201100306 六、發明說明： 【發明所屬之技術領域】 本發明係有關一種用於收納大型精密部件的容器，更 特別有關—種用於收納在液晶製造的光微影工序中使用的 一邊超過500 mm的大小的大型薄膜、大型光遮罩或大型 光遮罩用的玻璃基板等的容器。 【先前技術】 ❹ C) 在大型積體電路（LSI)、超大型積體電路等的半導體靠 造或液晶顯示器等的製造中，將光照射在半導體晶片或浴 晶用原板上以製作圖形，如果塵土和塵埃等的異物附著名 此時使用的光遮罩或中間遮罩（以下僅記為光遮罩）上，貝, 由於該異物將光吸收或將光傾斜，因而轉印的圖形變形: 除了邊緣残利之外，基底被污染成黑色等，存在著損壞 製造物的尺寸、品質、外觀等的問題1此，通常在 室=這些作業，但即使這樣’也難以長時間將光遮罩 保持清潔。所以，為了防止異物向光遮罩表面附著，在將 薄膜貼附到光遮罩上之後進行曝光。在這種情況下，異物 不直接附著在光遮罩的表面上，而是附著在薄膜上。因此， 如果在光微影時將焦點對齊在光遮罩的圖形上，那麼，薄 膜上的異物變得與轉印無關。 4 -般地，薄膜是將使光良好地透過的厚度為〗 程度的薄膜貼附或者黏結到由鋁、不銹 的薄膜框架的上端面，其中，6稀等形成 -中㈣膜由硝化纖維素、醋酸 201100306 纖維素或氟樹脂等形成。而且，在薄膜框架的下端，設有 用於安裝至光遮罩上的由聚丁烯樹脂、聚醋酸乙烯樹脂、 丙烯樹脂等形成的黏著層以及用於在直到使用薄膜之前保 護上述黏著層的分型層（分離層）。另一方面’光遮罩通常 是在由合成石英等形成的玻璃基板的單面上設置有由鉻等 形成的遮光膜，在該遮光膜上描繪所期望的電路圖形。描 繪後的光遮罩，在檢查了圖形的缺陷之後，被高度地洗淨， 並在保持極度清潔的狀態下貼附有薄膜，以保護該圖形。 因此，薄膜由於在使用前尤其不能在其内面側附著有異 物，並且如上所㉛地為冑際上不可能洗淨的材質及構造， 因而在從製造後的保管至用戶的輸送中，有必要極力防止 異物的附著。另一方面’對於光遮罩以及製作光遮罩前的 玻璃基板而言，該必要性是同樣的。 近年來伴隨著液晶顯示器的大型化，光遮罩和薄膜 也顯著地大型化。當然，與此相伴的是，它們的收納容器 也變得大型化。一直以來’出於成本低、輕型、能夠一體 成形、形狀的自由唐冥笼^ 厪网4的理由’收納容器使用真空成形 或黏結接合的樹脂_的& $ 表的奋益。然而，在收納容器大型化的 情況下，由於收納物的®量增大且對外力的變形量變大， 因而收納容器内的收納物或收納容器自身發生移動或摩 擦。為了防止這種容器内的灰塵產生和薄膜的變形，有必 要提高收納容器的剛性。基料個要求，—直以來，提出 了-種將金屬製的增強板安裝在樹脂製的薄膜收納容器的 托盤和罩的其中至少一太沾k 方的外面側的方法（參考專利文獻 201100306 1)。又，在光遮罩或玻璃基板中，也提出了同樣的增強方 法（參考專利文獻2和3)。 專利文獻1 :日本特開2009_037269 專利文獻2 :日本特開2〇〇5_17〇5〇7 專利文獻3 :日本特開2〇〇6_184414 【發明内容】201100306 VI. Description of the Invention: [Technical Field] The present invention relates to a container for accommodating large-scale precision parts, and more particularly to a side for use in a photolithography process for liquid crystal manufacturing exceeding 500 mm. A container such as a large film of a large size, a large light mask, or a glass substrate for a large light mask. [Prior Art] ❹ C) In the manufacture of semiconductors such as large-scale integrated circuits (LSI) and ultra-large integrated circuits, or in the manufacture of liquid crystal displays, etc., light is irradiated on a semiconductor wafer or a bath plate to form a pattern. If a foreign matter such as dust and dust is attached to a light mask or an intermediate mask (hereinafter simply referred to as a light mask) which is used at this time, the transfer pattern is deformed because the foreign matter absorbs light or tilts the light. : In addition to edge stagnation, the substrate is contaminated with black, etc., and there are problems that damage the size, quality, appearance, etc. of the manufactured product. This is usually done in the room = these operations, but even this is difficult to cover the light for a long time. keep clean. Therefore, in order to prevent foreign matter from adhering to the surface of the light mask, exposure is performed after attaching the film to the light mask. In this case, the foreign matter does not directly adhere to the surface of the light mask, but adheres to the film. Therefore, if the focus is aligned on the pattern of the light mask during photolithography, the foreign matter on the film becomes independent of the transfer. 