MP0593 Icps

Pre-installation Guide
1-1
CUSTOMER DETAILS
CUSTOMER: HI-TECH (VIETNAM)
SERIAL No: MP0593-ICP
SALES CONTACT: FRANK FEILI
TYPE OF SYSTEM: LPX ICP (SR)
DATE GUIDE WAS PREPARED: 18
th
JANUARY 2008
ISSUE: 01
DATE GUIDE WAS UPDATED:
1-2
IMPORTANT NOTES
The information contained within this guide is accurate at time of placement of order.
The electronics rack is supplied with 10 metres cables as standard, which allowing for cable drops, leaves 9 metres between rack & other system parts.
However, please note that the effective distance between parts may be reduced even further to avoid other obstructions or if cables are routed via cable
trays.
STS only recommend the use of orbitally welded VCR fittings for all gas line installations from source to gasbox. Only fit correctly rated regulators. It is also
recommended a wall-mounted isolation valve, high flow valve & non return valve be fitted in each gas line. Failure to provide this equipment may result in
unnecessary delays in the commissioning of the system.
In order to check the foreline for leaks, STS recommend fitting an isolation valve on the chamber pump.
A helium leak detector or similar equipment must be made available for STSs appointed engineer to use to commission the equipment. Failure to provide
this equipment may result in unnecessary delays in the commissioning of the system.
All facilities points of connection to have flexibility designed in to allow for vibration due to a seismic event.
STS recommend a noise survey assessment as part of the installation. STS also recommend positioning the pumps in the grey area away from the
operators point of use, if possible.
If this system is to be electrically installed by non STS personnel, it must be installed in line with the requirements of the latest issue of STS quality
documents: Q000130, Q000131, Q000135 & electrical drawing ED322778, using a suitable electrical installation tester. These documents are available from
STS by mailing the address below. If STS engineers are to electrically install this system they must be notified if an appropriate electrical tester is available
to prevent any delay.
The supply cable to this tool must be sized in accordance with local electrical rules/regulations & is the responsibility of the customer to ensure it is suitably
rated prior to installation.
A suitably rated mains circuit breaker should be installed up stream of the main breaker on the STS supplied electronics rack.
An input from a fire system can be linked in to the STS EMO circuit if required.
1-3
FOR FURTHER INFORMATION PLEASE CONTACT STS SERVICE DEPARTMENT AT:
preinstall@stsystems.co.uk
1-4
CONTENTS
SECTION 1 SYSTEM ENVIRONMENT & FOOTPRINT
SECTION 2 SYSTEM INSTALLATION DRAWINGS
SECTION 3 DATA SHEETS
SECTION 4 SYSTEM SERVICES INSTALLATION CHECKLIST
1-5
ABOUT THIS GUIDE
This guide describes the facilities requirements of the LPX ICP system. In order for the system to operate safely to the specifications, qualified personnel must
install each of the following user-supplied services prior to the arrival of an STS service engineer:
Electrical facilities
Cooling water facilities
Gas supply facilities
Extraction requirement
Compressed air
1-6
SECTION 1
SYSTEMS ENVIRONMENTAL
CONDITIONS
1-7
SYSTEMS ENVIRONMENTAL CONDITIONS (CLEAN ROOM)
Air particle count local to the system Class 1,000 or better
ROOM TEMPERATURE
Maximum 25
o
C
Minimum 5
o
C
RELATIVE HUMIDITY AT 20
o
C
Maximum 75%
Minimum 25%
SYSTEMS ENVIRONMENTAL CONDITIONS (GREY AREA)
Air particle count local to the system Class 10,000 or better
ROOM TEMPERATURE
Maximum 25
o
C
Minimum 5
o
C
RELATIVE HUMIDITY AT 20
o
C
Maximum 75%
Minimum 25%
1-8
FOOTPRINT LAYOUT
2-1
SECTION 2
SYSTEM INSTALLATION
INFORMATION
2-2
HOW TO USE THIS GUIDE
The System Services Diagrams
included in this section each
show a different service
required for the system. They
show where the service is to be
connected & who should
provide it (i.e. STS or the
CUSTOMER). Reference is
made to the tables for the
particular service.
In the example shown here, the
customer will be required to
provide the nitrogen supply to
the fitting at conditions shown
by referring to the table ref. (A).
