WO2007034723A1

WO2007034723A1 - Highly accurate moving magnet type linear slider

Info

Publication number: WO2007034723A1
Application number: PCT/JP2006/318195
Authority: WO
Inventors: Masahiko Tanabe
Original assignee: Kabushiki Kaisha Yaskawa Denki
Priority date: 2005-09-20
Filing date: 2006-09-13
Publication date: 2007-03-29
Also published as: TWI341070B; TW200717972A

Abstract

There is provided a highly accurate moving magnet of high-thrust resolution capable of suppressing external turbulence caused by cable tension. The linear slider includes a magnet track (5) formed by a U-shaped magnetic body having both surfaces in which field magnets are fixed, a coreless armature (2) arranged via a gap on the magnet track (5), a linear guide (6), and a linear scale (9). As the moving magnet structure, a power and sensor cables (11 to 13) are arranged at the fixed side so as to eliminate external turbulence for the thrust. A thrust sensor (15) is arranged between the output end of the U-shaped magnet track of the movable side and a work pressing member (14). Thus, it is possible to perform full-closed control of thrust with high resolution and with high accuracy.

Description

Specification

High precision moving magnet type linear slider

Technical field

The present invention relates to a linear slider that requires minute thrust control resolution.

Background art

[0002] In order to energize the armature, which is a moving part, the conventional moving coil type linear slider drives the mover to which the cable is fixed, and the thrust is controlled by the current input to the armature. (For example, see Patent Document 1).

FIG. 3 is an overall view of a conventional moving coil linear slider. FIG. 3 (a) is a front view, FIG. 3 (b) is a plan view, and FIG. 3 (c) is a side view. The linear slider shown in FIG. 3 includes a stator base 2Γ, a U-shaped magnetic track 25 fixed to the stator base 2Γ, a magnet track 25, a field magnet fixed to both inner surfaces, and a linear guide. The mover, which is composed of the rail 23 and the linear scale 29 and runs on the rail 23, is arranged on the mover base 21, the linear guide block 26 that engages the linear guide rail 23 on the stator side, and the mover base. A coreless armature column 22 provided so as to stand on the core, and a coreless armature coil 22 ′ which is attached to the coreless armature column 22 and is fixed by being inserted face-to-face with a gap between the field magnets. The scale head 24 is attached to the opposite position of the linear scale 29. In this case, it is a moving coil type in which the armature coil moves. Cables 31, magnetic pole detector leads 32, linear scale leads 33, etc. are wired on the mover side and expand and contract as the linear slider travels.

In addition, as shown in the schematic diagram of the control block of FIG. 4, the control block of the conventional linear slider 41 is a signal of the magnetic pole detection Hall sensor 42 that detects the timing of energizing the armature coil of the movable part. And a separate serial conversion unit 46 between the linear slider position signal and the scale signal from the sensor head 43, and the scale signal and the magnetic pole detection Hall sensor signal are separately transmitted to the serial conversion unit 46. The linear motor was controlled by inputting, serial signal input and signal transmission to the driver 45 for driving.

In systems without a magnetic pole detection Hall sensor, the driver software for the drive The magnetic pole was detected by wear.

Patent Document 1: Japanese Unexamined Patent Publication No. 2000-333435 (Specification, page 8, FIG. 11)

Disclosure of the invention

Problems to be solved by the invention

[0004] However, the conventional moving coil linear slider has a structure that drives the mover to which the cable is fixed in order to energize the armature that is the movable part. Caused disturbance and caused variations in thrust depending on the location. In addition, since the control is performed only with the current input to the armature, the output thrust must not be constant due to changes in the friction and thrust characteristics of the guide due to temperature changes, variations in the tension panel characteristics, etc. So, the problem is that we can't control micro thrust.

In addition, a serial conversion unit that performs serial signal input is provided, and the scale signal and magnetic pole detection hall sensor signal are input separately, so depending on the installation space problem and the serial conversion unit installation location, The signal or pulse signal wiring had to be extended for a long time, which caused a problem of reduced noise resistance.

Furthermore, if there is no Hall sensor for magnetic pole detection, it is difficult to detect the magnetic pole on the vertical axis by software!

Accordingly, an object of the present invention is to provide a high-accuracy thrust moving magnet type linear slider that suppresses disturbance of the cable, enables high-precision control, and does not lower the noise tolerance of the linear motor.

