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Micromachines
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Acoustic-Wave-Based Sensors and Microfluidics: Theories, Techniques, and Applications
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Acoustic-Wave-Based Sensors and Microfluidics: Theories, Techniques, and Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: 31 December 2024 | Viewed by 9562

Special Issue Editors

Dr. Wenbo Peng

E-Mail Website
Guest Editor
School of Microelectronics, Xi’an Jiaotong University, Xi’an 710049, China
Interests: piezotronics and flexotronics; piezo-phototronics and pyro-phototronics; tribotronics, contact electrification, and tribovoltaic; nanogenerators and self-powered sensors; surface acoustic wave devices
Special Issues, Collections and Topics in MDPI journals
Dr. Xiaolong Zhao

E-Mail Website
Guest Editor
School of Microelectronics, Xi’an Jiaotong University, Xi’an 710049, China
Interests: bulk acoustic wave; nuclear and optical detectors; nonlinear microwave effects; finite-difference time-domain simulation

Special Issue Information

Dear Colleagues,

Acoustic waves are one kind of mechanical vibration that can be produced by electric radio-frequency signals applied to the electrodes on a piezoelectric substrate. Surface and bulk acoustic waves (SAWs and BAWs), the two most commonly seen kinds of acoustic waves, have long been researched and are proposed to be useful in many potential application fields, including radio-frequency filters/resonators, physical/chemical/biomedical sensors and systems, manipulators for small particles in microfluidics, and so on. Because SAWs/BAWs are mechanical waves propagating within a very thin layer, where almost all the acoustic energy is concentrated, they are extremely sensitive to any perturbations of the thin layer. Consequently, they could be utilized to develop highly sensitive sensors to detect many physical, chemical, and biomedical signals. Additionally, acoustic waves could be utilized to purposefully manipulate small bio-particles or even cells due to their nature as propagating mechanical waves excited by radio-frequency electric signals, possessing huge potential in biology, clinical applications, neuroscience, lab-on-a-chip, and so on. Therefore, they are of great significance in developing high-performance acoustic-wave-based sensors and microfluidics. However, although there are many references reporting acoustic-wave-based sensors and microfluidics, the fundamental science and theories are still not very clear and need further in-depth investigation. Moreover, the techniques and practical applications of high-performance acoustic-wave-based sensors and microfluidics also require much more research.

Accordingly, this Special Issue, titled “Acoustic-Wave-Based Sensors and Microfluidics: Theories, Techniques, and Applications”, seeks to showcase research papers, short communications, and review articles that focus on the following: (1) the fundamental science and theories for high-performance acoustic-wave-based sensors and microfluidics, from the coupling between mechanics, electronics, and physics/chemistry/biology to the in-depth working mechanisms; (2) the design and manufacturing techniques and demonstrations of high-performance acoustic-wave-based sensors and microfluidics for potential applications in physical/chemical/biomedical detection and acoustofluidics.

Dr. Wenbo Peng
Dr. Xiaolong Zhao
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • surface acoustic wave
  • bulk acoustic wave
  • acoustic wave sensors
  • sensing mechanisms
  • acoustofluidics
  • acoustic streaming
  • micro/nanoparticle manipulation
  • lab-on-a-chip

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Published Papers (4 papers)

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Research

Jump to: Review

13 pages, 7956 KiB  
Article
Design and Investigation of a High-Performance Quartz-Based SAW Temperature Sensor
by Jianfei Jiang
Micromachines 2024, 15(11), 1349; https://doi.org/10.3390/mi15111349 - 31 Oct 2024
Viewed by 614
Abstract
In this work, a surface acoustic wave (SAW) temperature sensor based on a quartz substrate was designed and investigated. Employing the Coupling-of-Modes (COM) model, a detailed analysis was conducted on the effects of the number of interdigital transducers (IDTs), the number of reflectors, [...] Read more.
In this work, a surface acoustic wave (SAW) temperature sensor based on a quartz substrate was designed and investigated. Employing the Coupling-of-Modes (COM) model, a detailed analysis was conducted on the effects of the number of interdigital transducers (IDTs), the number of reflectors, and their spacing on the performance of the SAW device. The impact of the transversal mode of quartz SAWs on the device was subsequently examined using the finite element method (FEM). The simulation results indicate that optimizing these structural parameters significantly enhances the sensor’s sensitivity and frequency stability. SAW devices with optimal structural parameters were fabricated, and their resonant frequencies were tested across a temperature range of 25–150 °C. Experimental results demonstrate that the SAW temperature sensor maintains high performance stability and data reliability throughout the entire temperature range, achieving a Bode-Q of 7700. Furthermore, the sensor exhibits excellent linearity and repeatability. An analysis of the sensor’s response under varying temperature conditions reveals a significant temperature dependency on its Temperature Coefficient of Frequency (TCF). This feature suggests that the sensor possesses potential advantages for applications in industrial process control and environmental monitoring. Full article
(This article belongs to the Special Issue Acoustic-Wave-Based Sensors and Microfluidics: Theories, Techniques, and Applications)
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Figure 1

