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WO2015106538A1 - 触控显示面板及其制备方法 - Google Patents

触控显示面板及其制备方法 Download PDF

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Publication number
WO2015106538A1
WO2015106538A1 PCT/CN2014/080450 CN2014080450W WO2015106538A1 WO 2015106538 A1 WO2015106538 A1 WO 2015106538A1 CN 2014080450 W CN2014080450 W CN 2014080450W WO 2015106538 A1 WO2015106538 A1 WO 2015106538A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode line
electrode
line
display panel
touch
Prior art date
Application number
PCT/CN2014/080450
Other languages
English (en)
French (fr)
Inventor
王灿
王路
Original Assignee
京东方科技集团股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 京东方科技集团股份有限公司 filed Critical 京东方科技集团股份有限公司
Priority to US14/428,942 priority Critical patent/US9817501B2/en
Publication of WO2015106538A1 publication Critical patent/WO2015106538A1/zh

Links

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0445Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/047Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using sets of wires, e.g. crossed wires
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04112Electrode mesh in capacitive digitiser: electrode for touch sensing is formed of a mesh of very fine, normally metallic, interconnected lines that are almost invisible to see. This provides a quite large but transparent electrode surface, without need for ITO or similar transparent conductive material

Definitions

  • Embodiments of the present invention relate to a touch display panel and a method of fabricating the same. Background technique
  • the integrated integration technology development route of the embedded touch screen mainly includes the panel.
  • the touch panel is a touch technology that embeds the touch panel function between the color filter substrate and the polarizer. Specifically, the touch sensing component layer in the touch panel is formed on the color filter substrate. On the base substrate, and attached to the color filter.
  • In-panel touch is a touch technology that embeds the touch panel function into a pixel. Specifically, the touch panel function is integrated into the color filter substrate to be embedded in the liquid crystal pixel. Compared with the touch panel on the panel, the touch panel in the panel has the advantages of thinner and lighter weight, which reduces the thickness of the panel and reduces the manufacturing cost.
  • the touch electrode includes a touch scan line and a touch sensor. line.
  • a touch scan line and a touch sensor line are directly added to a thin film transistor (TFT) array substrate to implement a touch function.
  • TFT thin film transistor
  • ITO transparent indium tin oxide
  • the sensing line is formed to form a sensing capacitance at the intersection of the opposite faces of the two layers of germanium electrodes.
  • the capacitive in-cell touch display works as follows.
  • the touch scan signal is loaded on the touch scan line, the voltage signal that the touch sensor line passes through the induction capacitor is detected; in this process, if the human body touches the touch display screen, the human body electric field will be touched at the touched position.
  • the capacitance value of the sensing capacitor is changed, thereby changing the voltage signal coupled by the touch sensing line, and the position of the contact can be determined according to the change of the voltage signal.
  • Embodiments of the present invention provide a touch display panel and a method for fabricating the same, which can reduce the resistance of the touch electrode, thereby improving signal delay and improving touch precision.
  • At least one embodiment of the present invention provides a touch display panel including an array substrate and a counter substrate disposed opposite to each other, and a set of mutually parallel first electrode lines disposed on the array substrate or the opposite substrate; a set of mutually parallel second electrode lines disposed on the array substrate or the opposite substrate and intersecting the first electrode lines.
  • the first electrode line and the second electrode line are not electrically connected, and the array substrate or the opposite substrate includes a black matrix; the first electrode line and/or the second electrode line and the The black matrix positions correspond, and the first electrode line and/or the second electrode line corresponding to the black matrix position are metal electrode lines.
  • first electrode line and the second electrode line each correspond to the position of the black matrix; the first electrode line and the second electrode line are both metal electrode lines.
  • the first electrode line corresponds to the position of the black matrix
  • the second electrode line is located in the light transmission area of the display panel
  • the first electrode line is a metal electrode line
  • the second electrode line is Transparent ITO electrode wire.
  • the first electrode line and the second electrode line are both disposed on the opposite substrate or both on the array substrate, and between the first electrode line and the second electrode line An insulating layer is provided.
  • the first electrode line is disposed on the color filter substrate, and the second electrode line is disposed on the array substrate.
  • the first electrode line and/or the second electrode line are disposed on the opposite substrate and the opposite substrate includes the black matrix
  • the first electrode line and/or The second electrode line is disposed on a side of the black matrix of the opposite substrate adjacent to the array substrate.
  • a projection of the black matrix on the opposite substrate covers a projection of the first electrode line and/or the second electrode line on the color filter substrate corresponding to the position of the black matrix.
  • the first electrode line is a touch scan line
  • the second electrode line is a touch sensing line
  • the first electrode line is a touch sensing line
  • the second electrode line is a touch scan line. line.
  • the touch display panel further includes a signal input line connected to the touch scan line. And a signal collecting line connected to the touch sensing line.
  • the material of the metal electrode wire includes at least one of molybdenum, copper, silver, aluminum metal material or aluminum bismuth or aluminum silver alloy material.
  • the thickness of the metal electrode line is 100 ⁇ 400
  • the opposite substrate is a color film substrate.
  • At least another embodiment of the present invention provides a method of fabricating the above touch display panel, the method comprising: depositing a low temperature deposition when forming a first electrode line and/or a second electrode line corresponding to a position of a black matrix The process forms a metal layer, and the metal layer is subjected to a mask process to form a metal electrode line.
  • the metal layer having a thickness of 100 to 400 nm is formed by a magnetron sputtering process in an atmosphere of 20 ° C to 50 ° C .
  • FIG. 1 is a schematic structural diagram 1 of a touch display panel according to an embodiment of the present invention
  • FIG. 2 is a schematic structural diagram 2 of a touch display panel according to an embodiment of the present invention
  • FIG. 4 is a schematic diagram of a touch display panel according to an embodiment of the present invention
  • 5(a) to 5(c) are schematic diagrams showing a process of preparing a touch electrode according to an embodiment of the present invention.
  • At least one embodiment of the present invention provides a touch display panel, as shown in FIGS.
  • the first electrode line 301 and the second electrode line 302 are not electrically connected, that is, insulated from each other.
  • the first electrode line 301 and/or the second electrode line 302 correspond to the position of the black matrix 200 of the color filter substrate 20, and the first electrode line 301 and/or corresponding to the position of the black matrix 200 Or the second electrode line 302 is a metal electrode line. That is, at least one of the first electrode line 301 or the second electrode line 302 corresponding to the position of the black matrix 200 is a metal electrode line.
  • the first electrode line 301 and the second electrode line 302 together constitute the touch electrode 30.
