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WO2023093275A1 - Light source assembly and optical module - Google Patents

Light source assembly and optical module Download PDF

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Publication number
WO2023093275A1
WO2023093275A1 PCT/CN2022/121481 CN2022121481W WO2023093275A1 WO 2023093275 A1 WO2023093275 A1 WO 2023093275A1 CN 2022121481 W CN2022121481 W CN 2022121481W WO 2023093275 A1 WO2023093275 A1 WO 2023093275A1
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WO
WIPO (PCT)
Prior art keywords
laser
lasers
grating
optical
light source
Prior art date
Application number
PCT/CN2022/121481
Other languages
French (fr)
Chinese (zh)
Inventor
章力明
马军涛
Original Assignee
青岛海信宽带多媒体技术有限公司
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Publication of WO2023093275A1 publication Critical patent/WO2023093275A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/04Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/042Electrical excitation ; Circuits therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/20Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B10/00Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
    • H04B10/27Arrangements for networking
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04QSELECTING
    • H04Q11/00Selecting arrangements for multiplex systems

Definitions

  • the present disclosure relates to the technical field of optical communication, in particular to a light source component and an optical module.
  • some embodiments of the present disclosure provide a light source assembly.
  • the light source component includes a laser chip and multiple lasers.
  • the multiple lasers are arranged on the surface of the laser chip, and each laser includes a gain region and a grating region, and both the gain region and the grating region have an optical waveguide.
  • the plurality of lasers includes a first set of lasers and a second set of lasers.
  • the grating region of each laser in the first group of lasers is configured to receive an external current to output a first beam of corresponding wavelength, the optical waveguide of the grating region of each laser in the second group of lasers and the optical waveguide of the gain region There is an inclination angle between them, so as to output the second light beam corresponding to the wavelength.
  • the first light beam and the second light beam have different wavelengths.
  • the optical module includes a circuit board, the above-mentioned light source assembly and a silicon photonics chip.
  • the light source assembly is connected to the circuit board.
  • the silicon photonic chip is electrically connected to the circuit board and optically connected to the light source component, and is configured to receive the light beam emitted by the light source component.
  • Fig. 1 is a connection diagram of an optical communication system according to some embodiments
  • Fig. 2 is a structural diagram of an optical network terminal according to some embodiments.
  • Fig. 3 is a structural diagram of an optical module according to some embodiments.
  • Figure 4 is an exploded view of an optical module according to some embodiments.
  • FIG. 5 is a schematic diagram of the structure and materials along the growth direction outside the gain region (left) and the grating region (right) of a laser according to some embodiments;
  • FIG. 6 is a cross-sectional view of the optical waveguide in the gain region and the optical waveguide in the grating region of the laser according to some embodiments;
  • FIG. 7 is a schematic diagram of the distribution of lasers arranged on a laser chip according to some embodiments.
  • FIG. 8 is a schematic diagram of a specific design of a gain region and a grating region of a laser according to some embodiments.
  • FIG. 9 is a schematic diagram showing the relationship between the inclination angle of the optical waveguide extension direction of the grating region and the wavelength variation relative to the optical waveguide extension direction of the gain region according to some embodiments;
  • FIG. 10 is a schematic diagram of wavelengths for a 10-channel laser of a light source assembly according to some embodiments.
  • first and second are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as “first” and “second” may explicitly or implicitly include one or more of these features. In the description of the embodiments of the present disclosure, unless otherwise specified, "plurality” means two or more.
  • connection should be understood in a broad sense.
  • connection can be a fixed connection, a detachable connection, or an integral body; it can be a direct connection or an indirect connection through an intermediary.
  • the term “coupled” may be used in describing some embodiments to indicate that two or more elements are in direct physical or electrical contact.
  • the terms “coupled” or “communicatively coupled” may also mean that two or more elements are not in direct contact with each other, but yet still co-operate or interact with each other.
  • the embodiments disclosed herein are not necessarily limited by the context herein.
  • At least one of A, B and C has the same meaning as “at least one of A, B or C” and both include the following combinations of A, B and C: A only, B only, C only, A and B A combination of A and C, a combination of B and C, and a combination of A, B and C.
  • a and/or B includes the following three combinations: A only, B only, and a combination of A and B.
  • Exemplary embodiments are described herein with reference to cross-sectional and/or plan views that are idealized exemplary drawings.
  • the thickness of layers and regions are exaggerated for clarity. Accordingly, variations in shape from the drawings as a result, for example, of manufacturing techniques and/or tolerances are contemplated.
  • example embodiments should not be construed as limited to the shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, an etched region illustrated as a rectangle will, typically, have curved features.
  • the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of example embodiments.
  • optical signals are used to carry information to be transmitted, and the optical signals carrying information are transmitted to information processing equipment such as computers through optical fibers or optical waveguides to complete information transmission. Due to the passive transmission characteristics of light when transmitted through optical fibers or optical waveguides, low-cost, low-loss information transmission can be achieved.
  • the signals transmitted by information transmission equipment such as optical fibers or optical waveguides are optical signals, while the signals that can be recognized and processed by information processing equipment such as computers are electrical signals. To establish an information connection between them, it is necessary to realize the mutual conversion of electrical signals and optical signals.
  • the optical module realizes the mutual conversion function of the above-mentioned optical signal and electrical signal in the technical field of optical fiber communication.
  • the optical module includes an optical port and an electrical port.
  • the optical module realizes optical communication with information transmission equipment such as optical fiber or optical waveguide through the optical port, and realizes the electrical connection with the optical network terminal (such as an optical modem) through the electrical port. It is mainly used for power supply, I2C signal transmission, data information transmission and grounding, etc.; the optical network terminal transmits electrical signals to information processing equipment such as computers through network cables or wireless fidelity technology (Wi-Fi).
  • Wi-Fi wireless fidelity technology
  • Fig. 1 is a connection diagram of an optical communication system according to some embodiments.
  • the optical communication system includes a remote server 1000 , a local information processing device 2000 , an optical network terminal 100 , an optical module 200 , an optical fiber 101 and a network cable 103 .
  • optical fiber 101 One end of the optical fiber 101 is connected to the remote server 1000 , and the other end is connected to the optical network terminal 100 through the optical module 200 .
  • Optical fiber itself can support long-distance signal transmission, such as signal transmission of several kilometers (6 kilometers to 8 kilometers). On this basis, if repeaters are used, theoretically unlimited distance transmission can be achieved. Therefore, in a common optical communication system, the distance between the remote server 1000 and the optical network terminal 100 can usually reach thousands of kilometers, tens of kilometers or hundreds of kilometers.
  • the local information processing device 2000 may be any one or more of the following devices: routers, switches, computers, mobile phones, tablet computers, televisions, and so on.
  • the physical distance between the remote server 1000 and the optical network terminal 100 is greater than the physical distance between the local information processing device 2000 and the optical network terminal 100 .
  • the connection between the local information processing device 2000 and the remote server 1000 is completed by the optical fiber 101 and the network cable 103 ; and the connection between the optical fiber 101 and the network cable 103 is completed by the optical module 200 and the optical network terminal 100 .
  • the optical module 200 includes an optical port and an electrical port, and the optical port is configured to be connected to the optical fiber 101, so that the optical module 200 and the optical fiber 101 establish a bidirectional optical signal connection; the electrical port is configured to be connected to the optical network terminal 100, so that The optical module 200 establishes a bidirectional electrical signal connection with the optical network terminal 100 .
  • the optical module 200 implements mutual conversion between optical signals and electrical signals, so that an information connection is established between the optical fiber 101 and the optical network terminal 100 . For example, the optical signal from the optical fiber 101 is converted into an electrical signal by the optical module 200 and then input to the optical network terminal 100 , and the electrical signal from the optical network terminal 100 is converted into an optical signal by the optical module 200 and input to the optical fiber 101 . Since the optical module 200 is a tool for realizing mutual conversion of photoelectric signals and does not have the function of processing data, the information does not change during the above photoelectric conversion process.
  • the optical network terminal 100 includes a substantially rectangular parallelepiped housing (housing), and an optical module interface 102 and a network cable interface 104 disposed on the housing.
  • the optical module interface 102 is configured to access the optical module 200, so that the optical network terminal 100 and the optical module 200 establish a bidirectional electrical signal connection;
  • the network cable interface 104 is configured to access the network cable 103, so that the optical network terminal 100 and the network cable 103 A two-way electrical signal connection is established.
  • a connection is established between the optical module 200 and the network cable 103 through the optical network terminal 100 .
  • the optical network terminal 100 transmits the electrical signal from the optical module 200 to the network cable 103, and transmits the electrical signal from the network cable 103 to the optical module 200, so the optical network terminal 100, as the host computer of the optical module 200, can monitor the optical module 200 jobs.
  • the host computer of the optical module 200 may also include an optical line terminal (Optical Line Terminal, OLT) and the like.
  • the remote server 1000 establishes a two-way signal transmission channel with the local information processing device 2000 through the optical fiber 101 , the optical module 200 , the optical network terminal 100 and the network cable 103 .
  • FIG. 2 is a structural diagram of an optical network terminal according to some embodiments.
  • the optical network terminal 100 also includes a circuit board 105 disposed in the casing, a cage 106 disposed on the surface of the circuit board 105, a radiator disposed on the cage 106, and an electrical connector disposed inside the cage 106 .
  • the electrical connection is configured to be connected to the electrical port of the optical module 200 ; the heat sink 107 has a raised structure such as a fin that increases the heat dissipation area.
  • the optical module 200 is inserted into the cage 106 of the optical network terminal 100 , and the optical module 200 is fixed by the cage 106 .
  • the heat generated by the optical module 200 is conducted to the cage 106 and then diffused through the radiator 107 .
  • the electrical port of the optical module 200 is connected to the electrical connector inside the cage 106 , so that the optical module 200 establishes a bidirectional electrical signal connection with the optical network terminal 100 .
  • the optical port of the optical module 200 is connected to the optical fiber 101 , so that the optical module 200 establishes a bidirectional optical signal connection with the optical fiber 101 .
  • Fig. 3 is a structural diagram of an optical module according to some embodiments
  • Fig. 4 is an exploded structural diagram of an optical module according to some embodiments.
  • the optical module 200 includes a housing, a circuit board 300 disposed in the housing, a silicon photonics chip 400 and a light source assembly 500 .
  • the casing includes an upper casing 201 and a lower casing 202.
  • the upper casing 201 is covered on the lower casing 202 to form the above-mentioned casing with two openings; the outer contour of the casing generally presents a square shape.
  • the lower shell 202 includes a bottom plate 2021 and two lower side plates 2022 located on both sides of the bottom plate 2021 and perpendicular to the bottom plate 2021; the upper shell 201 includes a cover plate 2011, and the cover plate 2011 covers Two lower side panels 2022 of the housing 202 to form the above housing.
  • the lower case 202 includes a bottom plate 2021 and two lower side plates 2022 located on both sides of the bottom plate 2021 and perpendicular to the bottom plate 2021;
  • the two upper side plates 2012 perpendicular to the cover plate 2011 are combined with the two lower side plates 2022 so as to cover the upper case 201 on the lower case 202 .
  • the direction of the line connecting the two openings 204 and 205 may be consistent with the length direction of the optical module 200 , or may not be consistent with the length direction of the optical module 200 .
  • the opening 204 is located at the end of the optical module 200 (the left end in FIG. 3 ), and the opening 205 is also located at the end of the optical module 200 (the right end in FIG. 3 ).
  • the opening 204 is located at the end of the optical module 200
  • the opening 205 is located at the side of the optical module 200 .
  • the opening 204 is an electrical port, and the golden finger 301 of the circuit board 300 extends from the electrical port 204, and is inserted into the upper computer (for example, the optical network terminal 100); the opening 205 is an optical port, which is configured to be connected to the external optical fiber 101, so that The external optical fiber 101 is connected to the silicon photonics chip 400 inside the optical module 200 .
  • the combination of the upper housing 201 and the lower housing 202 is used to facilitate the installation of components such as the circuit board 300, the silicon photonics chip 400 and the light source assembly 500 into the housing, and the upper housing 201 and the lower housing 202 control these devices. Form package protection.
  • components such as the circuit board 300 , the silicon photonics chip 400 , and the light source assembly 500 , it facilitates the deployment of positioning components, heat dissipation components, and electromagnetic shielding components of these components, and facilitates automatic production.
  • the upper shell 201 and the lower shell 202 are generally made of metal materials, which is beneficial to realize electromagnetic shielding and heat dissipation.
  • the optical module 200 also includes an unlocking component 203 located outside the housing, configured to realize the fixed connection between the optical module 200 and the host computer, or release the fixed connection between the optical module 200 and the host computer .
  • the unlocking part 203 is located on the outer side of the two lower side plates 2022 of the lower housing 202, and has a locking part matching with the upper computer cage (for example, the cage 106 of the optical network terminal 100).
  • the optical module 200 is inserted into the cage of the host computer, the optical module 200 is fixed in the cage of the host computer by the engaging part of the unlocking part 203; when the unlocking part 203 is pulled, the engaging part of the unlocking part 203 moves accordingly, thereby changing
  • the connection relationship between the engaging part and the host computer is to release the engagement relationship between the optical module 200 and the host computer, so that the optical module 200 can be pulled out from the cage of the host computer.
  • the circuit board 300 includes circuit traces, electronic components and chips, through which the electronic components and chips are connected together according to the circuit design, so as to realize functions such as power supply, electrical signal transmission and grounding.
  • the electronic components may include, for example, capacitors, resistors, transistors, and metal-oxide-semiconductor field-effect transistors (Metal-Oxide-Semiconductor Field-Effect Transistor, MOSFET).
  • the chip can include, for example, a Microcontroller Unit (MCU), a Limiting Amplifier (LA), a Clock and Data Recovery chip (CDR), a power management chip, and a Digital Signal Processing (DSP) chip. ) chip, transimpedance amplifier (Trans-Impedance Amplifier).
  • the circuit board 300 is generally a rigid circuit board. Due to its relatively hard material, the rigid circuit board can also realize the bearing function, such as the rigid circuit board can stably carry the above-mentioned electronic components and chips; the rigid circuit board can also be inserted into the upper computer cage 106 in the electrical connector.
  • the circuit board 300 also includes a gold finger 301 formed on the surface of its end, and the gold finger 301 is composed of a plurality of independent pins.
  • the circuit board 300 is inserted into the cage 106 , and is conductively connected with the electrical connector in the cage 106 by the gold finger 301 .
  • Gold fingers 301 can be set on only one side of the circuit board 300 (such as the upper surface shown in FIG. 4 ), or can be set on the upper and lower sides of the circuit board 300, so as to meet the occasions where the number of pins is large.
  • the golden finger 301 is configured to establish an electrical connection with a host computer to realize power supply, grounding, I2C signal transmission, data signal transmission, and the like.
  • flexible circuit boards are also used in some optical modules.
  • Flexible circuit boards are generally used in conjunction with rigid circuit boards as a supplement to rigid circuit boards.
  • the optical module of the silicon photonics structure also includes a silicon photonic chip 400 and a light source assembly 500 .
  • the light source assembly 500 can be a laser box, and a laser chip is packaged inside the laser box, and the laser chip emits light.
  • the light source assembly 500 is used to provide a laser beam to the silicon photonics chip 400 .
