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TWI845820B - Electrode structural material, method for preparing electrode structural material, and electrolytic capacitor - Google Patents

Electrode structural material, method for preparing electrode structural material, and electrolytic capacitor Download PDF

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TWI845820B
TWI845820B TW110106696A TW110106696A TWI845820B TW I845820 B TWI845820 B TW I845820B TW 110106696 A TW110106696 A TW 110106696A TW 110106696 A TW110106696 A TW 110106696A TW I845820 B TWI845820 B TW I845820B
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substrate
metal
structural material
fiber layer
electrode structural
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TW110106696A
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TW202230410A (en
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胡三元
肖遠龍
何鳳榮
周政
李向東
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大陸商東莞東陽光科研發有限公司
大陸商乳源瑤族自治縣東陽光化成箔有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004Details
    • H01G9/04Electrodes or formation of dielectric layers thereon
    • H01G9/042Electrodes or formation of dielectric layers thereon characterised by the material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004Details
    • H01G9/04Electrodes or formation of dielectric layers thereon
    • H01G9/042Electrodes or formation of dielectric layers thereon characterised by the material
    • H01G9/045Electrodes or formation of dielectric layers thereon characterised by the material based on aluminium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004Details
    • H01G9/04Electrodes or formation of dielectric layers thereon
    • H01G9/048Electrodes or formation of dielectric layers thereon characterised by their structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/145Liquid electrolytic capacitors

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Powder Metallurgy (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

本發明提出了電極結構材料及製備電極結構材料的方法、電解電容器。該方法包括:提供基材,並將所述基材置於可移動的操作臺上;利用雷射將熔爐內的金屬原料熔融形成金屬熔體,所述熔爐底部具有漏嘴,所述漏嘴位於所述基材的上方,並令金屬熔體連續沉積至所述基材上;當所述金屬熔體與所述基材接觸之後,按照預定軌跡移動所述操作臺,以在所述基材上形成金屬纖維形成的纖維層,其中,調節所述漏嘴的內徑以及移動所述操作臺的速度可令所述金屬纖維的直徑D滿足0.1 μm ≤ D ≤ 20 μm。該方法可簡便快速地獲得電極結構材料,且該電極結構材料製成化成箔後具有較好的折彎強度和較大的比容量,適於製備電解電容器的陽極。The present invention proposes an electrode structural material and a method for preparing the electrode structural material, and an electrolytic capacitor. The method comprises: providing a substrate, and placing the substrate on a movable operating table; using a laser to melt a metal raw material in a melting furnace to form a metal melt, wherein the bottom of the melting furnace has a nozzle, the nozzle is located above the substrate, and allows the metal melt to be continuously deposited on the substrate; after the metal melt contacts the substrate, the operating table is moved along a predetermined trajectory to form a fiber layer formed by metal fibers on the substrate, wherein the inner diameter of the nozzle and the speed of moving the operating table can be adjusted to make the diameter D of the metal fiber meet 0.1 μm ≤ D ≤ 20 μm. The method can simply and quickly obtain the electrode structural material, and the electrode structural material has good bending strength and large specific capacity after being made into chemically formed foil, and is suitable for preparing the anode of the electrolytic capacitor.

Description

電極結構材料及製備電極結構材料的方法、電解電容器Electrode structural material, method for preparing electrode structural material, and electrolytic capacitor

本發明涉及材料領域,具體地,涉及電極結構材料及製備電極結構材料的方法、電解電容器。The present invention relates to the field of materials, and in particular, to an electrode structural material and a method for preparing the electrode structural material, and an electrolytic capacitor.

電解電容器由於性能獨特被廣泛應用於消費類電子產品中。近年來為適應電子產品集成化的需求,小型化、高容量和低成本成為了電解電容器的主要發展方向。由此,要求電解電容器具有較好的機械性能和較大的比容量。陽極箔為電解電容器的關鍵性原料,為適應電解電容器的上述性能要求,要求陽極箔也需要具備較高的比容量和較好的折彎強度。目前形成陽極箔的方法主要有電化學腐蝕技術和粉末層積技術。Electrolytic capacitors are widely used in consumer electronic products due to their unique performance. In recent years, in order to meet the needs of integrated electronic products, miniaturization, high capacity and low cost have become the main development direction of electrolytic capacitors. Therefore, electrolytic capacitors are required to have better mechanical properties and larger specific capacity. Anode foil is a key raw material for electrolytic capacitors. In order to meet the above performance requirements of electrolytic capacitors, anode foil is also required to have higher specific capacity and better bending strength. At present, the main methods for forming anode foil are electrochemical corrosion technology and powder lamination technology.

然而,目前的電極結構材料及製備電極結構材料的方法、電解電容器仍有待改進。However, current electrode structural materials, methods for preparing electrode structural materials, and electrolytic capacitors still need to be improved.

本申請是基於發明人對以下事實和問題的發現和認識而做出的:This application is made based on the inventor's discovery and understanding of the following facts and problems:

目前應用於電解電容器的化成箔多是通過對平面的金屬基體進行處理而獲得的。具體地,電化學腐蝕技術是在含氯高溫酸性電解液中對鋁箔施加直流電,從而在鋁箔表面形成大量隧道孔。因此,為了獲得高比容的腐蝕化成箔,電解腐蝕需要在較低溫度和較長時間下進行,這就導致電極箔的折彎強度不高,難以滿足小型化需求。並且,電化學腐蝕產生的酸性廢液如硫酸、鹽酸和硝酸等的處理難度大,增加了環保成本。此外,電化學腐蝕技術對金屬基體的種類也有一定要求,目前的電化學腐蝕技術主要以鋁箔為主,難以生產鉭、鈮等貴金屬電解電容器。而粉末層積技術在金屬載體上塗布金屬粉末後再進行燒結形成層積電極箔,因此層積箔對金屬粉末(粒徑分佈、粉末形狀)和燒結技術要求很高。現有設備很難得到粒徑均一的粉末,且燒結過程中會產生較多VOC氣體。另外,金屬粉末以顆粒形式堆積,化成後容易龜裂,導致電極箔折彎強度低。因此,如能夠開發一種新的能夠保持高的折彎強度和高比容的化成箔電極結構和製備方法,則將有利於緩解甚至解決上述問題。At present, the electrolytic foil used in electrolytic capacitors is mostly obtained by treating a flat metal substrate. Specifically, the electrochemical corrosion technology is to apply direct current to the aluminum foil in a chlorine-containing high-temperature acidic electrolyte, thereby forming a large number of tunnel holes on the surface of the aluminum foil. Therefore, in order to obtain a high-specific-volume corrosion-formed foil, the electrolytic corrosion needs to be carried out at a relatively low temperature and for a relatively long time, which results in the electrode foil having a low bending strength and is difficult to meet the miniaturization requirements. In addition, the acidic waste liquids generated by electrochemical corrosion, such as sulfuric acid, hydrochloric acid, and nitric acid, are difficult to handle, which increases environmental protection costs. In addition, electrochemical corrosion technology also has certain requirements for the type of metal substrate. The current electrochemical corrosion technology is mainly based on aluminum foil, which is difficult to produce precious metal electrolytic capacitors such as tantalum and niobium. The powder layering technology forms a layered electrode foil by coating metal powder on a metal carrier and then sintering it. Therefore, the layered foil has very high requirements for metal powder (particle size distribution, powder shape) and sintering technology. It is difficult to obtain powder with uniform particle size with existing equipment, and more VOC gas will be generated during the sintering process. In addition, the metal powder is accumulated in the form of particles, which is easy to crack after formation, resulting in low bending strength of the electrode foil. Therefore, if a new formed foil electrode structure and preparation method that can maintain high bending strength and high specific capacitance can be developed, it will be helpful to alleviate or even solve the above problems.

