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WO2011043417A1 - 半導体装置及びその製造方法 - Google Patents

半導体装置及びその製造方法 Download PDF

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Publication number
WO2011043417A1
WO2011043417A1 PCT/JP2010/067642 JP2010067642W WO2011043417A1 WO 2011043417 A1 WO2011043417 A1 WO 2011043417A1 JP 2010067642 W JP2010067642 W JP 2010067642W WO 2011043417 A1 WO2011043417 A1 WO 2011043417A1
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WO
WIPO (PCT)
Prior art keywords
wire
bonding
ball
folded
electrode
Prior art date
Application number
PCT/JP2010/067642
Other languages
English (en)
French (fr)
Inventor
良太 瀬野
Original Assignee
日亜化学工業株式会社
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Filing date
Publication date
Application filed by 日亜化学工業株式会社 filed Critical 日亜化学工業株式会社
Priority to CN201080045152.3A priority Critical patent/CN102576684B/zh
Priority to JP2011535450A priority patent/JP5692081B2/ja
Priority to US13/500,849 priority patent/US8759987B2/en
Publication of WO2011043417A1 publication Critical patent/WO2011043417A1/ja

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Definitions

  • the present invention relates to a semiconductor device and a manufacturing method thereof, and more particularly, to a semiconductor device including a semiconductor element wire-bonded to the inside or to another semiconductor element and a manufacturing method thereof.
  • Some conventional semiconductor devices using semiconductor elements such as light emitting diodes have a plurality of semiconductor elements mounted in one package, and a method of connecting such a plurality of semiconductor elements by wire bonding has been proposed.
  • Patent Document 1 when wire connection (wire bonding) is performed between a plurality of semiconductor light emitting elements, first, the first wire is wedge bonded from the terminal of the electrode pattern of the package to the upper electrode of the semiconductor light emitting element. Next, the second wire is overlapped on the wedge bonding portion and ball bonded. As a result, a ball formed by ball bonding is connected to the upper electrode of the semiconductor light emitting element, and the thinning of the wire in this portion is prevented, thereby strengthening the bonding of the wire bonding.
  • the ball neck of the first wire formed by ball bonding is crushed at the tip of the capillary, the side surface of the first wire folded back is pressed against the crushed ball neck, and the second wire is further placed thereon.
  • a bonding method has been proposed (for example, Patent Document 2). According to this method, when the second wire is bonded, the impact of bonding is reduced by the deformation of the wire pressed against the ball neck. As a result, damage to the semiconductor is reduced.
  • the first wire when bonding the second wire, the first wire is deformed into a convex portion that enters the central hole of the capillary by the pressing force of the capillary, and the convex portion that enters the central hole of the capillary, the inner chamfer portion of the capillary, A second wire is sandwiched between and compressed.
  • the present invention provides a semiconductor device including a semiconductor element in which a plurality of wires are bonded, the semiconductor device having a high bonding strength of the wires, and capable of realizing sufficient bonding reliability, and a method for manufacturing the same. For the purpose.
  • one end is bonded onto the electrode, the other end is bonded to a second bonding point outside the electrode, one end is bonded to the first wire on the electrode, the other And a second wire bonded to a third bonding point outside the electrode, and a bonding portion at one end of the second wire covers at least a part of the upper surface and the side surface of the first wire Relates to the device.
  • the number and length of wires can be reduced and a sufficient bonding area of the wires can be ensured regardless of the electrode position of the semiconductor element, so that the bonding strength of the wires can be increased.
  • the first wire is a ball portion bonded at one end onto the electrode, and has a folded portion that extends from the ball portion in a direction different from the second bonding point and then turns back onto the ball portion. It is preferable that one end of the second wire is bonded on the folded portion and covers at least a part of the side surface of the folded portion opposite to the second bonding point. According to this configuration, the bonding strength of the wire can be further increased.
  • the folded portion has a lower portion drawn from above the ball portion in the direction opposite to the wire extending direction, and an upper portion formed by folding the wire extending from the lower portion onto the ball portion, and the second wire
  • the tip of the cover covers at least the lower portion of the folded portion on the side opposite to the extending direction of the second wire.
  • the bonding strength of the wire can be increased.
  • the tip of the second wire preferably covers at least the ball portion.
  • the tip of the second wire preferably covers at least the ball portion.
  • the bonding strength of the wire can be increased.
  • the second wire is preferably provided substantially horizontally on the folded portion on the extending direction side of the second wire. According to such a configuration, the stress applied to the wire can be reduced, so that the wire breakage and the like can be prevented.
  • the present invention also includes a first step of bonding a first wire on the electrode to form a ball portion, forming a folded portion on the ball portion, and extending from the folded portion in a predetermined direction; A second step of bonding the two wires on the folded portion, and in the second step, the direction in which the second wire extends at least from the center of the folded portion (dashed line in FIG. 4C).
  • the present invention relates to a method for manufacturing a semiconductor device in which an external force is applied to a second wire on the opposite side to be crushed and joined to a folded portion. According to this configuration, a sufficient bonding area of the wire can be ensured, so that sufficient bonding reliability of the wire can be realized.
  • the folded portion has a lower portion drawn from above the ball portion in a direction opposite to the wire extending direction, and an upper portion formed by folding a wire extending from the lower portion onto the ball portion, and the second portion It is preferable to join the crushed portion of the wire to at least the lower portion of the folded portion on the side opposite to the extending direction of the second wire. According to this configuration, a sufficient bonding area of the wire can be ensured, so that the bonding strength of the wire can be increased.
  • the folded portion has a lower portion drawn from above the ball portion in the direction opposite to the wire extending direction, and an upper portion formed by folding the wire extending from the lower portion onto the ball portion, and the second wire
  • the tip end of the second wire is bonded to at least the lower portion of the folded portion on the side opposite to the extending direction of the second wire.
  • the bonding strength of the wire can be increased.
  • the bonding strength of the wire can be increased.
  • the second wire is preferably provided substantially horizontally on the folded portion on the extending direction side of the second wire. According to such a configuration, the stress applied to the wire can be reduced, so that the wire breakage and the like can be prevented.
  • the present invention also includes a first step of ball bonding the first wire on the electrode, and a second step of bonding the second wire on the ball portion of the first wire.
  • the second wire relates to a method for manufacturing a semiconductor element that is bonded so as to cover the center point (broken line in FIG. 4C) of the ball portion of the first wire. According to such a configuration, sufficient bonding strength of the wire can be ensured.
  • a semiconductor device including a semiconductor element to which a plurality of wires are bonded, the number and length of wires are reduced regardless of the electrode position of the semiconductor element, and the bonding strength of the wires is high and sufficient. It is possible to provide a semiconductor device and a method for manufacturing the semiconductor device that can realize high junction reliability.
  • FIG. 1 is a schematic plan view showing a semiconductor device according to an embodiment of the present invention. It is a schematic perspective view which shows the wire joining of the semiconductor device which concerns on embodiment of this invention.
  • FIG. 2 is a schematic process diagram for explaining wire bonding viewed from the y-axis direction of FIG. 1.
  • FIG. 2 is a schematic process diagram for explaining wire bonding viewed from the x-axis direction of FIG. 1.
  • It is a schematic side view for demonstrating the wire joining of the semiconductor device which concerns on embodiment of this invention.
  • FIG. 1 is a schematic plan view showing a semiconductor device 10 according to an embodiment of the present invention.
  • FIG. 2 is a schematic perspective view showing wire bonding of the semiconductor device 10 according to the embodiment of the present invention.
  • FIG. 5 is a schematic side view for explaining wire bonding of the semiconductor device 10 according to the embodiment of the present invention.
  • the semiconductor device 10 includes at least a semiconductor element 11 and a wire.
  • the wire connects between the semiconductor elements 11 or between the metal member 12 and the semiconductor element 11.
  • the wire has at least a first wire 14 and a second wire 15.
  • the first wire 14 has a ball part 141 formed by ball bonding on the electrode 16 of the semiconductor element 11 and a folded part 142 formed on the ball part 141, and the folded part is further provided. It extends from the part 142 in a predetermined direction.
  • the second wire 15 is bonded on the folded portion of the first wire.
  • the tip of the second wire covers the folded portion opposite to the extending direction of the second wire (on the side surface of the folded portion 142 of the first wire 14 and the second wire 15 is stretched).
  • At least a part of the side surface opposite to the direction is covered with the tip of the second wire 15). Thereby, the sufficient joining state of a wire is securable.
  • the tip of the second wire preferably covers at least the ball part (at least a part of the ball part 141). Thereby, the joining strength of a wire can be raised.
  • a semiconductor element, a wire, a metal member, and the like are integrally molded or sealed with a resin.
  • the molding resin may be formed of any material as long as it can ensure insulation against a semiconductor element or the like.
  • the sealing resin may be formed of any material as long as it can insulate the semiconductor element or the like and has translucency.
  • the size and shape of the molding or sealing resin are not particularly limited.
  • the semiconductor element used in the present invention is not particularly limited as long as it is an element in which semiconductors are stacked and a wire is bonded on an electrode.
  • the semiconductor element used in the present invention may be one in which positive and negative electrodes are respectively formed on opposing surfaces (for example, an upper surface and a lower surface) of a semiconductor layer, and positive and negative electrodes are formed on the same surface side of the semiconductor layer.
  • the electrodes may be formed together.
  • the pair of electrodes in the latter case generally have a height difference, but are arranged so as to have the same height (substantially the same distance from the semiconductor layer) by adjusting the height of the bumps and the like. Also good.
  • wedge bonding directly to the electrode means that the bonding area between the wire and the electrode is smaller than the bonding area between the ball portion and the electrode when bonding by ball bonding.
  • the positive and negative electrodes do not necessarily have to be formed one by one, and two or more each may be formed.
  • the electrode 16 is not particularly limited in its material, film thickness, and structure, but may be any of a single-layer structure or a laminated structure containing gold, copper, lead, aluminum, or an alloy thereof depending on the type of wire described later.