4 In general, the film is attached or bonded to the upper end surface of the aluminum or stainless film frame by a film having a thickness of a good degree of light transmission, wherein 6 is formed into a medium (four) film from nitrocellulose Form, acetic acid 201100306 cellulose or fluororesin, etc. Further, at the lower end of the film frame, an adhesive layer formed of a polybutene resin, a polyvinyl acetate resin, an acrylic resin or the like for mounting to a light mask, and a portion for protecting the above adhesive layer until the film is used are provided. Type layer (separation layer). On the other hand, the light mask is usually provided with a light-shielding film made of chromium or the like on one surface of a glass substrate formed of synthetic quartz or the like, and a desired circuit pattern is drawn on the light-shielding film. The drawn light mask is highly washed after the defects of the pattern are inspected, and a film is attached while maintaining an extremely clean state to protect the pattern. Therefore, since the film is particularly incapable of attaching foreign matter to the inner surface side thereof before use, and as described above, it is a material and structure that is impossible to clean on the surface of the film. Therefore, it is necessary to carry out transportation from the time of manufacture to the transportation of the user. Try to prevent the adhesion of foreign matter. On the other hand, the necessity is the same for the light mask and the glass substrate before the light mask is formed. In recent years, with the increase in size of liquid crystal displays, light masks and films have also become significantly larger. Of course, as a result, their storage containers have also become larger. For the reason of the low cost, light weight, and the shape and shape of the free Tang cage 4, the storage container uses the resin of vacuum forming or bonding and bonding. However, when the storage container is increased in size, the amount of the stored product is increased and the amount of deformation of the external force is increased, so that the storage object in the storage container or the storage container itself moves or rubs. In order to prevent the generation of dust and the deformation of the film in such a container, it is necessary to increase the rigidity of the container. In the case of the base material, a method of mounting a metal reinforcing plate on the outer side of at least one of the tray and the cover of the resin film storage container has been proposed (refer to Patent Document 201100306 1). ). Further, in the light mask or the glass substrate, the same reinforcing method has been proposed (refer to Patent Documents 2 and 3). Patent Document 1: Japanese Patent Laid-Open Publication No. 2009-037269 Patent Document 2: Japanese Patent Laid-Open Publication No. Hei 2 〇〇 5_17 〇 5 〇 7 Patent Document 3: Japanese Patent Laid-Open No. Hei 2 _ _ _ _ _ _ _ _
