Koyo 特殊環境軸承型錄
Koyo 特殊環境軸承型錄
Koyo 特殊環境軸承型錄
CAT.NO.457E
EXSEV Bearing Series
Product Guidebook
The Koyo EXSEV Bearing Series is a collection of high-performance bearings compatible with special operating
environments and conditions, where conventional bearings are not applicable.
From among our varied collection of EXSEV Series bearings, this Guidebook includes products that are especially
contributory to the semiconductor industry, such as in clean-room or vacuum-chamber applications.
Koyo is certain that the high-performance EXSEV Bearing Series, which is the materialization of new values, will
assist the many engineers who pioneer unexplored fields beyond the boundaries of the normal semiconductor
industry.
Clean Non-magnetic
Vacuum Corrosion-resistant
High-temperature
The information given in this catalog is subject to change without prior notice,
to include future improvements of the bearings.
Koyo pays close attention to the correctness of the information given in this catalog.
Nonetheless, we disclaim liability for any damage resulting from errors, omissions,
or missing pages in this catalog.
Deep Groove Ball Bearings (Angular Contact Ball Bearings)
HD Bearings
FA Bearings
Clean Pro Bearings
High-temperature Clean Pro Bearings
DL Bearings
PN Bearings
MO Bearings
WS Bearings
MG Bearings
High-temperature Hybrid Ceramic Bearings
Full Complement Ceramic Ball Bearings
(Angular Contact Ball Bearings)
SK Bearings
Corrosive-resistant SL Bearings
Corrosion-resistant Hybrid Ceramic Bearings
Ceramic Bearings
Corrosion-resistant Ceramic Bearings
Highly Corrosion-resistant Ceramic Bearings
Non-magnetic Hybrid Ceramic Bearings
High-speed/Insulated Hybrid Ceramic Bearings
HD Bearings FA Bearings
SV6003ZZST YS SE6003ZZST FA
Advantages Advantages
The HD Bearings packed with an appropriate amount of The FA Bearings are lubricated with a solid fluoropolymer
lithium-base KHD grease, which is low in particle lubricant, which offers superior lubrication performance.
emissions.
The cage is made from a low-particle-emission fluorocarbon
Lubricated with grease, the HD Bearings offer superior resin.
lubrication reliability.
Specifications Specifications
Cage Cage
Austenitic stainless steel Fluorocarbon resin
Shield Shield
Austenitic stainless steel Austenitic stainless steel
Lubrication Lubrication
KHD grease Fluoropolymer
Performance Performance
1) 1
CleanlinessClass 1000 Cleanliness Class 1000
5
Ambient pressure Atmospheric pressure Ambient pressureAtmospheric pressure to 10 Pa
Temperature30 to 120 Temperature100 to 200
2 1
Limiting speed dn < 5000 Limiting speeddn 100001000 min max.
3
Permissible radial load 1% of the basic dynamic load rating
Applications Applications
Carrier systems Semiconductor manufacturing systems
Food-processing systems LCD manufacturing systems
Cleaning systems Carrier systems
Inspection systems
1The cleanliness class number represents specific environments where the individual products are useful. The cleanliness of the products themselves may vary depending on operating conditions.
2When used in an environment where cleanliness is not a significant factor, the product can be used at higher speed, reaching the same limiting speed as that of standard products.
3The permissible radial load indicates the approximate size of radial load the bearing can carry. If the bearing carries an axial load, the permissible radial load may be lower.
Refer to the table at the end of the guidebook for each product's basic dynamic load rating (Cr).
Clean Pro Bearings High-temperature Clean Pro Bearings
SE6003ZZSTPR YS SE6003ZZSTPRB YS
Advantages Advantages
The Clean Pro Bearings are finished with Clean Pro The High-temperature Clean Pro Bearings are an
coating, which serves as the solid lubricant. upgraded version of the reliable Clean Pro Bearings,
which have an excellent record in clean-room applications.