  • the film thickness of an electrode is not specifically limited, It is preferable especially that the last layer (most surface side) arrange
  • a wire is bonded to the final layer of the electrode, that is, the outermost layer.
  • the semiconductor device only one semiconductor element may be mounted in one semiconductor device, or a plurality of semiconductor elements may be mounted.
  • the connection form is not particularly limited, such as parallel, series, or a combination thereof.
  • the metal member plays a role as an electrode for electrically connecting to the semiconductor element and a substrate on which the semiconductor element is mounted.
  • the metal member may be substantially plate-like, corrugated plate-like, plate-like having irregularities. It may be.
  • the film thickness may be uniform or partially thick or thin.
  • the material is not particularly limited, and a material having a relatively large thermal conductivity (for example, about 200 W / (m ⁇ K) or more), a material having a relatively large mechanical strength, or a punching press process or an etching process is easy. It is preferable to form with a material. By forming with such a material, heat generated in the semiconductor element can be efficiently released.
  • metals such as copper, aluminum, gold, silver, tungsten, iron and nickel, and alloys such as iron-nickel alloy and phosphor bronze. Further, it is preferable that the surface of the metal member is subjected to reflection plating in order to efficiently extract light from the semiconductor element to be mounted.
  • the metal member may have a region where a semiconductor element is mounted and extended (extended) as a lead terminal connected to the outside in addition to a region connected to the semiconductor element.
  • the lead terminal is a mounting type of the semiconductor device of the present invention (for example, a type side view type in which the light emitting surface is perpendicular to the mounting surface of the lead terminal, a type top view type in which the light emitting surface is parallel to the mounting surface of the lead terminal) Depending on the use mode, it can be appropriately bent and deformed.
  • an angle formed by the extending direction of the first wire and the extending direction of the second wire is in a range of 45 degrees to 135 degrees.
  • a wire is a conductive member used to electrically connect (bond) an electrode formed on the surface of a semiconductor element and a metal member, between semiconductor elements, between electrodes in the semiconductor element, and the like.
  • a point to be joined as a start point may be referred to as a first bonding point
  • a point to be next connected as an end point may be referred to as a second bonding point.
  • a ball formed by melting a wire is bonded onto an electrode of a semiconductor element.
  • the connection portion of the wire thus ball-bonded may be referred to as a ball portion.
  • the ball may be spherical, partially lacking, or oval.
  • the ball portion includes a form in which the ball portion is once formed into these shapes and then deformed by, for example, a pressing force when the second wire is connected to the upper portion.
  • the wire is connected without using a ball.
  • the connecting portion of the wire at the second bonding point may be referred to as a wedge bond portion 144.
  • a 2nd bonding point (or wedge bond part) is arrange
  • the second bonding point is disposed on the electrode of the semiconductor element, it is preferable that the second bonding point is disposed at least via the ball part, and the wedge bond part directly contacts the electrode of the semiconductor element. Are preferably not connected.
  • the bonding point usually refers to a partial region of the surface of the electrode of the semiconductor element or the surface of the metal member constituting the semiconductor device.
  • a plurality of wires are formed (for example, another wire on the bonded wire). Includes the bonded region, for example, on the wire or on the ball.
  • the wire has at least a first wire and a second wire.
  • a 1st wire means the wire which connects a 1st bonding point and a 2nd bonding point.
  • the second wire connects the third bonding point arranged at a position different from the straight line passing through the first bonding point and the second bonding point, and the ball portion of the first wire.
  • Means wire to A plurality of ones corresponding to the first and second wires may be formed in one semiconductor device.
  • the first wire 14 has the ball portion 141 ball-bonded on the electrode of the semiconductor element, and further has the folded portion 142 on the ball portion.
  • FIG. 9 is a cross-sectional view showing details of the folded portion 142.
  • the diameter of the ball portion 141 is appropriately adjusted according to the size of the semiconductor device and the electrodes mounted thereon, and is, for example, about 50 ⁇ m to 100 ⁇ m.
  • the folded portion 142 is drawn from the top of the ball portion 141 in the direction opposite to the wire stretching direction (the point at which the wire ends, that is, the direction where the second bonding point is located), and further becomes the end of the wire.
  • the portion of the folded portion 142 that is drawn from above the ball portion 141 in the direction opposite to the wire extending direction is defined as a lower portion 142a of the folded portion, and the wire extending from the lower portion 142a of the folded portion is above the ball portion 141.
  • the upper portion 142b of the folded portion preferably has a flat portion on the upper surface.
  • the flat portion 9 has two flat portions indicated by an ellipse A and an ellipse B.
  • the flat portion has an angle of 30 ° or less with respect to the surface of the electrode 16 on which the ball portion 141 is formed.
  • the flat portion indicated by the ellipse A has an angle of about 5 °
  • the angle indicated by the ellipse B has an angle of about 20-30 °.
  • the direction of inclination of the flat portion in FIG. 9, the upward direction to the right or the upward direction to the left
  • the folded portion 142 preferably protrudes from above the ball portion 141 in the direction opposite to the wire extending direction (the direction opposite to the second bonding point).
  • the horizontal length of the folded portion 142 is preferably longer than the radius of the ball portion 141. Thereby, the joining strength of the 2nd wire joined on the folding
  • the folded portion 142 preferably has a length of about 30 ⁇ m to 100 ⁇ m in the direction opposite to the wire drawing direction from the center point of the ball portion 141. From the folded-back portion 142, the wire extends substantially horizontally toward the point that is the end point of the wire.
  • substantially horizontal means that the wire is substantially parallel to the surface (for example, the electrode surface) to which the wire is bonded.
  • the substantially horizontal in this case includes a range in which the angle formed by the axis of the wire is within 30 ° with respect to the surface on which the wire is ball-bonded. Further, it is preferable that a gap 31 is provided between the wire extending from the folded portion 142 of the wire and the peripheral portion of the ball portion 141. Thereby, while being able to ensure a sufficient joining state, heat dissipation becomes favorable. Sealing resin may be present in the space 31.
  • FIG. 10 is a cross-sectional view showing details of the second wire 15 bonded onto the folded portion 142 of the first wire.
  • the first wire extends from the folded portion 142 in a direction perpendicular to the drawing.
  • the second wire 15 is formed on the surface of the electrode 16 of the semiconductor element via the ball portion 141 of the first wire, so that the lowermost ball portion 141 becomes the metal member or the electrode 16.
  • the third bonding point is arranged at a position different from the straight line passing through the first bonding point and the second bonding point. That is, the second wire intersects the extending direction of the first wire.
  • the second wire 15 is joined to the folded portion 142 of the first wire so as to cover the center point of the ball portion 141 of the first wire (so as to be positioned above the center point of the ball portion 141). Yes.
  • the distal end of the second wire 15 is extended along the folded portion and covers the folded portion on the opposite side to the extending direction of the second wire (on the opposite side to the third bonding point of the folded portion 142).
  • Side surface covers at least a part of the left side surface of folded portion 142 in FIG. 10).
  • the tip of the second wire 15 is preferably joined so as to cover at least a part of the side surface of the lower portion 142 a of the folded portion 142.
  • the tip of the second wire may be joined so as to cover the ball portion (at least a part of the ball portion 141) of the first wire.
  • such a second wire 15 covers at least part of the side surface of the first wire 14 (preferably the side surface opposite to the direction in which the second wire extends) and the second wire 15.
  • the strengthening of the bonding strength of the wire can also be applied to the bonding of the first wire bonding portion (bonding portion with the electrode 16) where the folded portion 142 is not formed and the second wire. That is, in the bonding portion (bonding portion) of the second wire with the first wire, the bonding portion of the second wire is not only the upper surface of the first wire but also the side surface of the first wire (preferably the second wire).
  • Embodiments covering at least a part of the side surface opposite to the direction in which the wire extends are included in the present invention regardless of the presence or absence of the folded portion 142. It is preferable that a gap 32 is provided between the second wire 15 and the folded portion on the extending direction side of the second wire. Further, the second wire is provided substantially horizontally, for example within 30 ° with respect to the surface of the electrode 16 as shown in FIG. preferable. Thereby, since the stress concerning a wire can be reduced, the disconnection etc. of a wire can be prevented.
  • the wire preferably has good ohmic properties with the electrodes of the semiconductor element, good mechanical connectivity, or good electrical and thermal conductivity.
  • the thermal conductivity 0.01cal / (S) (cm 2) (°C / cm) or higher order are preferable, further 0.5cal / (S) (cm 2 ) (°C / cm) or higher order is more preferable.
  • the diameter of the wire is preferably about 10 ⁇ m to 45 ⁇ m.
  • Examples of such a wire material include metals such as gold, copper, platinum, and aluminum, and alloys thereof. Among these, gold is preferable from the viewpoints of bonding reliability, stress relaxation after bonding, and the like.
  • FIG. 3 is a schematic process diagram for explaining wire bonding of the semiconductor device according to the embodiment of the present invention, and is a schematic process diagram viewed from the y-axis direction of FIG. 1.
  • FIG. 4 is a schematic process diagram for explaining wire bonding of the semiconductor device according to the embodiment of the present invention, and is a schematic process diagram viewed from the x-axis direction of FIG. 1.
  • the method for manufacturing a semiconductor device according to the present embodiment includes a first step (FIG. 3) in which a first wire is ball-bonded on an electrode of a semiconductor element, and a second wire on a ball portion of the first wire. And a second step of bonding (FIG. 4).
  • the wire bonding method used for realizing the wire connection of the present embodiment is not particularly limited, but usually, thermocompression wire bonding, ultrasonic combined thermocompression wire bonding, or the like can be suitably used.
  • a ball formed by melting the wire is pressure-bonded onto the electrode of the semiconductor element that is the first bonding point.