Figure 1
<p>(<b>a</b>) Schematic diagram of the 2D periodic model of the SAW device; (<b>b</b>) mode shapes of the symmetric and antisymmetric modes of the Rayleigh wave; (<b>c</b>) top view of the 3D periodic model of the SAW device.</p> Full article ">Figure 2
<p>Top view of the complete SAW resonator structure.</p> Full article ">Figure 3
<p>Simulation results for SAW resonators with different NI: (<b>a</b>) impedance curves, (<b>b</b>) Bode-Q curves, and (<b>c</b>) Bode-Q values (top) and impedance variation values (bottom) at the resonance point; for SAW resonators with different NR: (<b>d</b>) impedance curves, (<b>e</b>) Bode-Q curves, and (<b>f</b>) Bode-Q values (top) and impedance variation values (bottom) at the resonance point.</p> Full article ">Figure 4
<p>Simulated impedance curves corresponding to <b><span class="html-italic">L</span></b><sub>g</sub> for (<b>a</b>) λ/8 + nλ/2 (n = 0, 1, 2) and (<b>b</b>) λ/4 + nλ/8 (n = 0, 1, 2, 3).</p> Full article ">Figure 5
<p>(<b>a</b>) Admittance curve of the SAW without the dummy structure; (<b>b</b>) admittance and conductance curves of the SAW device with different dummy length designs.</p> Full article ">Figure 6
<p>(<b>a</b>) Simulated reflection coefficient curves of the device at different temperatures; (<b>b</b>) resonant frequency and minimum reflection coefficient of the sensor at different temperatures.</p> Full article ">Figure 7
<p>SEM image of the SAW resonator with a wavelength of 7.2 μm.</p> Full article ">Figure 8
<p>Test setup and procedure for temperature sensor evaluation.</p> Full article ">Figure 9
<p>(<b>a</b>) Impedance curve and S11 test results of the SAW device at 30 °C; (<b>b</b>) Bode-Q curve of the device at 30 °C; and (<b>c</b>) variation of the sensor’s resonant frequency at different temperatures. (<b>d</b>) Error chart of temperature sensor tested multiple times.</p> Full article ">
12 pages, 5227 KiB  
Article
Honeycomb-Shaped Phononic Crystals on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Miniaturization
by Panliang Tang, Hongzhi Pan, Temesgen Bailie Workie, Jia Mi, Jingfu Bao and Ken-ya Hashimoto
Micromachines 2024, 15(10), 1256; https://doi.org/10.3390/mi15101256 - 14 Oct 2024
Viewed by 2242
Abstract
A SAW device with a multi-layered piezoelectric substrate has excellent performance due to its high Q value. A multi-layer piezoelectric substrate combined with phononic crystal structures capable of acoustic wave reflection with a very small array can achieve miniaturization and high performance. In [...] Read more.
A SAW device with a multi-layered piezoelectric substrate has excellent performance due to its high Q value. A multi-layer piezoelectric substrate combined with phononic crystal structures capable of acoustic wave reflection with a very small array can achieve miniaturization and high performance. In this paper, a honeycomb-shaped phononic crystal structure based on 42°Y-X LT/SiO2/poly-Si/Si-layered substrate is proposed. The analysis of the bandgap distribution under various filling fractions was carried out using dispersion and transmission characteristics. In order to study the application of PnCs in SAW devices, one-port resonators with different reflectors were compared and analyzed. Based on the frequency response curves and Bode-Q value curves, it was found that when the HC-PnC structure is used as a reflector, it can not only improve the transmission loss of the resonator but also reduce the size of the device. Full article
(This article belongs to the Special Issue Acoustic-Wave-Based Sensors and Microfluidics: Theories, Techniques, and Applications)
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Figure 1