Means for solving the problem

In order to achieve the above object, an invention according to claim 1 relates to a high-precision moving magnet type linear slider, comprising: a mover having a field pole; and a coil disposed on the mover via a gap. In a linear slider comprising a stator having a fat-molded coreless armature, a linear guide for slidably supporting these, and a linear scale for controlling the linear slider having the above-described configuration,

As a moving magnet structure, the power cable and sensor cable arranged on the stator side and the output of the field pole are arranged so that the moving distance is eliminated and the disturbance of the output (thrust) is eliminated. A thrust sensor is provided between the force end and a work pressing member attached to the output end, and a thrust sensor for configuring full-closed control of thrust.

The invention described in claim 2 is the high-precision moving magnet type linear slider according to claim 1, wherein the mover is a magnet in which a field magnet serving as a field pole is fixed to both inner surfaces of a U-shaped magnetic body. A track, a linear guide block fixed to the magnet track, and a linear scale disposed at a position facing the scale head on the stator side, and the stator guides the linear guide block A linear guide rail fixed on the stator base, a scale head mounted on the stator base at a position facing the linear scale, and a coreless armature column provided so as to stand on the stator base. And a field fixed to both inner surfaces of the U-shaped magnetic body and attached to the coreless armature column. It consists of a coreless armature coil that is inserted oppositely through a gap between magnetic magnets. The invention described in claim 3 is the high-precision moving magnet type linear slider according to claim 1, wherein the magnetic pole detection signal of the linear motor is directly input, the scale signal and the magnetic pole detection signal are converted into a serial signal, and the drive driver It features a sensor head with a built-in serial conversion circuit for signal transmission.

The invention's effect

[0006] According to the present invention, disturbance due to cable tension can be suppressed, and high-resolution and high-accuracy thrust control can be performed by feeding back the output of the attached thrust sensor to the upper level.

Further, the system can be simplified without reducing the noise immunity of the linear slider, and magnetic pole detection on the vertical axis can be easily performed.

Brief Description of Drawings

FIG. 1 is an overall view of a high-precision moving magnet type linear slider according to Embodiment 1 of the present invention.

FIG. 2 is a schematic view of a control block of a high-precision moving magnet type linear slider according to Embodiment 2 of the present invention.

FIG. 3 is an overall view of a conventional linear slider. FIG. 4 is a schematic diagram of a control block of a conventional linear slider.

1 Stator base

2 Coreless armature support

2, 'armature coil

3 Linear guide rail (Linear guide)

4 Scale head

5 U-shaped magnet track (for field)

6 Linear guide block (linear guide)

8 Stopper

9 Linear scale

10 Tension panel

11 Motor lead (Power cable)

12 Magnetic pole detector lead (Sensor cable)

13 Linear scale lead (sensor cable)

14 Workpiece pressing member

15 Thrust sensor

21 Movable base

21, Stator base

22 Coreless armature prop

22, Armature coil

23 Linear guide rail

24 Skeleno Head

25 U-shaped magnet track

26 Linear guide block

28 Stopper

29 Linear scale

30 Tension panel 31 Motor lead

32 magnetic pole detector lead,

33 Linear scale lead

35 Sensor head

41 linear motor

42 Magnetic pole detection hole sensor

43 Sensor head

44 Linear scale

45 Driver

46 Serial conversion: Knit

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

Example 1

FIG. 1 is an overall view of a moving magnet type linear slider of the present invention.

1 (a) is a front view, FIG. 1 (b) is a plan view, and FIG. 1 (c) is a side view.

The features of the configuration of the present invention are as follows.

In the figure, 1 is a stator base, to which a coreless armature column 2 for mounting a coreless armature coil 2 ', a linear guide rail 3, and a scale head 4 of a linear scale for position detection are fixed. Base 1. A core is composed of a coreless armature coil 2, a coreless armature column 2, a linear guide rail 3, and a scale head 4 of a linear scale for position detection.

Reference numeral 5 denotes a U-shaped magnet track in which field magnets serving as field poles are fixed to both inner surfaces of a U-shaped magnetic body, and a linear guide block 6 that runs along the linear guide rail 3 is provided on one side thereof. The scale portion 9 of the linear scale that is fixed and arranged so as not to interfere with the linear guide rail 3 is fixed at a position facing the scale head 4 on the stator side, and the magnet track 5 and the linear guide block are fixed. 6 and linear scale 9 make up a movable element.