  • the wire extending from the pressure-bonded ball is further pressure-bonded onto the pressure-bonded ball, and the wire is stretched in the direction of the second bonding point to be connected to the second bonding point.
  • a wire is passed through a jig such as a capillary and the tip is melted by using a high temperature such as a spark to generate a ball made of the wire.
  • the temperature is not particularly limited and can be adjusted depending on the material and thickness of the wire used. For example, the temperature of about 360 degrees C or less is mentioned.
  • the size of the ball is not particularly limited, and can usually be about 2 to 20 times the diameter of the wire, and further about 2 to 10 times the diameter.
  • this pressure bonding point is the first bonding point.
  • the load at this time can be appropriately adjusted in consideration of, for example, the expansion of the diameter of the ball on the metal member or electrode surface.
  • the pressure may be applied while applying ultrasonic waves.
  • the capillary is moved in the opposite direction in order to stretch in the direction opposite to the point that is the direction of extension of the first wire (that is, the second bonding point).
  • the reverse direction in this case includes a range of about 150 to 210 ° with respect to the direction in which the second bonding point is present.
  • the stretching amount, that is, the moving length of the capillary is preferably about 10 to 100 ⁇ m.
  • the capillary is arbitrarily lifted, moved right above the ball part, and further lowered to press the capillary onto the ball part.
  • the first wire extending from the ball portion is folded back onto the ball portion and pressed.
  • the folded portion is formed on the ball portion, and the surface of the folded portion and the surface of the wire located in the vicinity thereof can be made substantially flat.
  • pressure bonding may be performed while applying an ultrasonic wave, but it is preferable to perform pressure bonding without application. This is because application of ultrasonic waves may cause the wire to be finely crushed, resulting in a decrease in bonding reliability.
  • the upward elongation of the wire (occupation of space) is reduced.
  • the wire diameter is 1.0 to 5.0 from the bottom of the crimping ball.
  • the height can be reduced to about 1 to 3 times that of the press-bonded ball from the viewpoint of the double height and another point of view.
  • the wire is stretched from directly above the press-bonded ball to a second bonding point located at a position different from the first bonding point, and joined to the second bonding point.
  • Bonding in this case can be performed with or without applying ultrasonic waves.
  • the second wire is bonded onto the folded portion 142 of the first wire.
  • the second wire is crushed by applying an external force, and the folded portion To be joined.
  • the second wire may be bonded to the first bonding point by ball bonding on the third bonding point and then extending in the direction of the first bonding point.
  • this second step first, as in the first step, the tip of the wire passed through a jig such as a capillary is melted to generate a ball.
  • this crimping point is the third bonding point.
  • the load at this time can be appropriately adjusted in consideration of, for example, the expansion of the diameter of the ball on the metal member or electrode surface.
  • the pressure may be applied while applying ultrasonic waves.
  • a folded portion may be formed on the ball portion of the second wire, and a flat portion may be formed on the surface of the folded portion and the surface of the wire located in the vicinity thereof ( FIG. 4 (b)).
  • the capillary is moved from the third bonding point onto the folded portion of the first wire.
  • the center of the capillary (the one-dot chain line in FIG. 4C) is directly above the center point of the ball portion of the first wire (the broken line in FIG. 4C), and the extending direction of the second wire (first It is preferable to shift in the direction opposite to the direction in which there are three bonding points.
  • the reverse direction in this case includes a range of about 150 to 210 ° from the center point of the ball portion of the first wire to the third bonding point.
  • the capillary shift amount is preferably about 30 to 50 ⁇ m.
  • the capillary shift amount is preferably about 30 to 50 ⁇ m.
  • the second wire sandwiched between the capillary and the folded portion of the first wire is crushed and the cross-sectional area is reduced. And the 2nd wire 15 is cut
  • the second wire covers the center point (center) of the folded portion of the first wire because the center of the capillary is crimped in a state shifted in the direction opposite to the extending direction of the second wire.
  • the cut surface 156 of the second wire is preferably formed on the side opposite to the extending direction of the second wire from the center of the ball portion of the first wire.
  • a cut surface means the surface produced when cut
  • FIG. a state in which the tip of the second wire that has been crushed (or the tip and the vicinity thereof) covers the folded portion of the first wire opposite to the extending direction of the second wire (the side surface of the folded portion 142) In this case, the bonding strength of the second wire can be increased. Therefore, the bonding strength of the second wire can be increased.
  • the bonding load is preferably 40 to 80 gf. Thereby, a favorable joining state can be ensured.
  • the tip of the second wire may be pressed against the folded portion 142 of the first wire by further lowering the capillary. Thereby, the bonding strength of the wire can be further increased. Further, the crushed portion of the second wire is joined to the ball portion opposite to the extending direction of the second wire (the side surface of the ball portion 141 opposite to the third bonding point). Also good.
  • the center of the capillary is a portion to which the wire material is supplied. Therefore, the center of the ball portion cannot be pressed by the capillary. Further, since the pressure of the capillary is applied on the peripheral portion of the ball portion, for example, as shown in FIG. 7, the wire is pressed onto the peripheral portion of the ball portion. Can be avoided.
  • the above-described series of methods from the generation of the ball portion to the bonding to the second bonding point is applied twice or more between any two different points, but the number of mounted semiconductor elements. It is preferable that the above-described series of methods is performed three times, four times, or more depending on the electrode mode of the semiconductor element, the connection mode of the semiconductor element, and the like. From another viewpoint, it is preferable that a total of three or more first bonding points and / or second bonding points are set for one semiconductor element, and two or more points are set for each. Is more preferable. In this case, two or more wires extending from another bonding point may be connected to the ball portion of the wire at one bonding point.
  • the angle formed between the extending direction of the first wire and the extending direction of the second wire is appropriately changed according to the size of the semiconductor device and the position of the electrode of the semiconductor element or the metal member. Can do. Further, as shown in FIG. 6, the semiconductor device may have a part where two or more wires are connected in a straight line.
  • FIG. 6 is a schematic plan view showing a semiconductor device according to this example.
  • 3 and 4 are schematic cross-sectional process diagrams for explaining wire bonding of the semiconductor device according to this embodiment.
  • the semiconductor device 10 of this embodiment is electrically connected to a semiconductor element 11, a plate-like metal member 12, between the semiconductor element 11 and the metal member 12, and between the semiconductor elements 11. And a molded body 19 that integrally seals them with a resin.
  • the semiconductor device 10 further includes a protection element 13 that is electrically connected to the metal member 12.
  • the metal member 12 is a plate-like body made of an aluminum alloy, and includes a region on which the semiconductor element 11 is mounted and a region extending in one direction therefrom.
  • the molded body 19 is integrally molded in a shape close to a rectangular parallelepiped (length 3.5 mm ⁇ width 3.5 mm ⁇ height 0.85 mm) by sandwiching a part of the metal member 12.
  • the molded body has a substantially rounded square (vertical 2.9 mm ⁇ horizontal 2.9 mm) window portion 19 a in the vicinity of the center thereof. A part of the metal member 12 is exposed in the window portion 19a, and the semiconductor element 11 is mounted on the exposed metal member 12.
  • the sealing resin 18 which has translucency is embed
  • the semiconductor element 11 has two electrodes formed on the surface thereof, and each electrode is electrically connected to the metal member 12 or another electrode by a wire.
  • the wire is bonded to the metal member surface or the electrode surface by wire bonding.
  • the wire has a loop shape is formed by the surface / top portion of the folded portion in a state of being crushed, including a portion of the wire There is a relatively flattened shape.
  • first wire 14 In joining the first wire 14, first, the wire is passed through the capillary, and the tip of the wire is melted by utilizing the high temperature caused by the spark to generate a ball made of the wire. Subsequently, the ball is pressure-bonded to the electrode surface and joined (FIG. 3A). This crimping point becomes the first bonding point. A wire having a diameter of 25 ⁇ m is used, and the diameter of the ball 141 is 70 ⁇ m. Next, in accordance with the arrow in FIG. 3A, the capillary 50 is raised from the crimping point, the wire is fed out, and the capillary is moved in the reverse direction in order to stretch in the direction opposite to the second bonding point (FIG. 3B). ).
  • the capillary (not shown) is raised, the wire is fed out, the capillary is horizontally moved in the direction opposite to the second bonding point, and is raised again to feed out the wire, The wire is stretched while passing and directly descending to the second bonding point, passing directly above the press-bonded ball, and joined to the second bonding point.
  • the 1st wire 14 which bridge
  • a second wire 15 is provided on the first bonding point P 1 of the electrode 16 to electrically connect the electrode 16 to another electrode 17 (third bonding point P 3 ). It has been.
  • the second wire 15 intersects the extending direction of the first wire 14. In the joining of the second wire 15, as in the step of joining the first wire 14, first, the tip of the wire passed through a jig such as a capillary is melted to generate a ball.
  • the capillary is moved from the third bonding point onto the folded portion of the first wire.
  • the center of the capillary (the one-dot chain line in FIG. 4C) is directly above the center point of the ball portion of the first wire (the broken line in FIG. 4C), and the extending direction of the second wire (first Move to a position shifted in the opposite direction to the direction in which there are three bonding points.
  • the capillary is crimped onto the folded portion of the first wire, and the second wire is bonded (FIG. 4D).
  • the second wire sandwiched between the capillary and the folded portion of the first wire is crushed to reduce the cross-sectional area. Then, the second wire is cut at the portion where the cross-sectional area is reduced (FIG. 4E).
  • bonding is performed with a load of 40 gf with a capillary shift amount of 40 ⁇ m.
  • the second wire 15 is bonded onto the folded portion 142 of the first wire 14, and the tip of the second wire 15 is in the extending direction of the second wire. It covers the folded portion 142 on the opposite side.
  • the bonding state of the wires can be made favorable.
  • FIG. 7 is an enlarged schematic cross-sectional view of a part of a semiconductor device according to a comparative example.