  • the function of the touch electrode 30 is limited in the embodiment of the present invention, but the respective functions of the first electrode line 301 and the second electrode line 302 are not specifically limited.
  • the first electrode line 301 can be a touch sensing line
  • the second electrode line 301 can be a touch sensing line
  • the second electrode line 302 can be a touch scan line.
  • the touch display panel further includes a driving circuit connected to the touch scan line and the touch sensing line.
  • the driving circuit can be disposed on a separate printed circuit board (PCB), and the relevant circuit portion on the PCB is electrically connected to the touch scanning line and the touch sensing line by bonding. connection.
  • PCB printed circuit board
  • the relevant circuit portion on the PCB is electrically connected to the touch scanning line and the touch sensing line by bonding. connection.
  • the relevant circuit portion on the PCB is electrically connected to the touch scan line and the touch sensing line through the lead wires.
  • the touch display panel may further include a signal input line (not shown) electrically connected to the touch scan line and a signal set line electrically connected to the touch sensing line (FIG. Not shown).
  • the signal input line and the signal collection line may both be disposed on the PCB, and the lead wire and the touch scan line and the electrical connection respectively connected to the touch scan line and the touch sensing line respectively The electrical connection between the touch sensing lines is achieved.
  • the above lead wires may be made of a metal material.
  • the leads of the first electrode line 301 and the leads of the second electrode line 302 may be formed separately therefrom.
  • the lead of the metal electrode line may be formed together with the set of metal electrode lines, and in order to reduce the number of patterning processes, the ITO electrode
  • the leads of the wires may be formed together with patterns of other metal materials, for example, may be formed together with the leads of the metal electrode wires.
  • first electrode line 301 and the second electrode line 302 are not limited; they may be simultaneously disposed on the array substrate 10 or simultaneously On the color filter substrate 20, one set of electrode lines may be disposed on the array substrate 10, and another set of electrode lines may be disposed on the color filter substrate 20.
  • the first electrode line 301 and the second electrode line 302 are arranged to cross each other without electrical connection therebetween, such that the first electrode line 301 and the second electrode line 302 intersect.
  • the sensing capacitor can be formed at the position; the touch display panel can determine the position of the contact by the change of the capacitance value of the sensing capacitor during operation.
  • the touch display panel Since the line width of the metal electrode line is narrower than the line width of the ITO electrode line at the same resistance value, the arrangement thereof can be relatively tighter. Therefore, at least one embodiment of the present invention can be according to the touch display panel.
  • the touch precision requirement is to adjust the spacing between adjacent first electrode lines 301 and the spacing between adjacent second electrode lines 302.
  • the first electrode line 301 and the second electrode line 302 may each use an ITO electrode line; however, the electrode line of the ITO material has a defect with a large resistance value, and the ITO electrode line is used as the touch scan line and the touch sensing line. , may cause signal delay.
  • the metal electrode wire is used for the metal, and the electrode wire of the metal material is disposed in a region corresponding to the position of the black matrix 200 of the color filter substrate 20, so that the possibility of being caused by the opacity of the metal material can be avoided.
  • the problem of light transmittance of the display device is not limited to the display device.
  • the first electrode line 301 and the second electrode line 302 may both be metal electrode lines and correspond to the position of the black matrix 200; or a set of electrode lines may be used with metal electrode lines.
  • the positions of the black matrix 200 correspond to each other, and the other set of electrode lines are ITO electrode lines.
  • the material of the metal electrode wire may include at least one of a metal material such as phase, copper, silver or aluminum or an alloy material such as aluminum bismuth or aluminum silver; of course, the metal electrode wire may also be used.
  • the metal or alloy material may be any metal material that is advantageous for reducing the resistance of the first electrode line 301 and/or the second electrode line 302; the thickness of the metal electrode line is preferably 100 to 400.
  • the position of the first electrode line 301 and/or the second electrode line 302 corresponding to the black matrix 200 of the color filter substrate 20 refers to: the black matrix 200 on the color filter substrate 20
  • the projection may completely cover the projection of the first electrode line 301 and/or the second electrode line 302 on the color filter substrate 20 corresponding to the position of the black matrix 200.
  • At least one embodiment of the present invention provides a touch display panel including an array substrate 10 and a color filter substrate 20 that are oppositely disposed to form a liquid crystal cell, and a set of the array substrate 10 or the color filter substrate 20 a first electrode line 301 parallel to each other; a set of mutually parallel second electrode lines 302 disposed on the array substrate 10 or the color filter substrate 20 and intersecting the first electrode line 301; There is no electrical connection between the first electrode line 301 and the second electrode line 302.
  • the first electrode line 301 and/or the second electrode line 302 correspond to the position of the black matrix 200 of the color filter substrate 20, and the first electrode line 301 and/or corresponding to the position of the black matrix 200 Or the second electrode line 302 is a metal electrode line.
  • the first electrode line 301 and the second electrode line 302 may serve as touch scan lines and touch sensing lines of the touch display panel, respectively, by using the first electrode lines 301 and/or
  • the second electrode line 302 is disposed as a metal electrode line, and the touch scan line and/or the touch can be effectively reduced compared to using the ITO electrode line as the touch scan line and the touch sensing line. Controlling the resistance of the sensing line to improve the delay of the signal; on the basis of this, since the line width of the metal electrode line is narrower than the line width of the ITO electrode line under the same resistance value, the metal is selected.
  • the electrode line can also improve the touch precision of the touch display panel.
  • the first electrode line 301 may be located at a position corresponding to the black matrix 200, and the second electrode line 302 may be located in a light transmitting area of the display panel; the first electrode line 301
  • the metal electrode line is a transparent ITO electrode line.
  • the first electrode line 301 is located in the light transmissive area of the display panel
  • the second electrode line 302 corresponds to the position of the black matrix 200
  • the first electrode line 301 is a transparent ITO electrode line.
  • said The second electrode line 302 is a metal electrode line.
  • the relative positions of the first electrode line 301 and the second electrode line 302 may be interchanged, which is not limited herein.
  • the resistance of the metal electrode line is smaller than the resistance of the ITO electrode line, by setting the first electrode line 301 or the second electrode line 302 as a metal electrode line, it can be certain The resistance of the first electrode line 301 or the second electrode line 302 is reduced to a certain extent, so that the signal delay phenomenon of the touch display panel is improved.
  • the first electrode line 301 and the second electrode line 302 may both correspond to the position of the black matrix 200, and the first electrode Both the line 301 and the second electrode line 302 are metal electrode lines.
