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TWI265148B - Process for the production of nitrogen trifluoride - Google Patents

Process for the production of nitrogen trifluoride

Info

Publication number
TWI265148B
TWI265148B TW094131928A TW94131928A TWI265148B TW I265148 B TWI265148 B TW I265148B TW 094131928 A TW094131928 A TW 094131928A TW 94131928 A TW94131928 A TW 94131928A TW I265148 B TWI265148 B TW I265148B
Authority
TW
Taiwan
Prior art keywords
column
ion source
ammonium ion
temperature
minimizing
Prior art date
Application number
TW094131928A
Other languages
Chinese (zh)
Other versions
TW200610731A (en
Inventor
Vipul P Dholakia
Athanasios Georgios Tsirukis
Anthony J Zehnder
Richard Peter Boehme
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Publication of TW200610731A publication Critical patent/TW200610731A/en
Application granted granted Critical
Publication of TWI265148B publication Critical patent/TWI265148B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C01B21/0832—Binary compounds of nitrogen with halogens
    • C01B21/0835—Nitrogen trifluoride

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
  • Gas Separation By Absorption (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Treating Waste Gases (AREA)

Abstract

The present invention is directed to an improved reaction process that allows for the achievement of excellent NF3 production yields, while minimizing the amount of unreacted fluorine exiting with the process gases and minimizing the amount of liquid melt waste (HP/NF3) produced by the process. The basic NF3 process resides in reacting F2 with an ammonium ion source, e.g., ammonium acid fluoride, under conditions for forming NF3. The improvement in the process comprises: introducing F2 and said ammonium ion source cocurrently and downflow through a packed column or monolith column at a first temperature; Reacting said F2 and ammonium ion source in said column; and, removing a mixture of NF3 and byproducts from said column at a second temperature higher than said first temperature.
TW094131928A 2004-09-20 2005-09-15 Process for the production of nitrogen trifluoride TWI265148B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/945,243 US7045107B2 (en) 2004-09-20 2004-09-20 Process for the production of nitrogen trifluoride

Publications (2)

Publication Number Publication Date
TW200610731A TW200610731A (en) 2006-04-01
TWI265148B true TWI265148B (en) 2006-11-01

Family

ID=35428030

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094131928A TWI265148B (en) 2004-09-20 2005-09-15 Process for the production of nitrogen trifluoride

Country Status (12)

Country Link
US (1) US7045107B2 (en)
EP (1) EP1640339B1 (en)
JP (1) JP4515989B2 (en)
KR (1) KR100734383B1 (en)
CN (1) CN100482576C (en)
AT (1) ATE460383T1 (en)
CA (1) CA2520086A1 (en)
DE (1) DE602005019819D1 (en)
MX (1) MXPA05010108A (en)
RU (1) RU2005129184A (en)
TW (1) TWI265148B (en)
ZA (1) ZA200507484B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7413722B2 (en) * 2005-08-04 2008-08-19 Foosung Co., Ltd. Method and apparatus for manufacturing nitrogen trifluoride
US8163262B1 (en) 2011-01-04 2012-04-24 Omotowa Bamidele A Method for production of nitrogen trifluoride from trimethylsilylamines
JP6089888B2 (en) * 2013-03-29 2017-03-08 栗田工業株式会社 Separation and regeneration method of mixed bed ion exchange resin

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3917811A (en) * 1970-10-19 1975-11-04 Kenics Corp Interactive surface mixer
US4091081A (en) * 1977-04-19 1978-05-23 Air Products And Chemicals, Inc. Preparation of nitrogen trifluoride
US4156598A (en) * 1978-06-08 1979-05-29 Air Products And Chemicals, Inc. Purification of nitrogen trifluoride atmospheres
JPS6071503A (en) * 1983-09-27 1985-04-23 Central Glass Co Ltd Manufacture of nf3
US6010605A (en) * 1995-10-17 2000-01-04 Florida Scientific Laboratories Inc. Nitrogen trifluoride production apparatus
US5637285A (en) * 1996-01-30 1997-06-10 Air Products And Chemicals, Inc. Process for nitrogen trifluoride synthesis
JP3727797B2 (en) * 1998-05-22 2005-12-14 セントラル硝子株式会社 Method for producing nitrogen trifluoride
US6005143A (en) * 1998-08-07 1999-12-21 Air Products And Chemicals, Inc. Use of a monolith catalyst for the hydrogenation of dinitrotoluene to toluenediamine
US7018598B2 (en) * 2000-05-12 2006-03-28 Showa Denko K.K. Process for producing nitrogen trifluoride
US6986874B2 (en) * 2000-12-14 2006-01-17 The Boc Group, Inc. Method and apparatus for the production of nitrogen trifluoride
RU2184698C1 (en) * 2001-05-08 2002-07-10 Закрытое акционерное общество Научно-производственное объединение "ПиМ-Инвест" Method of nitrogen trifluoride production
US7109378B2 (en) 2001-08-30 2006-09-19 Air Products And Chemicals, Inc. Monolith catalytic reactor coupled to static mixer
US6908601B2 (en) * 2002-02-08 2005-06-21 The Boc Group, Inc. Method for the production of nitrogen trifluoride
US6790428B2 (en) * 2002-03-20 2004-09-14 Air Products And Chemicals, Inc. Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride
KR100452233B1 (en) * 2002-07-19 2004-10-12 한국과학기술연구원 production method of trifluoronitrogen using jet-loop reactors
KR100591101B1 (en) * 2002-11-19 2006-06-19 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드 Method for nitrogen trifluoride production
US20040096386A1 (en) * 2002-11-19 2004-05-20 Syvret Robert George Method for nitrogen trifluoride production
US7128885B2 (en) * 2002-12-23 2006-10-31 The Boc Group, Inc. NF3 production reactor

Also Published As

Publication number Publication date
KR100734383B1 (en) 2007-07-04
EP1640339A1 (en) 2006-03-29
US7045107B2 (en) 2006-05-16
RU2005129184A (en) 2007-03-27
JP4515989B2 (en) 2010-08-04
KR20060051426A (en) 2006-05-19
US20060062711A1 (en) 2006-03-23
CA2520086A1 (en) 2006-03-20
ZA200507484B (en) 2007-05-30
EP1640339B1 (en) 2010-03-10
CN1751985A (en) 2006-03-29
DE602005019819D1 (en) 2010-04-22
MXPA05010108A (en) 2006-03-23
ATE460383T1 (en) 2010-03-15
JP2006089371A (en) 2006-04-06
CN100482576C (en) 2009-04-29
TW200610731A (en) 2006-04-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees