WO2024191273A1

WO2024191273A1 - Clamp heater

Info

Publication number: WO2024191273A1
Application number: PCT/KR2024/095564
Authority: WO
Inventors: 강희문
Original assignee: 주식회사 아토즈
Priority date: 2023-03-16
Filing date: 2024-03-15
Publication date: 2024-09-19

Abstract

The present invention relates to a clamp heater comprising: a first main body portion comprising a pair of planes provided on both side surfaces, a curved surface connecting sides of the planes and formed to be curved, and an accommodation groove formed in the end portion of the curved surface; a second main body portion which is formed in a shape corresponding to the first main body, and is formed symmetrical to the first main body portion via a hinge portion axially connected to the accommodation groove; a cover portion which covers the end portion of the curved surface so as not to expose the hinge portion and in which cables are connected; covers which respectively come into close contact with the planes of the first main body portion and the second main body portion and are fixed to the first main body portion and the second main body portion via bolt members; a heating accommodation portion which is formed on the inner surface of the cover and has a round groove formed in the inner surface thereof; a heater which is accommodated in the heating accommodation portion and generates heat by means of electricity; and a fixing portion comprising a fixing bolt having a head in which a coupling hole is formed and an outer surface on which a male screw thread is formed, and a fixing nut which is coupled to the fixing bolt to fix the first main body portion and the second main body portion, and thus, the temperature inside a piping can be uniformly maintained and excellent thermal conduction can be possible through the piping.

Description

Clamp heater

The present invention relates to a clamp heater.

In general, the semiconductor manufacturing process is largely divided into a pre-process and a post-process. The pre-process refers to a process of depositing a thin film on a wafer and selectively etching the deposited thin film in various process chambers, and the post-process refers to a process of individually separating the chips manufactured in the pre-process and combining them with a lead frame to assemble the finished product. At this time, the process of depositing a thin film on the wafer or etching the thin film deposited on the wafer is performed at a high temperature in the process chamber using hazardous gases such as silane, arsine, and boron chloride and process gases such as hydrogen. During the process, a large amount of flammable gases, corrosive foreign substances, and hazardous gases containing toxic substances are generated inside the process chamber.

These hazardous gases are transported to a designated location along vacuum pipes connected to the process chamber, purified, and then released into the atmosphere. At this time, the hazardous gases transported along the vacuum pipe (exhaust pipe) solidify and turn into powder when they come into contact with the atmosphere or the surrounding temperature drops. This powder adheres to the inner surface of the vacuum pipe (exhaust pipe) and increases the exhaust pressure. If it flows into the vacuum pump, it not only causes a breakdown of the vacuum pump, but also causes a reverse flow of exhaust gas, which can contaminate the wafers inside the process chamber, etc.

In the past, a heating jacket with a built-in heater coil was placed over the outer surface of a vacuum pipe (exhaust pipe) to prevent the internal temperature of the vacuum pipe from decreasing, thereby suppressing the occurrence of powder inside the vacuum pipe.

However, the conventional method of suppressing powder generation had a problem in that it could not effectively suppress powder generation because the internal temperature of the vacuum pipe was not maintained to the required level in reality by covering the external surface of the vacuum pipe with a heating jacket to maintain the internal temperature of the vacuum pipe at a predetermined temperature.

In addition, there was a problem that maintenance and installation costs were high because a heating jacket had to be placed over the entire outer surface of the vacuum pipe.

Recently, in semiconductor production processes, technology is required to maintain a constant temperature of a fluid flowing through a pipe, and accordingly, functions such as insulation and heat generation of clamps that connect the pipes are also required.

In addition, the conventional technology had a limit to increasing the amount of heat as it was maintained at a temperature of 180 to 200 degrees, and there were problems with the fabric of the heating jacket being damaged and the heating wire being cut off.

The present invention, conceived with the above technical background, seeks to provide a clamp heater that maintains the temperature inside a pipe uniformly and enables excellent heat conduction to the pipe.

According to one embodiment of the present invention, a clamp heater may include a first main body part including a pair of flat surfaces provided on both sides, a curved surface formed by connecting one side of the flat surfaces and being curved, and a receiving groove formed at an end of the curved surface; a second main body part formed in a shape corresponding to the first main body part and symmetrically formed with the first main body part via a hinge part axially connected to the receiving groove; a cover part covering the end of the curved surface so that the hinge part is not exposed and having a cable connected thereto inside; a cover which is fixed to the first main body part and the second main body part by a bolt member while being in close contact with the flat surfaces of the first main body part and the second main body part, respectively; a heating receiving part formed on an inner surface of the cover and having a rounded groove on its inner surface; a heating element which is received in the heating receiving part and generates electricity; a fixing part having a fixing bolt having a joining hole formed in a head and a male screw thread formed on an outer surface, and a fixing nut which is fixed to the fixing bolt and fixes the first main body part and the second main body part.

The device may further include a heat transfer member that is coupled to the above heating receiving member and transfers heat generated from the heating element to the first main body part and the second main body part.

In addition, a clamp heater according to another embodiment of the present invention may include a first body part including a pair of hollow planes provided on both sides, a curved surface formed by connecting one side of the planes and being curved, and a protruding surface protruding in a square shape from an end of the planes, a second body part formed in a shape corresponding to the first body part and symmetrically connected to the first body part via a hinge part axially connected to the protruding surface, a heating part received in a heating receiving part surrounded by the plane and the curved surface and having a rounded inner surface and generating heat with electricity, and a cover part covering the protruding surface and the hinge part and having the cable connected internally.

The above main body may further include a cover formed spaced apart from an edge of the plane and fitted into the plane to block the heating receiving portion from the outside, and a temperature sensor formed in close contact with the curved surface and detecting a temperature in a section connected to the heating receiving portion.

The above heating unit may further include a heating element that is connected to the cable, receives electricity, and is formed to correspond to the heating receiving unit.

The device may include a fixing part having a fixing bolt having a joining hole formed in a head and a male screw thread formed on an outer surface, and a fixing nut coupled with the fixing bolt to fix the first main body part and the second main body part, a first fixing groove formed on one side of the first main body part and accommodating the head, and a second fixing groove formed on one side of the second main body part and having a groove corresponding to the width of the first fixing groove and a second fixing groove having a curved surface formed next to the groove.

A clamp heater according to one embodiment of the present invention can maintain the internal and external temperatures of a pipe uniformly and enable effective heat conduction through the pipe.

FIG. 1 is a perspective view of a clamp heater according to one embodiment of the present invention.

Figure 2 is an exploded perspective view of a clamp heater according to one embodiment of the present invention.

Figure 3 is a cross-sectional view taken along line A-A' of Figure 1.

Figure 4 is a cross-sectional view taken along line B-B' of Figure 1.

Figure 5 is a cross-sectional view taken along line C-C' of Figure 3.

Figure 6 is a usage state diagram of a clamp heater according to one embodiment of the present invention.

Figure 7 is a perspective view of a clamp heater according to another embodiment of the present invention.

Figure 8 is an exploded perspective view of a clamp heater according to another embodiment of the present invention.

FIG. 9 is a drawing showing a part of an exploded perspective view of a clamp heater according to another embodiment of the present invention.

Fig. 10 is a cross-sectional view taken along line A-A' of Fig. 7.

Fig. 11 is a cross-sectional view of a portion of a fixed part taken along line B-B' of Fig. 7.

Figure 12 is a usage state diagram of a clamp heater according to another embodiment of the present invention.

Figure 13 is an enlarged view of a clamp heater heating part according to another embodiment of the present invention.

Hereinafter, with reference to the attached drawings, embodiments of the present invention will be described in detail so that those skilled in the art can easily practice the present invention. The present invention may be implemented in various different forms and is not limited to the embodiments described herein. In the drawings, in order to clearly describe the present invention, parts that are not related to the description are omitted, and the same reference numerals are assigned to the same or similar components throughout the specification.

In this specification, it should be understood that terms such as "include" or "have" are intended to specify the presence of a feature, number, step, operation, component, part or combination thereof described in the specification, but do not exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof. In addition, when it is said that a part such as a layer, film, region or plate is "on" another part, this includes not only the case where it is "directly on" the other part, but also the case where there is another part in between. Conversely, when it is said that a part such as a layer, film, region or plate is "under" another part, this includes not only the case where it is "directly under" the other part, but also the case where there is another part in between.

FIG. 1 is a perspective view of a clamp heater according to one embodiment of the present invention, and FIG. 2 is an exploded perspective view of a clamp heater according to one embodiment of the present invention.

Referring to FIGS. 1 and 2, the clamp heater (6) may include a first main body part (610), a second main body part (620), a cover part (640), a lid (6110), a heating receiving part (630), a heating element (631), and a fixing part (650).

The first main body (610) may include a first plane (611), a first curved surface (612), and a receiving groove (613).

The first plane (611) may be formed on both sides of the first main body (610) and may be formed as a pair in a hollow shape. For example, the first plane (611) may be formed in a hollow shape with a semicircle shape in the middle and formed on both sides of the first main body (610).

The first plane (611) is formed flat on the surface to increase the contact area without forming structures such as protrusions or grooves so that it can be in close contact with the cover (6110) and effectively transfer heat generated through the heating element (631) to the first main body (610) and the second main body (620).

The first curved surface (612) may be formed by connecting one side of the first plane (611) and being curved. For example, the first curved surface (612) may be formed by connecting one side of two first planes (611) and being curved in an arc shape.

The receiving home (613) can be formed at an end of the first main body (610) where the first curved surface (612) is formed.

The receiving groove (613) is formed so that the first main body part (610) and the second main body part (620) face each other while being positioned opposite each other, and a hinge part (660) can be coupled to the receiving groove (613).

The second main body part (620) may be formed in a shape corresponding to the first main body part (610). For example, the second main body part (620) may be formed in a configuration corresponding to the first main body part (610) and may have a cylindrical shape with the center penetrating through the first main body part (610). Through this, the first main body part (610) and the second main body part (620) may be wrapped around the pipe (P) as the center.

Additionally, the second main body part (620) can be connected to the first main body part (610) via a hinge part (660) connected to the receiving groove (613) via a hinge fitting shaft (661).