  • the resistance values of the first electrode line 301 and the second electrode line 302 can be greatly reduced, thereby Improving the signal delay phenomenon of the touch display panel. Further, by arranging the first electrode line 301 and the second electrode line 302 as metal electrode lines, it is also possible to reduce the line width of the first electrode line 301 and the second electrode line 302, thereby improving Touch sensitivity.
  • the first electrode line 301 and the second electrode line 302 may be disposed on the color filter substrate 20; or, as shown in FIG. 3, the first electrode line 301 and the second electrode line 302 may both be disposed on the array substrate 10. In this case, since there is no electrical connection between the first electrode line 301 and the second electrode line 302, insulation between the first electrode line 301 and the second electrode line 302 should also be included.
  • the first electrode line 301 may be disposed on the array substrate 10
  • the second electrode line 302 may be disposed on the color filter substrate 20.
  • a sensing capacitor can be formed at the intersection of the first electrode line 301 and the second electrode line 302.
  • the capacitance value of the sensing capacitor can be passed. Change to determine the actual position of the contact.
  • the first electrode line 301 and/or the second electrode line 302 need to be electrically connected to an external driving circuit, the first electrode line 301 and/or the second electrode line are required to be connected.
  • the lead portion of 302 is exposed for easy connection.
  • the first electrode line 301 and/or the second electrode line 302 are disposed on the color filter substrate 20
  • the first electrode line 301 and/or the The second electrode line 302 is preferably disposed on a side of the black matrix 200 of the color filter substrate 20 adjacent to the array substrate 10.
  • the first electrode line 301 and/or the second electrode The line 302 may be disposed between the black matrix 200 and the color photoresist, or disposed on a side of the color photoresist adjacent to the array substrate 10; the color photoresist of the color filter substrate 20 is located at In the case where the black matrix 200 faces away from the side of the array substrate 10, the first electrode line 301 and/or the second electrode line 302 may be disposed on a side of the black matrix 200 adjacent to the array substrate 10. .
  • the specific position of the first electrode line 301 and/or the second electrode line 302 may not be limited herein as long as it is convenient to be in the first electrode line 301 and/or the second electrode line 302. Electrical connection between the drive circuits is sufficient.
  • the metal electrode line when used for the first electrode line 301 and/or the second electrode line 302, the metal electrode line can be made in consideration of the light transmittance of the touch display panel.
  • the black matrix 200 corresponds to a position.
  • the projection of the black matrix 200 on the color filter substrate 20 can be covered.
  • the light transmittance of the touch display panel has an influence.
  • the array substrate includes a plurality of gate lines and a plurality of data lines, the gate lines and the data lines crossing each other thereby defining sub-pixel units arranged in a matrix, each sub-pixel unit including a thin film as a switching element A transistor and a pixel electrode and a common electrode for controlling the arrangement of the liquid crystal.
  • the gate of each sub-pixel thin film transistor is electrically connected or integrally formed with a corresponding gate line
  • the source is electrically connected or integrally formed with a corresponding data line
  • the drain is electrically or integrally formed with the corresponding pixel electrode.
  • the color film substrate includes a black matrix and a color photoresist.
  • the black matrix defines sub-pixel units and avoids interference between the sub-pixel units, and the sub-pixel units of the color filter substrate and the sub-pixel units of the array substrate correspond to each other.
  • the color photoresist is formed in the sub-pixel unit and defines the color to be displayed by the corresponding sub-pixel unit, such as red, green or blue. If no color photoresist is formed in the sub-pixel unit, the sub-pixel unit displays, for example, white.
  • the array substrate is a COA (color filter on Array) type array substrate, that is, the array substrate includes a color photoresist, and correspondingly disposed opposite to the array substrate to form an opposite substrate of the liquid crystal cell
  • the color resist may not be included, but may include a black matrix.
  • the array substrate includes a color photoresist and a black matrix, and the opposite substrate disposed opposite to the array substrate to form the liquid crystal cell may not include the color photoresist and the black matrix.
  • the array substrate 2 and the opposite substrate 3 are opposed to each other and joined together by a sealant 6 to form a liquid crystal cell 1, in the liquid crystal cell 1.
  • the liquid crystal material 4 is filled therein.
  • An example of the counter substrate 3 is a color filter substrate (for example, the color filter substrate 20 of the above embodiment).
  • the pixel electrode of each sub-pixel unit of the array substrate 2 is used to apply an electric field to control the degree of rotation of the liquid crystal material to perform a display operation.
  • the touch display device further includes a backlight 5 that provides backlighting for the array substrate.
  • At least one embodiment of the present invention provides a touch display panel including a first substrate and a second substrate disposed opposite to form a liquid crystal cell, and the first substrate and the second substrate may be, for example, an array substrate and a counter substrate.
  • the touch display panel further includes a set of mutually parallel first electrode lines disposed on the first substrate or the second substrate; disposed on the first substrate or the second substrate, and A set of mutually parallel second electrode lines are arranged in a crosswise arrangement of the first electrode lines. There is no electrical connection between the first electrode line and the second electrode line, that is, insulation from each other.
  • first electrode line and/or the second electrode line are metal electrode lines.
  • the first electrode line and the second electrode line are respectively a touch sensing line and a touch scanning line, or are respectively a touch scanning line and a touch sensing line.
  • Some embodiments of the present invention further provide a method for fabricating the above touch display panel, the method comprising: when forming the first electrode line 301 and/or the second electrode line 302 corresponding to the position of the black matrix 200, The low temperature deposition process forms a metal layer, and the metal layer is subjected to a mask process to form a metal electrode line.
  • the low-temperature deposition process may be a deposition process using a low-temperature magnetron sputtering method; on the basis of the above, preferably, the thickness may be 100 by a magnetron sputtering process in an atmosphere of 20 ° C to 50 ° C. ⁇ 400nm metal layer.
  • the first electrode line 301 and the second electrode line 302 may be formed on the color film substrate 20 or both on the array substrate 10.
  • An insulating layer should also be included between the first electrode line 301 and the second electrode line 302.
  • the first electrode line 301 may be formed on the array substrate 10
  • the second An electrode line 302 may be formed on the color filter substrate 20.
  • the first electrode line 301 and the second electrode line 302 may both be metal electrode lines, or one of the electrode lines may be a metal electrode line, and the other group of electrode lines may be an ITO electrode line. Based on this, the metal electrode line is formed at a position corresponding to the position of the black matrix 200, and the ITO electrode line may be formed in a light transmitting area of the display panel.