但是，在將增強板安裝於上述樹脂製容器的外側的方 法中，存在著以下的問冑。在這些問題中，主要的問題涉 及成本和重量。至於剛性’通過使增強板為高剛性或增加 其使用里，能夠充分地提高。但是，肖此相伴的是，由於 與樹脂托盤和罩的連接點數增加，因而裝配所需的輔助部 件以及裝配工時增加，導致大的成本上升。例如，對於一 1526 mm χ 1748 mm x 直以來所使用的作為外形尺寸為 8 mm的薄膜用的、在ABS樹脂製真空成形體的外側安裝 作為增強板的鋁合金拉製型材的現有型的收納容器而言， 僅裝配就需要4名作業者進行約1〇個小時。又，由於越增 加增強板就越增加重量，因而越提高剛性’就越失去使用 樹脂作為托盤和罩的材質的優點。而1，雖然樹脂製的托 盤和罩能夠成形為複雜形狀，但如果考慮成本，安裝的增 強板不得不為比較簡單的形狀組合。所以，從這點來看， 也容易導致重量增加。出於這些理由，到現在為止，具有 能夠在保持薄膜、光遮罩或玻螭基板等的清潔的狀態下進 行輸送的高剛性，輕型且花費在製作上的工時和成本低的 201100306 優異的收納容器並不存在。 本發明是鑒於如上述問題而提出的，其目的在於，提 供-種能夠保持極清潔的狀態而保管和輸送例如大型薄 膜、光遮罩或玻璃基板的大型精密部件的、高剛性、輕型 且低成本的大型精密部件收納容器。 為了解決上述問題，本發明的—個實施形態為一種大 型精密部件收納容器’其收納大型精密部件並具備將該大 型精密部件的全體覆蓋而嵌合的托盤和罩，其中，托盤和 罩中的至少托盤由鋁、鋁合金或鎂合金構成。 。 本發明的另一個實施形態為大型精密部件收納容 器’其中，托盤和罩中的至少托盤通過鑄造而製造。 。又本發明的另一個實施形態為大型精密部件收納容 器’其中，托盤或罩的厚度在平面部中為4〜1〇 _的範圍。 。。又，本發明的另一個實施形態為大型精密部件收納容 盗，其中，托盤或罩的表面被塗裝，並且，該塗膜的表面 粗链度為Ra l〇//m以下。 又，本發明的另一個實施形態為大型精密部件收納容 器’其中，塗膜含有導電性物質。 。又，本發明的另一個實施形態為大型精密部件收納容 器，其中，在托盤中，托盤的外緣是比位於該外緣的内侧 的内底面更突出至罩側的凸形狀，該凸形狀的外緣的背側 是凹形狀。 器 又，本發明的另一個實施形態為大型精密部件收納容 其中’在托盤或者由鋁、鋁合金或鎂合金構成的罩的 201100306 其中至少一個中’具有至少一個開口部，並在該口部安裝 有覆蓋開口部的整個面的樹脂板或玻璃板。 又’本發明的另一個實施形態為大型精密部件收納容 器’其中’覆盍開口部的樹脂板或玻璃板和托盤或罩的間 隙由黏結性樹脂完全地密封。 藉由本發明’可以提供一種能夠保持極清潔的狀態而 保管、輸送例如大型的薄膜、光遮罩或玻璃基板的大型精 密部件的' 高剛性、輕型且低成本的大型精密部件收 〇 器。 、’ 【實施方式】 以下，對本發明的大型精密部件收納容器的各實施形 態進行說明。 1 ·第一實施形態 〇 第一實施形態是構成大型精密部件收納 銘、銘合金或者鎂合金的鏵造物且罩為樹脂製的的方=盤為 第1圖是第-實施形態之大型精密部件收納容器的立 體圖。第2圖是將薄膜收納在第i圖所 收納容器内時的分解立體圖。 i精“件 如第1圖和第2圖所示’第一實施形態之大型精密 :收納容器i是薄的大致箱型的容器’在通常的使用狀: ，具備上側的罩2和下側的托盤3。罩2和粍盤3能彳 開閉，在將它們嵌合關閉的狀態下，在大型精密部件收 容器1的内部存在著”。料A㈣密料的—例的》 201100306 膜4旎夠收納在該空間内。然而，如果僅將薄膜*收納在 5亥空間内，那麼，在輸送中，薄膜4在大型精密部件收納 谷器1内移動，因摩擦等而產生的灰塵有可能使得大量的 異物附著到薄膜4上。因此，有必要在托盤3上設置適合 於内部的收納物的固定機構並將該收納物固定在固定機 構從而使得在輸送時收納物不移動。 罩2是在托盤3側具有凹部的樹脂成形體。作為構成 罩2的樹脂材料，除了能夠使用娜樹脂之外，還能夠使 用丙烯樹脂、聚碳酸醋樹脂、PET樹脂等的聚醋系樹脂， pE、PP等的聚烯烴系樹脂，或者聚苯乙稀樹脂等，但也可 以使用其他的樹月旨材料，並不限定於這些。但是，如果考 慮大^精密部件收納容器1内的薄模4的可視性，則優選 罩2疋透明（無色透明或有色透明均可）或半透明的。所以， 如果除了透明性之外，還考慮剛性、成形和黏結等的加工However, in the method of attaching the reinforcing plate to the outside of the resin container, the following problems exist. Among these issues, the main issues involve cost and weight. As for the rigidity, the reinforcing plate can be sufficiently improved by making it high rigidity or increasing its use. However, this is accompanied by an increase in the number of joints with the resin tray and the cover, which increases the number of auxiliary parts and assembly work required for assembly, resulting in a large cost increase. For example, a conventional type of aluminum alloy drawn profile that is used as a reinforcing plate for the outer surface of a vacuum molded body made of ABS resin for a film having an outer dimension of 8 mm used for a 1526 mm χ 1748 mm x straight. For the container, only 4 operators are required to perform the assembly for about 1 hour. Further, since the weight is increased as the reinforcing plate is increased, the more the rigidity is increased, the more the advantage of using the resin as the material of the tray and the cover is lost. On the other hand, although the resin tray and the cover can be formed into a complicated shape, if the cost is considered, the mounted reinforcing plate has to be combined in a relatively simple shape. Therefore, from this point of view, it is also easy to cause an increase in weight. For these reasons, the present invention has excellent rigidity and light weight, which can be transported while keeping a film, a light mask, or a glass substrate clean, and is excellent in man-hours and low cost. The storage container does not exist. The present