  • the state where the center of the capillary is located on the center point of the ball portion 241 of the first wire 24, that is, the shift amount of the capillary is set to zero.
  • a similar semiconductor device is manufactured by a manufacturing method substantially similar to that of the embodiment 1 except that the bonding is performed.
  • the 2nd wire 25 will be in the state joined to the peripheral part of the return part of the 1st wire in the extending direction side of the 2nd wire.
  • the semiconductor device of the comparative example tends to break the wire in the reliability test as compared with the semiconductor device of the first embodiment.
  • each second wire was pulled to perform a strength test, and the load (gf) when the wire broke and the location where the wire broke were examined.
  • the results are shown in Table 1.
  • the portions indicated by the reference numerals A and B indicate those broken at the portions A and B shown in FIG.
  • Each code is as follows. A: In the vicinity of the folded portion of the second wire B: In the vicinity of the tip of the second wire In FIG. 8, the portion indicated by the symbol X indicates the position where the wire was pulled in the strength test.
  • the average value of the strength test of the Example was about 9.04 gf. Further, in the semiconductor device of the example, all 10 semiconductor devices were not disconnected in the vicinity of the tip end (B) of the second wire, but were disconnected in the vicinity of the folded portion (A) of the second wire. On the other hand, the average value of the strength test of the comparative example was about 7.46 gf. In addition, nine of the ten semiconductor devices in the comparative example were disconnected in the vicinity of the tip end (B) of the second wire. From this result, it was confirmed that the bonding strength between the first wire and the second wire was high because the semiconductor device of the example was not disconnected in the vicinity of the tip (B) of the second wire. In addition, it was confirmed that the semiconductor device of the example had higher wire bonding strength than the semiconductor device of the comparative example.
  • the semiconductor device of the present invention is equipped with a semiconductor element so that not only lighting devices used for image reading devices in facsimiles, copiers, hand scanners, etc., but also backlights for lighting light sources, LED displays, mobile phones, etc. It can be used for various illumination devices such as a light source, a traffic light, an illumination switch, a vehicle-mounted stop lamp, various sensors, and various indicators. Further, it can be widely used not only for semiconductor devices but also for wire bonding of various semiconductor devices such as ICs and memories.

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Abstract

　複数のワイヤがボンディングされた半導体素子を備える半導体装置であって、ワイヤの接合強度が高く、十分な接合信頼性を実現することができる半導体装置及びその製造方法を提供する　一端が電極上にボンディングされ、他端が前記電極外の第２ボンディング点にボンディングされている第１のワイヤと、一端が前記電極上の前記第１のワイヤの上にボンディングされ、他端が前記電極外の第３ボンディング点にボンディングされている第２のワイヤと、を含み、前記第２のワイヤの前記一端のボンディング部が、前記第１のワイヤの上面及び側面の少なくとも一部を覆うことを特徴とする半導体装置である。

Description

半導体装置及びその製造方法
　本発明は、半導体装置及びその製造方法に関し、より詳細には、その内部または他の半導体素子との間がワイヤボンディングされた半導体素子を備える半導体装置及びその製造方法に関する。
　発光ダイオード等の半導体素子を用いた従来の半導体装置では、複数の半導体素子を１つのパッケージ内に搭載したものがあり、このような複数の半導体素子間をワイヤボンディングにて接続する方法が提案されている（例えば、特許文献１）。この方法によれば、複数の半導体発光素子間をワイヤ接続（ワイヤボンディング）する場合、まず第１のワイヤとしてパッケージの電極パターンの端子上から半導体発光素子の上部電極上にウェッジボンディングする。次に、そのウェッジボンディング部の上に、第２のワイヤを重ねてボールボンディングする。これにより、半導体発光素子の上部電極上に、ボールボンディングで形成されたボールが接続されることとなり、この部分におけるワイヤの薄膜化を防止して、ワイヤボンディングの接合の強化を実現している。
　また、ボールボンディングによって形成された第１のワイヤのボールネックをキャピラリ先端で押し潰し、その上で折り返した第１のワイヤ側面を押し潰したボールネックに押し付け、さらにその上に第２のワイヤをボンディングする方法が提案されている（例えば、特許文献２）。この方法によれば、第２のワイヤをボンディングする際に、ボールネックに押し付けたワイヤが変形することによってボンディングの衝撃が緩和される。これにより、半導体の受けるダメージを低減している。また、第２のワイヤをボンディングする際に、キャピラリの押圧力によって第１のワイヤをキャピラリの中心孔に入り込む凸部に変形させ、キャピラリの中心孔に入り込んだ凸部とキャピラリのインナチャンファ部との間に第２のワイヤを挟みこんで圧縮している。
特開２００２－３５３２６７号公報 特開２００９－７６７８３号公報
　特許文献１に記載の方法において、半導体素子の電極に直接ウェッジボンディングを行うと、前記電極の膜厚が薄いことに起因して、安定した接合を得ることができないという課題があった。電極の膜厚が薄い場合、ボンディングの際にかける負荷によって半導体が破損してしまうおそれがあるためである。さらに、この半導体素子を形成する半導体層の片面側に正負両方の電極を有するタイプの半導体素子の場合、一方の電極面の高さが発光素子表面の高さよりも低いため、前記一方の電極面に上記ウェッジボンディングをすると、キャピラリの先端部にて半導体素子の段差表面を傷つけるという不具合が発生する。また、特許文献１に記載の方法においては、ウェッジボンディング部の上から重ねてボールボンディングしている。そのため、ワイヤのウェッジボンディング部と半導体素子の表面との間隔が狭く、ウェッジボンディング部と半導体素子との間において、周辺部材等の放熱効率が低下してしまうという問題がある。
　特許文献２に記載の方法においては、キャピラリの中心はワイヤの材料が供給される部分であるため、第２のワイヤをボンディングする際にキャピラリの中心によって押し付けることができない。このため第２のワイヤは、ボールネックの周辺部の上に接合された状態となるため、良好な接合状態を確保することができなくなるおそれがある。また、前記凸部周辺の第１のワイヤは、キャピラリのフェイス部とボール部との間で圧縮され、薄く押し潰された状態となるため、この箇所においてワイヤが断線しやすくなるという問題がある。