  • the first electrode line 301 and the second electrode line 302 are both formed on the color filter substrate 20 and are all metal electrode lines, and the color filter substrate 20 is sequentially formed on the base substrate.
  • an example of the formation process of the touch electrode 30 may include the following steps:
  • the black matrix 200 is formed on the base substrate by one patterning process.
  • the black matrix 200 may have a width of 7-9 ⁇ m, such as 8 ⁇ m.
  • the base substrate may be a glass substrate, a plastic substrate or the like.
  • a cooling operation is performed on the reaction chamber. After the temperature of the reaction chamber is stabilized at a predetermined temperature, the black matrix 200 is formed.
  • a layer of molybdenum metal is deposited on the substrate by a low-temperature magnetron sputtering process, and then a set of mutually parallel first electrode lines 301 are sequentially formed by exposure, development, etching, stripping, and the like.
  • the first electrode line 301 corresponds to the position of the black matrix 200.
  • the actual temperature of the low-temperature magnetron sputtering process may be room temperature 25 ° C; the actual thickness of the molybdenum metal layer may be 100-400 nm; and the width of the first electrode line 301 may be 7 ⁇ m.
  • an insulating layer 310 is formed on the substrate on which the first electrode line 301 is formed.
  • the insulating layer 310 is used to achieve electrical insulation between the first electrode line 301 and the second electrode line 302. 5104, referring to FIG. 5(c), after the insulating layer 310 is formed, a temperature lowering operation is performed on the reaction chamber, and after the temperature of the reaction chamber is stabilized at a predetermined temperature, the insulating layer 310 is formed.
  • a layer of molybdenum metal is deposited on the substrate by a low-temperature magnetron sputtering process, and then a set of mutually parallel second electrode lines 302 are sequentially formed by exposure, development, etching, stripping, and the like.
  • the second electrode line 302 corresponds to the position of the black matrix 200.
  • the actual temperature of the low-temperature magnetron sputtering process may be room temperature 25 ° C; the actual thickness of the molybdenum metal layer may be 100-400 nm; and the width of the second electrode line 302 may be 7 ⁇ m.
  • the color film substrate 20 having a touch function is formed; the first electrode line 301 and the second electrode line 302 are separated by metal electrode lines, which can effectively improve the resistance
  • the signal delay phenomenon caused by the large value increases the touch precision of the touch display panel.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Position Input By Displaying (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Liquid Crystal (AREA)

Abstract