The specification for this air
supply can be found on page
2.3 of this section. The exhaust
requirements (M) are detailed
on page 2.9. By examining the
Systems Service Diagrams &
referring to the tables you will
be able to determine the
services required & the points
of connection.
2-3
NITROGEN REQUIREMENTS
TABLE
REF
LETTER
SERVICE
REQUIRED
PURITY
INLET
PRESSURE
MAX
SAFETY
PRESSURE
FLOW RATE SUPPLIER
A Loadlock vent 99.99% 2-6 Bar (g) 10 Bar (g) 22 SLPM Customer
B Loadlock pump purge
Varian SH100
No purge required.
FITTING FOR THE ABOVE SUPPLY IS 8MM PUSH FIT
C Process pump purge
Edwards iH80
99.99% 2.8-3.2 Bar (g) 7 Bar (g) 12 SLPM
(Dry pump)
Customer
FITTINGS FOR THE ABOVE SUPPLIES ARE 1/4 SWAGELOK COMPRESSION
D Anti-condensation 99.99% 2-6 Bar (g) 10 Bar (g) 1 SLPM Customer
FITTING FOR THE ABOVE SUPPLY IS 1/4" PUSH FIT
E Chamber vent, turbo
purge & gas line purges
99.9995% 1 Bar (g) 10 Bar (g) 22 SLPM Customer
FITTING FOR THE ABOVE SUPPLY IS 1/4 VCR MALE
2-4
WATER REQUIREMENTS
RECOMMENDED CONDITIONS OF HOUSE COOLING WATER:-RESISTIVITY: 10 Kohm.cm
SOLID CONTENT: 30 ppm
PH VALUE: 6 - 8
TEMPERATURE: 15
o
C - 25
o
C
NOTE
Please also refer to the "Cooling Requirements" section of this document, page 2-9.
TABLE
REF
LETTER
SERVICE REQUIRED PURITY
INLET
PRESSURE
FLOW RATE SUPPLIER
F
Machine supply 100 Microns 2-4 Bar (g) 300 l/h Customer
FITTING SIZE 3/8 QUICK COUPLING
G
Process chamber
dry pump
Edwards iH80
100 Microns 2-4 Bar (g) 120 l/h Customer
FITTING SIZE 1/2 QUICK COUPLING
H
Loadlock chamber
dry pump
Varian SH100
No water required. Air cooled.
I RF generators in cabinet 100 Microns 2-4 Bar (g) 340 l/h Customer
FITTING SIZE 3/8 SWAGELOK COUPLING
2-5
COMPRESSED AIR REQUIREMENTS
TABLE
REF
LETTER
SERVICE
REQUIRED
CONTAMINANTS
INLET
PRESSURE
MAX
SAFETY
PRESSURE
FLOW RATE SUPPLIER
J
Compressed air
supply unit
<5 micron particles 5 Bar (g) 10 Bar (g) 10 SLPM
Customer
FITTING SIZE 8MM PUSH FIT
2-6
PROCESS GASES REQUIREMENTS
NOTES
Process performance can be influenced by pressure variation in certain gases (particularly C
4
F
8
, SiCl
4
& BCl
3
). In order to minimise this effect, thought
should be given to their storage conditions (for instance, store indoors to maintain a stable temperature).
Should Argon not be required as a process gas, it must still be made available for de-chucking when using an electrostatic clamp.
TABLE
REF
LETTER
SERVICE
REQUIRED
PURITY
INLET
PRESSURE
MAX
SAFETY
PRESSURE
FLOW RATE SUPPLIER
K
Process gases
99.995%
EXCEPT GASES
SiCl
4
& BCl
3
1 Bar (g) 6 Bar (g) Process dependant Customer
FITTTING SIZE 1/4 VCR MALE CONNECTION
2-7
HELIUM BACKSIDE COOLING REQUIREMENTS
TABLE
REF
LETTER
SERVICE
REQUIRED
PURITY
INLET
PRESSURE
MAX SAFETY
PRESSURE
FLOW RATE SUPPLIER
L
Helium gas 99.999% 1 Bar (g) 6 Bar (g) 50 SCCM Customer
FITTING SIZE 1/4 VCR FEMALE CONNECTION
2-8
EXHAUST REQUIREMENTS
TABLE
REF
LETTER
SERVICE
REQUIRED
EXTRACTION
RATE
FITTING
TYPE OF
EXHAUST
WHO SUPPLIES
M Loadlock pump >40 l/m @ 13789 Pa less than
atmospheric pressure
NW40 Factory Customer
N Process chamber
pump
>50 l/m @ 13789 Pa less than
NW40 Factory Customer
O Gas box >550 l/m @ 100 Pa less than
89mm (3.5) dia.pipe Factory Customer
2-9
COOLING REQUIREMENTS
NOTE
Please also refer to the "Water Requirements" section of this document, page 2-4.
TABLE
REF
LETTER
SERVICE
REQUIRED
TYPE OF COOLING WHO SUPPLIES
P
Lower electrode
cooling
Fed from the SMC HRZ chiller
This unit requires house cooling water at 4 bar (g) & 120 l/h at 25
o
C
Customer
FITTING SIZE 1/2 SWAGELOK COMPRESSION.
2-10
SYSTEM ELECTRICAL SUPPLY REQUIREMENTS
NOTE
If this system is to be electrically installed by non STS personnel, it must be installed in line with the requirements of the latest issue of STS quality
documents: Q000130, Q000131, Q000135 & electrical drawing ED322778, using a suitable electrical installation tester. These documents are available from
STS by mailing the address below. If STS engineers are to electrically install this system they must be notified if an appropriate electrical tester is available
to prevent any delay.
The supply cable to this tool must be sized in accordance with local electrical rules/regulations & is the responsibility of the customer to ensure it is suitably
rated prior to installation.
A suitably rated mains circuit breaker should be installed up stream of the main breaker on the STS supplied electronics rack.
TABLE
REF
LETTER
SERVICE REQUIRED RATING SUPPLIER
R 3 phase supply, neutral & protective earth (PE).
Noiseless earth not required (TE).
380 Volts 50 Hz 56 Amps/Phase Customer
S Country of origin phone connection to RG45
connection to rack.
10/100 mbs internet based connection Customer
2-11
TURBO INFORMATION
CAUTION WHEN USING THE TURBO
If you are involved in removing the turbo, it is essential that the splinter guard is re-installed correctly (see page 24 of the operating instructions).
When the turbo is in use the basic flange can become so hot (>80
o
C, >176
o
F) that it represents a burn hazard. While this flange is protected by an
insulated collar (which should not be removed) the rest of the body should also be treated with care to avoid burns.
3-1
SECTION 3
DATA SEETS
4-1
SECTION 4
CHECK LIST
4-2
SYSTEM SERVICES
CHECK LIST
To enable STS to commission your new system you are
asked to complete and sign the services checklist.
After completion please fax the complete section back to STS
on the fax number shown on Page 4.6. Arrangements for the
Commissioning Engineer to visit you can then be made.
4-3
LOADLOCK PUMP
ELECTRICAL INCOMING SUPPLY
SYSTEM SERVICE
SERVICE CONNECTION
FITTED
PLEASE ANSWER YES/NO
CUSTOMERS SIGNATURE
Loadlock pump to system flexible connection pipe
Loadlock pump exhaust connection
Loadlock pump nitrogen purge supply inlet (if required)
SYSTEM SERVICE
SERVICE CONNECTION
FITTED
CUSTOMERS SIGNATURE
Electrical supply into the electronics cabinet
4-4
GAS BOX
PROCESS CHAMBER
SYSTEM SERVICE
SERVICE CONNECTION
FITTED
CUSTOMERS SIGNATURE
All process gas lines to the gas box
All process gas line nitrogen purge (if required)
Gas box process chamber vent
Gas box exhaust
SYSTEM SERVICE
SERVICE CONNECTION
FITTED
CUSTOMERS SIGNATURE
Helium backside cooling supply
Nitrogen supply
Water cooling supply (house water)
Water cooling supply for chillers & pumps (house water)
Compressed air
4-5
PROCESS CHAMBER BACKING PUMP
SYSTEM SERVICE
SERVICE CONNECTION
FITTED
CUSTOMERS SIGNATURE
Backing pump to system flexible connection pipe
Backing pump exhaust connection
Backing pump nitrogen purge supply inlet (if required)
Water cooling supply (if required)
4-6
CUSTOMER DECLARATION
SYSTEM No...........................
All services have been installed to the system and the system is ready for a STS approved engineer to come to commission the system.
Signed .................................................
Print Name: .................................................
Date: .................................................
After completing this form and signing it please
fax a copy of the complete document back to
STS on +44 1633 652437
Please address it for the attention of the Service Manager.

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Pre-installation Guide

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