　そこで、本発明は、複数のワイヤがボンディングされた半導体素子を備える半導体装置であって、ワイヤの接合強度が高く、十分な接合信頼性を実現することができる半導体装置及びその製造方法を提供することを目的とする。
　本発明は、一端が電極上にボンディングされ、他端が前記電極外の第２ボンディング点にボンディングされている第１のワイヤと、一端が電極上の第１のワイヤの上にボンディングされ、他端が当該電極外の第３ボンディング点にボンディングされている第２のワイヤと、を含み、第２のワイヤの一端のボンディング部が、第１のワイヤの上面及び側面の少なくとも一部を覆う半導体装置に関する。かかる構成によれば、半導体素子の電極位置にかかわらず、ワイヤ数及び長さを低減するとともに、ワイヤの十分な接合面積を確保することができるため、ワイヤの接合強度を高めることができる。
　また、第１のワイヤは、一端が前記電極上にボンディングされたボール部であり、当該ボール部から第２ボンディング点と異なる方向に延伸した後、前記ボール部上に折り返す折り返し部を有し、第２のワイヤは、一端が前記折り返し部の上にボンディングされ、折り返し部の第２ボンディング点と反対側の側面の少なくとも一部を覆うことが好ましい。
　かかる構成によればワイヤの接合強度をさらに高めることができる。
　また、折り返し部は、ボール部の上からワイヤの延伸方向とは逆方向に引き出される下部と、下部から伸びるワイヤがボール部の上に折り返されてなる上部と、を有し、第２のワイヤの先端が、少なくとも第２のワイヤの延伸方向とは反対側の折り返し部の下部を覆うことが好ましい。かかる構成によれば、ワイヤの接合強度を高めることができる。
　第２のワイヤの先端は、少なくともボール部を覆うことが好ましい。また、第２のワイヤの先端は、少なくともボール部を覆うことが好ましい。かかる構成によれば、ワイヤの接合強度を高めることができる。
　第２のワイヤは、第２のワイヤの延伸方向側の折り返し部の上において略水平に設けられていることが好ましい。かかる構成によれば、ワイヤにかかる応力を低減することができるため、ワイヤの断線等を防止することができる。
　また、本発明は、電極上に第１のワイヤをボンディングしてボール部を形成し、ボール部の上に折り返し部を形成し、折り返し部から所定の方向に延伸させる第１の工程と、第２のワイヤを折り返し部の上にボンディングする第２の工程と、を有し、第２の工程において、少なくとも折り返し部の中心（図４（ｃ）における破線）よりも第２のワイヤが伸びる方向とは反対側において第２のワイヤに外力を加えて押し潰し、折り返し部に接合させる半導体装置の製造方法に関する。かかる構成によれば、ワイヤの十分な接合面積を確保することができるため、ワイヤの十分な接合信頼性を実現することができる。
　折り返し部は、ボール部の上からワイヤの延伸方向とは逆方向に引き出される下部と、該下部から伸びるワイヤが前記ボール部の上に折り返されてなる上部と、を有し、前記第２のワイヤの押し潰した部分を、少なくとも前記第２のワイヤの延伸方向とは反対側の前記折り返し部の下部に接合させることが好ましい。かかる構成によれば、ワイヤの十分な接合面積を確保することができるため、ワイヤの接合強度を高めることができる。
　また、折り返し部は、ボール部の上からワイヤの延伸方向とは逆方向に引き出される下部と、下部から伸びるワイヤがボール部の上に折り返されてなる上部と、を有し、第２のワイヤの先端が、少なくとも第２のワイヤの延伸方向とは反対側の折り返し部の下部に接合させることが好ましい。かかる構成によれば、ワイヤの接合強度を高めることができる。
　第２のワイヤの押し潰した部分を少なくともボール部に接合させることが好ましい。かかる構成によれば、ワイヤの接合強度を高めることができる。
　第２のワイヤは、第２のワイヤの延伸方向側の折り返し部の上において略水平に設けられていることが好ましい。かかる構成によれば、ワイヤにかかる応力を低減することができるため、ワイヤの断線等を防止することができる。
　また、本発明は、電極の上に、第１のワイヤをボールボンディングする第１工程と、第１のワイヤのボール部の上に第２のワイヤをボンディングする第２の工程と、を有し、第２の工程において、第２のワイヤは、第１のワイヤのボール部の中心点（図４（ｃ）の破線）上を覆うようにボンディングされる半導体素子の製造方法に関する。かかる構成によれば、ワイヤの十分な接合強度を確保することができる。
　本発明によれば、複数のワイヤがボンディングされた半導体素子を備える半導体装置であって、半導体素子の電極位置にかかわらず、ワイヤ数及び長さを低減するとともに、ワイヤの接合強度が高く、十分な接合信頼性を実現することができる半導体装置及びその製造方法を提供することができる。
本発明の実施形態に係る半導体装置を示す概略平面図である。 本発明の実施形態に係る半導体装置のワイヤ接合を示す概略斜視図である。 図１のｙ軸方向から見たワイヤ接合を説明するための概略工程図である。 図１のｘ軸方向から見たワイヤ接合を説明するための概略工程図である。 本発明の実施形態に係る半導体装置のワイヤ接合を説明するための概略側面図である。 本発明の実施形態に係る半導体装置の変形例を示す概略平面図である。 比較例の半導体装置のワイヤ接合を説明するための概略斜視図である。 ワイヤの強度試験を説明するための平面図である。 折り返し部の詳細を示す断面図である。 第１のワイヤの折り返し部の上にボンディングされた第２のワイヤの詳細を示す断面図である。
　以下、図面を参照して本発明を実施するための形態（以下「実施形態」という）について詳細に説明する。ただし、本発明は、この実施形態に限定されない。
　図１は、本発明の実施形態に係る半導体装置１０を示す概略平面図である。図２は、本発明の実施形態に係る半導体装置１０のワイヤ接合を示す概略斜視図である。図５は、本発明の実施形態に係る半導体装置１０のワイヤ接合を説明するための概略側面図である。
　本実施形態に係る半導体装置１０は、少なくとも、半導体素子１１とワイヤとを含んで構成されている。通常、ワイヤは、半導体素子１１間又は金属部材１２と半導体素子１１との間を接続している。ワイヤは、少なくとも第１のワイヤ１４と第２のワイヤ１５とを有している。
　第１のワイヤ１４は、半導体素子１１の電極１６上にボールボンディングされて形成されるボール部１４１と、ボール部１４１の上に形成される折り返し部１４２と、を有しており、さらにその折り返し部１４２から所定の方向に延伸されてなる。第２のワイヤ１５は、第１のワイヤの折り返し部の上にボンディングされる。第２のワイヤの先端は、第２のワイヤの延伸方向とは反対側の折り返し部を覆っている（第１のワイヤ１４の折り返し部の１４２の側面であって、第２のワイヤ１５の延伸方向と反対側の側面の少なくとも一部が第２のワイヤ１５の先端部により覆われている）。これにより、ワイヤの十分な接合状態を確保することができる。
　第２のワイヤの先端は、少なくともボール部（ボール部１４１の少なくとも一部）を覆うことが好ましい。これにより、ワイヤの接合強度を高めることができる。
　本実施形態の半導体装置は、半導体素子、ワイヤ及び金属部材等が、一体的に、樹脂によって成形又は封止されていることが好ましい。成形樹脂は、半導体素子等に対して、絶縁性を確保することができるものであれば、どのような材料によって形成されていてもよい。また、封止樹脂は、半導体素子等に対して、絶縁性を確保することができ、透光性を有するものであれば、どのような材料によって形成されていてもよい。成形又は封止樹脂の大きさ及び形状は、特に限定されるものではない。
　以下、各構成部材について詳述する。
　（半導体素子）
　本発明で用いられる半導体素子は、半導体が積層されてなる素子であって、電極上にワイヤがボンディングされるものであれば特に限定されない。
　本発明に用いられる半導体素子は、半導体層の対向する面（例えば上面と下面）に正および負の電極がそれぞれ形成されたものであってもよく、半導体層の同一面側に正および負の電極がともに形成されていてもよい。後者の場合の一対の電極は、一般的には高低差を有しているが、バンプ等の高さを調整することによって同じ高さ（半導体層からほぼ同じ距離）となるように配置してもよい。高低差を有している場合、直接電極にウェッジボンディングすることは、ワイヤと電極との接合面積が、ボールボンディングによって接合する場合のボール部と電極との接合面積よりも小さいため、接合状態が悪く、ダイスへのキャピラリ接触による損傷が発生することから、本発明の効果がより顕著に現れる。また、この場合の正および負の電極は、必ずしも１つずつ形成されていなくてもよく、それぞれ２つ以上形成されていてもよい。
　電極１６は、その材料、膜厚、構造において、特に限定されないが、後述するワイヤの種類によって、金、銅、鉛、アルミニウム又はこれらの合金を含む単層構造、積層構造のいずれでもよい。電極の膜厚は特に限定されないが、なかでも、最終層（最も表面側）がＡｕを配置され、その膜厚が１００ｎｍ程度以上であることが好ましい。この電極の最終層、つまり最表面の層には、ワイヤがボンディングされる。
　半導体装置において、半導体素子は、１つの半導体装置において１つのみ搭載されていてもよいし、複数個搭載されていてもよい。半導体素子が複数個搭載されている場合には、それらが並列、直列又はそれらの組み合わせなど、接続形態は特に限定されない。
　（金属部材）
　金属部材は、半導体素子と電気的に接続するための電極及び半導体素子を搭載する基板としての役割を果たすものであり、実質的に板状であればよく、波形板状、凹凸を有する板状であってもよい。その膜厚は均一であってもよいし、部分的に厚膜又は薄膜であってもよい。材料は特に限定されず、熱伝導率の比較的大きな材料（例えば、２００Ｗ／（ｍ・Ｋ）程度以上）、比較的大きい機械的強度を有するもの、あるいは打ち抜きプレス加工又はエッチング加工等が容易な材料で形成することが好ましい。このような材料で形成することにより、半導体素子で発生する熱を効率的に逃がすことができる。具体的には、銅、アルミニウム、金、銀、タングステン、鉄、ニッケル等の金属又は鉄－ニッケル合金、燐青銅等の合金等が挙げられる。また、金属部材の表面には、搭載される半導体素子からの光を効率よく取り出すために反射メッキが施されていることが好ましい。
　金属部材は、通常、１つの半導体装置において２本以上備えられている。また、半導体素子の数＋１本以上であってもよい。
　金属部材は、半導体素子を搭載し、半導体素子と接続される領域の他に、外部と接続するリード端子として延長（延在）する領域を有していてもよい。リード端子は、本発明の半導体装置の実装タイプ（例えば、発光面がリード端子の実装面に垂直であるタイプサイドビュータイプ、発光面がリード端子の実装面に平行であるタイプトップビュータイプ等）、使用態様に応じて、適宜屈曲、変形させることができる。
　半導体装置において、第１のワイヤの延伸方向と第２のワイヤの延伸方向がなす角度が４５度～１３５度の範囲となるように、半導体素子及び金属部材を配置させることが好ましい。これにより、第２のワイヤが、第１のワイヤの折り返し部の上面及び側面、すなわち、異なる２つの面に亘ってより確実に接合されるため、接合強度を顕著に高めることができる。
　（ワイヤ）
　ワイヤは、半導体素子の表面に形成された電極と金属部材との間、半導体素子間、半導体素子内の電極間などを電気的に接続する（ボンディングする）ために用いられる導電部材である。
　本発明においては、２つのポイント間のワイヤにおいて、始点として接合するポイントを第１ボンディング点、終点として次に接続するポイントを第２ボンディング点と称することがある。
　第１ボンディング点は、半導体素子の電極上に、ワイヤが溶融して形成されたボールがボンディングされている。このようにボールボンディングされたワイヤの接続部分を、ボール部と称することがある。ボールは、球状であるものや、また一部が欠けているもの、楕円球状であればよい。
　さらにボール部は、これらの形状に一旦成形した後、例えば上部に第２のワイヤを接続する際の押圧力により変形した形態も含む。
　また、第２ボンディング点においては、ワイヤは、ボールを介することなく接続されている。この第２ボンディング点におけるワイヤの接続部分を、ウェッジボンド部１４４と称することがある。なお、第２ボンディング点（又はウェッジボンド部）は、金属部材に接触するように金属部材の直上に配置されることが好ましい。また、第２ボンディング点が、半導体素子の電極上に配置される場合には、少なくともボール部を介して配置されていることが好ましく、半導体素子の電極と接触するように、直接、ウェッジボンド部が接続されていないことが好ましい。
　ボンディング点とは、通常、半導体素子の電極表面又は半導体装置を構成する金属部材表面の一部領域を指すが、複数のワイヤが形成される場合（例えば、ボンディングされたワイヤの上に別のワイヤがボンディングされる場合）は、ボンディングされた領域、例えば、ワイヤ上又はボール部上をも包含する。
　本発明において、ワイヤは、少なくとも第１のワイヤと第２のワイヤとを有している。第１のワイヤは、第１ボンディング点と、第２ボンディング点とを接続するワイヤを意味する。また、第２のワイヤは、第１ボンディング点及び第２ボンディング点の２点を通る直線上とは異なる位置に配置された第３ボンディング点と、第１のワイヤのボール部の上とを接続するワイヤを意味する。このような第１および第２のワイヤに対応するものが、１つの半導体装置において複数形成されていてもよい。
　第１のワイヤ１４は、上述したように、半導体素子の電極の上にボールボンディングされたボール部１４１を有しており、さらに、ボール部の上に折り返し部１４２を有している。
　図９は、折り返し部１４２の詳細を示す断面図である。図９では、折り返し部１４２の詳細を容易に理解できるように第２のワイヤ１５の記載を省略してある。
　ボール部１４１の径は、半導体装置やそれに搭載される電極の大きさによって適宜調節されるものであり、例えば５０μｍ～１００μｍ程度である。折り返し部１４２は、ボール部１４１の上からワイヤの延伸方向（ワイヤの終点となる点、つまり、第２のボンディング点がある方向）とは逆方向にワイヤが引き出され、さらにワイヤの終点となる点の方向に折り返されて、折り返されたワイヤがボール部１４１上に押し付けられることにより形成される。
　ここで、折り返し部１４２の内、ボール部１４１の上からワイヤの延伸方向とは逆方向に引き出された部分を折り返し部の下部１４２ａとし、折り返し部の下部１４２ａから伸びるワイヤがボール部１４１の上に折り返された部分を折り返し部の上部１４２ｂとする。すなわち、折り返し部の下部１４２ｂの上に折り返し部の上部１４２が折り返し部の下部１４２ｂと接触（接合）して配置されている。
　折り返し部の上部１４２ｂは、上面に平坦部を備えていることが好ましい。図９に示す実施形態では、楕円Ａおよび楕円Ｂで示す２つの平坦部を有している。平坦部はボール部１４１が形成されている電極１６の表面に対して３０°以下の角度を有している。例えば楕円Ａで示す平坦部は５°程度の角度を有しており、楕円Ｂで示す角度は２０～３０°程度の角度を有している。なお平坦部の傾斜の向き（図９において右上がり方向か、左上がり方向か）は何れの向きであってもよい。
　折り返し部１４２は、ボール部１４１の上からワイヤの延伸方向とは逆方向（第２ボンディング点とは反対の方向）に突出していることが好ましい。すなわち、折り返し部１４２の水平方向の長さは、ボール部１４１の半径よりも長いことが好ましい。これにより、折り返し部１４２の上に接合される第２のワイヤの接合強度を高めることができる。折り返し部１４２は、ボール部１４１の中心点からワイヤの延伸方向とは逆方向に３０μｍ～１００μｍ程度の長さを有していることが好ましい。
　折り返し部１４２からはワイヤの終点となる点の方向に向かってワイヤが略水平に伸びている。ここで、略水平とは、ワイヤがボールボンディングされる面（例えば電極表面）に対して、略平行であることを意味する。この場合の略水平は、ワイヤがボールボンディングされる面に対して、ワイヤの軸の成す角度が３０°以内の範囲を含むものとする。
　また、ワイヤの折り返し部１４２から延びるワイヤとボール部１４１の周縁部との間には、空隙３１が設けられていることが好ましい。これにより、十分な接合状態を確保することができるとともに、放熱性が良好なものとなる。この空隙３１の部分には、封止樹脂が存在していてもよい。
　第２のワイヤは、一方が第３ボンディング点にボンディングされ、他方が第１のワイヤの折り返し部１４２の上にボンディングされる。第３ボンディング点が、半導体素子の電極である場合には、第３ボンディング点にボールボンディングされたボール部を有していることが好ましい。
　図１０は、第１のワイヤの折り返し部１４２の上にボンディングされた第２のワイヤ１５の詳細を示す断面図である。第１のワイヤは折り返し部１４２から図面に垂直な方向に延伸している。
　このように、半導体素子の電極１６の表面に、第１のワイヤのボール部１４１を介して、第２のワイヤ１５が形成されることにより、最下層のボール部１４１が、金属部材又は電極１６の表面（特に電極１６の表面）に対して、下地として機能するために（金属部材又は電極表面と第２のワイヤとの間に介在するために）、ワイヤボンディングの際の接合不良及び半導体素子の損傷等を効果的に防止することができる。
　第３ボンディング点は、第１ボンディング点及び第２ボンディング点の２点を通る直線上とは異なる位置に配置されている。つまり、第２のワイヤは第１のワイヤの延伸方向に対して交差している。
　第２のワイヤ１５は、第１のワイヤのボール部１４１の中心点上を覆うように（ボール部１４１の中心点の上部に位置するように）第１のワイヤの折り返し部１４２に接合されている。さらに、第２のワイヤ１５の先端は、折り返し部に沿って延伸され、第２のワイヤの延伸方向とは反対側の折り返し部を覆っている（折り返し部１４２の第３ボンディング点と反対側の側面（図１０における折り返し部１４２の左側の側面）の少なくとも一部を覆っている）。この場合、図５に示すように、第２のワイヤ１５の先端が、折り返し部１４２の下部１４２ａの側面の少なくとも一部を覆うように接合されていることが好ましい。これにより、ワイヤの折り返し部近傍の接合強度を高めることができる。また、第２のワイヤの先端が、第１のワイヤのボール部（ボール部１４１の少なくとも一部）を覆うように接合されていてもよい。これにより、ワイヤの折り返し部近傍の接合強度をさらに高めることができる。
　なお、このような第２のワイヤ１５が第１のワイヤ１４の側面（好ましくは第２のワイヤが延伸する方向と反対側の側面）の少なくとも一部を覆うことによる第１のワイヤと第２のワイヤの接合強度の強化は、折り返し部１４２が形成されていない第１のワイヤのボンディング部（電極１６とのボンディング部）と第２のワイヤとの接合にも適用できる。すなわち、第２のワイヤの第１のワイヤとのボンディング部（接合部）において、第２のワイヤのボンディング部が第１のワイヤの上面のみならず第１のワイヤの側面（好ましくは第２のワイヤが延伸する方向と反対側の側面）の少なくとも一部を覆う実施形態は、折り返し部１４２の有無に関わらず本願発明に含まれる。
　第２のワイヤ１５は、第２のワイヤの延伸方向側の折り返し部との間に空隙３２が設けられていることが好ましい。さらに、第２のワイヤは、第２のワイヤの延伸方向側の折り返し部の上において略水平、例えば図１０に示すように電極１６の表面に対して３０°以内、に設けられていることが好ましい。これにより、ワイヤにかかる応力を低減することができるため、ワイヤの断線等を防止することができる。
　ワイヤは、半導体素子の電極とのオーミック性が良好であるか、機械的接続性が良好であるか、電気伝導性及び熱伝導性が良好なものであることが好ましい。熱伝導率としては、０．０１ｃａｌ／（Ｓ）（ｃｍ２）（℃／ｃｍ）程度以上が好ましく、さらに０．５ｃａｌ／（Ｓ）（ｃｍ２）（℃／ｃｍ）程度以上がより好ましい。作業性などを考慮すると、ワイヤの直径は、１０μｍ～４５μｍ程度であることが好ましい。このようなワイヤの材料としては、例えば、金、銅、白金、アルミニウム等の金属及びそれらの合金が挙げられる。なかでも、接合信頼性、接合後の応力緩和等の観点から、金が好ましい。
　（製造方法）
　図３は、本発明の実施形態に係る半導体装置のワイヤ接合を説明するための概略工程図であって、図１のｙ軸方向から見た概略工程図である。図４は、本発明の実施形態に係る半導体装置のワイヤ接合を説明するための概略工程図であって、図１のｘ軸方向から見た概略工程図である。
　本実施形態に係る半導体装置の製造方法は、第１のワイヤを半導体素子の電極上にボールボンディングする第１の工程（図３）と、第１のワイヤのボール部の上に第２のワイヤをボンディングする第２の工程（図４）と、を有する。
　本実施形態のワイヤ接続を実現するために用いられるワイヤボンディング法としては、特に限定されないが、通常、熱圧着ワイヤボンディング、超音波併用熱圧着ワイヤボンディング等を好適に利用することができる。
　以下、各工程について詳述する。
　（第１の工程）
　第１ボンディング点である半導体素子の電極の上に、ワイヤの溶融により形成されたボールを圧着する。この圧着ボールから延長するワイヤをさらに前記圧着ボール上に圧着し、第２のボンディング点の方向に前記ワイヤを引き伸ばして、第２のボンディング点に接続する。