Figure 1
<p>Top view of HC-PnC unit cell with its IBZ.</p> Full article ">Figure 2
<p>Three-dimensional view of the HC-PnC unit cell.</p> Full article ">Figure 3
<p>(<b>a</b>) Schematic 3D representation of the proposed PnC; (<b>b</b>) schematic representation of a transmission line composed of an array of 5 unit cells of the proposed PnC.</p> Full article ">Figure 4
<p>(<b>a</b>) Dispersion curve of acoustic waves for the HC-PnC; (<b>b</b>) simulated transmission curve through a finite strip.</p> Full article ">Figure 5
<p>Dispersion curve and simulated transmission curve with different filling fractions. (<b>a</b>) dispersion curve with <span class="html-italic">p</span> = 1.4 μm. (<b>b</b>) simulated transmission curve with <span class="html-italic">p</span> = 1.4 μm. (<b>c</b>) dispersion curve with <span class="html-italic">p</span> = 1.6 μm. (<b>d</b>) simulated transmission curve with p = 1.6 μm. (<b>e</b>) dispersion curve with <span class="html-italic">p</span> = 2.0 μm. (<b>f</b>) simulated transmission curve with <span class="html-italic">p</span> = 2.0 μm. (<b>g</b>) dispersion curve with <span class="html-italic">p</span> = 2.2 μm. (<b>h</b>) simulated transmission curve with <span class="html-italic">p</span> = 2.2 μm.</p> Full article ">Figure 5 Cont.
<p>Dispersion curve and simulated transmission curve with different filling fractions. (<b>a</b>) dispersion curve with <span class="html-italic">p</span> = 1.4 μm. (<b>b</b>) simulated transmission curve with <span class="html-italic">p</span> = 1.4 μm. (<b>c</b>) dispersion curve with <span class="html-italic">p</span> = 1.6 μm. (<b>d</b>) simulated transmission curve with p = 1.6 μm. (<b>e</b>) dispersion curve with <span class="html-italic">p</span> = 2.0 μm. (<b>f</b>) simulated transmission curve with <span class="html-italic">p</span> = 2.0 μm. (<b>g</b>) dispersion curve with <span class="html-italic">p</span> = 2.2 μm. (<b>h</b>) simulated transmission curve with <span class="html-italic">p</span> = 2.2 μm.</p> Full article ">Figure 6
<p>A schematic 3D representation of a one-port SAW resonator with (<b>a</b>) 3 HC-PnCs as a reflector and (<b>b</b>) 3 pairs of reflective gratings.</p> Full article ">Figure 7
<p>(<b>a</b>) Simulated admittance (Y) response and (<b>b</b>) simulated Bode-Q of a one-port SAW resonator with 3HC-PnCs as a reflector vs. 3 pairs of reflective gratings.</p> Full article ">Figure 8
<p>A one-port SAW resonator 3D model with an incomplete etched LT layer and the detailed model.</p> Full article ">Figure 9
<p>(<b>a</b>) Simulated frequency response curve and (<b>b</b>) simulated transmission curve with different PnC thicknesses.</p> Full article ">
8 pages, 3631 KiB  
Communication
Low-Voltage High-Frequency Lamb-Wave-Driven Micromotors
by Zhaoxun Wang, Wei Wei, Menglun Zhang, Xuexin Duan, Quanning Li, Xuejiao Chen, Qingrui Yang and Wei Pang
Micromachines 2024, 15(6), 716; https://doi.org/10.3390/mi15060716 - 29 May 2024
Viewed by 3204
Abstract
By leveraging the benefits of a high energy density, miniaturization and integration, acoustic-wave-driven micromotors have recently emerged as powerful tools for microfluidic actuation. In this study, a Lamb-wave-driven micromotor is proposed for the first time. This motor consists of a ring-shaped Lamb wave [...] Read more.
By leveraging the benefits of a high energy density, miniaturization and integration, acoustic-wave-driven micromotors have recently emerged as powerful tools for microfluidic actuation. In this study, a Lamb-wave-driven micromotor is proposed for the first time. This motor consists of a ring-shaped Lamb wave actuator array with a rotor and a fluid coupling layer in between. On a driving mechanism level, high-frequency Lamb waves of 380 MHz generate strong acoustic streaming effects over an extremely short distance; on a mechanical design level, each Lamb wave actuator incorporates a reflector on one side of the actuator, while an acoustic opening is incorporated on the other side to limit wave energy leakage; and on electrical design level, the electrodes placed on the two sides of the film enhance the capacitance in the vertical direction, which facilitates impedance matching within a smaller area. As a result, the Lamb-wave-driven solution features a much lower driving voltage and a smaller size compared with conventional surface acoustic-wave-driven solutions. For an improved motor performance, actuator array configurations, rotor sizes, and liquid coupling layer thicknesses are examined via simulations and experiments. The results show the micromotor with a rotor with a diameter of 5 mm can achieve a maximum angular velocity of 250 rpm with an input voltage of 6 V. The proposed micromotor is a new prototype for acoustic-wave-driven actuators and demonstrates potential for lab-on-a-chip applications. Full article
(This article belongs to the Special Issue Acoustic-Wave-Based Sensors and Microfluidics: Theories, Techniques, and Applications)
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Figure 1