invention has been made in view of the above problems, and an object thereof is to provide a high-rigidity, light-weight, and low-sized, large-sized precision component that can hold and transport a large film, a light mask, or a glass substrate in a state of being extremely clean. Large precision component storage container for cost. In order to solve the above-described problems, an embodiment of the present invention is a large-sized precision component storage container that accommodates a large-sized precision component and includes a tray and a cover that are fitted to cover the entire large-sized precision component, wherein the tray and the cover are At least the tray is made of aluminum, aluminum alloy or magnesium alloy. . Another embodiment of the present invention is a large-sized precision component housing container' in which at least a tray of a tray and a cover is manufactured by casting. . Still another embodiment of the present invention is a large-sized precision component housing container' in which the thickness of the tray or the cover is in the range of 4 to 1 〇 in the plane portion. . . Further, another embodiment of the present invention is a large-sized precision component housing thief in which the surface of the tray or the cover is coated, and the surface roughness of the coating film is Ra l 〇 / / m or less. Further, another embodiment of the present invention is a large-sized precision component housing container' in which the coating film contains a conductive material. . Further, another embodiment of the present invention is a large-sized precision component storage container in which the outer edge of the tray protrudes from the inner bottom surface on the inner side of the outer edge to the cover side, and the convex shape The back side of the outer edge is concave. Further, another embodiment of the present invention is a large-sized precision component in which at least one opening portion of at least one of 201100306 in a tray or a cover made of aluminum, aluminum alloy or magnesium alloy has at least one opening portion, and at the mouth portion A resin plate or a glass plate covering the entire surface of the opening is attached. Further, another embodiment of the present invention is a large-sized precision component accommodating container. The gap between the resin plate or the glass plate covering the opening and the tray or the cover is completely sealed by the adhesive resin. According to the present invention, it is possible to provide a high-rigidity, light-weight, and low-cost large-sized precision component squeezing device capable of maintaining and cleaning a large-sized precision member such as a large-sized film, a light mask, or a glass substrate. [Embodiment] Hereinafter, each embodiment of the large-sized precision component storage container of the present invention will be described. (1st embodiment) The first embodiment is a large-sized precision component which is a first-order embodiment of a large-sized precision component storage, an alloy or a magnesium alloy, and a cover made of a resin. A perspective view of the