　この第１の工程は、まず、ワイヤをキャピラリ等の治具に通し、スパーク等による高温を利用して、その先端を溶融させてワイヤによるボールを生成させる。温度は、特に限定されることなく、用いるワイヤの材料、太さ等によって調整することができる。例えば、３６０℃程度以下の温度が挙げられる。ボールの大きさは特に限定されることなく、通常、ワイヤの２～２０倍程度、さらに２～１０倍程度の直径とすることができる。
　続いて、そのボールを金属部材又は電極表面に圧着してボール部を形成する。本発明では、上述したように、この圧着点が第１のボンディング点となる。この際の負荷は、例えば、金属部材又は電極表面でのボールの直径の広がりを考慮して、適宜調整することができる。また、この際、超音波を印加しながら圧着してもよい。
　次いで、第１のワイヤの延伸方向となる点（つまり、第２ボンディング点）とは逆方向に引き伸ばすために、キャピラリを逆方向に移動させる。この場合の逆方向は、第２ボンディング点がある方向に対して、１５０～２１０°程度の範囲が含まれる。この際の引き伸ばし量、つまりキャピラリの移動長さは、１０～１００μｍ程度とすることが好ましい。
　その後、キャピラリを、任意に上昇させ、前記ボール部の直上に移動させ、さらに下降させることにより、前記ボール部上にキャピラリを圧着させる。これにより、ボール部から延長する第１のワイヤが前記ボール部上に折り返されて圧着される。その結果、前記ボール部上に折り返し部が形成され、折り返し部の表面及びその近傍に位置するワイヤの表面をほぼ平坦とすることができる。この場合、超音波を印加しながら圧着してもよいが、印加せずに圧着することが好ましい。超音波の印加により、ワイヤが細く潰れることがあり、接合信頼性の低下を招くことがあるからである。また、圧着ボール上にワイヤの別の一部を圧着することにより、ワイヤの上方向への伸び（空間の占有）を低減し、例えば、圧着ボール底面からワイヤ径の１．０～５．０倍程度の高さ、別の観点から、圧着ボールの１倍から３倍程度以内の高さに止めることができる。
　続いて、ワイヤを、前記圧着ボールの直上から、前記第１ボンディング点とは別の位置にある第２ボンディング点へ引き伸ばし、第２ボンディング点に接合する。この場合の接合は、超音波を印加しながら又は印加せずに接合することができる。
　（第２の工程）
　第１の工程の後、第１のワイヤの折り返し部１４２の上に第２のワイヤをボンディングする。この際、少なくとも第１のワイヤの折り返し部１４２の中心よりも第２のワイヤが伸びる方向とは反対側（図４の左方向）において、第２のワイヤに外力を加えて押し潰し、折り返し部に接合させる。
　第２のワイヤは、第３ボンディング点上にボールボンディングした後、第１のボンディング点の方向に引き伸ばして第１ボンディング点にボンディングしてもよい。
　この第２の工程は、まず、第１の工程と同様に、キャピラリ等の治具に通したワイヤの先端を溶融させてボールを生成させる。
　続いて、そのボールを金属部材又は電極表面に圧着してボール部を形成する（図４（ａ））。本発明では、上述したように、この圧着点が第３のボンディング点となる。この際の負荷は、例えば、金属部材又は電極表面でのボールの直径の広がりを考慮して、適宜調整することができる。また、この際、超音波を印加しながら圧着してもよい。また、第１の工程と同様に、第２のワイヤのボール部の上に折り返し部を形成し、その折り返し部の表面及びその近傍に位置するワイヤの表面に平坦部を形成してもよい（図４（ｂ））。
　次いで、キャピラリを第３のボンディング点上から、第１のワイヤの折り返し部の上に移動させる。この際、キャピラリの中心（図４（ｃ）における一点鎖線）を、第１のワイヤのボール部の中心点（図４（ｃ）における破線）の直上から、第２のワイヤの延伸方向（第３ボンディング点がある方向）とは逆方向にずらすことが好ましい。この場合の逆方向は、第１のワイヤのボール部の中心点から第３ボンディング点に対して、１５０～２１０°程度の範囲が含まれる。このようにキャピラリを第１のワイヤの折り返し部の上に移動させた状態において、第１のワイヤのボール部の中心点からキャピラリの中心までの水平方向の距離Ｌを、キャピラリのシフト量と称することがある。この場合、キャピラリのシフト量は、３０～５０μｍ程度とすることが好ましい。
　続いて、キャピラリを下降させることにより、第１のワイヤの折り返し部１４２の上にキャピラリを圧着させて、第２のワイヤをボンディングする。このようにキャピラリの中心をずらした状態で圧着させることにより、第１のワイヤのボール部の中心点上に位置する折り返し部に対してキャピラリ５０のフェイス部５１を押し付けることができるため、折り返し部の周縁部に過剰な荷重が加わることを防止することができる。また、キャピラリ５０を第１のワイヤの折り返し部１４２に圧着させると、キャピラリと第１のワイヤの折り返し部との間に挟まれた第２のワイヤが押し潰されて断面積が小さくなる。そして、第２のワイヤ１５は断面積が小さくなった部分において切断される。上述したように、キャピラリの中心を第２のワイヤの延伸方向とは逆方向にずらした状態で圧着させるため、第２のワイヤは第１のワイヤの折り返し部の中心点（中心）上を覆うように接合され、第２のワイヤの切断面１５６は、好ましくは第１のワイヤのボール部の中心よりも第２のワイヤの延伸方向とは反対側に形成される。
　なお、切断面とは、ボンディングのため押しつぶされたワイヤ１５とキャピラリ５０内のワイヤ１５とを分離するために切断する際に生ずる面を意味する。
　また、押し潰された第２のワイヤの先端（または先端とその近傍）が、第２のワイヤの延伸方向とは反対側の第１のワイヤの折り返し部を覆った状態（折り返し部１４２の側面であって、第３のボンディング点と反対側の側面の少なくとも一部を覆った状態）で接合されるため、第２のワイヤの接合強度を高めることができる。このボンディングの際の荷重は、４０～８０ｇｆが好ましい。これにより、良好な接合状態を確保することができる。また、キャピラリを圧着させる際に、キャピラリをさらに下降させることによって、第１のワイヤの折り返し部１４２に第２のワイヤの先端部分を押し付けてもよい。これにより、ワイヤの接合強度をさらに高めることができる。また、第２のワイヤの押し潰した部分を第２のワイヤの延伸方向とは反対側のボール部（ボール部１４１の側面であって、第３ボンディング点と反対側の側面）に接合させてもよい。
　なお、キャピラリの中心が第１のワイヤのボール部の中心点上に位置する状態、すなわち、キャピラリのシフト量が０の状態でボンディングを行うと、キャピラリの中心はワイヤの材料が供給される部分であるため、キャピラリによってボール部の中心を押し付けることができない。また、ボール部の周縁部上にキャピラリの圧力が加わるため、例えば図７に示すように、ワイヤがボール部の周辺部上に押し付けられた状態となってしまうが、本願発明ではこのような状態を回避できる。
　本発明の半導体装置では、上述したボール部の生成から第２ボンディング点への接合までの一連方法を、互いに異なる任意の２ポイント間で２回以上適用するが、搭載される半導体素子の数、半導体素子の電極の態様、半導体素子の接続態様等に応じて、３回、４回、さらにそれ以上、上述した一連方法が行われたものであることが好ましい。また、別の観点から、１つの半導体素子に対して、第１ボンディング点及び／又は第２ボンディング点が、合計３点以上設定されていることが好ましく、それぞれ２点以上ずつ設定されていることがより好ましい。この場合、一つのボンディング点におけるワイヤのボール部上に、他のボンディング点から延伸するワイヤが２つ以上接続されていてもよい。
　本発明の半導体装置では、第１のワイヤの延伸方向と第２のワイヤの延伸方向がなす角度は、半導体装置の大きさ、半導体素子の電極や金属部材の位置に応じて、適宜変更することができる。また、図６に示すように、半導体装置内において、２本以上のワイヤが一直線上に接続されている箇所を一部に有していてもよい。
　以下に、本発明の半導体装置の実施例を図面に基づいて詳細に説明する。
　実施例
　図６は、本実施例に係る半導体装置を示す概略平面図である。図３及び図４は、本実施例に係る半導体装置のワイヤ接合を説明するための概略断面工程図である。
　図６に示すように、この実施例の半導体装置１０は、半導体素子１１と、板状の金属部材１２と、半導体素子１１と金属部材１２との間及び半導体素子１１間をそれぞれ電気的に接続するワイヤと、これらを一体的に樹脂封止する成形体１９とを備えて構成されている。この半導体装置１０には、金属部材１２に電気的に接続された保護素子１３がさらに搭載されている。
　金属部材１２は、アルミニウム合金からなる板状体であり、半導体素子１１を搭載する領域と、そこから一方向に延長する領域を備えている。
　成形体１９は、金属部材１２の一部を挟持して一体的に、直方体に近い形状（縦３．５ｍｍ×横３．５ｍｍ×高さ０．８５ｍｍ）で成形されている。成形体は、その中央付近に、略角丸四角形（縦２．９ｍｍ×横２．９ｍｍ）の窓部１９ａを有している。窓部１９ａ内では、金属部材１２の一部が露出しており、露出した金属部材１２上に半導体素子１１が搭載されている。なお、窓部１９ａ内には、透光性を有する封止樹脂１８が埋設されている。
　半導体素子１１は、その表面に２つの電極が形成されており、各電極が、金属部材１２又は他の電極と、ワイヤによってそれぞれ電気的に接続されている。
　ワイヤは、ワイヤボンディングにより、金属部材表面又は電極表面に接合されている。第１ボンディング部（第１ボンディング点）である半導体素子１１の電極上において、ワイヤの溶融により形成されたボールが電極１６表面に圧着されており（ボール部１４１）、この圧着ボールから延長（延伸）するワイヤがさらに圧着ボール上に折り返されており（折り返し部１４２）、第２ボンディング点である金属部材１２の方向に延長（延伸）し、金属部材１２の表面に接合されている（ウェッジボンド部）。つまり、第１ボンディング点Ｐ１において、第２ボンディング点と反対側に、ワイヤによるループ形状が形成されており、その折り返し部の表面／頂上部分はワイヤの一部を含めて潰された状態であり、比較的平坦化された形状となっている。
　この第１のワイヤ１４の接合は、まず、ワイヤをキャピラリに通し、スパークによる高温を利用して、その先端を溶融させてワイヤによるボールを生成させる。
　続いて、そのボールを電極表面に圧着し、接合する（図３（ａ））。この圧着点が第１ボンディング点となる。ワイヤは、直径が２５μｍのものを用い、ボール１４１の径は、７０μｍとする。
　次いで、図３（ａ）の矢印に従って、圧着点からキャピラリ５０を上昇させ、ワイヤを繰り出し、第２ボンディング点とは逆方向に引き伸ばすために、キャピラリを逆方向に移動させる（図３（ｂ））。
