Search Results (375)

The article presents accelerations occurring in the human body when falling onto a safety net. An attitude and heading reference system (AHRS) consists of sensors on three axes that provide attitude information for objects, including pitch, roll, and yaw. These sensors are made of microelectromechanical systems (MEMS) gyroscopes, accelerometers, and magnetometers. Usually, they are used in aircraft flight instruments due to their high precision. In the present article, these sensors were used to test safety nets, protecting people or objects falling from heights. The measurement was made for two heights: 6 m and 3.5 m. During the research, a type of mannequin that is a representative model of the human body for the largest segment of the adult population was used. The measurement was carried out using two independent measurement systems. One recorded the accelerations at the chest of the tested object, while the sensors of the second system were placed at the head, arms, and legs. The compiled measurement results were related to the permissible acceleration values that do not threaten human health and life. Full article

This paper introduces a methodology to compensate inertial Micro-Electro-Mechanical System (IMU-MEMS) time-varying calibration loss, induced by stress and aging. The approach relies on a periodic assessment of the sensor through specific stimuli, producing outputs which are compared with the response of a high-precision sensor, used as ground truth. At any re-calibration iteration, differences with respect to the ground truth are approximated by quantization-aware trained tiny neural networks, allowing calibration-loss compensations. Due to the unavailability of aging IMU-MEMS datasets, a synthetic dataset has been produced, taking into account aging effects with both linear and nonlinear calibration loss. Also, field-collected data in conditions of thermal stress have been used. A model relying on Dense and 1D Convolution layers was devised and compensated for an average of 1.97 g and a variance of 1.07 g², with only 903 represented with 16 bit parameters. The proposed model can be executed on an intelligent signal processing inertial sensor in 126.4 ms. This work represents a step forward toward in-sensor machine learning computing through integrating the computing capabilities into the sensor package that hosts the accelerometer and gyroscope sensing elements. Full article

Shock and vibration hazards to civil structures are common and come not only from earthquakes but most often from mining operations or foundation work involving the installation of piles using hammer-driving and vibrating technology. The purpose of this study is to present test methods for low-cost MEMS accelerometers in terms of their selection for low-amplitude acceleration vibration-prone object-monitoring systems. Tests of 24 commercially available digital accelerometers were carried out on a custom-built test bench, selecting four models for detailed tests conducted on a specially built precision vibration table capable of inflicting accelerations at frequencies of 1–2 Hz, using displacements as small as a few micrometers. The analysis of the results was based, among other things, on a modified method of determining the signal-to-noise ratio (SNR) and also on the idea of the effective number of bits (ENOB). The results of the analysis showed that among low-cost MEMS accelerometers, there are some that are successfully suitable for the monitoring and warning of excessive vibration hazards in situations where objects are extremely sensitive to such impacts (e.g., treatment rooms in hospitals). Examples of accelerometers capable of detecting harmonic vibrations with amplitudes as small as 10 mm/s² or impulsive shocks with amplitudes of at least 70 mm/s² are indicated. Full article

Inertial Measurement Units are widely used in various applications and, hardware-wise, they primarily consist of a tri-axial accelerometer and a tri-axial gyroscope. For low-end commercial employments, the low cost of the device is crucial: this makes MEMS-based sensors a popular choice in this context. However, MEMS-based transducers are prone to significant, non-uniform and environmental-condition-dependent systematic errors, that require frequent re-calibration to be eliminated. To this end, identification methods that can be performed in-field by non-expert users, without the need for high-precision or costly equipment, are of particular interest. In this paper, we propose an in-field identification procedure based on the Total Least Squares method for both tri-axial accelerometers and gyroscopes. The proposed identification model is linear and requires no prior knowledge of the parameters to be identified. It enables accelerometer calibration without the need for specific reference surface orientation relative to Earth’s gravity and allows gyroscope calibration to be performed independently of accelerometer data, without requiring the sensor’s sensitive axes to be aligned with the rotation axes during calibration. Experiments conducted on NXP sensors FXOS8700CQ and FXAS21002 demonstrated that using parameters identified by our method reduced cross-validation standard deviations by about two orders of magnitude compared to those obtained using manufacturer-provided parameters. This result indicates that our method enables the effective calibration of IMU sensor parameters, relying only on simple 3D-printed equipment and significantly improving IMU performance at minimal cost. Full article