  • the silicon photonics chip 400 is optically connected to the light source assembly 500 .
  • the light emitted by the light source assembly 500 enters the silicon photonics chip 400 , and the silicon photonics chip 400 receives the light from the light source assembly 500 .
  • the light source assembly 500 provides light with a single wavelength, stable power, and no information to the silicon photonic chip 400, and the silicon photonic chip 400 modulates the light to load the data to be transmitted into the light to form an optical signal .
  • the silicon photonic chip 400 also receives an optical signal from outside the optical module, and converts the optical signal into a current signal to extract data from the optical signal. That is to say, both the modulation of the light emitted by the optical module 200 and the demodulation of the optical signal received by the optical module 200 are completed by the silicon optical chip 400 .
  • the circuit board 300 provides the silicon photonic chip 400 with an electrical signal from the host computer, and the silicon photonic chip 400 receives the light that does not carry information output by the light source assembly 500, and modulates the received light based on the above electrical signal
  • An optical signal is formed, and the optical signal is sent to the outside of the optical module 200, so that the electrical signal is converted into an optical signal.
  • the optical signal from the outside of the optical module 200 is converted into a current signal by the silicon optical chip 400, and the current signal is converted into a differential voltage signal by the transimpedance amplifier, and the differential voltage signal is output to the In the upper computer, the optical signal is converted into an electrical signal.
  • the silicon photonics chip 400 and the light source assembly 500 are disposed on the same substrate, and the substrate is a plate structure made of the same material.
  • the deformation of the substrate of the same material has the same impact on the silicon photonics chip 400 and the light source assembly 500 , and the change of the relative position between the silicon photonics chip 400 and the light source assembly 500 can be avoided. This embodiment does not limit the material of the substrate.
  • the expansion coefficient of the substrate material is close to the thermal expansion coefficient of the silicon photonic chip 400 and/or the light source assembly 500.
  • the main material of the silicon photonic chip 400 is silicon.
  • the light source assembly 500 can be made of Kovar alloy, and the substrate can be made of silicon or glass.
  • Kovar alloy also known as iron-nickel-cobalt alloy, or iron-nickel-cobalt glass sealing alloy, generally contains 29% nickel, 18% cobalt, and the rest is iron.
  • the thermal expansion coefficient of Kovar alloy is reduced by the addition of cobalt, which is similar to that of glass, and is suitable for matching and sealing with glass.
  • the silicon photonics chip 400 and the light source assembly 500 are usually disposed on the same side of the circuit board 300 . At this time, there are various positional relationships between the substrate and the circuit board 300 .
  • the circuit board 300 has a through hole through the upper and lower surfaces, the substrate is disposed in the through hole, and the silicon photonics chip 400 and/or the light source assembly 500 are disposed on the substrate.
  • the silicon photonics chip 400 and/or the light source assembly 500 can dissipate heat to the substrate, so that the substrate can simultaneously have the effect of supporting and dissipating heat.
  • the circuit board 300 is not provided with through holes, and the substrate is provided on the circuit board.
  • the substrate may be provided on the surface of the circuit board 300 or embedded in the circuit board 300.
  • the silicon photonic chip 400 and the light source assembly 500 are provided on the substrate surface.
  • the light output surface of the light source assembly 500 is the surface of the light source assembly 500 near the silicon photonic chip 400
  • the light incident surface of the silicon photonic chip 400 is the surface of the silicon photonic chip 400 near the light source assembly 500 .
  • the optical module 200 also includes a first internal optical fiber ribbon 600, a second internal optical fiber ribbon 700, and an optical fiber interface 800.
  • Each of the first internal optical fiber ribbon 600 and the second internal optical fiber ribbon 700 is formed by a plurality of internal optical fibers arranged in parallel and cured by ultraviolet light. thin flat strips.
  • the first inner fiber optic ribbon 600 is a launch fiber optic ribbon and the second inner fiber optic ribbon 700 is a receive fiber optic ribbon.
  • One end of the first internal optical fiber ribbon 600 is connected to the silicon photonics chip 400 , and the other end is connected to the optical fiber interface 800 .
  • One end of the second internal optical fiber ribbon 700 is connected to the silicon photonics chip 400 , and the other end is connected to the optical fiber interface 800 .
  • the optical fiber interface 800 is connected with the external optical fiber 101 . It can be seen that the optical connection between the silicon photonics chip 400 and the optical fiber interface 800 is realized through the first internal optical fiber ribbon 600 and the second internal optical fiber ribbon 700, and the optical fiber interface 800 is optically connected to the external optical fiber 101 of the optical module.
  • the light source assembly 500 transmits the light that does not carry information to the silicon photonics chip 400, and the silicon photonics chip 400 modulates the light that does not carry information, that is, loads data into the light that does not carry information, and then modulates the light that does not carry information into
  • the light (optical signal) carrying information, the light (optical signal) carrying information is transmitted to the optical fiber interface 800 through the first internal optical fiber ribbon 600, and then transmitted to the external optical fiber 101 through the optical fiber interface 800, so that the light carrying information ( Optical signal) is transmitted to the external optical fiber 101 to convert the electrical signal into an optical signal.
  • the optical signal from the external optical fiber 101 is transmitted to the silicon optical chip 400 through the optical fiber interface 800 and the second internal optical fiber ribbon 700.
  • the silicon optical chip 400 demodulates the optical signal into an electrical signal, and outputs it to the host computer through the circuit board 300. Realize the conversion of optical signals into electrical signals.
  • multiple laser chips are usually mechanically welded on the same substrate, and the electrodes of the laser chips are connected to the electrodes of the substrate through gold wires to realize the integration of light sources at the substrate level. Since the laser chip is fixed on the substrate by mechanical operation, the precision of industrial operation is low, and the distance between adjacent laser chips is maintained at the order of mm, so the integration degree of the light source in this way is low.
  • the light source assembly 500 in some embodiments of the present disclosure includes a laser chip and multiple lasers, and the multiple lasers are arranged on the laser chip.
  • Some embodiments of the present disclosure take a laser chip with a size of 1*4mm as an example.
  • multiple lasers are arranged on a single laser chip to realize chip-level light source integration, thereby improving the light source integration degree.
  • multiple lasers on the single laser chip output light beams of different wavelengths to realize wavelength division multiplexing, improve bandwidth usage efficiency, and thereby improve information transmission efficiency and speed.
  • a laser array is provided on the surface of the laser chip, and the laser array includes at least two lasers, each laser includes a gain region, a grating region, and a Fabry-Perot resonator connected to the grating region, and the gain region is Configured to emit light when excited by the gain energizing signal, the grating region is configured to modulate the wavelength of the light when excited by the Bragg reflective grating energizing signal.
  • the Fabry Perot resonant cavity tailed by the grating region is configured to output the optical signal transmitted by the grating region.
  • FIG. 5 is a schematic diagram of the structure and materials along the growth direction outside the gain region (left) and the grating region (right) of the laser according to some embodiments;
  • FIG. 6 is the optical waveguide structure in the gain region and the grating region of the laser according to some embodiments Sectional view.
  • the grating region includes a grating layer, a waveguide layer and electrodes stacked in sequence. It can be understood that the grating layer can also be called a grating, and the waveguide layer can also be called an optical waveguide.
  • the grating layer in the grating area may be a distributed Bragg reflection grating, and an InGaAsP material with a photoluminescence peak of 1150 nm and a thickness of 450 A O .
  • the waveguide layer in the grating area is made of InGaAsP material with a photoluminescence peak of 1170nm and a thickness of 3100A O , and the width of the waveguide layer in the grating area is controlled at about 1.5 ⁇ m to achieve a single-mode waveguide.
  • the gain region includes waveguide layers and electrodes stacked in sequence. It can be understood that the waveguide layer can also be called an optical waveguide.
  • the electrode of the gain area is electrically connected with an external current source, and the gain area emits light under the excitation of the gain power signal, and the light is transmitted to the grating area through the optical waveguide of the gain area, and the optical waveguide of the grating area is connected to the grating area.
  • the Fabry Perot resonator is transmitted to the light entrance of the silicon photonics chip.
  • the electrodes of one of the laser grating regions in the laser array are electrically connected to another external current source, and the output of first light beams with different wavelengths is achieved by changing the current magnitude of the Bragg reflection grating energizing signal injected into the grating region.
  • the extension direction of the optical waveguide of the grating region of the other laser in the laser array is inclined relative to the extension direction of the optical waveguide of the gain region to form an inclination angle, and outputting second beams of different wavelengths is achieved by changing the inclination angle.
  • the wavelength of the second light beam is greater than the wavelength of the first light beam.
  • At least two lasers output at least two beams with different wavelengths by changing the magnitude of the current injected into the grating region, and changing the inclination angle between the extending direction of the optical waveguide in the gain region and the extending direction of the optical waveguide in the grating region, so that wave Multiplexing, improve the efficiency of bandwidth usage, and then improve the efficiency and speed of information transmission.
  • the present disclosure can realize the integration of at least two lasers at the laser chip level, and realize the precise modulation of wavelength through carrier (current carrier) injection change and inclined waveguide design.
  • Figure 7 is a schematic diagram of the distribution of lasers arranged on the laser chip according to some embodiments; Figure 7 shows that the surface of the laser chip is respectively provided with a first signal laser, a first photodetector, a first laser, a A laser, a third laser, a fourth laser, a fifth laser, a sixth laser, a seventh laser, an eighth laser, a ninth laser, a tenth laser, a second photodetector and a second signal laser.
  • the first signal laser, the first photodetector, the second photodetector and the second signal laser are used for active alignment of 10 lasers.
  • the optical devices labeled 11, 21, 20, and 10 are respectively the first signal laser, the first photodetector, the second photodetector and the second signal laser; the optical devices labeled 0-9 are respectively 10
  • the lasers of channels, the lasers of channel 0, channel 1, channel 2, channel 3, channel 4, channel 5, channel 6, channel 7, channel 8 and channel 9 in Fig. 7 Corresponding to the first laser, the second laser, the third laser, the fourth laser, the fifth laser and the sixth laser, the seventh laser, the eighth laser, the ninth laser and the tenth laser.
  • 10 lasers, 2 signal lasers and 2 photodetectors are arranged on the surface of the laser chip, and the anodes of the 10 lasers are all connected to the surface of the laser chip through their surfaces, so as to be electrically connected to an external current source.
  • Each laser is connected to two electrical signals, which are the gain power-on signal and the Bragg reflection grating power-on signal.
  • the grating area of the laser is the laser.
  • each laser is 1 channel, and there are 10 channels in total.
  • the interval between adjacent channels should be 200 GHz.
  • the distance between adjacent lasers in the 10-channel laser is 250 ⁇ m. There are two factors that affect the distance between lasers. One factor is the requirements of the receiving end of the silicon photonic chip that matches the laser; the other factor is the size of the laser spot. . The distance of 250 ⁇ m between adjacent lasers is an order of magnitude that cannot be achieved by the traditional solution of multiple laser chips arranged on a substrate. In some embodiments of the present disclosure, taking the 1280nm wavelength band as an example, multiple lasers are arranged on a single laser chip to realize simultaneous emission of light beams with different wavelengths.
  • the first laser, the second laser, the third laser, the fourth laser, the fifth laser and the sixth laser are divided into the first group of lasers, and the seventh laser, the eighth laser, the ninth laser
  • the laser and the tenth laser are divided into the second group of lasers; the first group of lasers optimizes the material of the optical waveguide in the grating area, and at the same time cooperates with the change of injected carriers into the optical waveguide in the grating area, to achieve a short wavelength relative to the target wavelength band (1280nm).
  • the wavelength modulation range of the Bragg grating tailed with the Fabry-Perot resonator itself is increased; the second group of lasers adopts an oblique waveguide design, and the direction of the long wavelength (1280nm-1285nm) relative to the target band (1280nm) Increase the wavelength modulation range; this eventually enables each laser on the laser chip to achieve a wavelength modulation range of 10nm.
  • a temperature adjustment device is provided inside the grating area of the laser, such as a heating device, and the wavelength can be tuned by changing the temperature of the grating area.
  • This tuning method is called thermal tuning; the grating area of the laser There are electrodes inside, and the wavelength is tuned by inputting currents of different sizes to the grating area through the electrodes.
  • This tuning method is called electrical tuning; There is an inclination angle between the extension direction of the optical waveguide in the gain region, and the wavelength can be tuned by changing the inclination angle.
  • This tuning method is called mechanical tuning.
  • the gain region of the laser generates photons due to the excitation of the injection current and is amplified.
  • the distributed Bragg reflection grating in the grating region selects the frequency of the amplified light wave, and the specific wavelength is in the tailed Fabry
  • the Perot resonant cavity is reflected and oscillated back and forth, so as to realize the output of laser light.
  • each laser in the first group of lasers outputs first light beams with different wavelengths by changing the current magnitude of the Bragg reflection grating energizing signal injected into each grating region; the optical waveguide extension direction of each grating region of each laser in the second group of lasers The extension direction of the optical waveguide is inclined relative to the gain region, and second light beams with different wavelengths are output by changing the size of the inclination angle.
  • the gratings in the grating areas of the first laser, the second laser, the third laser, the fourth laser, the fifth laser and the sixth laser in the first group of lasers are all distributed Bragg reflection gratings, and the entire laser chip is only subjected to a holographic exposure A grating is formed so that the period of the grating is fixed.
  • a distributed Bragg reflection grating tailed with a Fabry-Perot resonator is a simple and practical solution.
  • a distributed Bragg reflection grating in the grating area is used to tail the Fabry-Perot resonant cavity, so as to avoid the random distribution of laser peaks affected by the phase in the filter channel band, and realize precise control of the wavelength.
  • electrical tuning for wavelength adjustment has a larger wavelength adjustment range and faster wavelength switching speed, which can better meet the needs of optical fiber communication for lasers.
  • electrical tuning is achieved by injecting carriers into the grating region to change the refractive index of the material in the grating region.
  • the refractive index of the optical waveguide in the grating area can be continuously changed, thereby realizing the continuous change of the grating passband, and selecting the Fabryper corresponding to the target wavelength. Luo mode.
  • the free carrier plasma effect causes the refractive index to change, and the projected spectrum of the grating will shift to the short wavelength direction at this time.
  • a Bragg reflection grating power-on signal is applied to the grating area to reduce the internal refractive index of the laser, thereby shortening the effective wavelength and moving to a relatively short wavelength (1275nm-1280nm) direction relative to 1280nm to achieve a relative target wavelength.
  • the first group of lasers increases the distributed Bragg frequency in the direction of short wavelength (1275nm-1280nm) by cooperating with the optical waveguide in the grating area and the change of the current magnitude of the distributed Bragg reflection grating power signal.
  • the reflective grating is connected to the wavelength modulation range of the Fabry-Perot cavity itself; the wavelength modulation can cover the wavelength variation requirements of 6-way lasers from 0 to 5.
  • the carrier injection into the optical waveguide in the grating region leads to a change in the refractive index of the waveguide, and ultimately a wavelength change.
  • Fig. 8 is a specific design schematic diagram of the gain region (left) and the grating region (right) of the laser chip according to some embodiments;
  • the extension direction of the waveguide is inclined, thereby increasing the grating period experienced by the optical waveguide in the grating area, making the effective wavelength larger, and realizing the wavelength modulation of 5nm in the long wavelength direction relative to the target wavelength in the direction of the long wavelength (1280nm-1285nm) relative to 1280nm scope.