　その後、キャピラリ５０を上昇させ（図３（ｃ））、ボール直上に移動させてワイヤを繰り出し、ボール上にキャピラリを圧着する（図３（ｄ））。これにより、圧着ボールから延長する（繋がる）ワイヤ（第１のワイヤ１４）の別の一部がボール上に折り返されて、この折り返し部の表面及びその近傍に位置するワイヤがほぼ平坦となる（図３（ｅ））。
　続いて、図３（ｅ）の矢印に従って、キャピラリ（図示せず）を上昇させて、ワイヤを繰り出し、第２ボンディング点とは逆方向にキャピラリを水平移動させ、再度上昇させてワイヤを繰り出し、圧着ボールの直上を通り、第２ボンディング点へ水平移動及び下降しながらワイヤを引き伸ばし、第２ボンディング点に接合する。これにより、第１ボンディング点と第２ボンディング点とを架橋する第１のワイヤ１４が形成される。
　この半導体装置では、電極１６の第１ボンディング点Ｐ１の上に、この電極１６と別の電極１７（第３ボンディング点Ｐ３）との間を電気的に接続する第２のワイヤ１５が設けられている。第２のワイヤ１５は、第１のワイヤ１４の延伸方向と交差している。
　この第２のワイヤ１５の接合は、第１のワイヤ１４を接合する工程と同様に、まず、キャピラリ等の治具にとおしたワイヤの先端を溶融させてボールを生成させる。
　続いて、そのボールを金属部材又は電極表面に圧着してボール部を形成する（図４（ａ））。この圧着点が第３のボンディング点となる。第１のワイヤと同様に、第２のワイヤのボール部の上に折り返し部を形成し、その折り返し部の表面及びその近傍に位置するワイヤの表面に平坦部を形成してもよい（図４（ｂ））。
　次いで、キャピラリを第３のボンディング点上から、第１のワイヤの折り返し部の上に移動させる。この際、キャピラリの中心（図４（ｃ）における一点鎖線）を、第１のワイヤのボール部の中心点（図４（ｃ）における破線）の直上から、第２のワイヤの延伸方向（第３ボンディング点がある方向）とは逆方向にずらした位置まで移動させる。
　続いて、キャピラリを下降させることにより、第１のワイヤの折り返し部の上にキャピラリを圧着させて、第２のワイヤをボンディングする（図４（ｄ））。キャピラリを第１のワイヤの折り返し部に圧着させると、キャピラリと第１のワイヤの折り返し部との間に挟まれた第２のワイヤが押し潰されて断面積が小さくなる。そして、第２のワイヤは断面積が小さくなった部分において切断される（図４（ｅ））。
　本実施例においては、第２のワイヤ１５を第１のワイヤ１４のボール部の上に接合する際に、キャピラリのシフト量を４０μｍとして、４０ｇｆの荷重によりボンディングを行う。
　このように構成された半導体装置１０では、第２のワイヤ１５は、第１のワイヤ１４の折り返し部１４２の上に接合され、さらに第２のワイヤ１５の先端は、第２のワイヤの延伸方向とは反対側の折り返し部１４２を覆っている。
　本実施例の半導体装置１０においては、ワイヤの接合状態を良好なものとすることができる。
　比較例
　図７は、比較例に係る半導体装置の一部を拡大した概略断面図である。
　第２のワイヤ２５を第１のワイヤ２４の上にボンディングする際に、キャピラリの中心が第１のワイヤ２４のボール部２４１の中心点上に位置する状態、すなわち、キャピラリのシフト量を０として、ボンディングを行うように変更した以外、実質的に実施例１と同様の製造方法で、同様の半導体装置を作製する。
　その結果、第２のワイヤ２５は、第２のワイヤの延伸方向側にある第１のワイヤの折り返し部の周縁部に接合された状態になる。
　比較例の半導体装置は、実施例１の半導体装置と比較して、信頼性試験においてワイヤが断線しやすい傾向にある。
　実施例及び比較例と同様の半導体装置を各１０個作製し、それぞれの第２のワイヤを引っ張って強度試験を行い、ワイヤが破断する時の荷重（ｇｆ）と破断した箇所を調べた。その結果を表１に示す。尚、表１において、Ａ、Ｂの符号で示す部分は、図８において示したＡ、Ｂの部分で破断されたものを示している。各符号は、以下の通りである。
　Ａ：第２のワイヤの折り返し部近傍
　Ｂ：第２のワイヤの先端近傍
　また、図８において、Ｘの符号を付して示す部分は、強度試験に際してワイヤを引っ張った位置を示している。
Figure JPOXMLDOC01-appb-T000001
　実施例の強度試験の平均値は、約９．０４ｇｆであった。また、実施例の半導体装置は、１０個とも第２のワイヤの先端近傍（Ｂ）においては断線しておらず、第２のワイヤの折り返し部近傍（Ａ）において断線していた。一方、比較例の強度試験の平均値は、約７．４６ｇｆであった。また、比較例の半導体装置は、１０個のうち９個が、第２のワイヤの先端近傍（Ｂ）において断線していた。
　この結果から、実施例の半導体装置は、第２のワイヤの先端近傍（Ｂ）においては断線していないため、第１のワイヤと第２のワイヤの接合強度が高いことが確認できた。
　また、実施例の半導体装置の方が、比較例の半導体装置よりもワイヤの接合強度が高いことを確認した。
　本発明の半導体装置は、半導体素子を搭載することにより、ファクシミリ、コピー機、ハンドスキャナ等における画像読取装置に利用される照明装置のみならず、照明用光源、ＬＥＤディスプレイ、携帯電話機等のバックライト光源、信号機、照明式スイッチ、車載用ストップランプ、各種センサおよび各種インジケータ等の種々の照明装置に利用することができる。
　また、半導体装置のみならず、ＩＣ、メモリ等の種々の半導体装置のワイヤボンディングにおいても広く利用することができる。
１０　半導体装置
１１、２１　半導体素子
１２　金属部材
１３　保護素子
１４、２４　第１のワイヤ
１４１、２４１　第１のワイヤのボール部
１４２、２４２　第１のワイヤの折り返し部
１４２ａ　折り返し部の下部
１４２ｂ　折り返し部の上部
１４４　ウェッジボンド部
１５、２５　第２のワイヤ
１５１　第１のワイヤのボール部
１５２　第１のワイヤの折り返し部
１６、１７、２６　電極
１８　封止樹脂
１９　成形体
１９ａ　窓部
５０　キャピラリ
５１　フェイス部

Claims (9)

  1. 　一端が電極上にボンディングされ、他端が前記電極外の第２ボンディング点にボンディングされている第１のワイヤと、
    　一端が前記電極上の前記第１のワイヤの上にボンディングされ、他端が前記電極外の第３ボンディング点にボンディングされている第２のワイヤと、
    を含み、前記第２のワイヤの前記一端のボンディング部が、前記第１のワイヤの上面及び側面の少なくとも一部を覆うことを特徴とする半導体装置。
  2. 　前記第１のワイヤは、前記一端が前記電極上にボンディングされたボール部であり、該ボール部から前記第２ボンディング点と異なる方向に延伸した後前記ボール部上に折り返す折り返し部を有し、
    　前記第２のワイヤは、前記一端が前記折り返し部の上にボンディングされ、前記折り返し部の前記第２ボンディング点と反対側の側面の少なくとも一部を覆うことを特徴とする請求項１に記載の半導体装置。
  3. 　前記折り返し部は、前記ボール部上からの前記第２ボンディング点と逆方向に延伸する折り返し下部と、該折り返し下部上に配置され、前記ボール部の上に折り返す折り返し上部と、を有し、
    　前記第２のワイヤの一端が、前記折り返し下部の前記第２ボンディング点と反対側の側面の少なくとも一部を覆うことを特徴とする請求項２に半導体装置。
  4. 　前記第２のワイヤの一端が、前記ボール部の少なくとも一部を覆うことを特徴とする請求項２又は３のいずれか１項に記載の半導体装置。
  5. 　前記第２のワイヤは、前記折り返し部の上に略水平に配置されていることを特徴とする請求項２乃至４のいずれか１項に記載の半導体装置。
  6. 　一端をボンディングして電極上にボール部を形成し、他端を前記電極外の第２ボンディング点にボンディングする第１のワイヤのボンディング工程であって、前記第１のワイヤを前記ボール部から前記第２ボンディング点と異なる方向に延伸させた後、前記ボール部上で前記異なる方向に延伸する前記第１のワイヤにボンディングして折り返し部を形成することを含む第１のワイヤのボンディング工程と、
    　一端を前記折り返し部の上にボンディングし、他端を前記電極外の第３ボンディング点にボンディングする第２のワイヤのボンディング工程であって、前記折り返し部の中心よりも前記第３ボンディング点の反対側で前記第２のワイヤを変形し前記折り返し部と接合させることを含む第２のワイヤのボンディング工程と、
    を含むことを特徴とする半導体装置の製造方法。
  7. 　前記第１のワイヤのボンディング工程において、前記折り返し部は、前記ボール部の上から前記第３ボンディング点と反対方向に延伸する折り返し下部と、該折り返し下部の上に接合した、前記反対方向から前記ボール部の上に延伸する折り返し上部とを設けることにより形成し、
    　前記第２のワイヤのボンディング工程において、前記第２のワイヤの前記変形により、前記第２のワイヤの先端が、前記折り返し下部の前記第２ボンディング点と反対側の側面の少なくとも一部を覆うことを特徴とする請求項６に記載の半導体装置の製造方法。
  8. 　前記第２のワイヤを前記変形により、前記ボール部の少なくとも一部分と接合させることを特徴とする請求項６又は７のいずれか１項に記載の半導体装置の製造方法。
  9. 　前記第２のワイヤは、前記折り返し部の上に略水平に接合することを特徴とする請求項６乃至８のいずれか１項に記載の半導体装置の製造方法。
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JP2003243442A (ja) * 2002-02-19 2003-08-29 Seiko Epson Corp 半導体装置及びその製造方法、回路基板並びに電子機器
JP2008130863A (ja) * 2006-11-22 2008-06-05 Nichia Chem Ind Ltd 半導体装置及びその製造方法
JP2009076783A (ja) * 2007-09-21 2009-04-09 Shinkawa Ltd 半導体装置及びワイヤボンディング方法

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JPWO2014083805A1 (ja) * 2012-11-28 2017-01-05 パナソニックＩｐマネジメント株式会社 発光装置および発光装置の製造方法
JP2015173235A (ja) * 2014-03-12 2015-10-01 株式会社東芝 半導体装置及びその製造方法

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