The Clean Pro coating provides excellent lubrication and
is low in particle and gas emissions, making the Clean With improved heat resistance, the High-temperature
Pro Bearings useful in clean-room applications. Clean Pro Bearings offer an expanded operating
temperature range of up to 260 .
Specifications Specifications
Cage Cage
Austenitic stainless steel Austenitic stainless steel
Shield Shield
Austenitic stainless steel Austenitic stainless steel
Lubrication Lubrication
Clean Pro coating Clean Pro coating
Performance Performance
1 1
CleanlinessClass 10 chemically clean CleanlinessClass 10
5 5
Ambient pressureAtmospheric pressure to 10 Pa Ambient pressureAtmospheric pressure to 10 Pa
Temperature100 to 200 Temperature 100 to 260
1 The long service life of the High-temperature Clean Pro Bearings is especially
Limiting speeddn 100001000 min max. significant in an environment where temperatures exceed 200 .
3 1
Permissible radial load 3% of the basic dynamic load rating Limiting speeddn 100001000 min max.
3)
Permissible radial load 3% of the basic dynamic load rating
Applications Applications
Semiconductor manufacturing systems Semiconductor manufacturing systems
LCD manufacturing systems LCD manufacturing systems
Carrier systems Vacuum evaporators
Inspection and analysis systems Hard-disk manufacturing systems
Rotary drives
Vacuum motors
Vacuum
DL Bearings PN Bearings
SV6003ZZST YS SE6003ZZST PN
Advantages Advantages
The DL Bearings packed with an appropriate amount of The PN Bearings are solid-lubricant bearings, provided
KDL grease (fluorine base), which is suitable for vacuum with a solid lubricant and fluoropolymer.
environments.
The cage is made from a highly heat-resistant PEEK
The low-particle-emission DL Bearings are suitable for (poly-ether-ether-ketone) resin, enabling the bearings to
use in a clean environment as well. operate stably under high temperatures.
Lubricated with grease, the DL Bearings ensure superior
lubrication reliability.
Specifications Specifications
Cage Cage
Austenitic stainless steel PEEK resin
Shield Shield
Austenitic stainless steel Austenitic stainless steel
Lubrication Lubrication
KDL grease Fluoropolymer and solid lubricant
Performance Performance
1
CleanlinessClass 100 Cleanliness
5 5
Ambient pressureAtmospheric pressure to 10 Pa Ambient pressureAtmospheric pressure to 10 Pa
Temperature30 to 200 Temperature30 to 300
2 1
Limiting speeddn 40000 Limiting speeddn 100001000 min max.
3
Permissible radial load 3% of the basic dynamic load rating
Applications Applications
Semiconductor manufacturing systems Drink-carton manufacturing systems
LCD manufacturing systems LCD washing systems
Carrier robots
Vacuum pumps
1The cleanliness class number represents specific environments where the individual products are useful. The cleanliness of the products themselves may vary depending on operating conditions.
2When used in an environment where cleanliness is not a significant factor, the product can be used at higher speed, reaching the same limiting speed as that of standard products.
3The permissible radial load indicates the approximate size of radial load the bearing can carry. If the bearing carries an axial load, the permissible radial load may be lower.
Refer to the table at the end of the guidebook for each product's basic dynamic load rating (Cr).
MO Bearings WS Bearings
SE6003ZZSTMSA7 YS SE6003ZZST WS
Advantages Advantages
The MO Bearings are solid-lubricant bearings, lubricated The WS Bearings are solid-lubricant bearings, lubricated
with molybdenum disulfide coating. with tungsten disulfide.
They are superior to polymer-lubricated bearings in load- They have excellent heat resistance and load-carrying
carrying performance and lubrication performance. performance.
These bearings have a tungsten disulfide-including
separator, in place of a cage, keeping the balls equally
spaced.
Specifications Specifications
Lubrication Lubrication
Molybdenum disulfide coating Solid lubricant of tungsten disulfide base
Performance Performance
Cleanliness
Cleanliness
5 5
Ambient pressureAtmospheric pressure to 10 Pa Ambient pressureAtmospheric pressure to 10 Pa
Temperature100 to 300 Temperature100 to 350
1 1
Limiting speeddn 100001000 min max. Limiting speeddn 4000500 min max.