  • the gratings of the seventh laser, the eighth laser, the ninth laser and the tenth laser in the second group of lasers are also distributed Bragg reflection gratings, and the sixth laser, the seventh laser, the ninth laser and the tenth laser
  • the extension direction of the optical waveguide in the grating area is inclined relative to the extension direction of the optical waveguide in the gain area, that is, there is an inclination angle between the extension direction of the optical waveguide in the grating area and the extension direction of the optical waveguide in the gain area, by changing the inclination angle
  • the size outputs a second light beam of a different wavelength.
  • the magnitude of the output wavelength of the laser is proportional to the grating period experienced by the optical waveguide in the grating area.
  • Some embodiments of the present disclosure set the optical waveguide in the grating area as an oblique waveguide relative to the extending direction of the optical waveguide in the gain area to increase the grating area.
  • the grating period experienced by the optical waveguide makes the wavelength of the laser output light larger than that of 1280nm, and achieves a wavelength modulation range of 5nm in the long wavelength direction relative to the target wavelength in the direction of the long wavelength (1280nm-1285nm) relative to 1280nm.
  • the inclination angles between the extending direction of the optical waveguide in the grating region of the seventh laser, the eighth laser, the ninth laser, and the tenth laser and the extending direction of the optical waveguide in the gain region are 2.57 degrees and 3.63 degrees respectively. degrees, 4.44 degrees and 5.15 degrees, the equivalent grating period changes are 1947.09A, 1949.05A, 1951.01A, 1953.03A, and the modulation range of wavelength from 1280nm to 1285nm can be realized.
  • the first group of 6 laser channels optimizes the material of the optical waveguide in the grating area, and at the same time cooperates with the change of injected carriers into the optical waveguide in the grating area.
  • the short-wavelength direction of the target band is modulated; the second group of 4 laser channels is modulated in the long-wavelength direction relative to the target band by adopting an oblique waveguide structure.
  • Fig. 9 is a schematic diagram showing the relationship between the inclination angle of the optical waveguide extension direction of the grating region relative to the optical waveguide extension direction of the gain region and the wavelength change of the laser according to some embodiments, and the labels in Fig. 9 are 1, 2, 3, 4 and 5
  • the change lines respectively correspond to inclination angles with angles of 0 degree, 2.57 degrees, 3.63 degrees, 4.44 degrees and 5.15 degrees.
  • the inclination angles between the extending direction of the optical waveguide of the grating region of the seventh laser, the eighth laser, the ninth laser and the tenth laser and the extending direction of the optical waveguide of the gain region are 2.57 degrees, 3.63 degrees, At 4.44 degrees and 5.15 degrees, the wavelength range from 1280 to 1285nm can be realized.
  • the optical waveguide in the grating area is inclined relative to the optical waveguide in the gain area, although the equivalent grating period can be increased, it will cause the loss of the optical waveguide in the grating area to increase, the starting current of the device will increase, and the power will decrease. Since this application has a lower limit requirement for power, the tilt angle cannot be increased all the time.
  • the tilt angles of channels 6, 7, 8, and 9 are designed to be 2.57 degrees, 3.63 degrees, 4.44 degrees, and 5.15 degrees, and the equivalent grating period changes are 1947.09A, 1949.05A, 1951.01A, 1953.03A , can achieve wavelength changes from 1280nm to 1285nm.
  • the first laser, the second laser, the third laser, the fourth laser, the fifth laser, the sixth laser, the seventh laser, the eighth laser, the ninth laser, and the tenth laser The optical waveguide and the grating area of the 10 lasers The relationship between the angle between the optical waveguides in the gain area, the injection current parameters in the grating area, and the output wavelength is shown in Table 1.
  • Table 1 The relationship between the angle between the optical waveguide in the grating area and the optical waveguide in the gain area of the laser, the injection current parameter and the output wavelength
  • the distance between the extending direction of the optical waveguide in the grating region of the first laser, the second laser, the third laser, the fourth laser, the fifth laser and the sixth laser and the extending direction of the optical waveguide in the gain region The included angles are all 0 degrees, and the extension direction of the optical waveguide in the grating area and the extension direction of the optical waveguide in the gain area are on the same horizontal line, that is, the first laser, the second laser, the third laser, the fourth laser, the fifth laser and The sixth laser is not set as an inclined optical waveguide, but modulates beams of different wavelengths by changing the magnitude of the Bragg reflection energization signal applied to the grating area, the first laser, the second laser, the third laser, the fourth laser,
  • the currents of the fifth laser and the sixth laser injected into the optical waveguide of the grating area are 40mA, 25mA, 9.5mA, 5.4mA, 2mA, 0.3mA, and the corresponding output wavelengths are 1274.96nm
  • the included angles between the extension direction of the optical waveguide in the grating area of the seventh laser, the eighth laser, the ninth laser, and the tenth laser and the extension direction of the optical waveguide in the gain area are 2.57 degrees, 3.63 degrees, 4.44 degrees and 5.15 degrees in sequence, That is, the seventh laser, the eighth laser, the ninth laser, and the tenth laser are all set as oblique waveguides, and the corresponding output wavelengths are 1281.52nm, 1282.62nm, 1283.76nm, and 1284.92nm; the increase in the direction of long wavelength (1280nm-1285nm) wavelength modulation range.
  • each laser on the laser chip can finally realize a wavelength modulation range of 10nm.
  • Fig. 10 is a schematic diagram of specific wavelength modulation of a 10-channel laser of a light source assembly according to some embodiments. As shown in Fig. The wavelength changes corresponding to the laser, the second laser, the third laser, the fourth laser, the fifth laser and the sixth laser, the seventh laser, the eighth laser, the ninth laser and the tenth laser, that is, channel 0 and channel 1 , Channel 2, Channel 3, Channel 4, Channel 5, Channel 6, Channel 7, Channel 8, and Channel 9 corresponding to the wavelength change of the laser.
  • At least two lasers are arranged on the surface of the laser chip, one of the lasers includes a gain region and a grating region, and the first output of different wavelengths is output by changing the magnitude of the current injected into the grating region.
  • the other laser includes a gain region and a grating region, and the extension direction of the optical waveguide in the grating region is relative to the extension direction of the optical waveguide in the gain region Tilting and forming a tilt angle, by changing the size of the tilt angle to output second light beams with different wavelengths, and by adopting a slope waveguide design, the wavelength modulation range can be increased in the long wavelength direction relative to the target wavelength.
  • the present invention can realize the integration of lasers at the level of laser chips, realize the simultaneous operation of multiple lasers on a single chip, improve the integration density of chips, and realize precise modulation of wavelength through carrier injection changes and inclined waveguides.
  • the light source assembly in some embodiments of the present disclosure can be used as a light source of an optical module with a silicon optical structure, and the optical signal emitted from the Fabry Perot resonant cavity tailed by the grating region of the light source assembly is coupled to the optical entrance of the silicon optical chip.
  • the optical module provided by some embodiments of the present disclosure realizes the integration of multiple lasers at the chip level, realizes simultaneous output of beams of different wavelengths by multiple lasers on the same laser chip, improves the integration of light sources and realizes precise modulation of wavelengths.

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Abstract

Some embodiments of the present disclosure provide a light source assembly and an optical module. The light source assembly and the optical module comprise a laser chip and a plurality of lasers. The plurality of lasers are configured on a surface of the laser chip. Each laser comprises a gain area and a grating area. The gain area and the grating area are each provided with an optical waveguide. The plurality of lasers comprise a first set of lasers and a second set of lasers. The grating area of each laser in the first set of lasers is configured to receive an external current to output a first light beam having a corresponding wavelength. An angle of inclination is present between the optical waveguide of the grating area and the optical waveguide of the gain area of each laser in the second set of lasers, so as to output a second light beam having a corresponding wavelength. The wavelength of the second light beam is different from the wavelength of the first light beam.

Description

一种光源组件及光模块A light source component and an optical module
本申请要求申请号为202122905995.4、2021年11月24日提交的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application with application number 202122905995.4, filed on November 24, 2021, the entire contents of which are incorporated in this application by reference.
技术领域technical field
本公开涉及光通信技术领域,尤其涉及一种光源组件及光模块。The present disclosure relates to the technical field of optical communication, in particular to a light source component and an optical module.
背景技术Background technique
由硅光芯片实现光电转换功能已经成为高速光模块目前采用的一种主流方案。由于硅光芯片采用的硅材料不是理想的激光芯片发光材料,不能在硅光芯片制作过程集成发光单元,所以硅光芯片需要由外部光源提供光。在当代高速硅光芯片设计中,提高光源的集成程度是主要趋势。Realizing the photoelectric conversion function by silicon photonics chips has become a mainstream solution currently adopted by high-speed optical modules. Since the silicon material used in the silicon photonics chip is not an ideal light-emitting material for laser chips, the light-emitting unit cannot be integrated in the silicon photonics chip manufacturing process, so the silicon photonics chip needs to be provided by an external light source. In the design of contemporary high-speed silicon photonics chips, improving the integration of light sources is the main trend.
发明内容Contents of the invention
一方面,本公开一些实施例提供一种光源组件。所述光源组件包括激光芯片和多个激光器。所述多个激光器设置在所述激光芯片的表面,每个激光器均包括增益区和光栅区,所述增益区和所述光栅区均具有光波导。所述多个激光器包括第一组激光器和第二组激光器。所述第一组激光器中每个激光器的光栅区被配置为接收外部电流以输出对应波长的第一光束,所述第二组激光器中每个激光器的光栅区的光波导与增益区的光波导之间具有倾斜角,以输出对应波长的第二光束。所述第一光束和所述第二光束的波长不同。In one aspect, some embodiments of the present disclosure provide a light source assembly. The light source component includes a laser chip and multiple lasers. The multiple lasers are arranged on the surface of the laser chip, and each laser includes a gain region and a grating region, and both the gain region and the grating region have an optical waveguide. The plurality of lasers includes a first set of lasers and a second set of lasers. The grating region of each laser in the first group of lasers is configured to receive an external current to output a first beam of corresponding wavelength, the optical waveguide of the grating region of each laser in the second group of lasers and the optical waveguide of the gain region There is an inclination angle between them, so as to output the second light beam corresponding to the wavelength. The first light beam and the second light beam have different wavelengths.
另一方面,本公开一些实施例提供一种光模块。所述光模块包括电路板、如上所述的光源组件和硅光芯片。所述光源组件与所述电路板连接。所述硅光芯片与所述电路板电连接,且与所述光源组件光连接,被配置为接收所述光源组件发出的光束。On the other hand, some embodiments of the present disclosure provide an optical module. The optical module includes a circuit board, the above-mentioned light source assembly and a silicon photonics chip. The light source assembly is connected to the circuit board. The silicon photonic chip is electrically connected to the circuit board and optically connected to the light source component, and is configured to receive the light beam emitted by the light source component.
附图说明Description of drawings
为了更清楚地说明本公开中的技术方案,下面将对本公开一些实施例中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本公开的一些实施例的附图,对于本领域普通技术人员来讲,还可以根据这些附图获得其他的附图。此外,以下描述中的附图可以视作示意图,并非对本公开实施例所涉及的产品的实际尺寸、方法的实际流程、信号的实际时序等的限制。In order to illustrate the technical solutions in the present disclosure more clearly, the following will briefly introduce the accompanying drawings required in some embodiments of the present disclosure. Obviously, the accompanying drawings in the following description are only appendices to some embodiments of the present disclosure. Figures, for those of ordinary skill in the art, other drawings can also be obtained based on these drawings. In addition, the drawings in the following description can be regarded as schematic diagrams, and are not limitations on the actual size of the product involved in the embodiments of the present disclosure, the actual process of the method, the actual timing of signals, and the like.
图1为根据一些实施例的一种光通信系统的连接关系图;Fig. 1 is a connection diagram of an optical communication system according to some embodiments;
图2为根据一些实施例的一种光网络终端的结构图;Fig. 2 is a structural diagram of an optical network terminal according to some embodiments;
图3为根据一些实施例的一种光模块的结构图;Fig. 3 is a structural diagram of an optical module according to some embodiments;
图4为根据一些实施例的一种光模块的分解图;Figure 4 is an exploded view of an optical module according to some embodiments;
图5为根据一些实施例的激光器的增益区(左)与光栅区(右)外沿生长方向结构与材料示意图;5 is a schematic diagram of the structure and materials along the growth direction outside the gain region (left) and the grating region (right) of a laser according to some embodiments;
图6为根据一些实施例的激光器的增益区光波导及光栅区光波导结构的截面图;6 is a cross-sectional view of the optical waveguide in the gain region and the optical waveguide in the grating region of the laser according to some embodiments;
图7为根据一些实施例的激光芯片上设置各激光器的分布示意图;7 is a schematic diagram of the distribution of lasers arranged on a laser chip according to some embodiments;
图8为根据一些实施例的激光器的增益区和光栅区的具体设计示意图;FIG. 8 is a schematic diagram of a specific design of a gain region and a grating region of a laser according to some embodiments;
图9为根据一些实施例的激光器的光栅区的光波导延伸方向相对于增益区的光波导延伸方向的倾斜角度与波长变化关系示意图;9 is a schematic diagram showing the relationship between the inclination angle of the optical waveguide extension direction of the grating region and the wavelength variation relative to the optical waveguide extension direction of the gain region according to some embodiments;
图10为根据一些实施例的光源组件的10通道激光器的波长示意图。10 is a schematic diagram of wavelengths for a 10-channel laser of a light source assembly according to some embodiments.
具体实施方式Detailed ways
下面将结合附图,对本公开一些实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本公开一部分实施例,而不是全部的实施例。基于本公开所提供的实施例,本领域普通技术人员所获得的所有其他实施例,都属于本公开保护的范围。The technical solutions in some embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are only some of the embodiments of the present disclosure, not all of them. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments provided in the present disclosure belong to the protection scope of the present disclosure.
除非上下文另有要求,否则,在整个说明书和权利要求书中,术语“包括(comprise)”及其其他形式例如第三人称单数形式“包括(comprises)”和现在分词形式“包括(comprising)”被解释为开放、包含的意思,即为“包含,但不限于”。在说明书的描述中,术语“一个实施例(one embodiment)”、“一些实施例(some embodiments)”、“示例性实施例(exemplary embodiments)”、“示例(example)”、“特定示例(specific example)”或“一些示例(some examples)”等旨在表明与该实施例或示例相关的特定特征、结构、材料或特性包括在本公开的至少一个实施例或示例中。上述术语的示意性表示不一定是指同一实施例或示例。此外,所述的特定特征、结构、材料或特点可以以任何适当方式包括在任何一个或多个实施例或示例中。Throughout the specification and claims, unless the context requires otherwise, the term "comprise" and other forms such as the third person singular "comprises" and the present participle "comprising" are used Interpreted as the meaning of openness and inclusion, that is, "including, but not limited to". In the description of the specification, the terms "one embodiment", "some embodiments", "exemplary embodiments", "example", "specific examples" example)" or "some examples (some examples)" etc. are intended to indicate that specific features, structures, materials or characteristics related to the embodiment or examples are included in at least one embodiment or example of the present disclosure. Schematic representations of the above terms are not necessarily referring to the same embodiment or example. Furthermore, the particular features, structures, materials or characteristics described may be included in any suitable manner in any one or more embodiments or examples.
以下,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本公开实施例的描述中,除非另有说明,“多个”的含义是两个或两个以上。Hereinafter, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the embodiments of the present disclosure, unless otherwise specified, "plurality" means two or more.
在描述一些实施例时,使用了“耦接”和“连接”及其衍伸的表达。术语“连接”应做广义理解,例如,“连接”可以是固定连接,也可以是可拆卸连接,或成一体;可以是直接连接,也可以通过中间媒介间接相连。又如,描述一些实施例时可能使用了术语“耦接”以表明两个或两个以上部件有直 接物理接触或电接触。然而,术语“耦接”或“通信耦合(communicatively coupled)”也可能指两个或两个以上部件彼此间并无直接接触,但仍彼此协作或相互作用。这里所公开的实施例并不必然限制于本文内容。In describing some embodiments, the expressions "coupled" and "connected" and their derivatives are used. The term "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral body; it can be a direct connection or an indirect connection through an intermediary. As another example, the term "coupled" may be used in describing some embodiments to indicate that two or more elements are in direct physical or electrical contact. However, the terms "coupled" or "communicatively coupled" may also mean that two or more elements are not in direct contact with each other, but yet still co-operate or interact with each other. The embodiments disclosed herein are not necessarily limited by the context herein.
“A、B和C中的至少一个”与“A、B或C中的至少一个”具有相同含义,均包括以下A、B和C的组合:仅A,仅B,仅C,A和B的组合,A和C的组合,B和C的组合,及A、B和C的组合。"At least one of A, B and C" has the same meaning as "at least one of A, B or C" and both include the following combinations of A, B and C: A only, B only, C only, A and B A combination of A and C, a combination of B and C, and a combination of A, B and C.
“A和/或B”,包括以下三种组合:仅A,仅B,及A和B的组合。"A and/or B" includes the following three combinations: A only, B only, and a combination of A and B.
本文中“适用于”或“被配置为”的使用意味着开放和包容性的语言,其不排除适用于或被配置为执行额外任务或步骤的设备。The use of "suitable for" or "configured to" herein means open and inclusive language that does not exclude devices that are suitable for or configured to perform additional tasks or steps.
如本文所使用的那样,“约”、“大致”或“近似”包括所阐述的值以及处于特定值的可接受偏差范围内的平均值,其中所述可接受偏差范围如由本领域普通技术人员考虑到正在讨论的测量以及与特定量的测量相关的误差(即,测量系统的局限性)所确定。As used herein, "about", "approximately" or "approximately" includes the stated value as well as the average within the acceptable deviation range of the specified value, wherein the acceptable deviation range is as determined by one of ordinary skill in the art. Determined taking into account the measurement in question and the errors associated with the measurement of a particular quantity (ie, limitations of the measurement system).
本文参照作为理想化示例性附图的剖视图和/或平面图描述了示例性实施方式。在附图中,为了清楚,放大了层和区域的厚度。因此,可设想到由于例如制造技术和/或公差引起的相对于附图的形状的变动。因此,示例性实施方式不应解释为局限于本文示出的区域的形状,而是包括因例如制造而引起的形状偏差。例如,示为矩形的蚀刻区域通常将具有弯曲的特征。因此,附图中所示的区域本质上是示意性的,且它们的形状并非旨在示出设备的区域的实际形状,并且并非旨在限制示例性实施方式的范围。Exemplary embodiments are described herein with reference to cross-sectional and/or plan views that are idealized exemplary drawings. In the drawings, the thickness of layers and regions are exaggerated for clarity. Accordingly, variations in shape from the drawings as a result, for example, of manufacturing techniques and/or tolerances are contemplated. Thus, example embodiments should not be construed as limited to the shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, an etched region illustrated as a rectangle will, typically, have curved features. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of example embodiments.
光通信系统中,使用光信号携带待传输的信息,并使携带有信息的光信号通过光纤或光波导等信息传输设备传输至计算机等信息处理设备,以完成信息的传输。由于光通过光纤或光波导传输时具有无源传输特性,因此可以实现低成本、低损耗的信息传输。此外,光纤或光波导等信息传输设备传输的信号是光信号,而计算机等信息处理设备能够识别和处理的信号是电信号,因此为了在光纤或光波导等信息传输设备与计算机等信息处理设备之间建立信息连接,需要实现电信号与光信号的相互转换。In an optical communication system, optical signals are used to carry information to be transmitted, and the optical signals carrying information are transmitted to information processing equipment such as computers through optical fibers or optical waveguides to complete information transmission. Due to the passive transmission characteristics of light when transmitted through optical fibers or optical waveguides, low-cost, low-loss information transmission can be achieved. In addition, the signals transmitted by information transmission equipment such as optical fibers or optical waveguides are optical signals, while the signals that can be recognized and processed by information processing equipment such as computers are electrical signals. To establish an information connection between them, it is necessary to realize the mutual conversion of electrical signals and optical signals.
光模块在光纤通信技术领域中实现上述光信号与电信号的相互转换功能。光模块包括光口和电口,光模块通过光口实现与光纤或光波导等信息传输设备的光通信,通过电口实现与光网络终端(例如,光猫)之间的电连接,电连接主要用于供电、I2C信号传输、数据信息传输以及接地等;光网络终端通过网线或无线保真技术(Wi-Fi)将电信号传输给计算机等信息处理设备。The optical module realizes the mutual conversion function of the above-mentioned optical signal and electrical signal in the technical field of optical fiber communication. The optical module includes an optical port and an electrical port. The optical module realizes optical communication with information transmission equipment such as optical fiber or optical waveguide through the optical port, and realizes the electrical connection with the optical network terminal (such as an optical modem) through the electrical port. It is mainly used for power supply, I2C signal transmission, data information transmission and grounding, etc.; the optical network terminal transmits electrical signals to information processing equipment such as computers through network cables or wireless fidelity technology (Wi-Fi).
图1为根据一些实施例的一种光通信系统的连接关系图。如图1所示, 光通信系统的包括远端服务器1000、本地信息处理设备2000、光网络终端100、光模块200、光纤101及网线103。Fig. 1 is a connection diagram of an optical communication system according to some embodiments. As shown in FIG. 1 , the optical communication system includes a remote server 1000 , a local information processing device 2000 , an optical network terminal 100 , an optical module 200 , an optical fiber 101 and a network cable 103 .
光纤101的一端连接远端服务器1000,另一端通过光模块200与光网络终端100连接。光纤本身可支持远距离信号传输,例如数千米(6千米至8千米)的信号传输,在此基础上如果使用中继器,则理论上可以实现无限距离传输。因此在通常的光通信系统中,远端服务器1000与光网络终端100之间的距离通常可达到数千米、数十千米或数百千米。One end of the optical fiber 101 is connected to the remote server 1000 , and the other end is connected to the optical network terminal 100 through the optical module 200 . Optical fiber itself can support long-distance signal transmission, such as signal transmission of several kilometers (6 kilometers to 8 kilometers). On this basis, if repeaters are used, theoretically unlimited distance transmission can be achieved. Therefore, in a common optical communication system, the distance between the remote server 1000 and the optical network terminal 100 can usually reach thousands of kilometers, tens of kilometers or hundreds of kilometers.
网线103的一端连接本地信息处理设备2000,另一端连接光网络终端100。本地信息处理设备2000可以为以下设备中的任一种或几种:路由器、交换机、计算机、手机、平板电脑、电视机等。One end of the network cable 103 is connected to the local information processing device 2000 , and the other end is connected to the optical network terminal 100 . The local information processing device 2000 may be any one or more of the following devices: routers, switches, computers, mobile phones, tablet computers, televisions, and so on.
远端服务器1000与光网络终端100之间的物理距离大于本地信息处理设备2000与光网络终端100之间的物理距离。本地信息处理设备2000与远端服务器1000之间的连接由光纤101与网线103完成;而光纤101与网线103之间的连接由光模块200和光网络终端100完成。The physical distance between the remote server 1000 and the optical network terminal 100 is greater than the physical distance between the local information processing device 2000 and the optical network terminal 100 . The connection between the local information processing device 2000 and the remote server 1000 is completed by the optical fiber 101 and the network cable 103 ; and the connection between the optical fiber 101 and the network cable 103 is completed by the optical module 200 and the optical network terminal 100 .
光模块200包括光口和电口,光口被配置为接入光纤101,从而使得光模块200与光纤101建立双向的光信号连接;电口被配置为接入光网络终端100中,从而使得光模块200与光网络终端100建立双向的电信号连接。光模块200实现光信号与电信号的相互转换,从而使得光纤101与光网络终端100之间建立信息连接。示例地,来自光纤101的光信号由光模块200转换为电信号后输入至光网络终端100中,来自光网络终端100的电信号由光模块200转换为光信号输入至光纤101中。由于光模块200是实现光电信号相互转换的工具,不具有处理数据的功能,在上述光电转换过程中,信息并未发生变化。The optical module 200 includes an optical port and an electrical port, and the optical port is configured to be connected to the optical fiber 101, so that the optical module 200 and the optical fiber 101 establish a bidirectional optical signal connection; the electrical port is configured to be connected to the optical network terminal 100, so that The optical module 200 establishes a bidirectional electrical signal connection with the optical network terminal 100 . The optical module 200 implements mutual conversion between optical signals and electrical signals, so that an information connection is established between the optical fiber 101 and the optical network terminal 100 . For example, the optical signal from the optical fiber 101 is converted into an electrical signal by the optical module 200 and then input to the optical network terminal 100 , and the electrical signal from the optical network terminal 100 is converted into an optical signal by the optical module 200 and input to the optical fiber 101 . Since the optical module 200 is a tool for realizing mutual conversion of photoelectric signals and does not have the function of processing data, the information does not change during the above photoelectric conversion process.
光网络终端100包括大致呈长方体的壳体(housing),以及设置在壳体上的光模块接口102和网线接口104。光模块接口102被配置为接入光模块200,从而使得光网络终端100与光模块200建立双向的电信号连接;网线接口104被配置为接入网线103,从而使得光网络终端100与网线103建立双向的电信号连接。光模块200与网线103之间通过光网络终端100建立连接。示例地,光网络终端100将来自光模块200的电信号传递给网线103,将来自网线103的电信号传递给光模块200,因此光网络终端100作为光模块200的上位机,可以监控光模块200的工作。光模块200的上位机除光网络终端100之外还可以包括光线路终端(Optical Line Terminal,OLT)等。The optical network terminal 100 includes a substantially rectangular parallelepiped housing (housing), and an optical module interface 102 and a network cable interface 104 disposed on the housing. The optical module interface 102 is configured to access the optical module 200, so that the optical network terminal 100 and the optical module 200 establish a bidirectional electrical signal connection; the network cable interface 104 is configured to access the network cable 103, so that the optical network terminal 100 and the network cable 103 A two-way electrical signal connection is established. A connection is established between the optical module 200 and the network cable 103 through the optical network terminal 100 . For example, the optical network terminal 100 transmits the electrical signal from the optical module 200 to the network cable 103, and transmits the electrical signal from the network cable 103 to the optical module 200, so the optical network terminal 100, as the host computer of the optical module 200, can monitor the optical module 200 jobs. In addition to the optical network terminal 100, the host computer of the optical module 200 may also include an optical line terminal (Optical Line Terminal, OLT) and the like.
远端服务器1000通过光纤101、光模块200、光网络终端100及网线103, 与本地信息处理设备2000之间建立了双向的信号传递通道。The remote server 1000 establishes a two-way signal transmission channel with the local information processing device 2000 through the optical fiber 101 , the optical module 200 , the optical network terminal 100 and the network cable 103 .
图2为根据一些实施例的一种光网络终端的结构图,为了清楚地显示光模块200与光网络终端100的连接关系,图2仅示出了光网络终端100的与光模块200相关的结构。如图2所示,光网络终端100还包括设置于壳体内的电路板105,设置在电路板105表面的笼子106,设置在笼子106上的散热器,以及设置在笼子106内部的电连接器。电连接被配置为接入光模块200的电口;散热器107具有增大散热面积的翅片等凸起结构。FIG. 2 is a structural diagram of an optical network terminal according to some embodiments. In order to clearly show the connection relationship between the optical module 200 and the optical network terminal 100, FIG. 2 only shows the optical network terminal 100 related to the optical module 200. structure. As shown in Figure 2, the optical network terminal 100 also includes a circuit board 105 disposed in the casing, a cage 106 disposed on the surface of the circuit board 105, a radiator disposed on the cage 106, and an electrical connector disposed inside the cage 106 . The electrical connection is configured to be connected to the electrical port of the optical module 200 ; the heat sink 107 has a raised structure such as a fin that increases the heat dissipation area.
光模块200插入光网络终端100的笼子106中,由笼子106固定光模块200,光模块200产生的热量传导给笼子106,然后通过散热器107进行扩散。光模块200插入笼子106中后,光模块200的电口与笼子106内部的电连接器连接,从而光模块200与光网络终端100建立双向的电信号连接。此外,光模块200的光口与光纤101连接,从而光模块200与光纤101建立双向的光信号连接。The optical module 200 is inserted into the cage 106 of the optical network terminal 100 , and the optical module 200 is fixed by the cage 106 . The heat generated by the optical module 200 is conducted to the cage 106 and then diffused through the radiator 107 . After the optical module 200 is inserted into the cage 106 , the electrical port of the optical module 200 is connected to the electrical connector inside the cage 106 , so that the optical module 200 establishes a bidirectional electrical signal connection with the optical network terminal 100 . In addition, the optical port of the optical module 200 is connected to the optical fiber 101 , so that the optical module 200 establishes a bidirectional optical signal connection with the optical fiber 101 .
图3为根据一些实施例的一种光模块的结构图,图4为根据一些实施例的一种光模块的分解结构图。如图3和图4所示,光模块200包括壳体、设置于壳体内的电路板300、硅光芯片400与光源组件500。Fig. 3 is a structural diagram of an optical module according to some embodiments, and Fig. 4 is an exploded structural diagram of an optical module according to some embodiments. As shown in FIG. 3 and FIG. 4 , the optical module 200 includes a housing, a circuit board 300 disposed in the housing, a silicon photonics chip 400 and a light source assembly 500 .
壳体包括上壳体201和下壳体202,上壳体201盖合在下壳体202上,以形成具有两个开口的上述壳体;壳体的外轮廓一般呈现方形体。The casing includes an upper casing 201 and a lower casing 202. The upper casing 201 is covered on the lower casing 202 to form the above-mentioned casing with two openings; the outer contour of the casing generally presents a square shape.
在本公开一些实施例中,下壳体202包括底板2021以及位于底板2021两侧、与底板2021垂直设置的两个下侧板2022;上壳体201包括盖板2011,盖板2011盖合在下壳体202的两个下侧板2022上,以形成上述壳体。In some embodiments of the present disclosure, the lower shell 202 includes a bottom plate 2021 and two lower side plates 2022 located on both sides of the bottom plate 2021 and perpendicular to the bottom plate 2021; the upper shell 201 includes a cover plate 2011, and the cover plate 2011 covers Two lower side panels 2022 of the housing 202 to form the above housing.
在一些实施例中,下壳体202包括底板2021以及位于底板2021两侧、与底板2021垂直设置的两个下侧板2022;上壳体201包括盖板2011、以及位于盖板2011两侧、与盖板2011垂直设置的两个上侧板2012,由两个上侧板2012与两个下侧板2022结合,以实现上壳体201盖合在下壳体202上。In some embodiments, the lower case 202 includes a bottom plate 2021 and two lower side plates 2022 located on both sides of the bottom plate 2021 and perpendicular to the bottom plate 2021; The two upper side plates 2012 perpendicular to the cover plate 2011 are combined with the two lower side plates 2022 so as to cover the upper case 201 on the lower case 202 .
两个开口204和205的连线所在的方向可以与光模块200的长度方向一致,也可以与光模块200的长度方向不一致。例如,开口204位于光模块200的端部(图3的左端),开口205也位于光模块200的端部(图3的右端)。或者,开口204位于光模块200的端部,而开口205则位于光模块200的侧部。开口204为电口,电路板300的金手指301从电口204伸出,插入上位机(例如,光网络终端100)中;开口205为光口,被配置为接入外部光纤101,以使外部光纤101连接光模块200内部的硅光芯片400。The direction of the line connecting the two openings 204 and 205 may be consistent with the length direction of the optical module 200 , or may not be consistent with the length direction of the optical module 200 . For example, the opening 204 is located at the end of the optical module 200 (the left end in FIG. 3 ), and the opening 205 is also located at the end of the optical module 200 (the right end in FIG. 3 ). Alternatively, the opening 204 is located at the end of the optical module 200 , while the opening 205 is located at the side of the optical module 200 . The opening 204 is an electrical port, and the golden finger 301 of the circuit board 300 extends from the electrical port 204, and is inserted into the upper computer (for example, the optical network terminal 100); the opening 205 is an optical port, which is configured to be connected to the external optical fiber 101, so that The external optical fiber 101 is connected to the silicon photonics chip 400 inside the optical module 200 .
采用上壳体201、下壳体202结合的装配方式,便于将电路板300、硅光 芯片400与光源组件500等器件安装到壳体中,由上壳体201、下壳体202对这些器件形成封装保护。此外,在装配电路板300和硅光芯片400与光源组件500等器件时,便于这些器件的定位部件、散热部件以及电磁屏蔽部件的部署,有利于自动化地实施生产。The combination of the upper housing 201 and the lower housing 202 is used to facilitate the installation of components such as the circuit board 300, the silicon photonics chip 400 and the light source assembly 500 into the housing, and the upper housing 201 and the lower housing 202 control these devices. Form package protection. In addition, when assembling components such as the circuit board 300 , the silicon photonics chip 400 , and the light source assembly 500 , it facilitates the deployment of positioning components, heat dissipation components, and electromagnetic shielding components of these components, and facilitates automatic production.
在一些实施例中,上壳体201及下壳体202一般采用金属材料制成,利于实现电磁屏蔽以及散热。In some embodiments, the upper shell 201 and the lower shell 202 are generally made of metal materials, which is beneficial to realize electromagnetic shielding and heat dissipation.
在一些实施例中,光模块200还包括位于其壳体外部的解锁部件203,被配置为实现光模块200与上位机之间的固定连接,或解除光模块200与上位机之间的固定连接。In some embodiments, the optical module 200 also includes an unlocking component 203 located outside the housing, configured to realize the fixed connection between the optical module 200 and the host computer, or release the fixed connection between the optical module 200 and the host computer .
示例地,解锁部件203位于下壳体202的两个下侧板2022的外侧,具有与上位机笼子(例如,光网络终端100的笼子106)匹配的卡合部件。当光模块200插入上位机的笼子里,由解锁部件203的卡合部件将光模块200固定在上位机的笼子里;拉动解锁部件203时,解锁部件203的卡合部件随之移动,进而改变卡合部件与上位机的连接关系,以解除光模块200与上位机的卡合关系,从而可以将光模块200从上位机的笼子里抽出。Exemplarily, the unlocking part 203 is located on the outer side of the two lower side plates 2022 of the lower housing 202, and has a locking part matching with the upper computer cage (for example, the cage 106 of the optical network terminal 100). When the optical module 200 is inserted into the cage of the host computer, the optical module 200 is fixed in the cage of the host computer by the engaging part of the unlocking part 203; when the unlocking part 203 is pulled, the engaging part of the unlocking part 203 moves accordingly, thereby changing The connection relationship between the engaging part and the host computer is to release the engagement relationship between the optical module 200 and the host computer, so that the optical module 200 can be pulled out from the cage of the host computer.
电路板300包括电路走线、电子元件及芯片,通过电路走线将电子元件和芯片按照电路设计连接在一起,以实现供电、电信号传输及接地等功能。电子元件例如可以包括电容、电阻、三极管、金属氧化物半导体场效应管(Metal-Oxide-Semiconductor Field-Effect Transistor,MOSFET)。芯片例如可以包括微控制单元(Microcontroller Unit,MCU)、限幅放大器(Limiting Amplifier,LA)、时钟数据恢复芯片(Clock and Data Recovery,CDR)、电源管理芯片、数字信号处理(Digital Signal Processing,DSP)芯片、跨阻放大器(Trans-Impedance Amplifier)。The circuit board 300 includes circuit traces, electronic components and chips, through which the electronic components and chips are connected together according to the circuit design, so as to realize functions such as power supply, electrical signal transmission and grounding. The electronic components may include, for example, capacitors, resistors, transistors, and metal-oxide-semiconductor field-effect transistors (Metal-Oxide-Semiconductor Field-Effect Transistor, MOSFET). The chip can include, for example, a Microcontroller Unit (MCU), a Limiting Amplifier (LA), a Clock and Data Recovery chip (CDR), a power management chip, and a Digital Signal Processing (DSP) chip. ) chip, transimpedance amplifier (Trans-Impedance Amplifier).
电路板300一般为硬性电路板,硬性电路板由于其相对坚硬的材质,还可以实现承载作用,如硬性电路板可以平稳地承载上述电子元件和芯片;硬性电路板还可以插入上位机笼子106中的电连接器中。The circuit board 300 is generally a rigid circuit board. Due to its relatively hard material, the rigid circuit board can also realize the bearing function, such as the rigid circuit board can stably carry the above-mentioned electronic components and chips; the rigid circuit board can also be inserted into the upper computer cage 106 in the electrical connector.
电路板300还包括形成在其端部表面的金手指301,金手指301由相互独立的多个引脚组成。电路板300插入笼子106中,由金手指301与笼子106内的电连接器导通连接。金手指301可以仅设置在电路板300一侧的表面(例如图4所示的上表面),也可以设置在电路板300上下两侧的表面,以适应引脚数量需求大的场合。金手指301被配置为与上位机建立电连接,以实现供电、接地、I2C信号传递、数据信号传递等。The circuit board 300 also includes a gold finger 301 formed on the surface of its end, and the gold finger 301 is composed of a plurality of independent pins. The circuit board 300 is inserted into the cage 106 , and is conductively connected with the electrical connector in the cage 106 by the gold finger 301 . Gold fingers 301 can be set on only one side of the circuit board 300 (such as the upper surface shown in FIG. 4 ), or can be set on the upper and lower sides of the circuit board 300, so as to meet the occasions where the number of pins is large. The golden finger 301 is configured to establish an electrical connection with a host computer to realize power supply, grounding, I2C signal transmission, data signal transmission, and the like.
当然,部分光模块中也会使用柔性电路板。柔性电路板一般与硬性电路 板配合使用,以作为硬性电路板的补充。Of course, flexible circuit boards are also used in some optical modules. Flexible circuit boards are generally used in conjunction with rigid circuit boards as a supplement to rigid circuit boards.
在硅光结构的光模块中还包括硅光芯片400与光源组件500,硅光芯片400自身没有光源,光源组件500用作硅光芯片400的外置光源。光源组件500可选用激光盒,激光盒内部封装激光芯片,激光芯片发光,光源组件500用于向硅光芯片400提供激光光束。The optical module of the silicon photonics structure also includes a silicon photonic chip 400 and a light source assembly 500 . The light source assembly 500 can be a laser box, and a laser chip is packaged inside the laser box, and the laser chip emits light. The light source assembly 500 is used to provide a laser beam to the silicon photonics chip 400 .
硅光芯片400与光源组件500光连接。光源组件500发出的光进入硅光芯片400中,硅光芯片400则接收来自光源组件500的光。在一些实施例中,光源组件500向硅光芯片400提供波长单一、功率稳定,且不携带信息的光,硅光芯片400对光进行调制,以将需要传输的数据加载到光中形成光信号。此外,硅光芯片400还接收来自光模块外部的光信号,并将光信号转换为电流信号以提取光信号中的数据。也就是说,光模块200发射的光的调制以及光模块200接收的光信号的解调均由硅光芯片400完成。The silicon photonics chip 400 is optically connected to the light source assembly 500 . The light emitted by the light source assembly 500 enters the silicon photonics chip 400 , and the silicon photonics chip 400 receives the light from the light source assembly 500 . In some embodiments, the light source assembly 500 provides light with a single wavelength, stable power, and no information to the silicon photonic chip 400, and the silicon photonic chip 400 modulates the light to load the data to be transmitted into the light to form an optical signal . In addition, the silicon photonic chip 400 also receives an optical signal from outside the optical module, and converts the optical signal into a current signal to extract data from the optical signal. That is to say, both the modulation of the light emitted by the optical module 200 and the demodulation of the optical signal received by the optical module 200 are completed by the silicon optical chip 400 .
在一些实施例中,电路板300向硅光芯片400提供来自上位机的电信号,硅光芯片400接收光源组件500输出的不携带信息的光,并基于上述电信号对接收到的光进行调制形成光信号,该光信号被发送至光模块200外部,从而实现电信号转换为光信号。来自光模块200外部的光信号经硅光芯片400转换为电流信号,该电流信号被跨阻放大器转换为差分电压信号,所述差分电压信号经过数字信号处理芯片处理后通过电路板300被输出至上位机中,从而实现光信号转换为电信号。In some embodiments, the circuit board 300 provides the silicon photonic chip 400 with an electrical signal from the host computer, and the silicon photonic chip 400 receives the light that does not carry information output by the light source assembly 500, and modulates the received light based on the above electrical signal An optical signal is formed, and the optical signal is sent to the outside of the optical module 200, so that the electrical signal is converted into an optical signal. The optical signal from the outside of the optical module 200 is converted into a current signal by the silicon optical chip 400, and the current signal is converted into a differential voltage signal by the transimpedance amplifier, and the differential voltage signal is output to the In the upper computer, the optical signal is converted into an electrical signal.
为了实现上述光信号的调制与解调过程,需要将电路板300、硅光芯片400及光源组件500按照预定位置进行装配,以形成预定的光传播路径。In order to realize the above optical signal modulation and demodulation process, it is necessary to assemble the circuit board 300, the silicon photonics chip 400 and the light source assembly 500 according to predetermined positions, so as to form a predetermined light propagation path.
由于光路对硅光芯片400及光源组件500之间的位置关系非常敏感,不同膨胀系数的材料会导致不同程度的形变,不利于预设光路的实现。在本公开一些实施例中,将硅光芯片400及光源组件500设置在同一衬底上,衬底为由同一种材料制成的板状结构。同一材料的衬底发生形变对硅光芯片400及光源组件500的影响相同,可以避免硅光芯片400与光源组件500之间的相对位置的改变。本实施例对于衬底的材料不进行限定,示例性地,衬底材料的膨胀系数与硅光芯片400和/或光源组件500的热膨胀系数相近,例如,硅光芯片400的主材料是硅,光源组件500可以采用可伐合金,衬底选用硅或玻璃等。可伐合金(Kovar Alloy),又称铁镍钴合金,或称铁镍钴玻封合金,一般含镍29%,钴18%,其余是铁。可伐合金的热膨胀系数由于钴的加入而降低,与玻璃的热膨胀系数相近,适合于与玻璃作匹配封接。Since the optical path is very sensitive to the positional relationship between the silicon photonics chip 400 and the light source assembly 500 , materials with different expansion coefficients will cause different degrees of deformation, which is not conducive to the realization of the preset optical path. In some embodiments of the present disclosure, the silicon photonics chip 400 and the light source assembly 500 are disposed on the same substrate, and the substrate is a plate structure made of the same material. The deformation of the substrate of the same material has the same impact on the silicon photonics chip 400 and the light source assembly 500 , and the change of the relative position between the silicon photonics chip 400 and the light source assembly 500 can be avoided. This embodiment does not limit the material of the substrate. Exemplarily, the expansion coefficient of the substrate material is close to the thermal expansion coefficient of the silicon photonic chip 400 and/or the light source assembly 500. For example, the main material of the silicon photonic chip 400 is silicon. The light source assembly 500 can be made of Kovar alloy, and the substrate can be made of silicon or glass. Kovar alloy, also known as iron-nickel-cobalt alloy, or iron-nickel-cobalt glass sealing alloy, generally contains 29% nickel, 18% cobalt, and the rest is iron. The thermal expansion coefficient of Kovar alloy is reduced by the addition of cobalt, which is similar to that of glass, and is suitable for matching and sealing with glass.
由上述可知,硅光芯片400及光源组件500通常设置在电路板300的同 侧。此时,衬底与电路板300的位置关系有多种。It can be known from the above that the silicon photonics chip 400 and the light source assembly 500 are usually disposed on the same side of the circuit board 300 . At this time, there are various positional relationships between the substrate and the circuit board 300 .
在一些实施例中,如图4所示,电路板300具有贯穿上下表面的通孔,衬底设置在通孔中,硅光芯片400和/或光源组件500设置在衬底上。这样,不仅可以避免硅光芯片400及光源组件500之间相对位置的改变,而且便于硅光芯片400和/或光源组件500与电路板300的电连接。此外,硅光芯片400和/或光源组件500可以向衬底散热,使衬底同时具有承托及散热的效果。In some embodiments, as shown in FIG. 4 , the circuit board 300 has a through hole through the upper and lower surfaces, the substrate is disposed in the through hole, and the silicon photonics chip 400 and/or the light source assembly 500 are disposed on the substrate. In this way, not only can the relative position change between the silicon photonics chip 400 and the light source assembly 500 be avoided, but also the electrical connection between the silicon photonics chip 400 and/or the light source assembly 500 and the circuit board 300 is facilitated. In addition, the silicon photonics chip 400 and/or the light source assembly 500 can dissipate heat to the substrate, so that the substrate can simultaneously have the effect of supporting and dissipating heat.
在另一些实施例中,电路板300不设置通孔,衬底设置在电路板上,具体可以是衬底设置在电路板300表面或嵌入电路板300中,硅光芯片400和光源组件500设置在衬底表面。In other embodiments, the circuit board 300 is not provided with through holes, and the substrate is provided on the circuit board. Specifically, the substrate may be provided on the surface of the circuit board 300 or embedded in the circuit board 300. The silicon photonic chip 400 and the light source assembly 500 are provided on the substrate surface.
需要说明的是,光源组件500的出光面为光源组件500靠近硅光芯片400一侧的表面,硅光芯片400的入光面为硅光芯片400靠近光源组件500一侧的表面。It should be noted that the light output surface of the light source assembly 500 is the surface of the light source assembly 500 near the silicon photonic chip 400 , and the light incident surface of the silicon photonic chip 400 is the surface of the silicon photonic chip 400 near the light source assembly 500 .
光模块200还包括第一内部光纤带600、第二内部光纤带700和光纤接口800,第一内部光纤带600和第二内部光纤带700各自是由多根内部光纤平行排列经紫外光固化成的薄平带。在本公开一些实施例中,第一内部光纤带600为发射光纤带,第二内部光纤带700为接收光纤带。第一内部光纤带600的一端与硅光芯片400连接,另一端与光纤接口800连接。第二内部光纤带700的一端与硅光芯片400连接,另一端与光纤接口800连接。光纤接口800与外部光纤101连接。可以看出,硅光芯片400与光纤接口800之间是通过第一内部光纤带600、第二内部光纤带700实现光连接,光纤接口800实现与光模块外部光纤101的光连接。The optical module 200 also includes a first internal optical fiber ribbon 600, a second internal optical fiber ribbon 700, and an optical fiber interface 800. Each of the first internal optical fiber ribbon 600 and the second internal optical fiber ribbon 700 is formed by a plurality of internal optical fibers arranged in parallel and cured by ultraviolet light. thin flat strips. In some embodiments of the present disclosure, the first inner fiber optic ribbon 600 is a launch fiber optic ribbon and the second inner fiber optic ribbon 700 is a receive fiber optic ribbon. One end of the first internal optical fiber ribbon 600 is connected to the silicon photonics chip 400 , and the other end is connected to the optical fiber interface 800 . One end of the second internal optical fiber ribbon 700 is connected to the silicon photonics chip 400 , and the other end is connected to the optical fiber interface 800 . The optical fiber interface 800 is connected with the external optical fiber 101 . It can be seen that the optical connection between the silicon photonics chip 400 and the optical fiber interface 800 is realized through the first internal optical fiber ribbon 600 and the second internal optical fiber ribbon 700, and the optical fiber interface 800 is optically connected to the external optical fiber 101 of the optical module.
光源组件500将不携带信息的光传输至硅光芯片400中,硅光芯片400对不携带信息的光进行调制,即将数据加载到不携带信息的光中,进而将不携带信息的光调制为携带信息的光(光信号),该携带信息的光(光信号)经过第一内部光纤带600传输至光纤接口800处,经过光纤接口800传输至外部光纤101中,从而将携带信息的光(光信号)传输至外部光纤101中,实现将电信号转换为光信号。The light source assembly 500 transmits the light that does not carry information to the silicon photonics chip 400, and the silicon photonics chip 400 modulates the light that does not carry information, that is, loads data into the light that does not carry information, and then modulates the light that does not carry information into The light (optical signal) carrying information, the light (optical signal) carrying information is transmitted to the optical fiber interface 800 through the first internal optical fiber ribbon 600, and then transmitted to the external optical fiber 101 through the optical fiber interface 800, so that the light carrying information ( Optical signal) is transmitted to the external optical fiber 101 to convert the electrical signal into an optical signal.
来自外部光纤101的光信号经过光纤接口800和第二内部光纤带700传输至硅光芯片400中,硅光芯片400将该光信号解调为电信号,通过电路板300输出至上位机中,实现将光信号转换为电信号。The optical signal from the external optical fiber 101 is transmitted to the silicon optical chip 400 through the optical fiber interface 800 and the second internal optical fiber ribbon 700. The silicon optical chip 400 demodulates the optical signal into an electrical signal, and outputs it to the host computer through the circuit board 300. Realize the conversion of optical signals into electrical signals.
为了实现多通道光源集成,目前通常将多个激光芯片机械焊接在同一个衬底上,通过金线将激光芯片的电极与衬底的电极相连,实现衬底层次的光源集成。由于激光芯片是通过机械操作固定在衬底上,工业操作精度较低, 相邻激光芯片的间隔保持在mm量级,因此这种方式下的光源集成度较低。In order to realize the integration of multi-channel light sources, multiple laser chips are usually mechanically welded on the same substrate, and the electrodes of the laser chips are connected to the electrodes of the substrate through gold wires to realize the integration of light sources at the substrate level. Since the laser chip is fixed on the substrate by mechanical operation, the precision of industrial operation is low, and the distance between adjacent laser chips is maintained at the order of mm, so the integration degree of the light source in this way is low.
本公开一些实施例中的光源组件500包括激光芯片和多路激光器,多路激光器设置在激光芯片上。本公开一些实施例以尺寸为1*4mm的激光芯片为例。本公开一些实施例通过在单一激光芯片上设置多路激光器以实现芯片层次的光源集成,从而提高光源集成度。并使所述单一激光芯片上的多路激光器输出不同波长的光束以实现波分复用,提高带宽使用效率,从而提高信息传输效率和速度。The light source assembly 500 in some embodiments of the present disclosure includes a laser chip and multiple lasers, and the multiple lasers are arranged on the laser chip. Some embodiments of the present disclosure take a laser chip with a size of 1*4mm as an example. In some embodiments of the present disclosure, multiple lasers are arranged on a single laser chip to realize chip-level light source integration, thereby improving the light source integration degree. In addition, multiple lasers on the single laser chip output light beams of different wavelengths to realize wavelength division multiplexing, improve bandwidth usage efficiency, and thereby improve information transmission efficiency and speed.
本公开一些实施例的激光芯片表面设置激光器阵列,所述激光器阵列包括至少两个激光器,每个激光器均包括增益区和光栅区以及光栅区尾接的法布里泊罗谐振腔,增益区被配置为在增益加电信号的激励下发出光,光栅区被配置为在布拉格反射光栅加电信号的激励下对该光的波长进行调制。光栅区尾接的法布里泊罗谐振腔被配置为输出光栅区传输的光信号。In some embodiments of the present disclosure, a laser array is provided on the surface of the laser chip, and the laser array includes at least two lasers, each laser includes a gain region, a grating region, and a Fabry-Perot resonator connected to the grating region, and the gain region is Configured to emit light when excited by the gain energizing signal, the grating region is configured to modulate the wavelength of the light when excited by the Bragg reflective grating energizing signal. The Fabry Perot resonant cavity tailed by the grating region is configured to output the optical signal transmitted by the grating region.
图5为根据一些实施例的激光器的增益区(左)与光栅区(右)外沿生长方向结构与材料示意图;图6为根据一些实施例的激光器的增益区光波导及光栅区光波导结构截面图。如图5和图6所示,在本公开一些实施例中,光栅区包括依次层叠设置的光栅层、波导层和电极。可以理解的是,光栅层又可以称为光栅,波导层又可以称为光波导。5 is a schematic diagram of the structure and materials along the growth direction outside the gain region (left) and the grating region (right) of the laser according to some embodiments; FIG. 6 is the optical waveguide structure in the gain region and the grating region of the laser according to some embodiments Sectional view. As shown in FIG. 5 and FIG. 6 , in some embodiments of the present disclosure, the grating region includes a grating layer, a waveguide layer and electrodes stacked in sequence. It can be understood that the grating layer can also be called a grating, and the waveguide layer can also be called an optical waveguide.
光栅区的光栅层可采用分布式布拉格反射光栅,且采用光致发光峰值为1150nm的InGaAsP材料,厚度为450A O。光栅区的波导层采用光致发光峰值为1170nm的InGaAsP材料,厚度为3100A O,且光栅区的波导层的宽度被控制在1.5μm左右,以实现单模波导。 The grating layer in the grating area may be a distributed Bragg reflection grating, and an InGaAsP material with a photoluminescence peak of 1150 nm and a thickness of 450 A O . The waveguide layer in the grating area is made of InGaAsP material with a photoluminescence peak of 1170nm and a thickness of 3100A O , and the width of the waveguide layer in the grating area is controlled at about 1.5 μm to achieve a single-mode waveguide.
所述增益区包括依次层叠设置的波导层和电极。可以理解的是波导层又可以称为光波导。The gain region includes waveguide layers and electrodes stacked in sequence. It can be understood that the waveguide layer can also be called an optical waveguide.
增益区的电极与一个外电流源电连接,增益区在增益加电信号的激励下发出光,该光通过增益区的光波导传输至光栅区,经由光栅区的光波导与光栅区尾接的法布里泊罗谐振腔传输至硅光芯片的入光口处。The electrode of the gain area is electrically connected with an external current source, and the gain area emits light under the excitation of the gain power signal, and the light is transmitted to the grating area through the optical waveguide of the gain area, and the optical waveguide of the grating area is connected to the grating area. The Fabry Perot resonator is transmitted to the light entrance of the silicon photonics chip.
所述激光器阵列中一个所述激光器光栅区的电极与另一个外电流源电连接,通过改变注入所述光栅区的布拉格反射光栅加电信号的电流大小实现输出不同波长的第一光束。所述激光器阵列中另外的一个所述激光器的光栅区的光波导延伸方向相对于增益区的光波导延伸方向倾斜并构成倾斜角,通过改变倾斜角大小实现输出不同波长的第二光束。所述第二光束的波长大于所述第一光束的波长。The electrodes of one of the laser grating regions in the laser array are electrically connected to another external current source, and the output of first light beams with different wavelengths is achieved by changing the current magnitude of the Bragg reflection grating energizing signal injected into the grating region. The extension direction of the optical waveguide of the grating region of the other laser in the laser array is inclined relative to the extension direction of the optical waveguide of the gain region to form an inclination angle, and outputting second beams of different wavelengths is achieved by changing the inclination angle. The wavelength of the second light beam is greater than the wavelength of the first light beam.
至少两个激光器分别通过改变注入光栅区电流的大小,以及改变增益区 的光波导延伸方向与光栅区的光波导延伸方向之间倾斜角大小,输出波长不同的至少两束光束,从而可以实现波分复用,提高带宽使用效率,进而提高信息传输效率和速度。本公开可以实现在激光芯片层次集成至少两个激光器,并通过载流子(电流载体)注入变化和斜波导设计共同实现波长的精确调制。At least two lasers output at least two beams with different wavelengths by changing the magnitude of the current injected into the grating region, and changing the inclination angle between the extending direction of the optical waveguide in the gain region and the extending direction of the optical waveguide in the grating region, so that wave Multiplexing, improve the efficiency of bandwidth usage, and then improve the efficiency and speed of information transmission. The present disclosure can realize the integration of at least two lasers at the laser chip level, and realize the precise modulation of wavelength through carrier (current carrier) injection change and inclined waveguide design.
图7为根据一些实施例的激光芯片上设置各激光器的分布示意图;图7示出了激光芯片表面从上至下分别设有第一信号激光器、第一光探测器、第一激光器、第二激光器、第三激光器、第四激光器、第五激光器、第六激光器、第七激光器、第八激光器、第九激光器、第十激光器、第二光探测器和第二信号激光器。第一信号激光器、第一光探测器、第二光探测器和第二信号激光器用来作10路激光器的有源对齐使用。Figure 7 is a schematic diagram of the distribution of lasers arranged on the laser chip according to some embodiments; Figure 7 shows that the surface of the laser chip is respectively provided with a first signal laser, a first photodetector, a first laser, a A laser, a third laser, a fourth laser, a fifth laser, a sixth laser, a seventh laser, an eighth laser, a ninth laser, a tenth laser, a second photodetector and a second signal laser. The first signal laser, the first photodetector, the second photodetector and the second signal laser are used for active alignment of 10 lasers.
图7中标号为11、21、20、10的光学器件分别为第一信号激光器、第一光探测器、第二光探测器和第二信号激光器;标号为0-9的光学器件分别为10通道的激光器,图7中的0号通道、1号通道、2号通道、3号通道、4号通道、5号通道、6号通道、7号通道、8号通道、9号通道的激光器分别对应第一激光器、第二激光器、第三激光器、第四激光器、第五激光器和第六激光器、第七激光器、第八激光器、第九激光器和第十激光器。In Fig. 7, the optical devices labeled 11, 21, 20, and 10 are respectively the first signal laser, the first photodetector, the second photodetector and the second signal laser; the optical devices labeled 0-9 are respectively 10 The lasers of channels, the lasers of channel 0, channel 1, channel 2, channel 3, channel 4, channel 5, channel 6, channel 7, channel 8 and channel 9 in Fig. 7 Corresponding to the first laser, the second laser, the third laser, the fourth laser, the fifth laser and the sixth laser, the seventh laser, the eighth laser, the ninth laser and the tenth laser.
这样,激光芯片表面共设置有10路激光器、2路信号激光器和2路光探测器,10路激光器的正极均通过其表面连接到激光芯片表面,便于与外电流源电连接。每个激光器连接两个电信号,分别是增益加电信号和布拉格反射光栅加电信号,增益加电信号被配置为连接10路激光器的增益区,布拉格反射光栅加电信号被配置为连接10路激光器的光栅区。In this way, 10 lasers, 2 signal lasers and 2 photodetectors are arranged on the surface of the laser chip, and the anodes of the 10 lasers are all connected to the surface of the laser chip through their surfaces, so as to be electrically connected to an external current source. Each laser is connected to two electrical signals, which are the gain power-on signal and the Bragg reflection grating power-on signal. The grating area of the laser.
图7中标号为0-9的10路激光器中每个激光器为1个通道,一共为10个通道,根据波分复用的标准,相邻通道应间隔200GHz。Among the 10 lasers marked 0-9 in Figure 7, each laser is 1 channel, and there are 10 channels in total. According to the standard of wavelength division multiplexing, the interval between adjacent channels should be 200 GHz.
10路激光器中相邻激光器间的距离是250μm,激光器间的距离大小的影响因素有两个,一个影响因素是与激光器配套的硅光芯片接收端的要求;另一个影响因素是激光器出光光斑的大小。相邻激光器间250μm的距离是传统的多个激光芯片设置在衬底上的方案无法达到的量级。在本公开一些实施例中,以1280nm波段为例,在单一激光芯片上设置多路激光器以实现不同波长光束同时出光。The distance between adjacent lasers in the 10-channel laser is 250 μm. There are two factors that affect the distance between lasers. One factor is the requirements of the receiving end of the silicon photonic chip that matches the laser; the other factor is the size of the laser spot. . The distance of 250 μm between adjacent lasers is an order of magnitude that cannot be achieved by the traditional solution of multiple laser chips arranged on a substrate. In some embodiments of the present disclosure, taking the 1280nm wavelength band as an example, multiple lasers are arranged on a single laser chip to realize simultaneous emission of light beams with different wavelengths.
在本公开一些实施例中,将第一激光器、第二激光器、第三激光器、第四激光器、第五激光器和第六激光器划分为第一组激光器,将第七激光器、第八激光器、第九激光器和第十激光器划分为第二组激光器;第一组激光器通过优化光栅区的光波导的材料,同时配合对光栅区的光波导注入载流子的 变化,向相对目标波段(1280nm)的短波长(1275nm-1280nm)方向增加布拉格光栅尾接法布里珀罗谐振腔自身的波长调制范围;第二组激光器采用斜波导设计,向相对目标波段(1280nm)的长波长(1280nm-1285nm)方向增加波长调制范围;这样最终使得激光芯片上的各激光器可实现10nm的波长调制范围。In some embodiments of the present disclosure, the first laser, the second laser, the third laser, the fourth laser, the fifth laser and the sixth laser are divided into the first group of lasers, and the seventh laser, the eighth laser, the ninth laser The laser and the tenth laser are divided into the second group of lasers; the first group of lasers optimizes the material of the optical waveguide in the grating area, and at the same time cooperates with the change of injected carriers into the optical waveguide in the grating area, to achieve a short wavelength relative to the target wavelength band (1280nm). In the direction of wavelength (1275nm-1280nm), the wavelength modulation range of the Bragg grating tailed with the Fabry-Perot resonator itself is increased; the second group of lasers adopts an oblique waveguide design, and the direction of the long wavelength (1280nm-1285nm) relative to the target band (1280nm) Increase the wavelength modulation range; this eventually enables each laser on the laser chip to achieve a wavelength modulation range of 10nm.