In this paper, we propose a wireless sensor network for pavement health monitoring exploiting the Zigbee technology. Accelerometers are adopted to measure local accelerations linked to pavement vibrations, which are then converted into displacements by a signal processing algorithm. Each device consists of an on-board unit buried in the roadway and a roadside unit. The on-board unit comprises a microcontroller, an accelerometer and a Zigbee module that transfers acceleration data wirelessly to the roadside unit. The roadside unit consists of a Raspberry Pi, a Zigbee module and a USB Zigbee adapter. Laboratory tests were conducted using a vibration table and with three different accelerometers, to assess the system capability. A typical displacement signal from a five-axle truck was applied to the vibration table with two different displacement peaks, allowing for two different vehicle speeds. The prototyped system was then encapsulated in PVC packaging, deployed and tested in a real-life road situation with a fatigue carousel featuring rotating truck axles. The laboratory and on-road measurements show that displacements can be estimated with an accuracy equivalent to that of a reference sensor. Full article

In this paper, we introduce a security approach for on-device learning Edge AIs designed to detect abnormal conditions in factory machines. Since Edge AIs are easily accessible by an attacker physically, there are security risks due to physical attacks. In particular, there is a concern that the attacker may tamper with the training data of the on-device learning Edge AIs to degrade the task accuracy. Few risk assessments have been reported. It is important to understand these security risks before considering countermeasures. In this paper, we demonstrate a data poisoning attack against an on-device learning Edge AI. Our attack target is an on-device learning anomaly detection system. The system adopts MEMS accelerometers to measure the vibration of factory machines and detect anomalies. The anomaly detector also adopts a concept drift detection algorithm and multiple models to accommodate multiple normal patterns. For the attack, we used a method in which measurements are tampered with by exposing the MEMS accelerometer to acoustic waves of a specific frequency. The acceleration data falsified by this method were trained on an anomaly detector, and the result was that the abnormal state could not be detected. Full article

This paper reports the design, fabrication, and characterization of a MEMS capacitive accelerometer with an asymmetrical comb finger arrangement. By optimizing the ratio of the gaps of a rotor finger to its two adjacent stator fingers, the sensitivity of the accelerometer is maximized for the same comb finger area. With the fingers’ length, width, and depth at 120 μm, 4 μm, and 45 μm, respectively, the optimized finger gap ratio is 2.5. The area of the proof mass is 750 μm × 560 μm, which leads to a theoretical thermomechanical noise of 9 μg/√Hz. The accelerometer has been fabricated using a modified silicon-on-glass (SOG) process, in which a groove is pre-etched into the glass to hold the metal electrode. This SOG process greatly improves the silicon-to-glass bonding yield. The measurement results show that the resonant frequency of the accelerometer is about 2.05 kHz, the noise floor is 28 μg/√Hz, and the nonlinearity is less than 0.5%. Full article

Amorphous carbon (a-C) has promising potential for temperature sensing due to its outstanding properties. In this work, an a-C thin film temperature sensor integrated with the MEMS silicon accelerometer was proposed, and a-C film was deposited on the fixed frame of the accelerometer chip. The a-C film was deposited by DC magnetron sputtering and linear ion beam, respectively. The nanostructures of two types of films were observed by SEM and TEM. The cluster size of sp² was analyzed by Raman, and the content of sp² and sp³ of the carbon film was analyzed by XPS. It showed that the DC-sputtered amorphous carbon film, which had a higher sp² content, had better temperature-sensitive properties. Then, an integrated sensor chip was designed, and the structure of the accelerometer was simulated and optimized to determine the final sizes. The temperature sensor module had a sensitivity of 1.62 mV/°C at the input voltage of 5 V with a linearity of 0.9958 in the temperature range of 20~150 °C. The sensitivity of the sensor is slightly higher than that of traditional metal film temperature sensors. The accelerometer module had a sensitivity of 1.4 mV/g/5 V, a nonlinearity of 0.38%, a repeatability of 1.56%, a total thermomechanical noise of 509 μg over the range of 1 to 20 Hz, and an average thermomechanical noise density of 116 µg/√Hz, which is smaller than the input acceleration amplitude for testing sensitivity. Under different temperatures, the performance of the accelerometer was tested. This research provided significant insights into the convenient procedure to develop a high-performance, economical temperature–accelerometer-integrated MEMS sensor. Full article