Also, in the linear slider of the present invention, a U-shaped magnet track 5 and a work pressing part are newly added. A thrust sensor 15 is provided between the material 14 and the material 14. The linear slider is often used in, for example, a semiconductor manufacturing apparatus in which a wafer or the like is loaded on a movable table and transported. In this embodiment, the tool is not provided with a pressing member 14 as is the case with a handling type linear slider. This is intended for machine tool type linear sliders that perform precision machining such as glass cutting.

In the linear slider configured as described above, the operation is first compared with the conventional apparatus shown in FIG. 3, in which the conventional example is a moving coil type, and each cable is connected to the movable element side of the coil. Wired, drives the motor by energizing each coil at the required energization timing based on the magnetic pole position detection data from the pole sensor, etc., and feeds back the position data detected by the linear scale during driving, and the position and speed Opening of drive current by servo control of 'Loop control!

In the present invention, a moving magnet type is used in which the stator and the mover are in opposite positions, and all the cables are arranged on the stator side, so that the influence of tension is eliminated. In addition, a thrust sensor is installed on the workpiece pressing member 14 to configure a closed loop that forms a feedback loop including the thrust applied to the load, and total control including the load state is performed. More accurate minute thrust control becomes possible.

Example 2

[0012] Next, Example 2 of the present invention will be described.

FIG. 2 is a schematic diagram of a control block of the linear slider according to the second embodiment of the present invention. In FIG. 2, 41 is a linear motor, 42 is a magnetic pole detection Hall sensor installed on the linear motor moving part or fixed part 41, and outputs a magnetic pole detection signal. The magnetic pole detection signal (phase data) and the scale signal (position data) read by the sensor head unit 43 are input to the sensor head unit 35 of the linear scale 44 installed in the linear motor movable unit or fixed unit 41. Then, the serial signal is input by the serial conversion circuit built in the sensor head unit 35 of the linear scale. The linear motor is controlled by inputting the serialized data to the driver 45 for driving.

[0013] In this way, the Hall sensor signal for magnetic pole detection is directly input to the sensor head unit 35 of the linear scale 44, and the scale signal is output by the serial conversion circuit built in the sensor head unit 35. In addition, by configuring a system that sends a serial signal to the magnetic pole detection signal and transmits the signal to the drive driver, both the pole sensor signal and the scale signal are simultaneously input to the sensor head on the stator side for processing. It is possible to simplify the system without reducing the noise immunity of the linear drive system by arranging the cables so that they are routed in the shortest distance and do not expand and contract, and use the signal of Hall sensor 42 for magnetic pole detection This makes it easy to detect magnetic poles in the vertical axis, which makes it possible to adapt linear drives to the vertical axis.

The present invention suppresses disturbance to the output thrust as much as possible, and enables high-precision and high-resolution thrust control by the installed thrust sensor. In particular, the tip of the workpiece pressing member 14 shown in FIG. Ideal for applications such as glass cutting machines that require precise control of the parts.

Claims

The scope of the claims

[1] A mover having a field pole, a stator having a coreless armature in which a coil disposed on the mover via a gap is molded, a linear guide for slidably supporting them, A linear slider with a linear scale for controlling the linear slider of the configuration,

A power cable and a sensor cable arranged on the stator side so as to eliminate the movement distance and the disturbance of the output (thrust) as a moving magnet structure;

A thrust sensor for configuring full-closed control of thrust between the output end of the field pole and a workpiece pressing member attached to the output end;

A high-precision moving magnet type linear slider characterized by comprising

[2] The mover includes a magnet track in which field magnets serving as field poles are fixed to both inner surfaces of a U-shaped magnetic body, a linear guide block fixed to the magnet track, and a stator side of the stator. It consists of a linear scale placed at a position facing the scale head,

The stator includes a linear guide rail fixed on the stator base so as to guide the linear guide block, a scale head mounted on the stator base at a position facing the linear scale, and the stator. A coreless armature column provided to stand on the base and a field magnet fixed to both inner surfaces of the U-shaped magnetic body and attached to the coreless armature column via a gap 2. The high-precision moving magnet type linear slider according to claim 1, comprising a coreless armature coil inserted oppositely.

[3] A sensor head including a serial conversion circuit that directly inputs a magnetic pole detection signal of a linear motor, inputs a scale signal and the magnetic pole detection signal, and transmits the signal to a drive driver. The high-precision moving magnet type linear slider according to claim 1.