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TW351708B - Method and apparatus for treating substrate - Google Patents

Method and apparatus for treating substrate

Info

Publication number
TW351708B
TW351708B TW086114120A TW86114120A TW351708B TW 351708 B TW351708 B TW 351708B TW 086114120 A TW086114120 A TW 086114120A TW 86114120 A TW86114120 A TW 86114120A TW 351708 B TW351708 B TW 351708B
Authority
TW
Taiwan
Prior art keywords
substrate
treating substrate
treating
tray
lifted
Prior art date
Application number
TW086114120A
Other languages
English (en)
Inventor
Dietmar Schoenleber
Original Assignee
Steag Micro Tech Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Steag Micro Tech Gmbh filed Critical Steag Micro Tech Gmbh
Application granted granted Critical
Publication of TW351708B publication Critical patent/TW351708B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)
  • Liquid Crystal (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
TW086114120A 1996-10-03 1997-09-27 Method and apparatus for treating substrate TW351708B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19640848A DE19640848C2 (de) 1996-10-03 1996-10-03 Verfahren und Vorrichtung zum Behandeln von Substraten

Publications (1)

Publication Number Publication Date
TW351708B true TW351708B (en) 1999-02-01

Family

ID=7807793

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086114120A TW351708B (en) 1996-10-03 1997-09-27 Method and apparatus for treating substrate

Country Status (8)

Country Link
US (1) US6379470B2 (zh)
EP (1) EP0929367B1 (zh)
JP (1) JP3299980B2 (zh)
KR (1) KR100325646B1 (zh)
AT (1) ATE198560T1 (zh)
DE (2) DE19640848C2 (zh)
TW (1) TW351708B (zh)
WO (1) WO1998014282A1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19644779C2 (de) * 1996-10-28 2001-06-28 Steag Micro Tech Gmbh Vorrichtung zum Behandeln von Substraten, insbesondere auch von Halbleiterwafern
DE19921726B4 (de) * 1999-05-12 2008-07-10 Wolfgang Klingel Verfahren zur Beschleunigung des Abtropfens überschüssigen Flüssiglack-Materials von der Beschichtungsseite einer Leiterplatte
DE19924302A1 (de) * 1999-05-27 2000-12-07 Steag Micro Tech Gmbh Vorrichtung und Verfahren zum Trocknen von Substraten
DE10127042A1 (de) * 2001-06-02 2002-12-12 Astec Halbleitertechnologie Gm Verfahren und Vorrichtung zum Behandeln von Substraten
DE10215284B4 (de) * 2002-04-05 2007-05-31 Astec Halbleitertechnologie Gmbh Verfahren und Vorrichtung zum Trocknen von Substraten
DE10215044B4 (de) * 2002-04-05 2006-05-24 Astec Halbleitertechnologie Gmbh Verfahren zum Ätzen und Trocknen von Substraten
DE10308842B4 (de) * 2003-02-27 2007-03-01 Astec Halbleitertechnologie Gmbh Vorrichtung zum Greifen einer Vielzahl von Substraten

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4722752A (en) * 1986-06-16 1988-02-02 Robert F. Orr Apparatus and method for rinsing and drying silicon wafers
NL8900480A (nl) * 1989-02-27 1990-09-17 Philips Nv Werkwijze en inrichting voor het drogen van substraten na behandeling in een vloeistof.
DE4413077C2 (de) * 1994-04-15 1997-02-06 Steag Micro Tech Gmbh Verfahren und Vorrichtung zur chemischen Behandlung von Substraten
DE19549490C2 (de) * 1995-01-05 2001-01-18 Steag Micro Tech Gmbh Anlage zur chemischen Naßbehandlung
DE19546990C2 (de) * 1995-01-05 1997-07-03 Steag Micro Tech Gmbh Anlage zur chemischen Naßbehandlung

Also Published As

Publication number Publication date
EP0929367B1 (de) 2001-01-10
KR100325646B1 (ko) 2002-03-06
KR20000048867A (ko) 2000-07-25
DE19640848C2 (de) 1998-07-16
ATE198560T1 (de) 2001-01-15
US6379470B2 (en) 2002-04-30
DE19640848A1 (de) 1998-04-16
US20010052352A1 (en) 2001-12-20
EP0929367A1 (de) 1999-07-21
JP2000507501A (ja) 2000-06-20
DE59702904D1 (de) 2001-02-15
JP3299980B2 (ja) 2002-07-08
WO1998014282A1 (de) 1998-04-09

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