在相关技术的一些实施例中,激光器的光栅区内部设有温度调节装置,如加热器件,通过改变光栅区的温度实现对波长的调谐,这种调谐方式被称为热调谐;激光器的光栅区内部设有电极,通过电极向光栅区输入不同大小的电流实现对波长的调谐,这种调谐方式被称为电调谐;激光器的光栅区的光波导延伸方向与激光器的增益区的出光方向(即增益区的光波导延伸方向)之间具有倾斜角,通过改变倾斜角大小实现对波长的调谐,这种调谐方式被称为机械调谐。这三种调谐方式在不同实施例中可以有不同的组合方式以实现对波长的调节。In some embodiments of the related technology, a temperature adjustment device is provided inside the grating area of the laser, such as a heating device, and the wavelength can be tuned by changing the temperature of the grating area. This tuning method is called thermal tuning; the grating area of the laser There are electrodes inside, and the wavelength is tuned by inputting currents of different sizes to the grating area through the electrodes. This tuning method is called electrical tuning; There is an inclination angle between the extension direction of the optical waveguide in the gain region, and the wavelength can be tuned by changing the inclination angle. This tuning method is called mechanical tuning. These three tuning modes can be combined in different ways in different embodiments to realize the adjustment of the wavelength.
在本公开一些实施例中的激光器的增益区由于注入电流激励而产生光子且被放大,光栅区的分布式布拉格反射光栅对被放大的光波进行选频,特定的波长在尾接的法布里珀罗谐振腔内被来回反射振荡,从而实现激光的输出。In some embodiments of the present disclosure, the gain region of the laser generates photons due to the excitation of the injection current and is amplified. The distributed Bragg reflection grating in the grating region selects the frequency of the amplified light wave, and the specific wavelength is in the tailed Fabry The Perot resonant cavity is reflected and oscillated back and forth, so as to realize the output of laser light.
示例地,第一组激光器中各激光器通过改变注入各光栅区的布拉格反射光栅加电信号的电流大小输出不同波长的第一光束;第二组激光器中各激光器的各光栅区的光波导延伸方向相对于增益区的光波导延伸方向倾斜,通过改变倾斜角大小输出不同波长的第二光束。Illustratively, each laser in the first group of lasers outputs first light beams with different wavelengths by changing the current magnitude of the Bragg reflection grating energizing signal injected into each grating region; the optical waveguide extension direction of each grating region of each laser in the second group of lasers The extension direction of the optical waveguide is inclined relative to the gain region, and second light beams with different wavelengths are output by changing the size of the inclination angle.
第一组激光器中的第一激光器、第二激光器、第三激光器、第四激光器、第五激光器和第六激光器的光栅区的光栅均为分布式布拉格反射光栅,整个激光芯片只做一次全息曝光形成光栅,因此光栅的周期固定。The gratings in the grating areas of the first laser, the second laser, the third laser, the fourth laser, the fifth laser and the sixth laser in the first group of lasers are all distributed Bragg reflection gratings, and the entire laser chip is only subjected to a holographic exposure A grating is formed so that the period of the grating is fixed.
相关技术中,由于分布式光栅的激光峰位置受端面相位的影响,无法实现波长的精确控制;相位光栅、损耗光栅以及增益光栅虽然可以解决相位控制问题,但是工艺复杂,效率不高,且对功率效率有影响。相比之下,分布式布拉格反射光栅尾接法布里珀罗谐振腔是简单且实用的解决方案。本公开一些实施例中采用光栅区的分布式布拉格反射光栅尾接法布里珀罗谐振腔,避免激光峰在滤波通道带中受相位影响随机分布的现象,可实现波长的精确控制。In related technologies, since the laser peak position of the distributed grating is affected by the phase of the end face, precise control of the wavelength cannot be achieved; although phase gratings, loss gratings, and gain gratings can solve the phase control problem, the process is complicated and the efficiency is not high. Power efficiency has an impact. In contrast, a distributed Bragg reflection grating tailed with a Fabry-Perot resonator is a simple and practical solution. In some embodiments of the present disclosure, a distributed Bragg reflection grating in the grating area is used to tail the Fabry-Perot resonant cavity, so as to avoid the random distribution of laser peaks affected by the phase in the filter channel band, and realize precise control of the wavelength.
相对于机械调谐和热调谐进行波长调节,电调谐进行波长调节具有更大的波长调节范围,且具有更快的波长切换速度,更能够满足光纤通信对激光器的需求。在本公开一些实施例中,电调谐即通过对光栅区注入载流子从而 改变光栅区材料的折射率来实现的。示例地,通过改变外加在光栅区的布拉格反射光栅加电信号的电流大小,实现光栅区的光波导折射率连续变化,从而实现光栅通带的连续变化,选择出目标波长对应的法布里珀罗模式。Compared with mechanical tuning and thermal tuning for wavelength adjustment, electrical tuning for wavelength adjustment has a larger wavelength adjustment range and faster wavelength switching speed, which can better meet the needs of optical fiber communication for lasers. In some embodiments of the present disclosure, electrical tuning is achieved by injecting carriers into the grating region to change the refractive index of the material in the grating region. As an example, by changing the current magnitude of the Bragg reflection grating energization signal applied to the grating area, the refractive index of the optical waveguide in the grating area can be continuously changed, thereby realizing the continuous change of the grating passband, and selecting the Fabryper corresponding to the target wavelength. Luo mode.
在光栅区注入电流时,自由载流子等离子体效应引发折射率改变,此时光栅的投射谱会向短波长方向漂移。When current is injected into the grating region, the free carrier plasma effect causes the refractive index to change, and the projected spectrum of the grating will shift to the short wavelength direction at this time.
因此本公开一些实施例中对光栅区外加布拉格反射光栅加电信号使得激光器内部折射率减小,进而使有效波长变短,向相对1280nm的短波长(1275nm-1280nm)方向移动,实现相对目标波长的短波长方向5nm的波长调制范围。Therefore, in some embodiments of the present disclosure, a Bragg reflection grating power-on signal is applied to the grating area to reduce the internal refractive index of the laser, thereby shortening the effective wavelength and moving to a relatively short wavelength (1275nm-1280nm) direction relative to 1280nm to achieve a relative target wavelength. The wavelength modulation range of 5nm in the short wavelength direction.
这样,第一组激光器通过优化光栅区的光波导的材料,同时配合光栅区的光波导外加分布式布拉格反射光栅加电信号的电流大小变化,向短波长(1275nm-1280nm)方向增加分布式布拉格反射光栅尾接法布里珀罗腔自身的波长调制范围;波长调制可以覆盖0到5号6路激光器的波长变化量需求。光栅区的光波导载流子注入导致波导折射率变化,最终实现波长变化。In this way, by optimizing the material of the optical waveguide in the grating area, the first group of lasers increases the distributed Bragg frequency in the direction of short wavelength (1275nm-1280nm) by cooperating with the optical waveguide in the grating area and the change of the current magnitude of the distributed Bragg reflection grating power signal. The reflective grating is connected to the wavelength modulation range of the Fabry-Perot cavity itself; the wavelength modulation can cover the wavelength variation requirements of 6-way lasers from 0 to 5. The carrier injection into the optical waveguide in the grating region leads to a change in the refractive index of the waveguide, and ultimately a wavelength change.
图8为根据一些实施例的激光芯片的增益区(左)和光栅区(右)的具体设计示意图;如图8所示,光栅区的光波导的延伸方向被设置成相对于增益区的光波导的延伸方向倾斜,从而增大光栅区的光波导经历的光栅周期,使有效波长变大,向相对1280nm的长波长(1280nm-1285nm)方向,实现相对目标波长的长波长方向5nm的波长调制范围。Fig. 8 is a specific design schematic diagram of the gain region (left) and the grating region (right) of the laser chip according to some embodiments; The extension direction of the waveguide is inclined, thereby increasing the grating period experienced by the optical waveguide in the grating area, making the effective wavelength larger, and realizing the wavelength modulation of 5nm in the long wavelength direction relative to the target wavelength in the direction of the long wavelength (1280nm-1285nm) relative to 1280nm scope.
示例地,第二组激光器中的第七激光器、第八激光器、第九激光器和第十激光器的光栅同样为分布式布拉格反射光栅,且第六激光器、第七激光器、第九激光器和第十激光器中光栅区的光波导的延伸方向相对于增益区的光波导的延伸方向倾斜,即光栅区的光波导的延伸方向与增益区的光波导的延伸方向之间具有倾斜角,通过改变该倾斜角大小输出不同波长的第二光束。Exemplarily, the gratings of the seventh laser, the eighth laser, the ninth laser and the tenth laser in the second group of lasers are also distributed Bragg reflection gratings, and the sixth laser, the seventh laser, the ninth laser and the tenth laser The extension direction of the optical waveguide in the grating area is inclined relative to the extension direction of the optical waveguide in the gain area, that is, there is an inclination angle between the extension direction of the optical waveguide in the grating area and the extension direction of the optical waveguide in the gain area, by changing the inclination angle The size outputs a second light beam of a different wavelength.
激光器输出波长的大小正比于光栅区的光波导经历的光栅周期,本公开一些实施例通过将光栅区的光波导设置为相对于增益区的光波导的延伸方向的斜波导,增大光栅区的光波导经历的光栅周期,从而使得激光器输出光的波长相对于1280nm变大,向相对1280nm的长波长(1280nm-1285nm)方向,实现相对目标波长的长波长方向5nm的波长调制范围。The magnitude of the output wavelength of the laser is proportional to the grating period experienced by the optical waveguide in the grating area. Some embodiments of the present disclosure set the optical waveguide in the grating area as an oblique waveguide relative to the extending direction of the optical waveguide in the gain area to increase the grating area. The grating period experienced by the optical waveguide makes the wavelength of the laser output light larger than that of 1280nm, and achieves a wavelength modulation range of 5nm in the long wavelength direction relative to the target wavelength in the direction of the long wavelength (1280nm-1285nm) relative to 1280nm.
本公开一些实施例中第七激光器、第八激光器、第九激光器、第十激光器的光栅区的光波导的延伸方向与增益区的光波导的延伸方向之间的倾斜角依次为2.57度、3.63度、4.44度和5.15度,实现等效的光栅周期变化为1947.09A,1949.05A,1951.01A,1953.03A,可以实现波长从1280nm到1285nm 的调制范围。In some embodiments of the present disclosure, the inclination angles between the extending direction of the optical waveguide in the grating region of the seventh laser, the eighth laser, the ninth laser, and the tenth laser and the extending direction of the optical waveguide in the gain region are 2.57 degrees and 3.63 degrees respectively. degrees, 4.44 degrees and 5.15 degrees, the equivalent grating period changes are 1947.09A, 1949.05A, 1951.01A, 1953.03A, and the modulation range of wavelength from 1280nm to 1285nm can be realized.
在本公开一些实施例中,采用多种波长调制技术,第一组共6个激光器通道通过优化光栅区的光波导的材料,同时配合对光栅区的光波导注入载流子的变化,向相对目标波段的短波长方向实现调制;第二组共4个激光器通道通过采用斜波导结构,向相对目标波段的长波长方向实现调制。In some embodiments of the present disclosure, a variety of wavelength modulation techniques are used. The first group of 6 laser channels optimizes the material of the optical waveguide in the grating area, and at the same time cooperates with the change of injected carriers into the optical waveguide in the grating area. The short-wavelength direction of the target band is modulated; the second group of 4 laser channels is modulated in the long-wavelength direction relative to the target band by adopting an oblique waveguide structure.
图9为根据一些实施例的激光器的光栅区的光波导延伸方向相对于增益区的光波导延伸方向的倾斜角与波长变化关系示意图,图9中标号为1、2、3、4和5的变化线分别依次对应角度为0度、2.57度、3.63度、4.44度和5.15度的倾斜角。如图9所示,第七激光器、第八激光器、第九激光器、第十激光器的光栅区的光波导延伸方向与增益区的光波导延伸方向之间的倾斜角依次为2.57度、3.63度、4.44度和5.15度时,可以实现波长从1280到1285nm的变化范围。Fig. 9 is a schematic diagram showing the relationship between the inclination angle of the optical waveguide extension direction of the grating region relative to the optical waveguide extension direction of the gain region and the wavelength change of the laser according to some embodiments, and the labels in Fig. 9 are 1, 2, 3, 4 and 5 The change lines respectively correspond to inclination angles with angles of 0 degree, 2.57 degrees, 3.63 degrees, 4.44 degrees and 5.15 degrees. As shown in Figure 9, the inclination angles between the extending direction of the optical waveguide of the grating region of the seventh laser, the eighth laser, the ninth laser and the tenth laser and the extending direction of the optical waveguide of the gain region are 2.57 degrees, 3.63 degrees, At 4.44 degrees and 5.15 degrees, the wavelength range from 1280 to 1285nm can be realized.
第七激光器、第八激光器、第九激光器、第十激光器的光栅区的光波导延伸方向与增益区的光波导之间有倾斜角,由于倾斜的光栅(或倾斜的光栅区的光波导)导致光栅区的光波导侧面粗糙程度增加,损耗变大,并且损耗随着角度增加变大。同时由于增益区的光波导的延伸方向与光栅区的光波导的延伸方向不一致,尾接区域(即增益区的光波导与光栅区的光波导连接的区域)的损耗也会随着角度增加而变大。因此,光栅区的光波导相对于增益区的光波导倾斜虽然可以增加等效的光栅周期,但是会造成光栅区的光波导损耗变大,器件工作的起振电流变大,功率降低。由于此应用对于功率有底限的要求,所以倾斜角度并不可以一直变大。经过反复的实验,6,7,8,9号通道的倾斜角度设计为2.57度,3.63度,4.44度,5.15度,实现等效的光栅周期变化为1947.09A,1949.05A,1951.01A,1953.03A,可以实现波长变化从1280nm到1285nm。There is an inclination angle between the extension direction of the optical waveguide of the grating area of the seventh laser, the eighth laser, the ninth laser, and the tenth laser and the optical waveguide of the gain area, due to the inclined grating (or the optical waveguide of the inclined grating area) The roughness of the side of the optical waveguide in the grating area increases, and the loss becomes larger, and the loss becomes larger with the increase of the angle. Simultaneously, because the extension direction of the optical waveguide in the gain region is inconsistent with the extension direction of the optical waveguide in the grating region, the loss in the tail region (that is, the region where the optical waveguide in the gain region is connected to the optical waveguide in the grating region) will increase with the increase of the angle. get bigger. Therefore, although the optical waveguide in the grating area is inclined relative to the optical waveguide in the gain area, although the equivalent grating period can be increased, it will cause the loss of the optical waveguide in the grating area to increase, the starting current of the device will increase, and the power will decrease. Since this application has a lower limit requirement for power, the tilt angle cannot be increased all the time. After repeated experiments, the tilt angles of channels 6, 7, 8, and 9 are designed to be 2.57 degrees, 3.63 degrees, 4.44 degrees, and 5.15 degrees, and the equivalent grating period changes are 1947.09A, 1949.05A, 1951.01A, 1953.03A , can achieve wavelength changes from 1280nm to 1285nm.
