Comparison study between optical emission spectroscopy and x-ray photoelectron spectroscopy techniques during process etch plasma

M Rizquez, A James, A Roussy… - 25th Annual SEMI …, 2014 - ieeexplore.ieee.org
This paper describes the complementary study of plasma-emission wavelength by optical
emission spectroscopy (OES) and the experimental results collected from an x-ray …
Save Cite Cited by 2 Related articles

Comparison study between optical emission spectroscopy and x-ray photoelectron spectroscopy techniques during process etch plasma

M Rizquez, A James, A Roussy, J Pinaton… - 25th Annual SEMI … - infona.pl
This paper describes the complementary study of plasma-emission wavelength by optical
emission spectroscopy (OES) and the experimental results collected from an x-ray …
Cite