本發明旨在至少一定程度上解決以上相關技術中的技術問題之一。為此,本發明提出一種製備電極結構材料的方法。該方法包括:提供基材,並將所述基材置於可移動的操作臺上;利用雷射將熔爐內的金屬原料熔融形成金屬熔體,所述熔爐底部具有漏嘴,所述漏嘴位於所述基材的上方,並令金屬熔體連續沉積至所述基材上;當所述金屬熔體與所述基材接觸之後,按照預定軌跡移動所述操作臺,以在所述基材上形成金屬纖維形成的纖維層;其中,調節所述漏嘴的內徑以及移動所述操作臺的速度可令所述金屬纖維的直徑D滿足:0.1 μm ≤ D ≤ 20 μm。該方法可簡便快速地獲得電極結構材料,且該電極結構材料製成化成箔後具有較好的折彎強度和較大的比容量,適於製備電解電容器的陽極。The present invention aims to solve one of the technical problems in the above-mentioned related technologies to at least a certain extent. To this end, the present invention proposes a method for preparing an electrode structural material. The method comprises: providing a substrate, and placing the substrate on a movable operating table; using a laser to melt the metal raw material in the furnace to form a metal melt, the bottom of the furnace has a nozzle, the nozzle is located above the substrate, and the metal melt is continuously deposited on the substrate; after the metal melt contacts the substrate, the operating table is moved according to a predetermined trajectory to form a fiber layer formed by metal fibers on the substrate; wherein, adjusting the inner diameter of the nozzle and the speed of moving the operating table can make the diameter D of the metal fiber meet the following conditions: 0.1 μm ≤ D ≤ 20 μm. The method can simply and quickly obtain the electrode structural material, and the electrode structural material has good bending strength and large specific capacity after being made into chemically formed foil, and is suitable for preparing the anode of the electrolytic capacitor.

根據本發明的實施例,所述熔爐為陶瓷熔爐,所述雷射光源被配置為可通過照射將所述金屬原料熔融。由此,可簡便地獲得金屬熔體。According to an embodiment of the present invention, the melting furnace is a ceramic melting furnace, and the laser light source is configured to melt the metal raw material by irradiation, thereby obtaining a metal melt in a simple manner.

根據本發明的實施例,所述漏嘴的內徑為0.5-1000 μm;所述操作臺相對於所述漏嘴進行移動的速度為50-150 mm/s。由此,可較好地控制金屬纖維的直徑,以獲得比容量較為理想的電極結構材料。According to an embodiment of the present invention, the inner diameter of the nozzle is 0.5-1000 μm, and the speed at which the operating platform moves relative to the nozzle is 50-150 mm/s. Thus, the diameter of the metal fiber can be better controlled to obtain an electrode structure material with a relatively ideal specific capacity.

根據本發明的實施例,所述熔爐進一步連接有流體控制推進器,所述流體控制推進器可控制所述金屬熔體的熔體流速為1-20 mL/h。由此,可簡便地控制金屬熔體的流速。According to an embodiment of the present invention, the melting furnace is further connected to a fluid control thruster, and the fluid control thruster can control the melt flow rate of the metal melt to 1-20 mL/h. Thus, the flow rate of the metal melt can be easily controlled.

根據本發明的實施例,所述預定軌跡包括第一預定圖形以及第二預定圖形;所述第一預定圖形包括多條沿第一方向延伸的平行線;所述第二預定圖形包括多條沿第二方向延伸的平行線;所述第一預定圖形中相鄰的兩條平行線之間的距離為0.1-1000 μm;所述第二預定圖形中相鄰的兩條平行線之間的距離為0.1-1000 μm。由此,形成的纖維層中的金屬纖維排布規則,且有利於提高電極結構材料的比容量。According to an embodiment of the present invention, the predetermined track includes a first predetermined pattern and a second predetermined pattern; the first predetermined pattern includes a plurality of parallel lines extending along a first direction; the second predetermined pattern includes a plurality of parallel lines extending along a second direction; the distance between two adjacent parallel lines in the first predetermined pattern is 0.1-1000 μm; the distance between two adjacent parallel lines in the second predetermined pattern is 0.1-1000 μm. Thus, the metal fibers in the formed fiber layer are arranged regularly, and are conducive to improving the specific capacity of the electrode structure material.

根據本發明的實施例,進一步包括以下操作的至少之一:多次重複按照所述第一預定圖形和所述第二預定圖形移動所述操作臺的步驟,以在所述基材上形成多個金屬纖維形成的亞層堆積而成的所述纖維層;以及所述基材具有相對的第一表面以及第二表面,在所述第一表面形成所述纖維層之後,將所述基材的所述第二表面相對於所述熔爐放置,並重複形成所述纖維層的操作,在所述第二表面以形成所述纖維層。由此,可在基板的兩側均形成纖維層從而構成三明治型結構,進而有利於進一步提高該電極結構材料的比容量。According to an embodiment of the present invention, at least one of the following operations is further included: repeatedly moving the operating stage according to the first predetermined pattern and the second predetermined pattern to form the fiber layer formed by stacking multiple sublayers formed by metal fibers on the substrate; and the substrate has a first surface and a second surface opposite to each other. After the fiber layer is formed on the first surface, the second surface of the substrate is placed relative to the furnace and the operation of forming the fiber layer is repeated to form the fiber layer on the second surface. In this way, fiber layers can be formed on both sides of the substrate to form a sandwich structure, which is beneficial to further improve the specific capacity of the electrode structure material.

根據本發明的實施例,形成所述基材以及所述金屬原料的材料包括閥金屬,所述閥金屬分別獨立地包括鋁、鉭、鈮、鈦、鋯或鉿。由此,有利於進一步提高利用該方法獲得的電極結構材料的性能。According to an embodiment of the present invention, the material forming the substrate and the metal raw material includes valve metals, and the valve metals independently include aluminum, tantalum, niobium, titanium, zirconium or tantalum. This is conducive to further improving the performance of the electrode structure material obtained by the method.

在本發明的另一方面,本發明提出了一種電極結構材料。該電極結構材料包括:基材;纖維層,所述纖維層包括多個規則排列的金屬纖維,所述金屬纖維的直徑D滿足0.1 μm ≤ D ≤ 20 μm。該電極結構材料具有比容量較高、折彎性能較好等優點,較為適用於製備電解電容器的陽極箔。In another aspect of the present invention, an electrode structural material is provided. The electrode structural material comprises: a substrate; a fiber layer, wherein the fiber layer comprises a plurality of regularly arranged metal fibers, and the diameter D of the metal fibers satisfies 0.1 μm ≤ D ≤ 20 μm. The electrode structural material has advantages such as high specific capacity and good bending performance, and is more suitable for preparing anode foil of electrolytic capacitors.

根據本發明的實施例,所述電極結構材料是利用前面所述的方法獲得的。由此,該電極結構材料具有製備成本低廉、環境友好等優點的至少之一。According to an embodiment of the present invention, the electrode structural material is obtained by the method described above. Therefore, the electrode structural material has at least one of the advantages of low preparation cost and environmental friendliness.

在本發明的又一方面,本發明提出了一種電解電容器。該電解電容器包括:陽極,所述陽極包括前面所述的電極結構材料;陰極,所述陰極包括電解質以及導電電極。由此,該電解電容器具有前面所述的電極結構材料具有的全部特徵以及優點,在此不再贅述。總的來說,該電解電容器具有比容量較高、電化學阻抗較小、陽極機械性能較好等優點的至少之一。In another aspect of the present invention, an electrolytic capacitor is provided. The electrolytic capacitor comprises: an anode, the anode comprises the electrode structural material described above; and a cathode, the cathode comprises an electrolyte and a conductive electrode. Thus, the electrolytic capacitor has all the characteristics and advantages of the electrode structural material described above, which will not be elaborated here. In general, the electrolytic capacitor has at least one of the advantages of high specific capacity, low electrochemical impedance, and good anode mechanical properties.

以下詳細描述本發明的實施例,所述實施例的示例在圖式中示出。以下通過參考圖式描述的實施例是示例性的,旨在用於解釋本發明,而不能理解為對本發明的限制。除非另外說明,本發明所使用的所有科技術語具有與本發明所屬技術領域中具有通常知識者的通常理解相同的含義。本發明涉及的所有專利和公開出版物通過引用方式整體併入本發明。術語“包含”或“包括”為開放式表達,即包括本發明所指明的內容,但並不排除其他方面的內容。The following describes in detail embodiments of the present invention, examples of which are shown in the drawings. The embodiments described below with reference to the drawings are exemplary and intended to be used to explain the present invention, and should not be construed as limiting the present invention. Unless otherwise specified, all technical terms used in the present invention have the same meanings as those commonly understood by those with ordinary knowledge in the technical field to which the present invention belongs. All patents and publications related to the present invention are incorporated herein by reference as a whole. The term "comprising" or "including" is an open expression, that is, including the contents specified in the present invention, but does not exclude other aspects of the content.