一种触控显示面板及其制备方法,所述触控显示面板包括相对设置的阵列基板(10)和对置基板(20);设置在所述阵列基板(10)或所述对置基板(20)上的一组相互平行的第一电极线(301);设置在所述阵列基板(10)或所述对置基板(20)上、且与所述第一电极线(301)交叉排列的一组相互平行的第二电极线(302)。所述第一电极线(301)与所述第二电极线(302)之间无电连接,所述阵列基板(10)或所述对置基板(20)包括黑矩阵(200);所述第一电极线(301)和/或所述第二电极线(302)与所述黑矩阵(200)位置对应,且与所述黑矩阵(200)位置对应的所述第一电极线(301)和/或所述第二电极线(302)为金属电极线。该触控显示装置可降低触控电极的阻值,改善信号的延迟现象,同时提高触控精度。

Description

触控显示面板及其制备方法 技术领域
本发明的实施例涉及一种触控显示面板及其制备方法。 背景技术
随着显示技术的不断发展, 将触控面板功能与液晶显示面板进行一体化 整合日趋流行。
目前, 内嵌式触控显示屏的一体化整合技术研发路线主要包括面板上
( on-cell )触控和面板内 ( in-cell )触控两大类。 两者的差异如下。 面板上触 控是将触控面板功能嵌入到彩膜基板 ( color filter substrate )与偏光板之间的 触控技术, 具体来说, 将触控面板中的触控感应组件层制作在彩膜基板的衬 底基板上, 并与彩色滤光片贴合。 面板内触控是将触控面板功能嵌入到像素 中的触控技术, 具体来说, 将触控面板功能整合于彩膜基板中, 从而内嵌至 液晶像素中。 相比于面板上触控面板, 面板内触控面板更具薄型化和轻量化 的优势, 减小面板厚度的同时还可降低制造成本。
为了使触控显示屏具有更轻薄的显示面板, 已经出现了将触控电极制作 在液晶显示面板内部的电容式内嵌触控显示屏; 所述触控电极包括触控扫描 线和触控感应线。 例如, 在薄膜晶体管 (Thin Film Transistor, TFT )阵列基 板上直接增加触控扫描线和触控感应线, 以实现触控功能。 在 TFT阵列基板 的表面制作两层异面相交且非电连接的条状透明氧化铟锡 (Indium Tin Oxides, ITO ) 电极, 这两层 ΙΤΟ电极分别作为触控显示屏的触控扫描线和 触控感应线, 在该两层 ΙΤΟ电极的异面相交处形成感应电容。
该电容式内嵌触控显示屏的工作原理如下。 在对触控扫描线加载触控扫 描信号时, 检测触控感应线通过感应电容辆合出的电压信号; 在此过程中, 若人体接触该触控显示屏, 在被触摸位置人体电场就会作用在相应的感应电 容上, 使感应电容的电容值发生变化, 进而改变触控感应线耦合出的电压信 号, 根据电压信号的变化便可确定触点位置。
随着产品分辨率的提升, 对于触控精度的要求也越来越高。 为了获得较 高的触控精度, 需要减小触控扫描线和触控感应线的线宽, 但这会引起所述 触控扫描线和所述触控感应线的阻值增大, 从而导致信号的延迟。 发明内容
本发明的实施例提供一种触控显示面板及其制备方法, 可降低触控电极 的阻值, 从而改善信号的延迟现象, 同时提高触控精度。
本发明的至少一个实施例提供一种触控显示面板, 包括相对设置的阵列 基板和对置基板; 设置在所述阵列基板或所述对置基板上的一组相互平行的 第一电极线; 设置在所述阵列基板或所述对置基板上、 且与所述第一电极线 交叉排列的一组相互平行的第二电极线。 所述第一电极线与所述第二电极线 之间无电连接, 所述阵列基板或所述对置基板包括黑矩阵; 所述第一电极线 和 /或所述第二电极线与所述黑矩阵位置对应,且与所述黑矩阵位置对应的所 述第一电极线和 /或所述第二电极线为金属电极线。
例如, 所述第一电极线和所述第二电极线均与所述黑矩阵位置对应; 所 述第一电极线和所述第二电极线均为金属电极线。
例如, 所述第一电极线与所述黑矩阵位置对应, 所述第二电极线位于所 述显示面板的透光区; 所述第一电极线为金属电极线, 所述第二电极线为透 明 ITO电极线。
例如, 所述第一电极线和所述第二电极线均设置在所述对置基板上或均 设置在所述阵列基板上, 且所述第一电极线和所述第二电极线之间设置有绝 缘层。 或者, 所述第一电极线设置在所述彩膜基板上, 所述第二电极线设置 在所述阵列基板上。
例如,在所述第一电极线和 /或所述第二电极线设置在所述对置基板上且 所述对置基板包括所述黑矩阵的情况下,所述第一电极线和 /或所述第二电极 线设置在所述对置基板的黑矩阵靠近所述阵列基板的一侧。
例如, 所述黑矩阵在所述对置基板上的投影覆盖与所述黑矩阵位置对应 的所述第一电极线和 /或所述第二电极线在所述彩膜基板上的投影。
例如, 所述第一电极线为触控扫描线, 所述第二电极线为触控感应线; 或者, 所述第一电极线为触控感应线, 所述第二电极线为触控扫描线。
例如, 所述触控显示面板还包括与所述触控扫描线连接的信号输入线以 及与所述触控感应线连接的信号釆集线。
例如, 所述金属电极线的材质包括钼、 铜、 银、 铝金属材质或铝钕、 铝 银合金材质中的至少一种。 例如, 所述金属电极线的厚度为 100~400
例如, 所述对置基板为彩膜基板。
本发明的至少另一个实施例提供了一种上述触控显示面板的制备方法, 所述方法包括: 在形成与黑矩阵位置对应的第一电极线和 /或第二电极线时, 通过低温沉积工艺形成金属层, 再对所述金属层进行掩膜工艺形成金属电极 线。
例如,在 20°C~50°C的气氛下,通过磁控溅射工艺形成厚度为 100~400nm 所述金属层。 附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案, 下面将对实 施例或现有技术描述中所需要使用的附图作简单地介绍, 显而易见地, 下面 描述中的附图仅仅涉及本发明的一些实施例,对于本领域普通技术人员来讲, 在不付出创造性劳动的前提下, 还可以根据这些附图获得其他的附图。
图 1为本发明实施例提供的一种触控显示面板的结构示意图一; 图 2为本发明实施例提供的一种触控显示面板的结构示意图二; 图 3为本发明实施例提供的一种触控显示面板的结构示意图三; 图 4为本发明实施例提供的一种触控显示面板的示意图;
图 5 ( a ) 〜图 5 ( c )为本发明实施例提供的一种触控电极的制备过程示 意图。
附图说明:
10-阵列基板; 20-彩膜基板; 200-黑矩阵; 30-触控电极; 301-第一电极 线; 302-第二电极线。 具体实施方式
下面将结合本发明实施例中的附图, 对本发明实施例中的技术方案进行 清楚、 完整地描述, 显然, 所描述的实施例仅仅是本发明一部分实施例, 而 不是全部的实施例。 基于本发明中的实施例, 本领域普通技术人员在没有做 出创造性劳动前提下所获得的所有其他实施例, 都属于本发明保护的范围。 本发明的至少一个实施例提供一种触控显示面板, 如图 1至图 3所示, 包括相对设置以形成液晶盒的阵列基板 10和彩膜基板 20; 设置在所述阵列 基板 10或所述彩膜基板 20上的一组相互平行的第一电极线 301 ; 设置在所 述阵列基板 10或所述彩膜基板 20上、 且与所述第一电极线 301交叉排列的 一组相互平行的第二电极线 302。所述第一电极线 301与所述第二电极线 302 之间无电连接, 即彼此绝缘。 所述第一电极线 301和 /或所述第二电极线 302 与所述彩膜基板 20的黑矩阵 200位置对应,且与所述黑矩阵 200位置对应的 所述第一电极线 301和 /或所述第二电极线 302为金属电极线。 即, 与所述黑 矩阵 200位置对应的所述第一电极线 301或所述第二电极线 302中至少之一 为金属电极线。
对于所述触控显示面板而言,所述第一电极线 301和所述第二电极线 302 共同构成触控电极 30。本发明实施例仅对所述触控电极 30的功能进行限定, 但对所述第一电极线 301和所述第二电极线 302各自的作用不做具体限定。 也就是说, 所述第一电极线 301可以为触控扫描线, 所述第二电极线 302可 以为触控感应线; 或者, 所述第一电极线 301可以为触控感应线, 所述第二 电极线 302可以为触控扫描线。
例如, 为了实现触控功能, 所述触控显示面板还包括与上述的触控扫描 线和触控感应线相连接的驱动电路。 例如, 该驱动电路可以设置在独立的印 制电路板 ( Printed Circuit Board, PCB )上, 通过粘接将该 PCB上的相关电 路部分与所述触控扫描线和所述触控感应线进行电连接。 进一步的, 例如, 考虑到电路布局以及其他方面的因素, 在形成所述触控扫描线和所述触控感 应线的同时, 还形成分别与每一根所述触控扫描线和每一根所述触控感应线 电连接的引线(图中未示出)。 在此基础上, 所述 PCB上的相关电路部分通 过上述的引线与所述触控扫描线和所述触控感应线实现电连接。
可选的, 所述触控显示面板还可以包括与所述触控扫描线电连接的信号 输入线(图中未示出) 以及与所述触控感应线电连接的信号釆集线(图中未 示出)。 这里, 所述信号输入线和所述信号釆集线可以均设置在 PCB上, 通 过分别与所述触控扫描线和所述触控感应线电连接的引线与所述触控扫描线 和所述触控感应线之间实现电相连。 例如, 上述的引线可以为金属材质。 当所述第一电极线 301和所述第二 电极线 302均为金属电极线时, 所述第一电极线 301的引线和所述第二电极 线 302的引线可以分别与其一起形成。 当其中一组电极线为金属电极线, 另 一组电极线为 ITO电极线时, 所述金属电极线的引线可以与该组金属电极线 一起形成, 而为了减少构图工艺次数, 所述 ITO电极线的引线可以与其它金 属材质的图案一起形成, 例如可以与所述金属电极线的引线一起形成。
需要说明的是, 第一, 本发明实施例对所述第一电极线 301和所述第二 电极线 302 的具体设置位置不做限定; 其可以同时设置在所述阵列基板 10 上或同时设置在所述彩膜基板 20上,也可以其中一组电极线设置在所述阵列 基板 10上, 另一组电极线设置在所述彩膜基板 20上。
第二, 所述第一电极线 301和所述第二电极线 302相互交叉排列、 且二 者之间无电连接, 这样在所述第一电极线 301和所述第二电极线 302的相交 位置处便可形成感应电容; 所述触控显示面板在工作时可以通过该感应电容 的电容值的变化来确定触点的位置。
由于在相同阻值下, 金属电极线的线宽相比于 ITO电极线的线宽要窄, 其排布也可以相对更加紧密, 因此本发明至少一个实施例中可以根据所述触 控显示面板的触控精度需求, 来调节相邻所述第一电极线 301之间的间距和 相邻所述第二电极线 302之间的间距。
第三, 当触控显示面板应用于显示装置时, 需要保证所述触控扫描线和 所述触控感应线的设置位置不影响所述显示装置的透光率, 故所述第一电极 线 301和所述第二电极线 302可以均釆用 ITO电极线;但 ITO材质的电极线 具有阻值较大的缺陷, 釆用 ITO电极线作为所述触控扫描线和所述触控感应 线, 可能会引起信号的延迟现象。 因此, 在本发明的一些实施例中, 为了降 低所述第一电极线 301 和 /或所述第二电极线 302的阻值, 所述第一电极线 301和 /或所述第二电极线 302优选釆用金属电极线, 且将该金属材质的电极 线设置在与所述彩膜基板 20的黑矩阵 200位置相对应的区域,从而可以避免 因金属材质的不透明性而可能引起的所述显示装置的透光率问题。
例如,所述第一电极线 301和所述第二电极线 302可以均为金属电极线, 且与所述黑矩阵 200位置相对应; 也可以仅一组电极线釆用金属电极线, 与 所述黑矩阵 200位置对应, 另一组电极线釆用 ITO电极线。 在此基础上, 所述金属电极线的材质可以包括相、 铜、 银、 铝等金属材 质或铝钕、 铝银等合金材质中的至少一种; 当然, 所述金属电极线还可以釆 用其它金属或合金材质,只要是有利于降低所述第一电极线 301和 /或所述第 二电极线 302 的阻值的金属材料均可; 所述金属电极线的厚度优选为 100~400
第四, 所述第一电极线 301 和 /或所述第二电极线 302与所述彩膜基板 20的黑矩阵 200位置对应是指: 所述黑矩阵 200在所述彩膜基板 20上的投 影可以完全覆盖与所述黑矩阵 200位置对应的所述第一电极线 301和 /或所述 第二电极线 302在所述彩膜基板 20上的投影。
本发明的至少一个实施例提供一种触控显示面板, 包括相对设置以形成 液晶盒的阵列基板 10和彩膜基板 20;设置在所述阵列基板 10或所述彩膜基 板 20上的一组相互平行的第一电极线 301 ; 设置在所述阵列基板 10或所述 彩膜基板 20上、且与所述第一电极线 301交叉排列的一组相互平行的第二电 极线 302; 所述第一电极线 301与所述第二电极线 302之间无电连接。 所述 第一电极线 301和 /或所述第二电极线 302与所述彩膜基板 20的黑矩阵 200 位置对应,且与所述黑矩阵 200位置对应的所述第一电极线 301和 /或所述第 二电极线 302为金属电极线。
这里, 所述第一电极线 301和所述第二电极线 302可以分别作为所述触 控显示面板的触控扫描线和触控感应线,通过将所述第一电极线 301和 /或所 述第二电极线 302设置为金属电极线,相比于使用 ITO电极线作为所述触控 扫描线和所述触控感应线,可以有效地降低所述触控扫描线和 /或所述触控感 应线的阻值, 从而改善信号的延迟现象; 在此基础上, 由于在相同阻值的情 况下, 金属电极线的线宽相比于 ITO电极线的线宽要窄, 因此, 选用金属电 极线作为所述第一电极线 301和 /或所述第二电极线 302, 还可以提高所述触 控显示面板的触控精度。
基于上述描述, 可选的, 所述第一电极线 301可以与所述黑矩阵 200位 置对应, 所述第二电极线 302可以位于所述显示面板的透光区; 所述第一电 极线 301为金属电极线, 所述第二电极线 302为透明 ITO电极线。 当然, 也 可以是所述第一电极线 301位于所述显示面板的透光区,所述第二电极线 302 与所述黑矩阵 200位置对应; 所述第一电极线 301为透明 ITO电极线, 所述 第二电极线 302为金属电极线。 这里, 所述第一电极线 301和所述第二电极 线 302的相对位置可以互换, 在此不做限定。