2 3
Permissible radial load 3% of the basic dynamic load rating Permissible radial load 5% of the basic dynamic load rating
Applications Applications
Semiconductor manufacturing systems Semiconductor manufacturing systems
LCD manufacturing systems LCD manufacturing systems
Vacuum evaporators Vacuum evaporators
Turbo-molecular pump PDP manufacturing systems
Rotary furnaces
Vacuum High-temperature
SE6003ZZSTMG3 YS 3NC6003HT4 GF
Advantages Advantages
The MG Bearings are solid-lubricant bearings, lubricated The High-temperature Hybrid Ceramic Bearings have
with the silver-ion plating on the rolling elements (balls). bearing rings made from excellently heatproof high-speed
tool steel with ceramic rolling elements (balls).
They are suitable for ultra-high vacuum applications,
because gas emissions are very low. These bearings are solid-lubricant bearings, with the
cage made from highly heat-resistant graphite, which
serves as the lubricant.
Specifications Specifications
Outer/inner rings
Outer/inner rings and balls High-speed tool steell
Martensitic stainless steel
Balls
Cage Ceramics
Austenitic stainless steel
Cage
Shield Graphite
Austenitic stainless steel
Lubrication
Lubrication Graphite
Silver
The cage protruding on one side.
Performance Performance
Cleanliness
Cleanliness
3 10
Ambient pressure10 to 10 Pa Ambient pressureAtmospheric pressure
Temperature200 to 350 Temperature100 to 500
1 1
Limiting speeddn 100001000 min max. Limiting speeddn 4000500 min max.
2 2
Permissible radial load 3% of the basic dynamic load rating Permissible radial load 3% of the basic dynamic load rating
Applications Applications
Semiconductor manufacturing systems Carrier systems in baking furnaces
LCD manufacturing systems Bogies in heating furnaces
Vacuum evaporators
Vacuum motors
Medical equipment
1The cleanliness class number represents specific environments where the individual products are useful. The cleanliness of the products themselves may vary depending on operating conditions.
2The permissible radial load indicates the approximate size of radial load the bearing can carry. If the bearing carries an axial load, the permissible radial load may be lower.
Refer to the table at the end of the guidebook for each product's basic dynamic load rating (Cr).
Corrosion-resistant
NC7003V SK6003ZZST YS
Advantages Advantages
The Full Complement Ball Bearings are the ultimate result The SK Bearings are suitable for use in slightly corrosive
of our commitment to heat resistance. environments.
The configuration of these bearings is of angular contact The bearing rings and rolling elements (balls) are made
ball bearings. from martensitic stainless steel, with an appropriate
amount of lithium-base KHD grease sealed in.
The bearing rings and rolling elements (balls) are made of
ceramic.
No cage is provided.
Specifications Specifications
Performance Performance
Cleanliness
Cleanliness
10
Ambient pressureAtmospheric pressure to 10 Pa Ambient pressureAtmospheric pressure
Temperature200 to 800 Temperature30 to 120
1
Limiting speeddn 4000500 min max.
2
Permissible radial load 1% of the basic dynamic load rating
Applications Applications
Carrier systems in baking furnaces Chemical processing systems
Fans in furnaces Carrier systems
Corrosion-resistant
SL6003ZZMD4 FA 3NC6003MD4 FA
Advantages Advantages
With precipitation-hardened stainless steel bearing rings With the precipitation-hardened stainless steel bearing
and carbon rolling elements (balls), the SL Bearings are rings and ceramic rolling elements (balls), the Hybrid
useful in corrosive environments. Ceramic Bearings are useful in corrosive environments.
These bearings are solid-lubricant bearings, lubricated These bearings are solid-lubricant bearings, lubricated
with carbon and fluoropolymer. with fluoropolymer.