在本發明的一個方面,本發明提出了一種製備電極結構材料的方法。該方法利用雷射將金屬粉末或塊體加熱至熔融以形成金屬熔體,並利用可移動的操作臺按照預定的路徑移動基材,以令金屬熔體在基材上形成排布規則的金屬纖維。多個金屬纖維堆積形成纖維層,從而獲得該電極結構材料。In one aspect of the present invention, a method for preparing an electrode structural material is provided. The method uses a laser to heat a metal powder or a block to melt to form a metal melt, and uses a movable operating table to move a substrate along a predetermined path so that the metal melt forms regularly arranged metal fibers on the substrate. A plurality of metal fibers are stacked to form a fiber layer, thereby obtaining the electrode structural material.

如前所述,基於平面箔片不論是通過電化學腐蝕技術還是粉末層積技術形成的化成箔的性能均有待提高。根據本發明實施例獲得的電極結構材料在平面金屬基材上具有纖維層,由纖維以一定排列方式進行堆積,進而可為該電極結構材料提供更加適於形成電解電容器的陽極箔的表面形貌。具體地,一方面金屬纖維形成的纖維層可具有更高的表面積,化成後的化成箔的表面積也較大。另一方面,化成時可以是僅基於對纖維層進行,由此可利用表面形貌被破壞較少,甚至是未被腐蝕的基材為最終獲得的化成箔提供良好的機械支撐。並且,由金屬纖維堆積而形成的纖維層成為決定陽極箔表面孔徑範圍以及孔徑分佈均勻性的決定性因素,因此相對於電化學腐蝕或燒結形成的結構而言,纖維層的表面形貌更加可控,同一批次的產品或是不同批次的產品之間具有更好的重複性。並且,該方法利用雷射加熱金屬材料,不涉及複雜的燒結過程或是環境不友好的酸腐蝕過程,因此環境成本較低。該電極結構材料的材質不再局限於鋁,可採用包括但不限於鋁、鉭、鈮中的任意一種形成。As mentioned above, the performance of the chemically-formed foil formed based on the planar foil, whether by electrochemical corrosion technology or powder lamination technology, needs to be improved. The electrode structural material obtained according to the embodiment of the present invention has a fiber layer on a planar metal substrate, and the fibers are stacked in a certain arrangement, thereby providing the electrode structural material with a surface morphology that is more suitable for forming an anode foil of an electrolytic capacitor. Specifically, on the one hand, the fiber layer formed by the metal fibers can have a higher surface area, and the surface area of the chemically-formed foil after chemical formation is also larger. On the other hand, the chemical formation can be based only on the fiber layer, thereby providing good mechanical support for the chemically-formed foil finally obtained by using a substrate with less damaged surface morphology or even uncorroded. Moreover, the fiber layer formed by the accumulation of metal fibers becomes the decisive factor in determining the pore size range and pore size distribution uniformity of the anode foil surface. Therefore, compared with the structure formed by electrochemical corrosion or sintering, the surface morphology of the fiber layer is more controllable, and the same batch of products or different batches of products have better repeatability. In addition, the method uses laser heating of metal materials, does not involve complex sintering processes or environmentally unfriendly acid corrosion processes, and therefore has lower environmental costs. The material of the electrode structure is no longer limited to aluminum, and can be formed by any one of aluminum, tantalum, and niobium, including but not limited to aluminum.

下面根據本發明的具體實施例,對該方法的各個步驟進行詳細說明。具體地,參考圖1,該方法包括:The following is a detailed description of each step of the method according to a specific embodiment of the present invention. Specifically, referring to FIG1 , the method comprises:

步驟S100:提供基材;Step S100: providing a substrate;

根據本發明的實施例,在步驟S100中首先提供基材。如前所述,基材的具體材料不受特別限制,例如可以為閥金屬,具體可以包括但不限於鋁、鉭、鈮、鈦、鋯或鉿。基材的厚度也不受特別限制,所屬技術領域中具有通常知識者可以根據需要的化成箔的具體要求進行設計。由於根據本發明的方法獲得的電極結構材料的化成之後的“夾心”厚度基本由基材提供,且基材的厚度在化成過程中並不會顯著降低,因此可通過選擇基材的厚度控制化成箔的夾心厚度。例如,根據本發明的具體實施例,基材的厚度可以為5-80 μm,例如可以為10-50 μm。發明人發現,基材厚度太薄,將導致該電極結構材料形成的化成箔在製備陽極箔時導致電極材料的拉力強度不足,而基材厚度太厚又將導致電極材料的折彎強度的降低。當基材的厚度為上述範圍內時,可滿足大部分的電解電容器電極的要求。根據本發明的一些具體實施例,基材的厚度可以為10-40 μm,具體可以為20-30 μm,例如可以為25 μm,28 μm等。由此,可進一步提高該電極結構材料的機械性能。所屬技術領域中具有通常知識者能夠理解的是,提供基材的步驟可包括形成平面基材的步驟,也可以包括對平面基材進行切割、打磨、清洗等操作。According to an embodiment of the present invention, a substrate is first provided in step S100. As mentioned above, the specific material of the substrate is not particularly limited, for example, it can be a valve metal, specifically including but not limited to aluminum, tantalum, niobium, titanium, zirconium or tantalum. The thickness of the substrate is also not particularly limited, and a person with ordinary knowledge in the relevant technical field can design it according to the specific requirements of the required chemical foil. Since the "sandwich" thickness of the electrode structure material obtained according to the method of the present invention after chemical formation is basically provided by the substrate, and the thickness of the substrate will not be significantly reduced during the chemical formation process, the sandwich thickness of the chemical foil can be controlled by selecting the thickness of the substrate. For example, according to a specific embodiment of the present invention, the thickness of the substrate can be 5-80 μm, for example, 10-50 μm. The inventors have found that if the thickness of the substrate is too thin, the tensile strength of the electrode material formed by the chemical foil will be insufficient when the anode foil is prepared, while if the thickness of the substrate is too thick, the bending strength of the electrode material will be reduced. When the thickness of the substrate is within the above range, it can meet the requirements of most electrolytic capacitor electrodes. According to some specific embodiments of the present invention, the thickness of the substrate can be 10-40 μm, specifically 20-30 μm, for example, 25 μm, 28 μm, etc. Thereby, the mechanical properties of the electrode structural material can be further improved. It can be understood by those with ordinary knowledge in the relevant technical field that the step of providing the substrate may include the step of forming a planar substrate, and may also include cutting, grinding, cleaning and other operations on the planar substrate.

步驟S200:利用雷射形成金屬熔體,以在所述基材上形成纖維層;Step S200: using laser to form a metal melt to form a fiber layer on the substrate;

根據本發明的實施例,在步驟S200中利用雷射形成金屬熔體並形成纖維層。具體地,在步驟S200中利用雷射將熔爐內的金屬原料熔融形成金屬熔體,令金屬熔體連續沉積至基材上,並在金屬熔體與基材接觸之後按照預定軌跡移動操作臺,以在基材上形成金屬纖維。規則排布的金屬纖維通過堆積形成纖維層。According to an embodiment of the present invention, a metal melt is formed by laser in step S200 and a fiber layer is formed. Specifically, in step S200, a metal raw material in a furnace is melted by laser to form a metal melt, and the metal melt is continuously deposited on a substrate. After the metal melt contacts the substrate, an operating table is moved along a predetermined trajectory to form metal fibers on the substrate. The regularly arranged metal fibers are stacked to form a fiber layer.