由于所述金属电极线的阻值相比于所述 ITO电极线的阻值较小, 通过将 所述第一电极线 301或所述第二电极线 302设置为金属电极线, 便可以在一 定程度上降低所述第一电极线 301或所述第二电极线 302的阻值, 从而使所 述触控显示面板的信号延迟现象有所改善。
在此基础上,参考图 1至图 3所示,进一步优选的,所述第一电极线 301 和所述第二电极线 302可以均与所述黑矩阵 200位置对应, 且所述第一电极 线 301和所述第二电极线 302均为金属电极线。
这样, 通过将所述第一电极线 301和所述第二电极线 302均设置为金属 电极线,可以大大地降低所述第一电极线 301和所述第二电极线 302的阻值, 从而改善所述触控显示面板的信号延迟现象。 此外, 通过将所述第一电极线 301和所述第二电极线 302设置为金属电极线, 还可以减小所述第一电极线 301和所述第二电极线 302的线宽, 从而提高触控灵敏度。
基于此, 参考图 2所示, 所述第一电极线 301和所述第二电极线 302可 以均设置在所述彩膜基板 20上; 或者, 参考图 3所示, 所述第一电极线 301 和所述第二电极线 302可以均设置在所述阵列基板 10上。在此情况下, 由于 所述第一电极线 301和所述第二电极线 302之间无电连接, 因此, 所述第一 电极线 301和所述第二电极线 302之间还应包括绝缘层。 或者, 可选的, 参 考图 1所示,所述第一电极线 301可以设置在所述阵列基板 10上,所述第二 电极线 302可以设置在所述彩膜基板 20上。
这样, 在所述第一电极线 301和所述第二电极线 302的相交位置处便可 以形成感应电容, 当所述触控显示面板处于工作状态时, 便可以通过该感应 电容的电容值的变化来确定触点的实际位置。
由于所述第一电极线 301和 /或所述第二电极线 302需与外部的驱动电路 之间实现电连接, 因此, 需将所述第一电极线 301和 /或所述第二电极线 302 的引线部分露出, 以便于进行连接。 基于上述考虑, 进一步的, 在所述第一 电极线 301和 /或所述第二电极线 302设置在所述彩膜基板 20上的情况下, 所述第一电极线 301和 /或所述第二电极线 302优选设置在所述彩膜基板 20 的黑矩阵 200靠近所述阵列基板 10的一侧。 例如, 在所述彩膜基板 20的颜色光阻( color filter )位于所述黑矩阵 200 靠近所述阵列基板 10一侧的情况下, 所述第一电极线 301和 /或所述第二电 极线 302可以设置在所述黑矩阵 200与所述颜色光阻之间, 或者设置在所述 颜色光阻靠近所述阵列基板 10的一侧; 在所述彩膜基板 20的颜色光阻位于 所述黑矩阵 200背离所述阵列基板 10一侧的情况下, 所述第一电极线 301 和 /或所述第二电极线 302可以设置在所述黑矩阵 200靠近所述阵列基板 10 的一侧。
这里,所述第一电极线 301和 /或所述第二电极线 302的具体位置在此可 以不做限定,只要便于在所述第一电极线 301和 /或所述第二电极线 302与驱 动电路之间进行电连接即可。
基于上述描述可知, 当所述第一电极线 301和 /或所述第二电极线 302釆 用金属电极线时, 考虑到触控显示面板的透光率问题, 可以使所述金属电极 线与所述黑矩阵 200位置相对应。 在此基础上, 为了保证所述金属电极线对 所述触控显示面板的透光率完全无影响, 进一步可选的, 所述黑矩阵 200在 所述彩膜基板 20上的投影可以覆盖与所述黑矩阵 200位置对应的所述第一电 极线 301和 /或所述第二电极线 302在所述彩膜基板 20上的投影, 这样便可 以保证所述金属电极线不会对所述触控显示面板的透光率产生影响。
在上述实施例中, 阵列基板包括多条栅线和多条数据线, 这些栅线和数 据线彼此交叉由此限定了排列为矩阵的亚像素单元, 每个亚像素单元包括作 为开关元件的薄膜晶体管和用于控制液晶的排列的像素电极和公共电极。 例 如, 每个亚像素的薄膜晶体管的栅极与相应的栅线电连接或一体形成, 源极 与相应的数据线电连接或一体形成, 漏极与相应的像素电极电连接或一体形 成。 彩膜基板包括黑矩阵以及颜色光阻。 黑矩阵定义了亚像素单元并避免各 亚像素单元之间彼此的干扰, 彩膜基板的亚像素单元与阵列基板的亚像素单 元彼此对应。 颜色光阻形成在亚像素单元中, 限定了相应亚像素单元要显示 的颜色, 例如为红、 绿或蓝。 如果亚像素单元中未形成颜色光阻, 则该亚像 素单元例如显示白色。
在本发明的至少一个实施例中, 阵列基板为 COA ( color filter on Array ) 型阵列基板, 即该阵列基板包括颜色光阻, 相应地与该阵列基板相对设置以 形成液晶盒的对置基板则可以不包括颜色光阻, 但是可以包括黑矩阵。 更进 一步, 在本发明的至少一个实施例中, 阵列基板包括颜色光阻和黑矩阵, 则 相应地与该阵列基板相对设置以形成液晶盒的对置基板则可以不包括颜色光 阻和黑矩阵。
如图 4所示, 根据本发明的至少一个实施例的该触摸显示装置, 阵列基 板 2与对置基板 3彼此对置并通过封框胶 6结合在一起以形成液晶盒 1, 在 液晶盒 1中填充有液晶材料 4。 该对置基板 3的一个示例为彩膜基板(例如 上述实施例的彩膜基板 20 )。 阵列基板 2的每个亚像素单元的像素电极用于 施加电场对液晶材料的旋转的程度进行控制从而进行显示操作。 在一些示例 中, 该触摸显示装置还包括为阵列基板提供背光的背光源 5。
本发明的至少一个实施例提供一种触控显示面板, 包括相对设置以形成 液晶盒的第一基板和第二基板, 该第一基板和第二基板例如可以阵列基板和 对置基板。 该触摸显示面板还包括设置在所述第一基板或所述第二基板上的 一组相互平行的第一电极线; 设置在所述第一基板或所述第二基板上、 且与 所述第一电极线交叉排列的一组相互平行的第二电极线。 所述第一电极线与 所述第二电极线之间无电连接, 即彼此绝缘。 第一基板和第二基板之一上形 成有黑矩阵, 所述第一电极线和 /或所述第二电极线与所述黑矩阵的位置对 应,且与所述黑矩阵位置对应的所述第一电极线和 /或所述第二电极线为金属 电极线。所述第一电极线与所述第二电极线分别为触控感应线和触控扫描线, 或分别为触控扫描线和触控感应线。
本发明的一些实施例还提供一种上述触控显示面板的制备方法, 所述方 法包括: 在形成与黑矩阵 200位置对应的第一电极线 301 和 /或第二电极线 302 时, 可以通过低温沉积工艺形成金属层, 再对所述金属层进行掩膜工艺 形成金属电极线。
所述低温沉积工艺可以是利用低温磁控溅射法进行的沉积工艺; 在此基 础上, 优选的, 可以在 20°C~50°C的气氛下, 通过磁控溅射工艺形成厚度为 100~400nm的金属层。
在此基础上, 参考图 2和图 3所示, 所述第一电极线 301和所述第二电 极线 302可以均形成在所述彩膜基板 20上或均形成在所述阵列基板 10上; 所述第一电极线 301和所述第二电极线 302之间还应包括绝缘层。 或者, 参 考图 1所示,所述第一电极线 301可以形成在所述阵列基板 10上,所述第二 电极线 302可以形成在所述彩膜基板 20上。