Specifications Specifications
Outer/inner rings Outer/inner rings
Precipitation-hardened stainless steel Precipitation-hardened stainless steel
Balls Balls
High-hardness carbon material Ceramics
Cage Cage
Fluorocarbon resin Fluorocarbon resin
Shield Shield
Austenitic stainless steel Austenitic stainless steel
Lubrication Lubrication
Carbon and fluoropolymer Fluoropolymer
Performance Performance
1 1)
Cleanliness100 CleanlinessClass 1000
5 5
Ambient pressureAtmospheric pressure to 10 Pa Ambient pressureAtmospheric pressure to 10 Pa
Temperature100 to 200 Temperature100 to 200
1 1
Limiting speeddn 4000500 min max. Limiting speeddn 100001000 min max.
2 2
Permissible radial load 0.3% of the basic dynamic load rating Permissible radial load 1% of the basic dynamic load rating
Applications Applications
Film manufacturing systems Semiconductor manufacturing systems
Electronic-device manufacturing systems Chemical processing systems
Washing systems Food machinery
Chemical processing systems Washing systems
1The cleanliness class number represents specific environments where the individual products are useful. The cleanliness of the products themselves may vary depending on operating conditions.
2The permissible radial load indicates the approximate size of radial load the bearing can carry. If the bearing carries an axial load, the permissible radial load may be lower.
Refer to the table at the end of the guidebook for each product's basic dynamic load rating (Cr).
NC6003 FA NCT6003 FA
Advantages Advantages
The ceramic-made bearing rings and rolling elements With both the bearing rings and rolling elements (balls)
(balls) make the Ceramic Bearings useful in corrosive made from highly corrosion-resistant silicon nitride
environments. ceramics, the Corrosion-resistant Ceramic Bearings are
compatible with corrosive environments.
These bearings are solid-lubricant bearings lubricated
with fluoropolymer. These bearings are solid-lubricant bearings lubricated
with fluoropolymer.
Specifications Specifications
Cage Cage
Fluorocarbon resin Fluorocarbon resin
Lubrication Lubrication
Fluoropolymer Fluoropolymer
Performance Performance
1) 1)
CleanlinessClass 1000 CleanlinessClass 1000
5 5
Ambient pressureAtmospheric pressure to 10 Pa Ambient pressureAtmospheric pressure to 10 Pa
Temperature100 to 200 Temperature100 to 200
1 1
Limiting speeddn 100001000 min max. Limiting speeddn 100001000 min max.
2 2
Permissible radial load 1% of the basic dynamic load rating Permissible radial load 1% of the basic dynamic load rating
Applications Applications
Semiconductor manufacturing systems Liquid-crystal-film processing systems
LCD manufacturing systems Aluminum-foil capacitor processing systems
Semiconductor inspection systems Plating systems
Synthetic-fiber manufacturing systems Synthetic-fiber manufacturing systems
Canning systems Food-container washing systems
Ultrasonic motors
Corrosion-resistant Non-magnetic
NCZ6003 FA 3NC6003YH4 FA
Advantages Advantages
These bearings are resistant to strong acid and alkaline The Non-magnetic Hybrid Ceramic Bearings have non-
solutions as well. magnetic stainless steel bearing rings and ceramic balls.
Having the bearing rings and rolling elements (balls) These bearings are solid-lubricant bearings lubricated
made from highly corrosion-resistant silicon-carbide with fluoropolymer.
ceramics, the Highly Corrosion-resistant Ceramic
Bearings are compatible with corrosive environments.
These bearings are solid-lubricant bearings lubricated
with fluoropolymer.
Specifications Specifications
Cage Balls
Fluorocarbon resin Ceramics
Cage
Lubrication Fluorocarbon resin
Fluoropolymer
Lubrication
Fluoropolymer
Performance Performance
1 1)
CleanlinessClass 100 CleanlinessClass 1000
5 5
Ambient pressureAtmospheric pressure to 10 Pa Ambient pressureAtmospheric pressure to 10 Pa
Temperature100 to 200 Temperature100 to 200
1 1
Limiting speeddn 100001000 min max. Limiting speeddn 100001000 min max.