具體地,參考圖2,形成金屬熔體的操作可以是在密閉的容器,如密封操作箱7中進行的,密封操作箱7中可充有保護氣體。可將金屬原料置於熔爐2內,利用雷射1照射使得金屬完全熔融並備用。金屬原料也可以為閥金屬,例如可以為鋁、鉭、鈮、鈦、鋯或鉿,具體材料不受特別限制。金屬原料可以為粉末或塊體,金屬原料的形貌也不受特別限制,只要可以利用雷射1形成金屬熔體即可。熔爐2可為耐高溫熔爐,例如可以為陶瓷熔爐。熔爐2中的金屬原料的質量可以為0.1-100 kg,以防形成的金屬熔體過少影響後續的金屬纖維直寫過程,或是熔融的金屬過量導致諸如熔體重新凝結堵塞熔爐2底部的漏嘴8。保護氣體可以為氬氣、氮氣、氬氫混合氣中的一種或組合。雷射1的功率不受特別限制,只要可以將金屬原料熔融即可,所屬技術領域中具有通常知識者可以根據具體的金屬原料材質進行選擇。根據本發明的一些實施例,雷射1的功率範圍可以為10 6~10 8W/cm 3Specifically, referring to FIG. 2 , the operation of forming the metal melt may be performed in a sealed container, such as a sealed operation box 7, which may be filled with a protective gas. The metal raw material may be placed in a melting furnace 2, and irradiated with a laser 1 so that the metal is completely melted and ready for use. The metal raw material may also be a valve metal, such as aluminum, tantalum, niobium, titanium, zirconium or tantalum, and the specific material is not particularly limited. The metal raw material may be a powder or a block, and the morphology of the metal raw material is not particularly limited, as long as the metal melt can be formed using the laser 1. The melting furnace 2 may be a high-temperature resistant melting furnace, such as a ceramic melting furnace. The mass of the metal raw material in the melting furnace 2 can be 0.1-100 kg, in order to prevent the formation of too little metal melt to affect the subsequent metal fiber direct writing process, or the melted metal is too much, such as the melt re-condenses and blocks the drain 8 at the bottom of the melting furnace 2. The protective gas can be one or a combination of argon, nitrogen, and argon-hydrogen mixed gas. The power of the laser 1 is not particularly limited, as long as the metal raw material can be melted. Those with ordinary knowledge in the relevant technical field can select it according to the specific material of the metal raw material. According to some embodiments of the present invention, the power range of the laser 1 can be 10 6 ~10 8 W/cm 3 .

形成金屬熔體之前,將基材100置於操作臺上。操作臺可以為配有可升降底座6的x-y雙軸控制滑台9。當金屬熔體形成之後,可以利用熔爐2和可相對於漏嘴8發生相對移動的操作臺在基材100上進行金屬纖維的直寫操作。漏嘴8處可連接有流體推進控制泵3,以控制金屬熔體的流速。設定合適的金屬熔體直寫參數,即可在金屬基材表面獲得有序結構的3D金屬纖維形成的纖維層。Before forming the metal melt, the substrate 100 is placed on an operating table. The operating table can be an x-y dual-axis control slide 9 equipped with a liftable base 6. After the metal melt is formed, the direct writing operation of the metal fiber can be performed on the substrate 100 using the melting furnace 2 and the operating table that can move relative to the nozzle 8. The nozzle 8 can be connected to a fluid propulsion control pump 3 to control the flow rate of the metal melt. By setting appropriate metal melt direct writing parameters, a fiber layer formed by 3D metal fibers with an ordered structure can be obtained on the surface of the metal substrate.

根據本發明的具體實施例,金屬熔體直寫參數可以包括操作臺的移動路徑、熔爐2底部的漏嘴8內徑、金屬熔體補給速率、操作臺移動速率和直寫距離(即漏嘴8到基材100表面距離)等。通過對上述參數進行設計,可在基材100上獲得直徑以及排布間距適中,且連續的金屬纖維。多層規則排布的金屬纖維堆積形成規則的網路結構,即可獲得3D的纖維層。由此,纖維層可為該電極結構材料提供較大的比表面積,從而使得在經過化成製成化成箔可具有較大的比容量,適於應用於電解電容器的電極材料。According to a specific embodiment of the present invention, the metal melt direct writing parameters may include the moving path of the operating platform, the inner diameter of the nozzle 8 at the bottom of the melting furnace 2, the metal melt supply rate, the operating platform moving rate and the direct writing distance (i.e., the distance from the nozzle 8 to the surface of the substrate 100), etc. By designing the above parameters, a continuous metal fiber with a moderate diameter and arrangement spacing can be obtained on the substrate 100. Multiple layers of regularly arranged metal fibers are stacked to form a regular network structure, and a 3D fiber layer can be obtained. Therefore, the fiber layer can provide a larger specific surface area for the electrode structural material, so that the formed foil can have a larger specific capacity after being formed, and is suitable for application as an electrode material for electrolytic capacitors.

根據本發明的具體實施例,該步驟中形成的金屬纖維的直徑D可以滿足0.1 μm ≤ D ≤ 20 μm。具體地,也可以為0.3-20 μm,或可不大於10 μm,例如可以為0.5 μm,0.8 μm,1 μm,2 μm,3 μm,5 μm,7 μm,8 μm,15 μm等等。發明人發現,直徑在上述範圍內的纖維可有效提高電極結構材料的比表面積,從而提升利用該電極結構材料獲得的化成箔的比容量,不會由於纖維直徑過大而無法有效提高比表面積,也不會由於纖維直徑過小而在化成過程中被損耗。According to a specific embodiment of the present invention, the diameter D of the metal fiber formed in this step can satisfy 0.1 μm ≤ D ≤ 20 μm. Specifically, it can also be 0.3-20 μm, or can be no greater than 10 μm, for example, it can be 0.5 μm, 0.8 μm, 1 μm, 2 μm, 3 μm, 5 μm, 7 μm, 8 μm, 15 μm, etc. The inventors have found that the fiber with a diameter within the above range can effectively increase the specific surface area of the electrode structure material, thereby improving the specific capacity of the formed foil obtained using the electrode structure material, and the specific surface area will not be effectively increased due to the excessively large fiber diameter, nor will it be consumed in the formation process due to the excessively small fiber diameter.

具體地,基材100上的金屬纖維的直徑可以通過漏嘴8內徑、操作臺的移動速度以及金屬熔體的流速控制。如前所述,熔爐2內的金屬原料形成金屬熔體之後,自漏嘴8處向下連續沉積。當金屬熔體接觸到下方的基材100,即在基材100表面形成“半月板”型的接觸面。此時可開始按照預定路徑移動操作臺,以實現金屬纖維。操作臺移動的方向決定了金屬纖維的排布,而操作臺移動的過程中,落至基材100上的金屬熔體會被拉伸,從而形成直徑略小於漏嘴8直徑的金屬纖維。因此,可通過控制漏嘴8內徑、操作臺的移動速度以及金屬熔體的流速控制基材100上形成的金屬纖維的直徑。具體地,漏嘴8的內徑可以為0.5-1000 μm。例如可以為0.5-10 μm,具體可以為0.5-2 μm。操作臺相對於漏嘴8進行移動的速度可以為50-150 mm/s,具體可以為50-100 mm/s。由此,可較好地控制金屬纖維的直徑,以獲得比容量較為理想的電極結構材料。熔體流速可控制為1-20 mL/h,例如可以為3 mL/h、5 mL/h、6 mL/h、8 mL/h、10 mL/h、15 mL/h等,直寫距離為0.5-3 mm,即漏嘴8到基材100之間的距離可以為0.5-3 mm。具體可以為0.8 mm、1 mm、1.2 mm、1.5 mm、1.8 mm、2 mm、2.5 mm等。由此,可形成金屬纖維連續、比容量較為理想的纖維層。Specifically, the diameter of the metal fiber on the substrate 100 can be controlled by the inner diameter of the nozzle 8, the moving speed of the operating table, and the flow rate of the metal melt. As mentioned above, after the metal raw material in the melting furnace 2 forms a metal melt, it is continuously deposited downward from the nozzle 8. When the metal melt contacts the substrate 100 below, a "meniscus" type contact surface is formed on the surface of the substrate 100. At this time, the operating table can be moved according to a predetermined path to realize the metal fiber. The direction of movement of the operating table determines the arrangement of the metal fiber, and during the movement of the operating table, the metal melt falling on the substrate 100 will be stretched, thereby forming a metal fiber with a diameter slightly smaller than the diameter of the nozzle 8. Therefore, the diameter of the metal fiber formed on the substrate 100 can be controlled by controlling the inner diameter of the nozzle 8, the moving speed of the operating table, and the flow rate of the metal melt. Specifically, the inner diameter of the nozzle 8 can be 0.5-1000 μm. For example, it can be 0.5-10 μm, and specifically can be 0.5-2 μm. The speed at which the operating table moves relative to the nozzle 8 can be 50-150 mm/s, and specifically can be 50-100 mm/s. In this way, the diameter of the metal fiber can be better controlled to obtain an electrode structure material with a more ideal specific capacity. The melt flow rate can be controlled to be 1-20 mL/h, for example, 3 mL/h, 5 mL/h, 6 mL/h, 8 mL/h, 10 mL/h, 15 mL/h, etc. The direct writing distance is 0.5-3 mm, that is, the distance between the nozzle 8 and the substrate 100 can be 0.5-3 mm. Specifically, it can be 0.8 mm, 1 mm, 1.2 mm, 1.5 mm, 1.8 mm, 2 mm, 2.5 mm, etc. Thus, a continuous metal fiber layer with an ideal specific capacity can be formed.

