Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide

M Pu, L Liu, H Ou, K Yvind, JM Hvam - Optics Communications, 2010 - Elsevier
Optics Communications, 2010Elsevier
An ultra-low-loss coupler for interfacing a silicon-on-insulator ridge waveguide and a single-
mode fiber in both polarizations is presented. The inverted taper coupler, embedded in a
polymer waveguide, is optimized for both the transverse-magnetic and transverse-electric
modes through tapering the width of the silicon-on-insulator waveguide from 450nm down to
less than 15nm applying a thermal oxidation process. Two inverted taper couplers are
integrated with a 3-mm long silicon-on-insulator ridge waveguide in the fabricated sample …
An ultra-low-loss coupler for interfacing a silicon-on-insulator ridge waveguide and a single-mode fiber in both polarizations is presented. The inverted taper coupler, embedded in a polymer waveguide, is optimized for both the transverse-magnetic and transverse-electric modes through tapering the width of the silicon-on-insulator waveguide from 450nm down to less than 15nm applying a thermal oxidation process. Two inverted taper couplers are integrated with a 3-mm long silicon-on-insulator ridge waveguide in the fabricated sample. The measured coupling losses of the inverted taper coupler for transverse-magnetic and transverse-electric modes are ∼0.36dB and ∼0.66dB per connection, respectively.
Elsevier