For example, the second main body part (620) can be coupled to the first main body part (610) via the hinge part (660) and can rotate around the hinge fitting axis (661). Likewise, the first main body part (610) can also rotate around the hinge fitting axis (661). Through this, the work of wrapping and coupling the first main body part (610) and the second main body part (620) to the pipe (P) can be made easier.

Here, the hinge part (660) may include a hinge fitting shaft (661). For example, the hinge part (660) may be formed by two hinge fitting shafts (661) that are coupled and fixed to each other. Through this, the hinge part (660) is hinge-coupled so that the first main body part (610) and the second main body part (620) can rotate around the hinge part (660), thereby making it simpler and easier to couple the clamp heater (6) to the pipe (P).

The above cover (6110) can be fixed to the first main body part (610) and the second main body part (620) by being in close contact with the planes (611, 621) of the first main body part (610) and the second main body part (620), respectively, through a bolt member (6111).

The cover (6110) has the same inner diameter and outer diameter as the first main body part (610) and the second main body part (620). Accordingly, the cover (6110) does not protrude outside the first main body part (610) and the second main body part (620).

The inner surface of the cover (6110) is formed flat in all areas except for the heater receiving portion (630) so that the widest possible area can be in close contact with the first and second planes (611, 621).

The above cover part (640) may include a cable gland (641).

The cable gland (641) is formed at the center of the cover part (640) and has a center that is penetrated so that a cable (633) can pass through it. Through this, multiple bundles of cables (633) are gathered at the center of the cable gland (641), so that the organization of cables (633) exposed to the outside can be made simpler and the installation work of the clamp heater (6) can be made easier.

The cover part (640) is formed to surround the hinge part (660), and a cable (633) can be connected to the internal space.

For example, the cover part (640) is surrounded by five sides and has a rectangular cross-section, and a hinge part (660) is positioned on a side that is not surrounded by the sides, and the five sides formed at a certain distance from the hinge part (660) form an internal compartment, and the cable (633) can be stored and connected in this internal compartment. Through this, the clamp heater (6) can more neatly organize the cable (633) that supplies electricity, thereby preventing secondary accidents during work and making storage and work easier.

The above cover part (640) can be attached and detached to the first main body part (610) and the second main body part (620) via a fixing screw (6412). This makes it more convenient to replace or reconnect the cable (633) when the cable (633) is cut or disconnected.

The cable (633) can be connected to one side of the heating element (631) and connected to the outside. For example, the cable (633) can be connected to one side of the heating element (631) and connected to an external power source through a cable ground hole (6411).

The above heating receiving portion (630) can be formed in an arc shape on the inner surface of the cover (6110).

The inner surface of the heating receiving portion (630) may be a round groove, and a heating element (631) may be inserted into the round groove. Through this, heat is transferred to the cover side through the round portion of the heating element (631), and the heat transferred to the cover (6110) may be transferred to the first and second main body portions (610, 620).

The depth of the heating receiving portion (630) is formed to a depth such that the heating element (631) does not protrude from the inner surface of the cover (6110) when the heating element (631) is inserted.

The above heating element (631) is accommodated in a heating receiver (630) and is heated by electricity.

The heating element (631) can be connected to a cable (633) to receive electricity and be formed to be curved to correspond to the curved surface (612, 622).

For example, the heating element (631) may be a banding cartridge heater made of SUS material that is connected to a cable (633) at one end to receive electricity and is curved in an arc shape corresponding to the curved surface (612, 622) and has a circular cross section. Through this, the heating element (631) can be flexibly fitted into the heating receiving portion (630), thereby making the assembly of the clamp heater (6) faster and more convenient.

The heating element (631) can increase the watt density (W/in^: work rate for a certain area, thermal conductivity) and can accelerate the immediate heating reaction. As another example, if it is operated using 75W of power consumption, it can generate heat at a maximum of 320 degrees and the operating temperature can be 240 degrees or lower. Through this, it is possible to prevent the internal temperature of the vacuum pipe from decreasing due to heat generation at a high temperature, and to prevent the phenomenon of harmful gases solidifying due to a decrease in the ambient temperature. In addition, since it is possible to maintain a constant temperature rather than effectively suppressing powder due to difficulty in maintaining the temperature even when using a heating jacket, the maintenance cost and installation cost for the heating jacket can be saved.

A cable hole (632) is formed at the end of the above cover (6110) so that a cable (633) can be inserted.

For example, the cable hole (632) can be connected to the heating receiver (630) so that the cable (633) can be connected to the heating element (631) inserted into the heating receiver (630).

Cable holes (632) are formed in each cover (6110), and when the cover part (640) is combined on the upper part of the first main body part (610) and the second main body part (620), the cable (633) passes through the cable gland hole (6411) and enters the inside of the cover part (640), and the cable (633) can be connected to the heating element (631) through the cable hole (632).

As described above, the cover (6110) with the heating element inserted is fixed to the flat surface (611, 621) on the outside of the first main body (610) and the second main body (620), so that no structure protrudes to the outside of the clamp heater (6), and stable heat transfer is possible without heat loss being emitted to the outside.

In addition, the clamp heater (6) of the present invention may include a heat transfer member (634).