關於操作臺移動的預定軌跡不受特別限制,可根據需要獲得的纖維層的3D排布進行設計。具體地,操作臺的移動路徑可以為3D移動路徑,可以通過包括但不限於Auto CAD、Origin、Excel或C語言等預先程式設計並導入到作業系統,並控制x-y雙軸控制滑台9實現。具體地,參考圖5和圖6,預定軌跡可以包括第一預定圖形210’以及第二預定圖形220’。具體地,第一預定圖形210’可包括多條沿第一方向延伸的平行線,兩個相鄰的平行線首尾相接,形成弓字形曲線。操作臺可首先按照第一預定圖形210’進行移動,從而在基材100上形成如圖中210’所示出的形狀的金屬纖維。相鄰的兩條平行線之間的距離D1為0.1-1000 μm。隨後,操作臺可首先按照第二預定圖形220’進行移動,從而在基材100上形成如圖中220’所示出的形狀的金屬纖維。第一預定方向和第二預定方向之間的夾角即為形成的纖維層中相鄰兩個亞層的金屬纖維之間的夾角。第一預定方向和第二預定方向可以是互相垂直的,即可以為x-y雙軸控制滑台9的x方向和y方向。第二預定圖形220’中相鄰的兩條平行線之間的距離D2也可以為0.1-1000 μm。根據本發明一個優選的實施例,第一預定圖形210’中兩條平行線之間的距離D1,和第二預定圖形220’中兩條平行線之間的距離D2可以是相等的。由此,可最終在基材100上形成規則的井字格排布的金屬纖維網路。根據本發明的一些示例,距離D1和距離D2的範圍可分別獨立地為0.05-5 μm,0.1-1 μm,或者可以分別獨立地為1 μm、5 μm、10 μm、15 μm、20 μm、30 μm、40 μm、60 μm、100 μm等,或可為200 μm、300 μm,或大於500 μm等。所屬技術領域中具有通常知識者能夠理解的是,該步驟中預定圖形中相鄰的兩個線條之間的距離,即為獲得的纖維層中相鄰的兩個金屬纖維之間的距離。There is no particular restriction on the predetermined trajectory of the operation table movement, and it can be designed according to the 3D arrangement of the fiber layer to be obtained as needed. Specifically, the movement path of the operation table can be a 3D movement path, which can be pre-programmed by including but not limited to Auto CAD, Origin, Excel or C language and imported into the operating system, and realized by controlling the x-y double-axis control slide 9. Specifically, with reference to Figures 5 and 6, the predetermined trajectory can include a first predetermined figure 210' and a second predetermined figure 220'. Specifically, the first predetermined figure 210' can include a plurality of parallel lines extending along the first direction, and two adjacent parallel lines are connected end to end to form a bow-shaped curve. The operating platform may first move according to the first predetermined pattern 210', thereby forming metal fibers of the shape shown in 210' on the substrate 100. The distance D1 between two adjacent parallel lines is 0.1-1000 μm. Subsequently, the operating platform may first move according to the second predetermined pattern 220', thereby forming metal fibers of the shape shown in 220' on the substrate 100. The angle between the first predetermined direction and the second predetermined direction is the angle between the metal fibers of two adjacent sublayers in the formed fiber layer. The first predetermined direction and the second predetermined direction may be perpendicular to each other, that is, they may be the x direction and y direction of the x-y dual-axis control slide 9. The distance D2 between two adjacent parallel lines in the second predetermined pattern 220' may also be 0.1-1000 μm. According to a preferred embodiment of the present invention, the distance D1 between two parallel lines in the first predetermined pattern 210' and the distance D2 between two parallel lines in the second predetermined pattern 220' may be equal. Thus, a metal fiber network with a regular tic-tac-toe arrangement may be finally formed on the substrate 100. According to some examples of the present invention, the ranges of the distance D1 and the distance D2 may be 0.05-5 μm, 0.1-1 μm, respectively, or may be 1 μm, 5 μm, 10 μm, 15 μm, 20 μm, 30 μm, 40 μm, 60 μm, 100 μm, etc., respectively, or may be 200 μm, 300 μm, or greater than 500 μm, etc. It is understood by those skilled in the art that the distance between two adjacent lines in the predetermined pattern in this step is the distance between two adjacent metal fibers in the obtained fiber layer.

隨後,可多次按照第一預定圖形210’和第二預定圖形220’移動操作臺,以形成多個亞層堆積而形成的纖維層。根據本發明的實施例,纖維層的厚度、亞層的數量等均不受特別限制,例如纖維層的總厚度可以為20-80 μm。由此,可進一步提高該電極結構材料的性能。例如,過薄的纖維層難以為該電極結構材料提供足夠的比表面積,進而製成的化成箔的比容量不夠理想。而過厚的纖維層則可能會引起亞層自基材100上脫落等不良現象,從而使得電極結構不穩定。根據本發明的另一些示例,可以在基材100相對的兩個表面上均形成上述纖維層。具體地,參考圖4,可以在基材100的第一表面形成纖維層200A之後,可將基材100的第二表面相對於熔爐2放置,並重複形成纖維層的操作以形成第二纖維層200B。纖維層200A和第二纖維層200B均可具有多個層疊的亞層210、220結構。由此,可進一步提高該電極結構材料的比容量。Subsequently, the operating table can be moved multiple times according to the first predetermined pattern 210' and the second predetermined pattern 220' to form a fiber layer formed by stacking multiple sublayers. According to an embodiment of the present invention, the thickness of the fiber layer, the number of sublayers, etc. are not particularly limited. For example, the total thickness of the fiber layer can be 20-80 μm. In this way, the performance of the electrode structure material can be further improved. For example, a fiber layer that is too thin can hardly provide a sufficient specific surface area for the electrode structure material, and the specific capacity of the resulting formed foil is not ideal. A fiber layer that is too thick may cause undesirable phenomena such as the sublayer falling off from the substrate 100, thereby making the electrode structure unstable. According to some other examples of the present invention, the above-mentioned fiber layer can be formed on both opposite surfaces of the substrate 100. Specifically, referring to FIG. 4 , after the fiber layer 200A is formed on the first surface of the substrate 100, the second surface of the substrate 100 can be placed relative to the melting furnace 2, and the operation of forming the fiber layer is repeated to form the second fiber layer 200B. The fiber layer 200A and the second fiber layer 200B can both have a plurality of stacked sublayers 210, 220 structures. Thus, the specific capacity of the electrode structure material can be further improved.

需要特別說明的是,該方法製備的電極結構材料還可以具有氧化膜,氧化膜至少覆蓋金屬纖維的部分表面。氧化膜可以是通過化成處理形成的。也就是說,該電極結構材料可以是經過化成處理的。該方法獲得的電極結構材料為包括但不限於中壓、高壓以及超高壓化成箔,該方法獲得的電極結構材料具有通過電化學腐蝕技術難以實現的高的比容量特性,有利於實現電解電容器小型化。而且,該電極結構材料適用於閥金屬(例如鋁、鉭、鈮、鈦、鋯或鉿等)電解電容器中任意一種。本發明的電極結構材料表層具有金屬纖維結構,因此與粉末層積技術形成的粉末結構相比有更好的韌性,電極材料的折彎強度也更高。纖維層中的上下層金屬纖維以一定角度交叉堆疊,可有效地避免電解液在金屬纖維間的繞流,因而電極材料具有較低的損耗,可用於製備具有低ESR的電解電容器。It should be particularly noted that the electrode structural material prepared by the method may also have an oxide film, which covers at least part of the surface of the metal fiber. The oxide film may be formed by chemical formation. In other words, the electrode structural material may be chemically formed. The electrode structural material obtained by the method includes but is not limited to medium-voltage, high-voltage and ultra-high-voltage chemical foils. The electrode structural material obtained by the method has a high specific capacity characteristic that is difficult to achieve by electrochemical corrosion technology, which is conducive to the miniaturization of electrolytic capacitors. Moreover, the electrode structural material is suitable for any one of valve metal (such as aluminum, tantalum, niobium, titanium, zirconium or niobium, etc.) electrolytic capacitors. The surface layer of the electrode structure material of the present invention has a metal fiber structure, so it has better toughness than the powder structure formed by powder lamination technology, and the bending strength of the electrode material is also higher. The upper and lower layers of metal fibers in the fiber layer are cross-stacked at a certain angle, which can effectively avoid the electrolyte from bypassing between the metal fibers, so the electrode material has lower loss and can be used to prepare electrolytic capacitors with low ESR.

