
M6 (137.618) 7
(0.7) 9.5 13
1.8
Clamp screw 220 Turning knob ø162
342 23.2 ø146
ø28 120 (T-groove pitch)
3
13
19.7
T-groove dimensions
(Scale 2/1)
19
M6
Clamp screw
V-block with Clamp Swivel Center Support Holder with Clamp Stage Adapter / Stage Adapter B
Order No. 172-378 Order No. 172-197 Order No. 176-107 176-304 (for 2017,
Maximum clamping diameter: 25mm ± 10° for swivel position Maximum clamp Order No. 3017, 4020)
35 B: 176-310 (for 2010)
Height from the mounting surface Minimum angle index: 1° length (mm)
to the center: 38 to 48mm Suitable for measuring screws or External External 50(W)×340(D)×15(H)
other objects 62(H)×152(W)×38(D) dimensions for Note: Adapter B is
External dimensions (mm)
dimensions 117(H)×90(W)×45(D) Maximum horizontal clamping Mass 0.4kg one piece (mm) 280(D).
(mm) size: ø80×140mm MF D / MF-U D Mass 1.5kg / B: 1.2kg
Mass 0.8kg Maximum clamping size when Note: Size 2010 is used Applicable model MF D / MF-U D
MF D / MF-U D inclined 10°: ø65×140mm with stage adapter B. Note: The two pieces are provided as one set.
Mass 2.5kg Applicable model
Note: Size 2010 is used with Sizes 2017, 3017, and
Applicable MF D / MF-U D
stage adapter B. 4020 are usable with
model Note: Size 2010 is used with
Sizes 2017, 3017, and 4020 are Applicable stage adapter
usable with stage adapter stage adapter B.
model
Sizes 2017, 3017, and 4020 are
used with stage adapter
43
Optional Accessories
44
C-Mount Adapter 0.5X TV Adapter (Including C-Mount Adapter)
Order No. 970441 Order No. 375-054
This standard adapter is used to mount a device This standard adapter is used to mount a device
such as a digital camera to the TV camera port of such as a digital camera to the TV camera port of
a microscope. a microscope.
Note: This is not used when the Vision Unit is This adapter enables observation with a wide field of
mounted. view using a 0.5X minimum relay image.
External Magnification accuracy: ±0.1%, Image field
ø45×22.5(H) diameter: 11mm
dimensions (mm)
Applicable model MF D / MF-U D Note: This adapter is included with the Vision Unit
as standard.
External
ø45×123(H)
dimensions (mm)
Applicable model MF D / MF-U D
45
Optional Accessories
Reticles
For MF D For MF-U D
0 10 20 30 40 50 60 70 80 90 100
46
0.25
0.3 1.25
0.1
0.15
0.35 0.2
0.25
0.4 0.3
1.5 0.4
0.45 0.5
0.6
0.5 0.8
1.75 1.0
0.6
0.7
2.0
0.8
RACK GEAR 14.5°
1.0
80
24
72
64 20
56
48 18
44
40 16
36
14
32
RACK GEAR 20°
28
METRIC THREAD
Reticle for digital protractor eyepiece
(included as standard)
13
12
11
10
47
120 1506 (3) B-(CH)HS, Printed in Japan
Coordinate Measuring Machines Vision Measuring Systems Form Measurement Optical Measuring
Whatever your challenges are,
Mitutoyo supports you from start to finish.
http://www.mitutoyo.co.jp/global.html
Mitutoyo Corporation
20-1, Sakado 1-Chome,
Takatsu-ku, Kawasaki-shi,
Kanagawa 213-8533, Japan
Note: Product illustrations are without obligation. Product descriptions, in particular any and all technical
specifications, are only binding when explicitly agreed upon. T +81 (0) 44 813-8230
MITUTOYO and MiCAT are either registered trademarks or trademarks of Mitutoyo Corp. in Japan and/or other countries/regions.
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