The heat transfer member (634) may be formed in a flat surface shape on one side and in a semicircular shape on the other side so that the heating element (631) is bonded and pressed against each other.

The heat transfer member (634) may be formed in a shape corresponding to the entire length of the heating receiving portion (630), and at least one may be combined at a set interval to transfer heat.

With the heating element (631) inserted into the heating receiving portion (630), the semicircular portion of the heat transfer member (634) can be joined to the heating receiving portion (630) so as to be in close contact with the heating element (631).

Accordingly, since the surface portion of the heat transfer member (634) is in close contact with the planes (611, 621) of the first main body (610) and the second main body (620), the empty space inside the heating receiving portion (630) is eliminated as much as possible, and the heat generated from the heating element (631) can be transferred to the first main body (610) and the second main body (620) as quickly and stably as possible, while also minimizing heat loss.

Figure 3 is a cross-sectional view taken along line A-A' of Figure 1.

Referring to FIG. 3, the clamp heater (6) may include a fixing portion (650), a first fixing groove (610a), and a second fixing groove (620a).

The first fixed groove (610a) is formed on one side of the first main body (610) and may include a groove and a curved surface next to the groove.

The second fixed groove (620a) is formed on one side of the second main body (620) and can accommodate the head (652a). For example, the second fixed groove (620a) can be formed on one side of the second main body (620) and can have a shape that penetrates the same width as the head (652a). Through this, the head (652a) can be accommodated without any obstruction, so that the fixed bolt (652) and the first main body (610) can be more firmly coupled.

Through this, the fixed part (650) can firmly fix the first main body part (610) and the second main body part (620) to the pipe (P) and stably support the clamp heater (6) by positioning it in the first fixed groove (610a) and the second fixed groove (620a).

The above fixed part (650) may include a fixed bolt (652) and a fixed nut (651).

The fixed bolt (652) may have a joining hole (652b) formed in the head (652a) and a male screw thread formed on the outer surface.

The retaining nut (651) may include a collar (6511), a ball plunger (6512), and a washer (6513).

The collar (6511) may be coupled to the male screw thread of the fixing bolt (652) and positioned between the first main body part (610) and the second main body part (620). Accordingly, when the fixing bolt (652) is excessively locked with the fixing nut (651), the first main body part (610) and the second main body part (620) form an oval shape instead of a circle. However, due to the collar (6511), the fixing nut (651) is not excessively locked to the fixing bolt (652), and thus the first main body part (610) and the second main body part (620) may form a circle. In addition, the pipe flange fixing of the clamp heater (6) may be more uniform.

Referring to FIG. 5, the ball plunger (6512) may be formed inside the first main body (610) or the second main body (620) and may be in contact with a groove formed on the outer surface of the fixed nut (651). For example, the ball plunger (6512) may have a spherical ball on one side that may be in contact with a groove formed on the outer surface of the fixed nut (651). Through this, it is possible to prevent the fixed nut (651) from loosening or releasing from the connection with the fixed bolt (652) due to vibration of the pipe (P). As a result, the pipe fixation of the clamp heater (6) can be made more solid.

The ball plunger (6512) may include a ball plunger fixing member (6512a).

The ball plunger fixing member (6512a) can fix and adjust the position of the ball plunger (6512). Through this, the ball plunger (6512) can be fixed more firmly and the position can be easily adjusted.

The washer (6513) may be connected to the male thread of the fixing bolt (652) and positioned to be in contact with the fixing nut (651). For example, the washer (6513) may be connected to the male thread of the fixing bolt (652) and positioned between the fixing bolt (652) and the fixing nut (651) and may be in contact with one surface of the fixing nut (651). Through this, loosening can be prevented and the pipe fixing of the clamp heater (6) can be made more solid.

Figure 6 is a usage state diagram of a clamp heater according to another embodiment of the present invention.

Referring to Fig. 6, a clamp heater (6) can be connected to a vacuum pipe (P). Through this, by applying heat to solidified powder on the inner surface of a vacuum pipe, etc., powder generation within the vacuum pipe can be suppressed.

Referring to Fig. 7, the clamp heater (1) may include a first main body part (10), a second main body part (20), a cover part (40), and a fixing part (50).

The first main body (10) may include a first cover (110).

The second main body (20) may include a second cover (210).

The cover (110, 210) can cover a portion of the surface area of the plane (11, 21) and be coupled to the plane (11, 21) to block the heating receiving portion (31) from the outside. For example, the first cover (110) can be formed in a shape corresponding to the first plane (11) and spaced apart from the edge of the first plane (11) and fitted to the first plane (11) to block the heating receiving portion (31) from the outside.

The cover part (40) may include a cable gland (41).

The cable gland (41) is formed at the center of the cover part (40) and has a center that is penetrated so that a cable (33) can pass through it. Through this, multiple bundles of cables (33) are gathered at the center of the cable gland (41), so that the organization of cables (33) exposed to the outside can be made simpler and the installation work of the clamp heater (1) can be made easier.

The fixing member (50) can fix the connection between the first main body part (10) and the second main body part (20). For example, the fixing member (50) is connected to the lower end of the first main body part (10) and can move toward the second main body part (20) with the connection as the center. Through this movement, the first main body part (10) and the second main body part (20) are tightened, and the clamp heater (1) can be fixed to the pipe. Through this, the configuration of the clamp heater (1) can be simplified, and thus the installation and release of the clamp heater (1) from the vacuum pipe can be made easier.

Referring to FIG. 8, the first main body (10) may include a first plane (11), a first curved surface (12), and a first protruding surface (13).

The first plane (11) may be provided on both sides of the first main body (10) and formed as a pair in a hollow shape. For example, the first plane (11) may be provided on both sides of the first main body (10) and formed in a hollow shape with a semicircle shape in the middle.

The first curved surface (12) can be formed by connecting one side of the first plane (11) and being curved. For example, the first curved surface (12) can be formed by connecting one side of two first planes (11) and being curved in an arc shape.

The first protruding surface (13) may protrude in a square shape from an end of the first plane (11). For example, the first protruding surface (13) may protrude in a square shape by being inclined perpendicular to the first plane (11).

The protruding surface (13, 23) may include a cable hole (131, 231).

The cable hole (131, 231) can be connected to the heating receiving section (31) by penetrating the center, and a cable (33) can pass through it, and a screw thread can be formed on the inner surface. Through this, multiple bundles of cables (33) can be gathered by the cable hole (131), so that the cable (33) can be organized more easily, and the work of passing the cable (33) through the cable gland (41) can be made easier.

In addition, when storing and loading the clamp heater (1), the heating receiving portion (31) can be sealed by combining rubber with the cable hole (131), thereby preventing the inflow of dust and contaminants.

The second main body part (20) may be formed in a shape corresponding to the first main body part (10). For example, the second main body part (20) may be formed in a configuration corresponding to the first main body part (10) and may have a cylindrical shape with the center penetrating the first main body part (10). Through this, the first main body part (10) and the second main body part may be wrapped around the pipe.

In addition, the second main body part (20) can be connected to the first main body part (10) via a hinge part (60) connected to the protruding surface (23) via a hinge fitting shaft (61). For example, the second main body part (20) can be connected to the first main body part (10) via the hinge part (60) and can rotate around the hinge fitting shaft (61). Likewise, the first main body part (10) can also rotate around the hinge fitting shaft (61). Through this, the work of wrapping and connecting the first main body part (10) and the second main body part (20) to the pipe can be made easier.

The heating unit (30) is accommodated in the heating receiving unit (31) and can generate heat by electricity. For example, the heating unit (30) can be inserted into the heating receiving unit (31) surrounded by the first flat surface (11) and the first curved surface (12) and the second flat surface (21) and the second curved surface (22) and generate heat. Through this, the clamp heater (1) generates heat from the inside rather than the outside, so that heat generation is effective and heat conduction efficiency can be further increased. In addition, it has excellent insulation function and can transmit a constant and high temperature without a large change in the joint part of the vacuum pipe and the clamp. As a result, the powder phenomenon that occurs due to the solidification of harmful gases inside the vacuum pipe due to the low temperature can be prevented more reliably.

The cover part (40) is formed to surround the protruding surfaces (13, 23) and the hinge part (60), and a cable (33) can be connected to the internal space. For example, the cover part (40) is surrounded by five sides and has a square cross-section, and the protruding surfaces (13, 23) and the hinge part (60) are introduced into the sides that are not surrounded by the sides, and the five sides formed at a certain distance from the protruding surfaces (13, 23) and the hinge part (60) form an internal compartment, and the cable (33) can be stored and connected in this internal compartment. Through this, the clamp heater (1) can prevent secondary accidents during operation and facilitate storage and operation by organizing the cable (33) that supplies electricity more neatly.

In addition, the cover part (40) can be attached and detached to the first main body part (10) and the second main body part (20). Through this, when the cable (33) is cut or disconnected, the work of replacing or reconnecting the cable (33) can be carried out more conveniently.

The cable (33) can be connected to one side of the heating element (32) and connected to the outside. For example, the cable (33) can be connected to one side of the heating element (32) and connected to external power through the cable hole (131, 231) and the cable grand hole (411).

The first main body (10) may further include a first cover (110).

The first cover (110) can block the heating receiving portion (31) from the outside. For example, a heating element (32) can be introduced into a curved inlet surface (not shown) formed on the first plane (11) and be placed in the heating receiving portion (31), and the first cover (110) can be covered on the inlet surface (not shown). Through this, the installation of the heating element (32) to the clamp heater (1) can be made simpler and the work can be made easier.

The heating unit (30) may further include a heating element (32).

The heating element (32) can be formed by being connected to a cable (33), receiving electricity, and being curved to correspond to the curved surface (12, 22). For example, the heating element (32) can be formed by being connected to a cable (33) on one side, receiving electricity, and being curved to correspond to the curved surface (12, 22). Through this, the heating element (32) can be flexibly fitted into the heating receiving portion (31), thereby making the assembly of the clamp heater (1) faster and more convenient.

The clamp heater (1) may include a fixing portion (50), a first fixing groove (10a), and a second fixing groove (20a).