第一激光器、第二激光器、第三激光器、第四激光器、第五激光器、第六激光器、第七激光器、第八激光器、第九激光器、第十激光器这10路激光器的光栅区的光波导与增益区的光波导之间的角度、光栅区的注入电流参数与输出波长之间的关系如表1所示。The first laser, the second laser, the third laser, the fourth laser, the fifth laser, the sixth laser, the seventh laser, the eighth laser, the ninth laser, and the tenth laser The optical waveguide and the grating area of the 10 lasers The relationship between the angle between the optical waveguides in the gain area, the injection current parameters in the grating area, and the output wavelength is shown in Table 1.
表1激光器的光栅区的光波导与增益区的光波导之间的角度、注入电流参数与输出波长之间的关系Table 1 The relationship between the angle between the optical waveguide in the grating area and the optical waveguide in the gain area of the laser, the injection current parameter and the output wavelength
通道aisle 光波导角度(°)Optical waveguide angle (°) 注入电流(mA)Injection current (mA) 输出波长(nm)Output wavelength(nm)
00 00 4040 1274.961274.96
11 00 2525 1276.181276.18
22 00 9.59.5 1277.101277.10
33 00 5.45.4 1278.301278.30
44 00 22 1279.401279.40
55 00 0.30.3 1280.581280.58
66 2.572.57 0.30.3 1281.521281.52
77 3.633.63 0.30.3 1282.621282.62
88 4.444.44 0.20.2 1283.761283.76
99 5.155.15 0.50.5 1284.921284.92
如表1所示,第一激光器、第二激光器、第三激光器、第四激光器、第五激光器和第六激光器的光栅区的光波导的延伸方向与增益区的光波导的延伸方向之间的夹角均为0度,光栅区的光波导的延伸方向与增益区的光波导的延伸方向在同一水平线上,即第一激光器、第二激光器、第三激光器、第四激光器、第五激光器和第六激光器并没有设置为倾斜光波导,而是通过改变外加在光栅区的布拉格反射加电信号的大小来调制不同波长的光束,第一激光器、第二激光器、第三激光器、第四激光器、第五激光器和第六激光器的注入光栅区的光波导的电流大小分别为40mA、25mA、9.5mA、5.4mA、2mA、0.3mA,相应地输出波长分别为1274.96nm、1276.18nm、1277.10nm、1278.30nm、1279.40nm、1280.58nm;实现了向短波长(1275nm-1280nm)方向增加布拉格光栅尾接法布里珀罗腔自身的波长调制范围。As shown in Table 1, the distance between the extending direction of the optical waveguide in the grating region of the first laser, the second laser, the third laser, the fourth laser, the fifth laser and the sixth laser and the extending direction of the optical waveguide in the gain region The included angles are all 0 degrees, and the extension direction of the optical waveguide in the grating area and the extension direction of the optical waveguide in the gain area are on the same horizontal line, that is, the first laser, the second laser, the third laser, the fourth laser, the fifth laser and The sixth laser is not set as an inclined optical waveguide, but modulates beams of different wavelengths by changing the magnitude of the Bragg reflection energization signal applied to the grating area, the first laser, the second laser, the third laser, the fourth laser, The currents of the fifth laser and the sixth laser injected into the optical waveguide of the grating area are 40mA, 25mA, 9.5mA, 5.4mA, 2mA, 0.3mA, and the corresponding output wavelengths are 1274.96nm, 1276.18nm, 1277.10nm, 1278.30 nm, 1279.40nm, 1280.58nm; realized to increase the wavelength modulation range of the Bragg grating tailed Fabry-Perot cavity to the short wavelength (1275nm-1280nm) direction.
第七激光器、第八激光器、第九激光器、第十激光器光栅区光波导的延伸方向与增益区的光波导的延伸方向之间的夹角依次为2.57度、3.63度、4.44度和5.15度,即第七激光器、第八激光器、第九激光器、第十激光器均设置为斜波导,相应地输出波长分别为1281.52nm、1282.62nm、1283.76nm、1284.92nm;向长波长(1280nm-1285nm)方向增加波长调制范围。The included angles between the extension direction of the optical waveguide in the grating area of the seventh laser, the eighth laser, the ninth laser, and the tenth laser and the extension direction of the optical waveguide in the gain area are 2.57 degrees, 3.63 degrees, 4.44 degrees and 5.15 degrees in sequence, That is, the seventh laser, the eighth laser, the ninth laser, and the tenth laser are all set as oblique waveguides, and the corresponding output wavelengths are 1281.52nm, 1282.62nm, 1283.76nm, and 1284.92nm; the increase in the direction of long wavelength (1280nm-1285nm) wavelength modulation range.
这样最终使得激光芯片上的各激光器可实现10nm的波长调制范围。In this way, each laser on the laser chip can finally realize a wavelength modulation range of 10nm.
图10为根据一些实施例的光源组件的10通道激光器的波长具体调制示意图,如图10所示,标号1、2、3、4、5、6、7、8、9、10分别为第一激光器、第二激光器、第三激光器、第四激光器、第五激光器和第六激光器、第七激光器、第八激光器、第九激光器和第十激光器对应的波长变化,即0号通道、1号通道、2号通道、3号通道、4号通道、5号通道、6号通道、7号通道、8号通道、9号通道的激光器对应的波长变化。Fig. 10 is a schematic diagram of specific wavelength modulation of a 10-channel laser of a light source assembly according to some embodiments. As shown in Fig. The wavelength changes corresponding to the laser, the second laser, the third laser, the fourth laser, the fifth laser and the sixth laser, the seventh laser, the eighth laser, the ninth laser and the tenth laser, that is, channel 0 and channel 1 , Channel 2, Channel 3, Channel 4, Channel 5, Channel 6, Channel 7, Channel 8, and Channel 9 corresponding to the wavelength change of the laser.
本公开一些实施例提供的光源组件及光模块中,激光芯片表面设置有至少两个激光器,其中一个所述激光器包括增益区和光栅区,通过改变注入光栅区的电流大小输出不同波长的第一光束,进而向相对目标波长的短波长方向增加光栅自身的波长调制范围;另外一个所述激光器包括增益区和光栅区,且光栅区的光波导的延伸方向相对于增益区的光波导的延伸方向倾斜并且形成倾斜角,通过改变该倾斜角大小以输出不同波长的第二光束,通过采用斜波导设计,实现向相对目标波长的长波长方向增加波长调制范围。本公开可以实现在激光芯片层次集成激光器,实现单颗芯片多路激光器同时工作,提高芯片的集成密度,且可以通过载流子注入变化和斜波导共同实现波长的精确调制。In the light source assembly and the optical module provided by some embodiments of the present disclosure, at least two lasers are arranged on the surface of the laser chip, one of the lasers includes a gain region and a grating region, and the first output of different wavelengths is output by changing the magnitude of the current injected into the grating region. light beam, and then increase the wavelength modulation range of the grating itself to the short wavelength direction relative to the target wavelength; the other laser includes a gain region and a grating region, and the extension direction of the optical waveguide in the grating region is relative to the extension direction of the optical waveguide in the gain region Tilting and forming a tilt angle, by changing the size of the tilt angle to output second light beams with different wavelengths, and by adopting a slope waveguide design, the wavelength modulation range can be increased in the long wavelength direction relative to the target wavelength. The present invention can realize the integration of lasers at the level of laser chips, realize the simultaneous operation of multiple lasers on a single chip, improve the integration density of chips, and realize precise modulation of wavelength through carrier injection changes and inclined waveguides.
本公开一些实施例中的光源组件可以作为硅光结构的光模块的光源,光源组件的光栅区尾接的法布里泊罗谐振腔中发出的光信号耦合至硅光芯片的光入口处。本公开一些实施例提供的光模块实现了在芯片层次上集成多路激光器,实现在同一激光芯片上多路激光器同时输出不同波长的光束,提高了光源的集成度且实现了波长的精确调制。The light source assembly in some embodiments of the present disclosure can be used as a light source of an optical module with a silicon optical structure, and the optical signal emitted from the Fabry Perot resonant cavity tailed by the grating region of the light source assembly is coupled to the optical entrance of the silicon optical chip. The optical module provided by some embodiments of the present disclosure realizes the integration of multiple lasers at the chip level, realizes simultaneous output of beams of different wavelengths by multiple lasers on the same laser chip, improves the integration of light sources and realizes precise modulation of wavelengths.
本领域的技术人员将会理解,本发明的公开范围不限于上述具体实施例,并且可以在不脱离本公开的精神的情况下对实施例的某些要素进行修改和替换。本公开的范围受所附权利要求的限制。Those skilled in the art will appreciate that the disclosed scope of the present invention is not limited to the specific embodiments described above, and some elements of the embodiments can be modified and replaced without departing from the spirit of the present disclosure. The scope of the present disclosure is limited by the appended claims.

Claims (15)

  1. 一种光源组件,包括:A light source assembly, comprising:
    激光芯片;laser chip;
    多个激光器,设置在所述激光芯片的表面,每个激光器均包括增益区和光栅区,所述增益区和所述光栅区均具有光波导;其中,所述多个激光器包括:A plurality of lasers are arranged on the surface of the laser chip, each laser includes a gain region and a grating region, and the gain region and the grating region each have an optical waveguide; wherein the plurality of lasers include:
    第一组激光器,所述第一组激光器中每个激光器的光栅区被配置为接收外部电流以输出对应波长的第一光束;A first group of lasers, the grating region of each laser in the first group of lasers is configured to receive an external current to output a first beam of corresponding wavelength;
    第二组激光器,所述第二组激光器中每个激光器的光栅区的光波导与增益区的光波导之间具有倾斜角,以输出对应波长的第二光束,所述第二光束的波长与所述第一光束的波长不同。The second group of lasers, the optical waveguide of each laser in the second group of lasers has an inclination angle between the optical waveguide of the grating area and the optical waveguide of the gain area, so as to output a second beam of corresponding wavelength, and the wavelength of the second beam is the same as that of the gain area. The wavelengths of the first light beams are different.
  2. 根据权利要求1所述的光源组件,其中,所述多个激光器的光栅区均尾接法布里泊罗谐振腔。The light source assembly according to claim 1, wherein the grating regions of the plurality of lasers are each terminated with a Fabry-Perot resonator.
  3. 根据权利要求1所述的光源组件,其中,所述光栅区的光波导的材料包括光致发光峰值为1170nm的InGaAsP。The light source assembly according to claim 1, wherein the material of the optical waveguide in the grating region comprises InGaAsP with a photoluminescence peak of 1170nm.
  4. 根据权利要求3所述的光源组件,其中,所述光栅区还包括光栅,所述光栅与所述光波导层叠设置,所述光栅的材料包括光致发光峰值为1150nm的InGaAsP。The light source assembly according to claim 3, wherein the grating area further includes a grating, the grating is stacked with the optical waveguide, and the material of the grating includes InGaAsP with a photoluminescence peak of 1150nm.
  5. 根据权利要求4所述的光源组件,其中,所述光栅为分布式布拉格反射光栅。The light source assembly of claim 4, wherein the grating is a distributed Bragg reflection grating.
  6. 根据权利要求1所述的光源组件,其中,所述多个激光器包括10个激光器,且相邻激光器之间的距离为250μm。The light source assembly according to claim 1, wherein the plurality of lasers comprises 10 lasers, and the distance between adjacent lasers is 250 μm.
  7. 根据权利要求6所述的光源组件,其中,所述第一组激光器包括6个激光器,每个激光器的光栅区的光波导延伸方向与增益区的光波导延伸方向相同;The light source assembly according to claim 6, wherein the first group of lasers includes 6 lasers, and the extending direction of the optical waveguide in the grating region of each laser is the same as the extending direction of the optical waveguide in the gain region;
    所述6个激光器的光栅区接收不同的外部电流,以输出不同波长的第一光束。The grating regions of the six lasers receive different external currents to output first light beams with different wavelengths.
  8. 根据权利要求7所述的光源组件,其中,所述第二组激光器包括4个激光器,所述4个激光器的光栅区的光波导与增益区的光波导之间的倾斜角不同,以输出不同波长的第二光束。The light source assembly according to claim 7, wherein the second group of lasers includes four lasers, and the inclination angles between the optical waveguides in the grating region and the optical waveguides in the gain region of the four lasers are different to output different wavelength of the second beam.
  9. 根据权利要求8所述的光源组件,其中,所述4个激光器的光栅区的光波导与增益区的光波导之间的倾斜角依次为2.57度、3.63度、4.44度和5.15度。The light source assembly according to claim 8, wherein the inclination angles between the optical waveguides in the grating area and the optical waveguides in the gain area of the four lasers are 2.57 degrees, 3.63 degrees, 4.44 degrees and 5.15 degrees in sequence.
  10. 根据权利要求1所述的光源组件,还包括多个信号激光器和多个光探测器;The light source assembly according to claim 1, further comprising a plurality of signal lasers and a plurality of photodetectors;
    所述多个信号激光器和所述多个光探测器设置在所述激光芯片的表面,且用于有源对齐。The plurality of signal lasers and the plurality of photodetectors are disposed on the surface of the laser chip for active alignment.
  11. 根据权利要求1所述的光源组件,其中,所述多个激光器还包括第三组激光器,所述第三组激光器中每个激光器的光栅区还包括温度调节器,所述温度调节器设置在所述光波导上,被配置为调节所述光栅区的温度。The light source assembly according to claim 1, wherein the plurality of lasers further comprises a third group of lasers, the grating area of each laser in the third group of lasers further comprises a temperature regulator, and the temperature regulator is arranged at The optical waveguide is configured to regulate the temperature of the grating region.
  12. 一种光模块,包括:An optical module, comprising:
    电路板;circuit board;
    如权利要求1所述的光源组件,与所述电路板连接;The light source assembly according to claim 1, connected to the circuit board;
    硅光芯片,与所述电路板电连接,且与所述光源组件光连接,被配置为接收所述光源组件发出的光束。The silicon photonics chip is electrically connected to the circuit board and optically connected to the light source component, configured to receive the light beam emitted by the light source component.
  13. 根据权利要求12所述的光模块,其中,所述电路板包括通孔,所述光源组件和所述硅光芯片设置在所述通孔内。The optical module according to claim 12, wherein the circuit board includes a through hole, and the light source component and the silicon photonic chip are arranged in the through hole.
  14. 根据权利要求13所述的光模块,还包括衬底,所述衬底设置在所述通孔内,所述硅光芯片和所述光源组件设置在所述衬底上。The optical module according to claim 13, further comprising a substrate, the substrate is arranged in the through hole, and the silicon photonic chip and the light source assembly are arranged on the substrate.
  15. 根据权利要求14所述的光模块,其中,所述衬底的材料包括硅或玻璃。The optical module according to claim 14, wherein the material of the substrate comprises silicon or glass.
PCT/CN2022/121481 2021-11-24 2022-09-26 Light source assembly and optical module WO2023093275A1 (en)

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