在本發明的又一方面,本發明提出了一種電極結構材料。參考圖3以及圖4,該電極結構材料包括基材100和纖維層200,纖維層200包括多個規則排列的金屬纖維,金屬纖維的直徑D滿足0.1 μm ≤ D ≤ 20 μm。該電極結構材料具有比容量較高、折彎性能較好等優點,較為適用於製備電解電容器的陽極箔。In another aspect of the present invention, an electrode structural material is provided. Referring to FIG. 3 and FIG. 4 , the electrode structural material includes a substrate 100 and a fiber layer 200, wherein the fiber layer 200 includes a plurality of regularly arranged metal fibers, and the diameter D of the metal fibers satisfies 0.1 μm ≤ D ≤ 20 μm. The electrode structural material has advantages such as high specific capacity and good bending performance, and is more suitable for preparing anode foil of an electrolytic capacitor.

根據本發明的實施例,該電極結構材料可以是利用前面所述的方法獲得的。關於該電極結構材料的具體結構,前面已經進行了詳細的描述,在此不再贅述。總的來說,該電極結構材料具有製備成本低廉、環境友好等優點的至少之一。具體地,基材100和纖維層200均是由金屬形成的。形成基材100和金屬纖維的材料分別獨立地為閥金屬,具體可以包括鋁、鉭、鈮、鈦、鋯或鉿。該電極結構材料具有適於製備電解電容的陽極箔的優點,製成的陽極箔比容量較高,彎折強度較高,可緩解電解液繞流進而有利於降低電解電容器的阻抗。According to an embodiment of the present invention, the electrode structural material can be obtained by the method described above. The specific structure of the electrode structural material has been described in detail above and will not be repeated here. In general, the electrode structural material has at least one of the advantages of low preparation cost and environmental friendliness. Specifically, the substrate 100 and the fiber layer 200 are both formed of metal. The materials forming the substrate 100 and the metal fiber are independently valve metals, which may specifically include aluminum, tantalum, niobium, titanium, zirconium or tantalum. The electrode structural material has the advantage of being suitable for preparing anode foil of an electrolytic capacitor. The prepared anode foil has a high specific capacity and high bending strength, and can alleviate the bypass of electrolyte, thereby being beneficial to reducing the impedance of the electrolytic capacitor.

該電極結構材料還可以具有氧化膜,氧化膜至少覆蓋金屬纖維的部分表面。氧化膜可以是通過化成處理形成的,用於諸如電解電容器的電極等應用。該電極結構材料可為包括但不限於中壓、高壓以及超高壓化成箔,該電極結構材料具有通過電化學腐蝕技術難以實現的高的比容量特性,有利於實現電解電容器小型化。而且,該電極結構材料適用於鋁、鉭和鈮等電解電容器中任意一種。本發明的電極結構材料表層具有金屬纖維結構,因此與粉末層積技術形成的粉末結構相比有更好的韌性,電極材料的折彎強度也更高。纖維層200中的上下層金屬纖維以一定角度交叉堆疊,可有效地避免電解液在金屬纖維間的繞流,因而電極材料具有較低的損耗,可用於製備具有低ESR的電解電容器。The electrode structural material may also have an oxide film, which covers at least part of the surface of the metal fiber. The oxide film may be formed by chemical treatment and used in applications such as electrodes of electrolytic capacitors. The electrode structural material may include but is not limited to medium voltage, high voltage and ultra-high pressure chemical foils. The electrode structural material has a high specific capacity characteristic that is difficult to achieve through electrochemical corrosion technology, which is conducive to the miniaturization of electrolytic capacitors. Moreover, the electrode structural material is suitable for any one of electrolytic capacitors such as aluminum, tantalum and niobium. The surface of the electrode structural material of the present invention has a metal fiber structure, so it has better toughness than the powder structure formed by powder lamination technology, and the bending strength of the electrode material is also higher. The upper and lower layers of metal fibers in the fiber layer 200 are cross-stacked at a certain angle, which can effectively prevent the electrolyte from bypassing between the metal fibers. Therefore, the electrode material has lower loss and can be used to prepare an electrolytic capacitor with low ESR.

在本發明的又一方面,本發明提出了一種電解電容器。根據本發明的實施例,該電解電容器包括:陽極和陰極,陽極包括前面所述的電極結構材料。陰極可以包括電解質以及導電電極。該電解電容器具有前面所述的電極結構材料具有的全部特徵以及優點,在此不再贅述。總的來說,該電解電容器具有比容量較高、電化學阻抗較小、陽極機械性能較好等優點的至少之一。In another aspect of the present invention, an electrolytic capacitor is provided. According to an embodiment of the present invention, the electrolytic capacitor includes: an anode and a cathode, wherein the anode includes the electrode structural material described above. The cathode may include an electrolyte and a conductive electrode. The electrolytic capacitor has all the characteristics and advantages of the electrode structural material described above, which will not be elaborated here. In general, the electrolytic capacitor has at least one of the advantages of high specific capacity, low electrochemical impedance, and good anode mechanical properties.

以下所描述的實施例,除非另有說明,所有的溫度定為攝氏度。所使用的試劑均可以從市場上購得或者可以通過本發明所描述的方法製備而得。In the examples described below, unless otherwise stated, all temperatures are in degrees Celsius. The reagents used can be purchased from the market or prepared by the methods described in the present invention.

實施例1:Embodiment 1:

搭建熔融金屬微奈纖維直寫裝置,主要配件包括:密封操作箱、雷射、熔爐、漏嘴、流體推進泵以及雙軸移動收集器等,裝置結構圖如圖2所示。A molten metal micro-nanofiber direct writing device was built. The main accessories include: a sealed operating box, a laser, a melting furnace, a nozzle, a fluid propulsion pump, and a dual-axis moving collector. The device structure diagram is shown in Figure 2.

首先,將100 g鋁粉加入到陶瓷熔爐中,選用氬氣作為密封箱的保護氣氛,設定雷射功率為10 7W/cm 3,加熱至鋁粉處於完全熔融狀態;然後,將30 μm厚度鋁基材置於移動收集器表面,選擇漏嘴內徑為1 μm,利用流體推進泵控制熔融體補給速率,當熔體到達鋁基材表面會迅速與基材交界處形成“半月板”接觸面,由程式控制的x-y雙軸移動收集器牽引基材移動定向收集成形的熔融金屬纖維。熔體補給速率為5 mL/h,漏嘴尖端離基底的接收距離為1 mm,設定雙軸移動收集器的軌跡為等間距弓字形折返路徑(如圖2所示),程式設定基材上金屬纖維間距為4.0 μm,滑台移動速度為100 mm/s。在雙軸移動收集器的x方向以及y方向上均形成弓字形折返的金屬纖維,並多次重複上述步驟至金屬纖維堆疊形成的纖維層厚度在50 μm。鋁基材另一面採用相同步驟,最終得到電極材料厚度為130 μm。實施例1製備的電極結構材料的SEM(掃描電子顯微鏡)圖如圖7所示。形成的鋁纖維直徑約為1 μm,且在基底上沿著同一方向按程式設定的4.0 μm間隔平行排列。鋁纖維呈均勻連續分佈,無明顯斷裂。 First, 100 g of aluminum powder was added to the ceramic melting furnace, argon was selected as the protective atmosphere of the sealed box, the laser power was set to 10 7 W/cm 3 , and the aluminum powder was heated until it was completely molten; then, a 30 μm thick aluminum substrate was placed on the surface of the mobile collector, the inner diameter of the nozzle was selected to be 1 μm, and the melt feed rate was controlled by a fluid propulsion pump. When the melt reached the surface of the aluminum substrate, it would quickly form a "meniscus" contact surface at the junction with the substrate. The program-controlled xy biaxial mobile collector pulled the substrate to move and directionally collect the formed molten metal fibers. The melt feed rate is 5 mL/h, the receiving distance between the tip of the nozzle and the substrate is 1 mm, the trajectory of the biaxial moving collector is set to an equidistant bow-shaped return path (as shown in Figure 2), the program sets the metal fiber spacing on the substrate to 4.0 μm, and the slide movement speed is 100 mm/s. Bow-shaped metal fibers are formed in both the x-direction and the y-direction of the biaxial moving collector, and the above steps are repeated many times until the thickness of the fiber layer formed by the metal fiber stacking is 50 μm. The same step is used on the other side of the aluminum substrate, and the final electrode material thickness is 130 μm. The SEM (scanning electron microscope) image of the electrode structural material prepared in Example 1 is shown in Figure 7. The aluminum fibers formed have a diameter of about 1 μm and are arranged in parallel on the substrate at a programmed interval of 4.0 μm in the same direction. The aluminum fibers are evenly and continuously distributed without obvious breaks.