The Casimir effect has been exploited in various MEMS (micro-electro-mechanical system) devices, especially to make sensitive force sensors and accelerometers. It has also been used to provide forces for a variety of purposes, for example, for the assembly of considerably small parts. Repulsive forces and torques have been produced using various configurations of media and materials. Just a few electronic devices have been explored that utilize the electrical properties of the Casimir effect. Recently, experimental results were presented that described the operation of an electronic device that employed a Casimir cavity attached to a standard MIM (metal–insulator–metal) structure. The DC (direct current) conductance of the novel MIM device was enhanced by the attached cavity and found to be directly proportional to the capacitance of the attached cavity. The phenomenological model proposed assumed that the cavity reduced the vacuum fluctuations, which resulted in a reduced injection of carriers. The analysis presented here indicates that the optical cavity actually enhances vacuum fluctuations, which would predict a current in the opposite direction from that observed. Further, the vacuum fluctuations near the electrode are shown to be approximately independent of the size of the optical cavity, in disagreement with the experimental data which show a dependence on the size. Thus, the proposed mechanism of operation does not appear correct. A more detailed theoretical analysis of these devices is needed, in particular, one that uses real material parameters and computes the vacuum fluctuations for the entire device. Such an analysis would reveal how these devices operate and might suggest design principles for a new genre of electronic devices that make use of vacuum fluctuations. Full article

A MEMS piezoresistive sensor for measuring accelerations greater than 100,000 g (about 10⁶ m/s²) is described in this work. To enhance the performance of the sensor, specifically widening its measurement range and natural frequency, a cross-beam construction with a center block was devised, and a Wheatstone bridge was formed by placing four piezoresistors at the ends of the fixed beams to convert acceleration into electricity. The location of the varistor was determined using the finite element approach, which yielded the optimal sensitivity. Additionally, a reliable Pt-Ti-Pt-Au electrode was designed to solve the issue of the electrode failing under high impact and enhancing the stability of the ohmic contact. The accelerometer was fabricated using MEMS technology, and the experiment with a Hopkinson pressure bar and hammering was conducted, and the bias stability was measured. It had a sensitivity of 1.06 μV/g with good linearity. The simulated natural frequency was 633 kHz The test result revealed that the accelerometer can successfully measure an acceleration of 100,000 g. Full article

This article proposes a low cross-axis sensitivity resonant MEMS(Micro-Electro-Mechanical Systems) accelerometer that is optimized based on the BP and NSGA-II algorithms. When resonant accelerometers are used in seismic monitoring, automotive safety systems, and navigation applications, high immunity and low cross-axis sensitivity are required. To improve the high immunity of the accelerometer, a coupling structure is introduced. This structure effectively separates the symmetric and antisymmetric mode frequencies of the DETF resonator and prevents mode coupling. To obtain higher detection accuracy and low cross-axis sensitivity, a decoupling structure is introduced. To find the optimal dimensional parameters of the decoupled structure, the BP and NSGA-II algorithms are used to optimize the dimensional parameters of the decoupled structure. The optimized decoupled structure has an axial stiffness of 6032.21 N/m and a transverse stiffness of 6.29 N/m. The finite element analysis results show that the sensitivity of the accelerometer is 59.1 Hz/g (Y-axis) and 59 Hz/g (X-axis). Cross-axis sensitivity is 0.508% (Y-axis) and 0.339% (X-axis), which is significantly lower than most resonant accelerometers. The coupling structure and optimization method proposed in this paper provide a new solution for designing resonant accelerometers with high interference immunity and low cross-axis sensitivity. Full article

Vertical drilling is the first stage of petroleum exploitation and directional well technology. The near-vertical attitude at each survey station directly determines the whole direction accuracy of the borehole trajectory. However, the attitude measurement for near-vertical wells has poor azimuth accuracy because the poor signal-to-noise ratio of radial accelerometers hardly obtains the correct horizontal attitude, especially the roll angle. In this paper, a novel near-vertical attitude measurement method was proposed to address this issue. The redundant micro-electromechanical system (MEMS) accelerometers were employed to replace the original accelerometers from MEMS inertial measurement unit (IMU)/magnetometers for calculating horizontal attitude under near-vertical conditions. In addition, a simplified four-position calibration method for the redundant accelerometers was proposed to compensate for the installation and non-orthogonal error. We found that the redundant accelerometers enhanced the signal-to-noise ratio to upgrade the azimuth accuracy at the near-vertical well section. Compared with the traditional method, the experiment results show that the average azimuth errors and roll errors are reduced from 34.45° and 27.09° to 5.7° and 0.61°, respectively. The designed configuration scheme is conducive to the miniaturized design and low-cost requirements of wellbore measuring tools. The proposed attitude measurement method can effectively improve the attitude accuracy of near-vertical wells. Full article

In recent years, there has been an increasing use of digital vibration sensors that are based on capacitive MEMS accelerometers for machine vibration monitoring and diagnostics. These sensors simplify the design of monitoring and diagnostic systems, thus reducing implementation costs. However, it is important to understand how effective these digital sensors are in detecting rolling bearing faults. This article describes a method for determining the diagnostic sensitivity of diagnostic parameters provided by commercially available vibration sensors based on MEMS accelerometers. Experimental tests were conducted in laboratory conditions, during which vibrations from 11 healthy and faulty rolling bearings were measured using two commercial vibration sensors based on MEMS accelerometers and a piezoelectric accelerometer as a reference sensor. The results showed that the diagnostic sensitivity of the parameters depends on the upper-frequency band limit of the sensors, and the parameters most sensitive to the typical fatigue faults of rolling bearings are the peak and peak-to-peak amplitudes of vibration acceleration. Despite having a lower upper-frequency range compared to the piezoelectric accelerometer, the commercial vibration sensors were found to be sensitive to rolling bearing faults and can be successfully used in continuous monitoring and diagnostics systems for machines. Full article

The paper presents the noise analysis of a MEMS and ASIC readout integrated circuit (ROIC) constituting the accelerometer developed in the frame of the InnoReh project, aiming at the development of methods for monitoring patients with imbalance disorders. Several experiments were performed at different temperatures and in different configurations: ROIC alone, ROIC with emulated parasitic capacitances, MEMS and ROIC in separate packages, and MEMS and ROIC in a single package. Many noise/interference sources were considered. The results obtained experimentally were compared to the results of theoretical investigations and were within the same order of magnitude, although in practice, the observed noise was always greater than the theoretical estimation. The paper also includes an in-depth analysis to explain these differences. Moreover, it is argued that, in terms of noise, the MEMS sensing element, and not the ROIC, is the quality-limiting factor. Full article

With the growing demand for infrastructure and transportation facilities, the need for advanced structural health monitoring (SHM) systems is critical. This study introduces two innovative, cost-effective, standalone, and open-source data acquisition devices designed to enhance SHM through the latest sensing technologies. The first device, termed CEDAS_acc, integrates the ADXL355 MEMS accelerometer with a RaspberryPi mini-computer, ideal for measuring strong ground motions and assessing structural modal properties during forced vibration tests and structural monitoring of mid-rise buildings. The second device, CEDAS_geo, incorporates the SM24 geophone sensor with a Raspberry Pi, designed for weak ground motion measurements, making it suitable for seismograph networks, seismological research, and early warning systems. Both devices function as acceleration/velocity Data Acquisition Systems (DAS) and standalone data loggers, featuring hardware components such as a single-board mini-computer, sensors, Analog-to-Digital Converters (ADCs), and micro-SD cards housed in protective casings. The CEDAS_acc includes a triaxial MEMS accelerometer with three ADCs, while the CEDAS_geo uses horizontal and vertical geophone elements with an ADC board. To validate these devices, rigorous tests were conducted. Offset Test, conducted by placing the sensor on a leveled flat surface in six orientations, demonstrating the accelerometer’s ability to provide accurate measurements using gravity as a reference; Frequency Response Test, performed at the Gebze Technical University Earthquake and Structure Laboratory (GTU-ESL), comparing the devices’ responses to the GURALP-5TDE reference sensor, with CEDAS_acc evaluated on a shaking table and CEDAS_geo’s performance assessed using ambient vibration records; and Noise Test, executed in a low-noise rural area to determine the intrinsic noise of CEDAS_geo, showing its capability to capture vibrations lower than ambient noise levels. Further field tests were conducted on a 10-story reinforced concrete building in Gaziantep, Turkey, instrumented with 8 CEDAS_acc and 1 CEDAS_geo devices. The building’s response to a magnitude 3.2 earthquake and ambient vibrations was analyzed, comparing results to the GURALP-5TDE reference sensors and demonstrating the devices’ accuracy in capturing peak accelerations and modal frequencies with minimal deviations. The study also introduced the Record Analyzer (RECANA) web application for managing data analysis on CEDAS devices, supporting various data formats, and providing tools for filtering, calibrating, and exporting data. This comprehensive study presents valuable, practical solutions for SHM, enhancing accessibility, reliability, and efficiency in structural and seismic monitoring applications and offering robust alternatives to traditional, costlier systems. Full article