2 2
Permissible radial load 1% of the basic dynamic load rating Permissible radial load 1% of the basic dynamic load rating
Applications Applications
Aluminum-foil capacitor manufacturing systems Semiconductor manufacturing systems
Semiconductor inspection systems
Canning systems
Superconductivity-related systems
Welding
1The cleanliness class number represents specific environments where the individual products are useful. The cleanliness of the products themselves may vary depending on operating conditions.
2The permissible radial load indicates the approximate size of radial load the bearing can carry. If the bearing carries an axial load, the permissible radial load may be lower.
Refer to the table at the end of the guidebook for each product's basic dynamic load rating (Cr).
High-speed / Insulated Hybrid Ceramic Bearings Full Complement Hybrid Ceramic Ball Bearings
3NC6003 FG 3NCKAA060V
Advantages Advantages
The High-speed Insulating Hybrid Ceramic Bearings have The Full Complement Hybrid Ceramic Ball Bearings have
ceramic rolling elements (balls). ceramic rolling elements (balls).
The lightweight ceramic balls produce low centrifugal In place of a cage, a stainless-steel separator guides the
force, making these bearings suitable for high-speed ceramic balls, reducing particle emissions and making
rotation. the bearings suitable for clean environments.
The ceramic balls insulate the outer ring and the inner
ring enabling the bearings to be used in environments
where electrical pitting is possible.
Specifications Specifications
Balls Balls
Ceramics Ceramics
Cage Separator
Reinforced polyamide resin Martensitic stainless steel
Cage
Lubrication Not provided
Grease or oil
Lubrication
KDL grease
Performance Performance
1
Cleanliness
CleanlinessClass 100
5
Ambient pressureAtmospheric pressure Ambient pressureAtmospheric pressure to10 Pa
Temperature30 to 120 Temperature30 to 200
Limiting speedEqual to or higher than 1.2 times the
limiting speed of standard bearings
Applications Applications
Hard disk drives Wafer-carrier robots
Motor spindles
High-speed stranding machine guide rolls
Linear Motion Bearings
Clean Pro Linear Ball Bearings / Linear Way Bearing Units DL Linear Ball Bearings / Linear Way Bearing Units
(Linear Ball Bearings) (Linear Way Bearing Units) (Linear Ball Bearings) (Linear Way Bearing Units)
Advantages Advantages
Both the Linear Ball Bearings and Linear Way Bearing Both the Linear Ball Bearings and Linear Way Bearing
Units are solid-lubricant bearings lubricated by means of Units seal in an appropriate amount of KDL grease
the Clean Pro coating. (fluorine base), which is low in particle emissions.
The Clean Pro coating has superior lubrication These bearings are suitable for vacuum applications and
performance and is low in particle and emissions, making in high-temperature environments.
the bearings useful in clean environments.
Specifications Specifications
Retainer Retainer
Austenitic stainless steel Austenitic stainless steel
Lubrication Lubrication
Clean Pro coating KDL grease
Lubrication Lubrication
Clean Pro coating KDL grease
Performance Performance
1
CleanlinessClass 100
Cleanliness
5 5
Ambient pressureAtmospheric pressure to 10 Pa Ambient pressureAtmospheric pressure to 10 Pa
Temperature100 to 200 Temperature30 to 200
1The cleanliness class number represents specific environments where the individual products are useful. The cleanliness of the products themselves may vary depending on operating conditions.
SESDM12ST5MSA7
Advantages
The MO Linear Ball Bearings are lubricated with
molybdenum disulfide, which is a solid lubricant.
These bearings are suitable for high-temperature, vacuum
applications.
They are superior to polymer-lubricated bearings in load-
carrying performance and lubrication performance.
Specifications
Warning
External cylinder and balls
Martensitic stainless steel
The EXSEV products that can be used for clean
Retainer
Austenitic stainless steel applications are seal-packaged. They are not to
Side plate be unpacked until immediately before they are
Precipitation-hardened stainless steel
assembled in the systems.
Lubrication
Molybdenum disulfide coating
When handling bearings, wear polyethylene
gloves or other appropriate material to keep the
bearings free from oil stains or dust.
Delivery guideline
Ex-factory basis
Available from stock 45 days after receiving an order
EXSEV Bearing Number Table 30 days after receiving an order Determined after consultation on each inquiry
Series High-temperature High-temperature Full Complement Corrosion-resistant Corrosion-resistant Highly Non-magnetic High-speed
HD FA Clean Pro DL PN MO WS MG SK Corrosion-resistant Ceramic
Clean Pro Hybrid Ceramic Ceramic Bearings Hybrid Ceramic Ceramic corrosion-resistant Hybrid Ceramic Insulating Hybrid
Boundary dimensions Basic load ratings Bearing Bearings Bearings Bearings Bearings Bearings Bearings Bearings Bearings Bearings SL Bearings Bearings
Bearings Bearings (Angular Contact Ball Bearings) Bearings Bearings Ceramic Bearings Bearings Ceramic Bearings
number
mm kN
Prefix SV SE SE SE SV SE SE SE SE NC NC SK SL NC NC NCT NCZ NC NC
Suffix ST ST STPR STPRB ST ST STMSA ST STMG HT V ST MD MD YH
Basic Cage code YS FA YS YS YS PN YS WS YS GF YS FA FA FA FA FA FA FG
Bore dia. Outside dia. Width Cr C0r number
. . 604
. . 624
. . 605
. . 625-5
. . 606
. . 626
. . 607
. . 627
. . 608
. . 628
. . 609
. . 629
. . . . . EE3S
. . 6000
. . 6200
. . 6001
. . 6201
. . 6002
. . 6202
. . 6003
. . 6203
. . 6004
. . 6204
. . 6005
. . 6205
. . 6006
. . 6206
. . 6007
. . 6207
. . 6008
. . 6208
Note 1The internal clearance of the in-stock bearings is as shown on the right. C C C C C C C CN CN CN
Packed with Packed with
KHD grease KHD grease
Note 2 Note 3 Note 4
Note 2Because the configuration of these bearings is that of angular contact ball bearings, their basic bearing number and basic load ratings differ from those shown in this table.
3Packed with KHD grease. The 6900 Series bearings are also available with these specifications.
4The bearings of the numbers marked with an asterisk have a C3 clearance.
Cleanliness, Vacuum and Heat-resistance Characteristics of the Typical EXSEV Bearings
Non-magnetic resistance
Operating temperature
Performance Cleanliness class Ambient pressurePa
Insulation
Lower limit Upper limit
Atmospheric
to to to
Series
5
HD Bearings
FA Bearings
DL Bearings
PN Bearings
MO Bearings
WS Bearings
MG Bearings
High-temperature
Hybrid Ceramic Bearings
SK Bearings
Corrosion-resistant SL Bearings
Corrosion-resistant
Hybrid Ceramic Bearings
Ceramic Bearings
Corrosion-resistant
Ceramic Bearings
Highly corrosion-resistant
Ceramic Bearings
Non-magnetic
Hybrid Ceramic Bearings
Note 1The colored sections and circles indicate the characteristics of individual products.
2The cleanliness class number represents the environments where the individual products are useful.
The cleanliness of the products themselves may vary depending on operating conditionsloads and rotational speed.
3Please consult Koyo when planning to use a bearing under conditions close to the limit conditions specified in this table,
or under the conditions that are outside the operating range indicated in this table.
KOYO SEIKO CO., LTD. HEAD OFFICE KOYO SEIKO CO., LTD. SHANGHAI LIAISON OFFICE
No.5-8, Minamisemba 3-chome,Chuo-ku,Osaka 542-8502,JAPAN Rm.402,Aetna Tower,107 Zunyi Road,Shanghai 200051,CHINA
TEL : 81-6-6245-6087 FAX : 81-6-6244-0814 TEL : 86-21-6237-5280 FAX : 86-21-6237-5277
KOYO SEIKO CO., LTD. (Japan) is certifide to ISO 9001 and QS-9000.
CAT.NO. 457E
,
Printed in Japan 03.6-2CM