Figure 1
<p>Comparison of the working principles of SAW and Lamb wave actuators. (<b>a</b>) Acoustic streaming working principle based on an SAW actuator. (<b>b</b>) Acoustic streaming working principle based on a Lamb wave actuator.</p> Full article ">Figure 2
<p>Lamb-wave-driven motor device. (<b>a</b>) Physical image of the Lamb wave actuator array on a coin. (<b>b</b>) SEM image of the Lamb wave actuator device used in the experimental array. (<b>c</b>) Schematic diagram of the Lamb-wave-driven micromotor. (<b>d</b>) Photo of the micromotor assembled on the connection board used in the experiment.</p> Full article ">Figure 3
<p>FEA analysis of a single Lamb wave actuator and Lamb wave actuator array. (<b>a</b>) The average value of single device vibration and sound pressure. (<b>b</b>) The overall flow field distribution of a Lamb wave actuator array. (<b>c</b>) Schematic diagram of flow field distribution for a single Lamb wave actuator.</p> Full article ">Figure 4
<p>Speed analysis under a fixed actuator array size and structure. (<b>a</b>) Top rotational speed of the device as a function of the liquid coupling layer thickness. (<b>b</b>) Top rotational speed of the device as a function of the rotor diameter. (<b>c</b>) Simulated velocity profiles at various horizontal cross-sections from the center to the edge of the device when the coupling layer thickness is 1 mm. The selected velocity images correspond to the bottom (H = 100 μm), center (H = 500 μm), and top (H = 1 mm) of the coupling layer in both the loaded and unloaded rotor states. In all images, FEA was used to simulate the fluid velocity field, and a rainbow color scheme was applied to the images, with red representing the maximum values and blue representing the minimum values.</p> Full article ">Figure 5
<p>Influence of the actuator array design on the rotational speed. (<b>a</b>) Relationship between the rotation speed and input voltage when the number of Lamb wave actuators is the same but the array diameter differs. The diameters of the Lamb wave actuator array and rotor are both 5 mm. (<b>b</b>) Rotor angular velocity versus input voltage for different array diameters. The diameter of the rotor is fixed at 6 mm.</p> Full article ">

Review

Jump to: Research

24 pages, 5693 KiB  
Review
Physical Sensors Based on Lamb Wave Resonators
by Zixia Yu, Yongqing Yue, Zhaozhao Liang, Xiaolong Zhao, Fangpei Li, Wenbo Peng, Quanzhe Zhu and Yongning He
Micromachines 2024, 15(10), 1243; https://doi.org/10.3390/mi15101243 - 9 Oct 2024
Viewed by 2935
Abstract
A Lamb wave is a guided wave that propagates within plate-like structures, with its vibration mode resulting from the coupling of a longitudinal wave and a shear vertical wave, which can be applied in sensors, filters, and frequency control devices. The working principle [...] Read more.
A Lamb wave is a guided wave that propagates within plate-like structures, with its vibration mode resulting from the coupling of a longitudinal wave and a shear vertical wave, which can be applied in sensors, filters, and frequency control devices. The working principle of Lamb wave sensors relies on the excitation and propagation of this guided wave within piezoelectric material. Lamb wave sensors exhibit significant advantages in various sensing applications due to their unique wave characteristics and design flexibility. Compared to traditional surface acoustic wave (SAW) and bulk acoustic wave (BAW) sensors, Lamb wave sensors can not only achieve higher frequencies and quality factors in smaller dimensions but also exhibit superior integration and multifunctionality. In this paper, we briefly introduce Lamb wave sensors, summarizing methods for enhancing their sensitivity through optimizing electrode configurations and adjusting piezoelectric thin plate structures. Furthermore, this paper systematically explores the development of Lamb wave sensors in various sensing applications and provides new insights into their future development. Full article
(This article belongs to the Special Issue Acoustic-Wave-Based Sensors and Microfluidics: Theories, Techniques, and Applications)
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Figure 1

Figure 1
<p>Classification of applications and detection parameters for LWRs as sensors.</p> Full article ">Figure 2
<p>Two topologies of LWRs: (<b>a</b>) edge-type and (<b>b</b>) grating-type.</p> Full article ">Figure 3
<p>Four transducer configurations of single-port LWRs [<a href="#B36-micromachines-15-01243" class="html-bibr">36</a>]: (<b>a</b>) single-IDT; (<b>b</b>) IDT/grounded-BE; (<b>c</b>) IDT/floating-BE; (<b>d</b>) double-IDT.</p> Full article ">Figure 4
<p>Effective electromechanical coupling coefficient of four transducer configurations in AlN thin plates of S<sub>0</sub> mode [<a href="#B36-micromachines-15-01243" class="html-bibr">36</a>], where <math display="inline"><semantics> <mrow> <msub> <mi>f</mi> <mi>p</mi> </msub> </mrow> </semantics></math> is the parallel resonant frequency and <math display="inline"><semantics> <mrow> <msub> <mi>f</mi> <mi>s</mi> </msub> </mrow> </semantics></math> is the series resonant frequency. The thickness of the piezoelectric thin plate affects the resonant frequency, which, in turn, influences the <math display="inline"><semantics> <mrow> <msubsup> <mi>k</mi> <mrow> <mi>e</mi> <mi>f</mi> <mi>f</mi> </mrow> <mn>2</mn> </msubsup> </mrow> </semantics></math>. Different colored lines represent different transducers, and their structures are shown in the figure.</p> Full article ">Figure 5
<p>(<b>a</b>) Two modes of the Lamb wave; (<b>b</b>) schematic diagram of a finite-length thin plate.</p> Full article ">Figure 6
<p>Comparison of acoustic impedance, Young’s modulus, and density for different electrode materials [<a href="#B88-micromachines-15-01243" class="html-bibr">88</a>]. All parameter values are normalized relative to the characteristics of AlN.</p> Full article ">Figure 7
<p>Common LWR biosensors [<a href="#B12-micromachines-15-01243" class="html-bibr">12</a>]: (<b>a</b>) structural design; (<b>b</b>) cross-sectional diagram.</p> Full article ">Figure 8
<p>Applications of LWR biosensors: (<b>a</b>) electrode structure and model diagram of an inverted LWR biosensor based on ZnO/SiO<sub>2</sub>/Si/ZnO film [<a href="#B13-micromachines-15-01243" class="html-bibr">13</a>]; (<b>b</b>) schematic diagram of a flexible acoustic sensor for biosensing based on LFE-TSM/Lamb wave hybrid mode [<a href="#B14-micromachines-15-01243" class="html-bibr">14</a>].</p> Full article ">Figure 9
<p>Curves showing the influence of piezoelectric film thickness on sensor sensitivity [<a href="#B12-micromachines-15-01243" class="html-bibr">12</a>].</p> Full article ">Figure 10
<p>Four coupling configurations of LWR liquid sensors [<a href="#B100-micromachines-15-01243" class="html-bibr">100</a>]: (<b>a</b>) sfT; (<b>b</b>) smfT; (<b>c</b>) sTf; (<b>d</b>) sTfm.</p> Full article ">Figure 11
<p>Curves of effective electromechanical coupling coefficients for four coupling configurations on c-AlN/SiC (001) &lt;100&gt; substrates [<a href="#B100-micromachines-15-01243" class="html-bibr">100</a>]: (<b>a</b>) sfT; (<b>b</b>) smfT; (<b>c</b>) sTf; (<b>d</b>) sTfm.</p> Full article ">Figure 12
<p>Applications of LWR liquid sensors: (<b>a</b>) model and physical diagram of a density and viscosity decoupled AlN Lamb wave sensor [<a href="#B16-micromachines-15-01243" class="html-bibr">16</a>]; (<b>b</b>) two-dimensional array model broken view of a Lamb wave viscosity sensor [<a href="#B15-micromachines-15-01243" class="html-bibr">15</a>].</p> Full article ">Figure 13
<p>Applications of LWR pressure sensors: (<b>a</b>) lateral field excited (LFE) Lamb wave resonator for high-temperature pressure sensing [<a href="#B46-micromachines-15-01243" class="html-bibr">46</a>]; (<b>b</b>) structural diagram of a piezoelectric sensor based on dual modes (LFE Lamb wave mode and SAW mode) [<a href="#B22-micromachines-15-01243" class="html-bibr">22</a>]; (<b>c</b>) 3D structure diagram and cross-sectional of the dual-temperature-compensated Lamb wave pressure sensor [<a href="#B23-micromachines-15-01243" class="html-bibr">23</a>].</p> Full article ">Figure 14
<p>Structural and physical diagram of a flexible dual-mode (A<sub>0</sub> and S<sub>0</sub>) LWR humidity sensor [<a href="#B19-micromachines-15-01243" class="html-bibr">19</a>].</p> Full article ">
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