所述第一电极线 301和所述第二电极线 302可以均为金属电极线, 也可 以其中一组电极线为金属电极线、另一组电极线为 ITO电极线。在此基础上, 所述金属电极线的形成位置与所述黑矩阵 200位置对应, 所述 ITO电极线可 以形成在所述显示面板的透光区。
下面将提供一具体的实施例对所述触控电极 30的形成过程进行说明。在 该实施例中, 所述第一电极线 301和所述第二电极线 302均形成在彩膜基板 20上、 且均为金属电极线, 所述彩膜基板 20包括依次形成在衬底基板上的 黑矩阵 200、 颜色光阻、 位于所述颜色光阻上方的保护层, 以及形成在所述 黑矩阵 200和所述颜色光阻之间的一组相互平行的第一电极线 301、绝缘层、 一组相互平行的第二电极线 302;所述第一电极线 301和所述第二电极线 302 相互交叉排列。
在此情况下, 所述触控电极 30 的形成过程的一个示例可以包括如下步 骤:
S101、 如图 5 ( a )所示, 通过一次构图工艺在所述衬底基板上形成所述 黑矩阵 200。
例如, 所述黑矩阵 200的宽度可以为 7-9μπι, 例如 8μπι。 该衬底基板可 以为玻璃基板、 塑料基板等。
5102、 如图 5 ( b )所示, 在形成所述黑矩阵 200之后对反应腔室进行降 温操作,待所述反应腔室的温度稳定在预定温度后,在形成有所述黑矩阵 200 的基板上釆用低温磁控溅射工艺沉积一层钼金属层, 然后依次通过曝光、 显 影、 刻蚀、 剥离等工艺形成一组相互平行的第一电极线 301。
例如, 所述第一电极线 301与所述黑矩阵 200位置对应。
这里, 例如, 所述低温磁控溅射工艺的实际温度可以为室温 25 °C ; 所述 钼金属层的实际厚度可以为 100~400nm; 所述第一电极线 301的宽度可以为 7μπι。
5103、 如图 5 ( c )所示, 在形成有所述第一电极线 301的基板上形成绝 缘层 310。
所述绝缘层 310用于实现所述第一电极线 301和所述第二电极线 302之 间的电绝缘。 5104、 参考图 5 ( c )所示, 在形成所述绝缘层 310之后对反应腔室进行 降温操作, 待所述反应腔室的温度稳定在预定温度后, 在形成有所述绝缘层 310的基板上釆用低温磁控溅射工艺沉积一层钼金属层,然后依次通过曝光、 显影、 刻蚀、 剥离等工艺形成一组相互平行的第二电极线 302。
例如, 所述第二电极线 302与所述黑矩阵 200位置对应。
这里, 例如, 所述低温磁控溅射工艺的实际温度可以为室温 25 °C ; 所述 钼金属层的实际厚度可以为 100~400nm; 所述第二电极线 302的宽度可以为 7μπι。
5105、 在形成有所述第二电极线 302的基板上形成所述颜色光阻, 并在 所述颜色光阻的上方形成所述保护层。
通过上述步骤 S101-S105, 便形成了具有触控功能的所述彩膜基板 20; 所述第一电极线 301和所述第二电极线 302釆用金属电极线, 这样可以有效 地改善因阻值较大而引起的信号延迟现象, 同时提高了所述触控显示面板的 触控精度。
以上所述, 仅为本发明的具体实施方式, 但本发明的保护范围并不局限 于此, 任何熟悉本技术领域的技术人员在本发明揭露的技术范围内, 可轻易 想到变化或替换, 都应涵盖在本发明的保护范围之内。 因此, 本发明的保护 范围应以所述权利要求的保护范围为准。
本申请要求于 2014年 01月 14日递交的中国专利申请第 201410016129.1 号的优先权, 在此全文引用上述中国专利申请公开的内容以作为本申请的一 部分。

Claims

权利要求书
1、 一种触控显示面板, 包括:
相对设置的阵列基板和对置基板;
设置在所述阵列基板或所述对置基板上的一组相互平行的第一电极线; 设置在所述阵列基板或所述对置基板上、 且与所述第一电极线交叉排列 的一组相互平行的第二电极线;
其中, 所述第一电极线与所述第二电极线之间无电连接, 所述阵列基板 或所述对置基板包括黑矩阵;所述第一电极线和 /或所述第二电极线与所述黑 矩阵位置对应,且与所述黑矩阵位置对应的所述第一电极线和 /或所述第二电 极线为金属电极线。
2、根据权利要求 1所述的触控显示面板, 其中, 所述第一电极线和所述 第二电极线均与所述黑矩阵位置对应;
所述第一电极线和所述第二电极线均为金属电极线。
3、根据权利要求 1所述的触控显示面板, 其中, 所述第一电极线与所述 黑矩阵位置对应, 所述第二电极线位于所述显示面板的透光区;
所述第一电极线为金属电极线, 所述第二电极线为透明氧化铟锡 ITO电 极线。
4、根据权利要求 2或 3所述的触控显示面板, 其中, 所述第一电极线和 所述第二电极线均设置在所述对置基板上或均设置在所述阵列基板上, 且所 述第一电极线和所述第二电极线之间设置有绝缘层;
或者, 所述第一电极线设置在所述对置基板上, 所述第二电极线设置在 所述阵列基板上。
5、 根据权利要求 4所述的触控显示面板, 其中, 在所述第一电极线和 / 或所述第二电极线设置在所述对置基板上且所述对置基板包括所述黑矩阵的 情况下,所述第一电极线和 /或所述第二电极线设置在所述对置基板的黑矩阵 靠近所述阵列基板的一侧。
6、 根据权利要求 1-5任一所述的触控显示面板, 其中, 所述黑矩阵在所 述对置基板上的投影覆盖与所述黑矩阵位置对应的所述第一电极线和 /或所 述第二电极线在所述对置基板上的投影。
7、 根据权利要求 1-6任一所述的触控显示面板, 其中, 所述第一电极线 为触控扫描线, 所述第二电极线为触控感应线; 或者,
所述第一电极线为触控感应线, 所述第二电极线为触控扫描线。
8、根据权利要求 7所述的触控显示面板,还包括与所述触控扫描线连接 的信号输入线以及与所述触控感应线连接的信号釆集线。
9、 根据权利要求 1-8任一所述的触控显示面板, 其中, 所述金属电极线 的材质包括钼、 铜、 银、 铝金属材质或铝钕、 铝银合金材质中的至少一种。
10、 根据权利要求 1-9任一所述的触控显示面板, 其中, 所述金属电极 线的厚度为 100~400nm。
11、 根据权利要求 1-10任一所述的触控显示面板, 其中, 所述对置基板 为彩膜基板。
12、一种如权利要求 1至 11任一项所述的触控显示面板的制备方法, 包 括:
在形成与黑矩阵位置对应的第一电极线和 /或第二电极线时,通过低温沉 积工艺形成金属层, 再对所述金属层进行掩膜工艺形成金属电极线。
13、根据权利要求 12所述的方法, 其中, 所述通过低温沉积工艺形成金 属层包括:
在 20°C~50°C的气氛下, 通过磁控溅射工艺形成厚度为 100~400nm所述 金属层。
PCT/CN2014/080450 2014-01-14 2014-06-20 触控显示面板及其制备方法 WO2015106538A1 (zh)

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