The first fixed groove (10a) is formed on one side of the first main body (10) and may include a groove and a curved surface next to the groove. For example, the first fixed groove (10a) may be formed on one side of the first main body (10) and may include a groove dug toward the heating receiving portion (31) and a curved surface formed next to the groove.

The second fixed groove (20a) is formed on one side of the second main body (20) and can accommodate the head (52a). For example, the second fixed groove (20a) can be formed on one side of the second main body (20) and have a shape that penetrates the same width as the head (52a). Through this, the head (52a) can be accommodated without any obstruction, so that the fixed bolt (52) and the first main body (10) can be more firmly coupled.

Through this, the fixed part (50) can firmly fix the first main body part (10) and the second main body part (20) to the pipe and stably support the clamp heater (1) by being positioned in the first fixed groove (10a) and the second fixed groove (20a).

Referring to Fig. 9, the heating receiving portion (31) may be formed on both sides of the main body portion (10, 20). For example, the heating receiving portion (31) may be formed in two pieces inside the main body portion (10, 20). Through this, the clamp heater (1) can apply heat to the pipe from both sides, thereby enabling more effective powder prevention and increasing heat generation.

The second main body (20) may include a bimetal (221) and a bimetal cover (220).

The bimetal (221) is connected to the heating element (32) and can control the temperature of the heating part (30). For example, the bimetal (221) may be formed as an N Type or NC contact, and the contact may be closed when the temperature rises and closed when the temperature drops. Through this, when the temperature of the heating part (30) drops below a preset value, the contact closes and heat is generated again, thereby preventing the temperature of the heating part (30) from dropping. As a result, the powder phenomenon in the pipe can be prevented more and the temperature required in the pipe can be maintained more consistently.

The bimetal cover (220) can be formed to come into contact with the second curved surface (22). Through this, the bimetal cover (220) can protect the bimetal (221) from the outside.

The second main body (20) may include a thermocouple (222).

The thermocouple (222) can be connected to the heating receiving portion (31) compartment. For example, the thermocouple (222) can be connected to the heating receiving portion (31) compartment and formed by being attached to the second curved surface (22). Through this, the heat of the heating receiving portion (31) is transferred to one side of the thermocouple (222) attached to the second curved surface (22), so that the thermocouple (222) can measure the temperature of the heating receiving portion (31). As a result, the heat generation of the clamp heater (1) can be recognized from the outside, so that the feedback can be faster.

The thermocouple (222) can detect the temperature of the heating part (30).

The thermocouple (222) may be formed on the second curved surface (22). For example, the thermocouple (222) may be formed at a location close to the second protruding surface (23) of the second curved surface (22). Through this, the thermocouple (222) may be formed at a location that can be recognized at a glance with the naked eye, thereby making replacement work and temperature detection faster and more accurate.

The first cover (110) may include a first cover bolt (111).

The first cover bolt (111) can be connected as a pair to both ends of the first cover (110).

The second cover (210) may include a second cover bolt (211).

The first cover (110) and the second cover (210) cover a portion of the surface area of the plane (11, 21) and are joined to the surface (11, 21) to block the heating receiving portion (31) from the outside.

The second cover bolts (211) are formed as a pair at both ends of the second cover (210) and can penetrate the second cover (210). Through this, the second cover (210) can be fixed to the second plane (21).

The cover (110, 210) can be fitted to a surface formed with a step on the plane (11, 21). For example, the first cover (110) can be formed with a shape corresponding to the first plane (11) and a smaller area than the first plane (11) and can be fitted to the surface with a step on the first plane (11). Since the clamp heater (1) generates heat from the inside rather than the outside, the heat generation is effective and the heat conduction efficiency can be further increased. In addition, it has excellent insulation function and can transmit a constant and high temperature without a large change to the joint part of the vacuum pipe and the clamp. As a result, the powder phenomenon that occurs due to the solidification of harmful gases inside the vacuum pipe due to the low temperature can be prevented more reliably.

Cables (33) can be connected to one or more heating elements (32).

The fixed part (50) may include a fixed bolt (52) and a fixed nut (51).

The fixed bolt (52) may have a joining hole (52b) formed in the head (52a) and a male screw thread formed on the outer surface.

The fixed bolt (52) may include a fixed bolt insertion shaft (521). For example, the fixed bolt (52) may be coupled to the first main body (10) by having the fixed bolt insertion shaft (521) penetrate the head (52a). Through this, the fixed bolt (52) may be coupled to the fixed nut (51) to more firmly couple the first main body (10) and the second main body (20) to the pipe.

The fixed bolt fitting shaft (521) can pass through the joining hole (52b) of the head (52a). For example, the fixed bolt fitting shaft (521) can pass through the joining hole (52b) of the head (52a) and be connected to the first main body (10).

The fixed nut (51) can be combined with the fixed bolt (52) to fix the first main body part (10) and the second main body part (20). For example, the fixed nut (51) has a female thread formed on the inner surface to be combined with the fixed bolt (52) and the combination can be adjusted through rotation. Through this, the fastening force of the clamp heater (1) to the pipe can be loosened or tightened without using a large force.