實施例2:Embodiment 2:

其餘操作同實施例1,所不同的是:弓字形折返路徑程式設定基材上金屬纖維間距為0.8 μm,滑台移動速度為80 mm/s。得到鋁纖維直徑約為1.8 μm。鋁基材另一面採用相同步驟,最終得到電極材料厚度為130 μm。The remaining operations are the same as those in Example 1, except that the distance between the metal fibers on the substrate is set to 0.8 μm in the bow-shaped return path program, and the sliding speed is 80 mm/s. The diameter of the aluminum fiber is about 1.8 μm. The other side of the aluminum substrate is subjected to the same step, and the thickness of the electrode material is finally 130 μm.

實施例3:Embodiment 3:

其餘操作同實施例1,所不同的是:弓字形折返路徑程式設定基材上金屬纖維間距為0.8 μm,滑台移動速度降低至70 mm/s,得到鋁纖維直徑約為2.0 μm。鋁基材另一面採用相同步驟,最終得到電極材料厚度為130 μm。The remaining operations are the same as those in Example 1, except that the distance between the metal fibers on the substrate is set to 0.8 μm in the bow-shaped return path program, and the sliding speed is reduced to 70 mm/s, resulting in an aluminum fiber diameter of about 2.0 μm. The same step is used on the other side of the aluminum substrate, and the final electrode material thickness is 130 μm.

實施例4:Embodiment 4:

其餘操作同實施例1,所不同的是:弓字形折返路徑程式設定基材上金屬纖維間距為1.0 μm,滑台移動速度為80 mm/s,得到鋁纖維直徑約為1.8 μm。控制金屬纖維堆疊厚度在50 μm。鋁基材另一面採用相同步驟,最終得到電極材料厚度為130 μm。The remaining operations are the same as those in Example 1, except that the distance between the metal fibers on the substrate is set to 1.0 μm in the bow-shaped return path program, and the sliding speed is 80 mm/s, so that the diameter of the aluminum fiber is about 1.8 μm. The stacking thickness of the metal fiber is controlled to be 50 μm. The same step is used on the other side of the aluminum substrate, and the thickness of the electrode material is finally obtained to be 130 μm.

實施例5:Embodiment 5:

其餘操作同實施例1,所不同的是:弓字形折返路徑程式設定基材上金屬纖維間距為1.0 μm,滑台移動速度為80 mm/s。控制金屬纖維堆疊厚度在50 μm。得到鋁纖維直徑約為2.0μm。鋁基材另一面採用相同步驟,最終得到電極材料厚度為130 μm。The remaining operations are the same as those in Example 1, except that the distance between the metal fibers on the substrate is set to 1.0 μm in the bow-shaped return path program, and the sliding speed is 80 mm/s. The stacking thickness of the metal fibers is controlled to be 50 μm. The diameter of the aluminum fibers obtained is about 2.0 μm. The other side of the aluminum substrate adopts the same step, and the thickness of the electrode material is finally obtained to be 130 μm.

對比例1:Comparative Example 1:

使用鹽酸和硫酸作為發孔槽液,溫度控制在68 ℃,對純度為99.99%的130 μm厚鋁箔施加直流電6級腐蝕,平均電流密度為0.42 A/cm 2,時間為25秒,以使夾心層厚度為7 μm左右,隨後在72℃的硝酸溶液中擴大孔徑,電流密度和時間分別為0.15 A/cm 2和480秒。 Using hydrochloric acid and sulfuric acid as the pore bath solution, the temperature was controlled at 68°C, and a 130 μm thick aluminum foil with a purity of 99.99% was subjected to 6-level DC corrosion with an average current density of 0.42 A/ cm2 for 25 seconds to make the sandwich layer thickness about 7 μm. The pore size was then expanded in a nitric acid solution at 72°C with a current density and time of 0.15 A/ cm2 and 480 seconds, respectively.

性能測試:Performance Test:

將實施例1~5以及對比例1獲得的樣品在硼酸水溶液中通過施加520V電壓進行陽極化成,測試化成箔的比容、折彎強度以及殘心厚度,測試結果如下表1所示: 表1   520V比容(μF/cm 2 R3.5折彎強度(回) 殘心厚度(μm) 纖維直徑(μm) 間距(μm) 實施例1 0.41 62 30 1.0 4.0 實施例2 1.28 59 30 1.8 0.8 實施例3 1.21 63 30 2.0 0.8 實施例4 0.95 65 30 1.8 1.0 實施例5 0.81 55 30 2.0 1.0 對比例1 1.02 35 7 - - The samples obtained in Examples 1 to 5 and Comparative Example 1 were anodic-formed in a boric acid aqueous solution by applying a voltage of 520 V, and the specific volume, bending strength and residual thickness of the formed foil were tested. The test results are shown in Table 1 below: Table 1 520V specific capacitance (μF/cm 2 ) R3.5 bending strength (return) Residual thickness (μm) Fiber diameter (μm) Pitch (μm) Embodiment 1 0.41 62 30 1.0 4.0 Embodiment 2 1.28 59 30 1.8 0.8 Embodiment 3 1.21 63 30 2.0 0.8 Embodiment 4 0.95 65 30 1.8 1.0 Embodiment 5 0.81 55 30 2.0 1.0 Comparative Example 1 1.02 35 7 - -

從表1可以看出,控制鋁基材上金屬纖維間距和金屬纖維直徑,可以有效地調節化成箔的520V化成電壓容量。金屬纖維間距由程式設定的雙軸滑台精確調控,金屬纖維間距越小,化成箔具有越高的比表面積,其520 V化成比容量越高。金屬纖維直徑主要由漏嘴內徑決定,並通過滑台的牽引力進行適當修飾。當纖維直徑控制在約1.8 μm時,520 V化成箔具有更理想的比容量。從實施例與對比例可以看出,基於熔融鋁金屬成形技術,可以得到高比容和高折彎的化成箔。As can be seen from Table 1, controlling the metal fiber spacing and metal fiber diameter on the aluminum substrate can effectively adjust the 520V formation voltage capacity of the formed foil. The metal fiber spacing is precisely controlled by a programmed double-axis slide. The smaller the metal fiber spacing, the higher the specific surface area of the formed foil, and the higher its 520 V formation specific capacity. The metal fiber diameter is mainly determined by the inner diameter of the nozzle and is appropriately modified by the traction of the slide. When the fiber diameter is controlled at about 1.8 μm, the 520 V formed foil has a more ideal specific capacity. It can be seen from the embodiments and comparative examples that based on the molten aluminum metal forming technology, a high specific capacity and high bending formed foil can be obtained.

在本說明書的描述中,參考術語“一實施方案”、“另一實施方案”、“實施例”、“示例”等的描述意指結合該實施例或示例描述的具體特徵、結構、材料或者特點包含於本發明的至少一個實施例或示例中。在本說明書中,對上述術語的示意性表述不必須針對的是相同的實施例或示例。而且,描述的具體特徵、結構、材料或者特點可以在任一個或多個實施例或示例中以合適的方式結合。此外,在不相互矛盾的情況下,所屬技術領域中具有通常知識者可以將本說明書中描述的不同實施例或示例以及不同實施例或示例的特徵進行結合和組合。In the description of this specification, the descriptions with reference to the terms "one embodiment", "another embodiment", "embodiment", "example", etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in an appropriate manner. In addition, where there is no contradiction, a person of ordinary skill in the art may combine and combine different embodiments or examples described in this specification and features of different embodiments or examples.

儘管以上已經示出和描述了本發明的實施方案以及實施例,可以理解的是,上述實施方案、實施例是示例性的,不能理解為對本發明的限制,所屬技術領域中具有通常知識者在本發明的範圍內可以對上述實施方案、實施例進行變化、修改、替換和變型。Although the embodiments and examples of the present invention have been shown and described above, it can be understood that the above embodiments and examples are exemplary and cannot be understood as limitations of the present invention. A person having ordinary knowledge in the relevant technical field can change, modify, replace and modify the above embodiments and examples within the scope of the present invention.

1:雷射 2:熔爐 3:流體推進控制泵 6:底座 7:密封操作箱 8:漏嘴 9:x-y雙軸控制滑台 100:基材 200:纖維層 200A:纖維層 200B:第二纖維層 210,220:亞層 210’:第一預定圖形 220’:第二預定圖形 S100,S200:步驟 D1,D2:距離 1: Laser 2: Furnace 3: Fluid propulsion control pump 6: Base 7: Sealed operating box 8: Nozzle 9: x-y dual-axis control slide 100: Substrate 200: Fiber layer 200A: Fiber layer 200B: Second fiber layer 210,220: Sublayer 210’: First predetermined pattern 220’: Second predetermined pattern S100,S200: Steps D1,D2: Distance

[圖1]為根據本發明一個實施例的製備電極結構材料的方法的流程示意圖。 [圖2]為根據本發明另一個實施例的製備電極結構材料的方法的裝置示意圖。 [圖3]為根據本發明一個實施例的電極結構材料的結構示意圖。 [圖4]為根據本發明又一個實施例的電極結構材料的結構示意圖。 [圖5]為根據本發明一個實施例的第一預定圖形的結構示意圖。 [圖6]為根據本發明一個實施例的第二預定圖形的結構示意圖。 [圖7]為根據本發明實施例1製備的電極結構材料的掃描電子顯微鏡照片。 [Figure 1] is a schematic diagram of a process for preparing an electrode structural material according to an embodiment of the present invention. [Figure 2] is a schematic diagram of an apparatus for preparing an electrode structural material according to another embodiment of the present invention. [Figure 3] is a schematic diagram of the structure of an electrode structural material according to an embodiment of the present invention. [Figure 4] is a schematic diagram of the structure of an electrode structural material according to another embodiment of the present invention. [Figure 5] is a schematic diagram of the structure of a first predetermined pattern according to an embodiment of the present invention. [Figure 6] is a schematic diagram of the structure of a second predetermined pattern according to an embodiment of the present invention. [Figure 7] is a scanning electron microscope photograph of the electrode structural material prepared according to Embodiment 1 of the present invention.

S100,S200:步驟 S100,S200: Steps

Claims (9)

一種製備電極結構材料之方法,其包括:提供基材,並將所述基材置於可移動的操作臺上;利用雷射將熔爐內的金屬原料熔融形成金屬熔體,所述熔爐底部具有漏嘴,所述漏嘴位於所述基材的上方,並令金屬熔體連續沉積至所述基材上;當所述金屬熔體與所述基材接觸之後,按照預定軌跡移動所述操作臺,以在所述基材上形成由金屬纖維形成的纖維層;其中,調節所述漏嘴的內徑以及移動所述操作臺的速度可令所述金屬纖維的直徑D滿足:0.1μm
Figure 110106696-A0305-02-0018-8
D
Figure 110106696-A0305-02-0018-9
20μm;其中,所述熔爐為陶瓷熔爐,所述雷射光源被配置為可通過照射將所述金屬原料熔融。
A method for preparing an electrode structural material comprises: providing a substrate and placing the substrate on a movable operating table; using a laser to melt a metal raw material in a furnace to form a metal melt, wherein the bottom of the furnace has a nozzle, the nozzle is located above the substrate, and allows the metal melt to be continuously deposited on the substrate; after the metal melt contacts the substrate, the operating table is moved along a predetermined trajectory to form a fiber layer formed of metal fibers on the substrate; wherein the inner diameter of the nozzle and the speed of moving the operating table are adjusted so that the diameter D of the metal fiber meets: 0.1 μm
Figure 110106696-A0305-02-0018-8
D
Figure 110106696-A0305-02-0018-9
20μm; wherein the furnace is a ceramic furnace, and the laser light source is configured to melt the metal raw material by irradiation.
如請求項1所述之方法,其中,所述漏嘴的內徑為0.5-1000μm;所述操作臺相對於所述漏嘴進行移動的速度為50-150mm/s。 The method as described in claim 1, wherein the inner diameter of the nozzle is 0.5-1000μm; the speed at which the operating table moves relative to the nozzle is 50-150mm/s. 如請求項1所述之方法,其中,所述熔爐進一步連接有流體控制推進器,所述流體控制推進器可控制所述金屬熔體的熔體流速為1-20mL/h。 The method as described in claim 1, wherein the melting furnace is further connected to a fluid control thruster, and the fluid control thruster can control the melt flow rate of the metal melt to 1-20mL/h. 如請求項1至3中任一項所述之方法,其中,所述預定軌跡包括第一預定圖形以及第二預定圖形;所述第一預定圖形包括多條沿第一方向延伸的平行線;所述第二預定圖形包括多條沿第二方向延伸的平行線;所述第一預定圖形中相鄰的兩條平行線之間的距離為0.1-1000μm;所述第二預定圖形中相鄰的兩條平行線之間的距離為0.1-1000μm。 A method as described in any one of claims 1 to 3, wherein the predetermined trajectory includes a first predetermined pattern and a second predetermined pattern; the first predetermined pattern includes a plurality of parallel lines extending along a first direction; the second predetermined pattern includes a plurality of parallel lines extending along a second direction; the distance between two adjacent parallel lines in the first predetermined pattern is 0.1-1000μm; the distance between two adjacent parallel lines in the second predetermined pattern is 0.1-1000μm. 如請求項4所述之方法,其進一步包括以下操作的至少之一: 多次重複按照所述第一預定圖形和所述第二預定圖形移動所述操作臺的步驟,以在所述基材上形成多個金屬纖維形成的亞層堆積而成的所述纖維層;以及所述基材具有相對的第一表面以及第二表面,在所述第一表面形成所述纖維層之後,將所述基材的所述第二表面相對於所述熔爐放置,並重複形成所述纖維層的操作,在所述第二表面形成所述纖維層。 The method as described in claim 4 further comprises at least one of the following operations: Repeating the step of moving the operating table according to the first predetermined pattern and the second predetermined pattern multiple times to form the fiber layer formed by stacking multiple sublayers formed by metal fibers on the substrate; and the substrate has a first surface and a second surface opposite to each other, after the fiber layer is formed on the first surface, the second surface of the substrate is placed relative to the furnace, and the operation of forming the fiber layer is repeated to form the fiber layer on the second surface. 如請求項1所述之方法,其中,形成所述基材以及所述金屬原料包括閥金屬,所述閥金屬分別獨立地包括鋁、鉭、鈮、鈦、鋯或鉿。 The method as described in claim 1, wherein the substrate and the metal raw material include valve metals, and the valve metals independently include aluminum, tantalum, niobium, titanium, zirconium or tantalum. 一種電極結構材料,其是利用如請求項1至6中任一項所述之方法獲得的。 An electrode structure material obtained by using the method described in any one of claims 1 to 6. 如請求項7所述之電極結構材料,其中,所述纖維層包括多個規則排列的金屬纖維。 The electrode structural material as described in claim 7, wherein the fiber layer includes a plurality of regularly arranged metal fibers. 一種電解電容器,其包括:陽極,所述陽極包括如請求項7或8所述之電極結構材料;陰極,所述陰極包括電解質以及導電電極。 An electrolytic capacitor, comprising: an anode, the anode comprising the electrode structural material as described in claim 7 or 8; a cathode, the cathode comprising an electrolyte and a conductive electrode.
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