The hinge part (60) may include a hinge fitting shaft (61). For example, the hinge part (60) may be formed by two hinge fitting shafts (61) being connected and fixed to each other. Through this, the hinge part (60) may be hinge-connected so that the first main body part (10) and the second main body part (20) can rotate around the hinge part (60), thereby making it simpler and easier to connect the clamp heater (1) to the pipe.

The curved surface (12, 22) may include a bimetal (221). Through this, the clamp heater (1) can control the temperature by lowering the heat generation when the temperature exceeds the preset value and increasing the heat generation when the temperature reaches below the preset value, thereby allowing the clamp heater (1) to maintain a constant temperature required by the pipe and prevent the phenomenon of harmful gases turning into powder.

Fig. 10 is a cross-sectional view taken along line A-A' of Fig. 1.

Referring to Fig. 10, the heating receiving portion (31) may be a compartment formed by being surrounded by flat surfaces (11, 21) and curved surfaces (12, 22). For example, the heating receiving portion (31) may be formed in two compartments surrounded by the first flat surface (11) and the first curved surface (12). In addition, the heating receiving portion (31) may be formed in two compartments surrounded by the second flat surface (21) and the second curved surface in the second main body portion (20). Through this, the heating element (32) accommodated in the heating receiving portion (31) can generate heat on both sides of the first main body portion (10) and the second main body portion (20), and since it is composed of four, it can heat the vacuum pipe on both sides. Accordingly, not only is it possible to prevent the internal temperature of the vacuum pipe from decreasing, but also, when the clamp heater (1) is coupled to the vacuum pipe, the heating receiving portion (31) is positioned closer to the vacuum pipe, so that the thermal conductivity can be further increased, and the temperature required for the inside of the vacuum pipe can be more effectively maintained, and the exothermicity of the clamp can be further increased. As a result, the generation of powder in the vacuum pipe can be suppressed, and accidents such as breakdown, backflow, and contamination caused by fixed powder can be prevented.

The heating element (32) may be accommodated in the heating receiving portion (31) by being curved to correspond to the curved surfaces (12, 22). For example, the heating element (32) may be a banding cartridge heater made of SUS material that is curved in an arc shape to correspond to the shape of the first curved surface (12) and has a circular cross section. Through this, the heating element (32) may have an increased watt density (W/in^: work rate for a certain area, thermal conductivity) and may have a faster immediate heating reaction. As another example, when operated using 75 W of power consumption, heating may be possible at a maximum of 320 degrees and the operating temperature may be 240 degrees or lower. Through this, it is possible to prevent the internal shaft temperature of the vacuum pipe from lowering due to heating at a high temperature, and to prevent the phenomenon of harmful gases solidifying due to a decrease in the surrounding temperature. In addition, since it is possible to maintain a constant temperature rather than effectively suppressing powder due to difficulty in maintaining temperature even when using a heating jacket, the maintenance and installation costs for the heating jacket can be further reduced.

Ultimately, the clamp heater (1) can prevent failure of the vacuum pump, prevent an increase in exhaust pressure, and prevent the backflow of exhaust gas, thereby preventing the problem of contaminating the wafer within the process chamber.

Fig. 11 is a cross-sectional view of a portion of a fixed part taken along line B-B' of Fig. 1.

Referring to FIG. 11, the fixed nut (51) may include a collar (511), a ball plunger (512), and a washer (513).

The collar (511) can be positioned between the first main body part (10) and the second main body part (20) by being connected to the male screw thread of the fixing bolt (52). In this way, if the fixing bolt (52) is excessively locked with the fixing nut (51), the first main body part (10) and the second main body part (20) form an oval shape instead of a circle, but due to the collar (511), the fixing nut (51) is not excessively locked to the fixing bolt (52), so that the first main body part (10) and the second main body part can form a circle. In addition, the pipe flange fixing of the clamp heater (1) can be made more consistent.

The ball plunger (512) may be formed inside the first main body (10) or the second main body (20) and may come into contact with a groove formed on the outer surface of the fixed nut (51). For example, the ball plunger (512) may have a spherical ball on one side that may come into contact with a groove formed on the outer surface of the fixed nut (51). Through this, it is possible to prevent the fixed nut (51) from loosening or releasing from the connection with the fixed bolt (52) due to vibration of the pipe. As a result, the pipe fixation of the clamp heater (1) can be made more solid.

The ball plunger (512) may include a ball plunger fixing member (512a).

The ball plunger fixing member (512a) can fix and adjust the position of the ball plunger (512). Through this, the ball plunger (512) can be fixed more firmly and its position can be easily adjusted.

The washer (513) can be connected to the male thread of the fixed bolt (52) and positioned so as to be in contact with the fixed nut (51). For example, the washer (513) can be connected to the male thread of the fixed bolt (52) and positioned between the fixed bolt (52) and the fixed nut (51) and so as to be in contact with one surface of the fixed nut (51). Through this, loosening can be prevented and the pipe fixing of the clamp heater (1) can be made more solid.

Referring to Fig. 12, a clamp heater (1) can be connected to a vacuum pipe (P). Through this, by applying heat to solidified powder on the inner surface of a vacuum pipe, etc., powder generation within the vacuum pipe can be suppressed.

The first main body (10) may include a bimetal cover (120), a bimetal (121), and a thermocouple (122). For example, the bimetal (121) formed in the first main body (10) may be of an N Type or an NC Type, and may be configured such that the contact falls when the temperature rises and the contact closes when the temperature drops. Through this, the heating parts (30) of the first main body (10) and the second main body (20) may close the contact when the temperature drops below a preset value, thereby generating heat again and preventing the temperature of the heating part (30) from dropping. As a result, the powder phenomenon in the pipe can be prevented more and the temperature required in the pipe can be maintained more consistently.

Fig. 13 is an enlarged view of a clamp heater heating part according to another embodiment of the present invention.

Referring to FIG. 13, the cover (110, 210) may include a heating element fixing part (32a).

The heating element fixing part (32a) is formed on the surface where the cover (110, 210) comes into contact with the first plane (11) and the second plane (21) to fix the heating element (32). For example, the heating element fixing part (32a) is formed to wrap the shape of the heating element (32) on the surface where the cover (110, 210) comes into contact with the second plane (21), and may be provided in two pieces to wrap the upper and lower ends of the heating element (32). Through this, the heating element (32) can be completely pressed into the inner surface of the heating receiving portion (31) by the heating element fixing part (32a), so that the heat transfer of the heating element (32) can be more efficient. In addition, it is possible to prevent the heating element (32) from moving on the heating element fixing part (32a) or from being detached from the heating element fixing part (32a).

The curved surface (12, 22) may include a heat transfer protrusion (22a).

The heat transfer protrusion (22a) may be a protrusion formed on the surface where the curved surface (12, 22) comes into contact with the pipe (P). For example, the heat transfer protrusion (22a) may be a plurality of protrusions formed on the surface where the curved surface (12, 22) comes into contact with the pipe (P), and the heat transfer protrusion (22a) may be a cylindrical protrusion having a height of 1 mm at a distance of about 1 mm between the pipe (P) and the curved surface (12, 22). Through this, the heat generated from the heating element (32) may be transferred to a wider area of the heat transfer protrusion (22a), so that the heat conduction efficiency may be further increased. In addition, even when the clamp heater (1) is connected to the pipe (P), a gap may be created between the curved surface (12, 22) and the pipe (P). In this case, the heat transfer protrusion (22a) can transfer heat, thereby preventing the heat transfer efficiency from decreasing.

Although the embodiments of the present invention have been described above, the spirit of the present invention is not limited to the embodiments presented in this specification, and those skilled in the art who understand the spirit of the present invention will be able to easily propose other embodiments by adding, changing, deleting, or adding components within the scope of the same spirit, but this will also be considered to fall within the spirit of the present invention.

Claims

A first main body including a pair of flat surfaces provided on both sides, a curved surface formed by connecting one side of the flat surfaces, and a receiving groove formed at an end of the curved surface;

A second main body part formed in a shape corresponding to the first main body part and symmetrically formed with the first main body part via a hinge part axially connected to the receiving groove;

A cover part covering the end of the curved surface so that the above hinge part is not exposed and in which the cable is connected internally;

A cover that is fixed to the first and second main body parts by a bolt member and is in close contact with the planes of the first and second main body parts, respectively;

A heating receiving portion formed on the inner surface of the above cover and having a round groove on the inner surface;

A heating element that is accommodated in the above heating receiving portion and generates heat through electricity;

A clamp heater including a fixing part having a fixing bolt having a joining hole formed in a head and a male thread formed on an outer surface, and a fixing nut that is combined with the fixing bolt to fix the first main body part and the second main body part.
In paragraph 1,

A clamp heater further comprising a heat transfer member coupled to the above heating receiving member and transferring heat generated from the heating element to the first main body part and the second main body part.
A first main body including a pair of hollow planes provided on both sides, a curved surface formed by being curved and connecting one side of the planes, and a protruding surface protruding in a square shape from an end of the planes;

A second main body part formed in a shape corresponding to the first main body part and symmetrically formed with the first main body part via a hinge part connected to the protruding surface as an axis;

A heating unit including a heating receiving unit surrounded by the above-mentioned flat surface and the above-mentioned curved surface and having a circularly grooved inner surface, and a heating element accommodated in the heating receiving unit and heated by electricity;

A cover part covering the above protruding surface and the hinge part, and in which a cable is connected inside; and

A fixing part including a fixing bolt having a joining hole formed in the head and a male screw thread formed on the outer surface, and a fixing nut that is combined with the fixing bolt to fix the first main body part and the second main body part,

The above curved surface is,

A clamp heater including a plurality of heat transfer protrusions formed on a surface where the above-mentioned curved surface comes into contact with the pipe and which transfer heat in the gap between the above-mentioned curved surface and the pipe.
In paragraph 1,

The above main body part,

A bimetal formed on the above curved surface and configured to detect and control the temperature in a section connected to the heating receiving portion; and

A clamp heater including a thermocouple formed in contact with the above bimetal.
In paragraph 1,

It further includes a cover that is fitted to the above plane and blocks the heating receiving part from the outside,

The above cover,

A clamp heater further comprising a heating element fixing part formed in multiple pieces on a surface facing the above plane and fixing the heating element to the inner surface of the heating receiving part in a shape corresponding to the outer surface of the heating element.