storage container. Fig. 2 is an exploded perspective view showing the state in which the film is housed in the container of Fig. i. As shown in Fig. 1 and Fig. 2, the large-scale precision of the first embodiment: the storage container i is a thin substantially box-shaped container. In the normal use form, the upper cover 2 and the lower side are provided. The tray 3 and the lid 3 can be opened and closed, and are present inside the large-sized precision component container 1 in a state in which they are fitted and closed. Material A (four) dense material - for example, 201100306 The film 4 is sufficiently accommodated in the space. However, if only the film* is housed in the 5 liter space, the film 4 moves in the large-sized precision component accommodating barn 1 during transportation, and dust generated by friction or the like may cause a large amount of foreign matter to adhere to the film 4 . on. Therefore, it is necessary to provide a fixing mechanism suitable for the interior of the storage tray 3 and fix the storage object to the fixing mechanism so that the storage object does not move during transportation. The cover 2 is a resin molded body having a concave portion on the side of the tray 3. As the resin material constituting the cover 2, in addition to the naphthalene resin, a polyacetal resin such as an acrylic resin, a polycarbonate resin, or a PET resin, a polyolefin resin such as pE or PP, or polyphenylene can be used. Although it is a thin resin or the like, other materials may be used, and it is not limited to these. However, in consideration of the visibility of the thin mold 4 in the large-sized component storage container 1, it is preferable that the cover 2 is transparent (colorless transparent or colored transparent) or translucent. Therefore, in addition to transparency, processing such as rigidity, forming, and bonding is also considered.
性以及成本等，則輩2 6^7 -rf- /s BE I料2的rn其優選❹ABS樹脂或丙 烯樹脂’而^，如果賦予帶電防止性，那麼就更優選。 罩2適宜通過真空成形來製造’但除了真空成形之外， 也能夠通過從樹脂侧向模具側施加氣墨而成形㈣空成形 以及將该壓空成形和真空成形的忐I4人 ㈣的兩者組合的壓空真空成形 來製造，能夠考慮材料的成形 犋/、形狀的複雜性等而 適:。又，也可以選擇上述成形方法以外的成形方法。 在罩/的相對的兩短邊，分別具備兩個把持部20。把 二。二用：從托盤3開閉罩2的構成部件。如果以成為 恰虽的強度的方式構成把持部20,那麼，雖然也可能用於 201100306 密部件收納容器1全體的搬運，但由於過度的剛性 =二:是必要的，因而通常優選只限定…的開 A 1 X计把持部20。又’該實施形態中，用螺栓將作 為:、罩2不同的部件而製作的把持部2。固定在成形後的罩 +未顯不）’也可以將罩2的構成部件-體成形而作 持P的形狀。又，作為其安裝位置，也可以僅在罩2 兩長邊具備或在上述兩短邊和兩長邊—起具備。 Q 是在罩2側具有凹部的鋁、鋁合金或鎂合金的 成形體。、作為托盤3的製造方法，優選使用鑄造、衝壓加 工等，尤其優選㈣鑄造。衝壓加卫時，具有能夠獲得平 滑且清潔的表面的優點。這種情況下，作為材質，雖然能 夠使用一般的伸展用結合金、A1_Cu系、A·系、A% =、ΑΜΑ系、、A1-Zn-Mg系的各種合金等，但從成形和 焊接等的加工性的觀點來看，尤其優選選擇Μ·%系⑽ 5000系）、A1-Mg_Si系⑽6〇〇〇系）。對鎮合金而言，與每 〇 合金相比，雖然衝壓成形性差，但在使用溫熱衝壓的情況 下，能夠適宜地使用Mg-Al-Zn系的AZ31等。 但是，在衝壓加工中，在進行成為本發明中的對象的 大型的成形的情況下，除了模具的加工費變得高昂之外， 還由於所使用的衝壓機具有數百噸以上的加壓力並且需要 幾乎與汽車製造設備相同的設備，因而存在著製造成本變 得非常高的缺點。又，在加工時，由於使用同一厚度的薄 板，因而僅通過部件而不能確保充分的剛性。因此，有，义 要設置大量的肋，補充剛性的不足。 9 201100306 另一方面，在採用鑄造的情況下，作為鑄造法，能夠 選擇砂型法'熔模法、壓鑄 釋法4雖然可以考慮所製造的 大型精密部件收納容器1的大 J八和生產量而從這些方法中 選擇最佳的方法，但尤盆優潠 八慢選在成本方面占優的砂型鑄 造。在鑄造中，即使是禎雜玷m ， 疋複雜的形狀，通過1次成形也能夠 獲得幾乎接近完成品的形狀，需要機械加卫的部分僅是薄 膜4的固定機構和安裝孔等的幾處。因此，鑄造具有生產 性非常高的優點。作為採用鑄造時的材質，能夠適宜地使 用-般的鑄造用合金，但在其中，如果是銘合金的話，那 麼，尤其優選Al_Si_Mg系、A1_Si_Cu系、ike,系 的合金。但是，即使是AW系合金，Sl含有量極多的 合金（例如 JIS AC8、AC9 黧、A c 9等）在Sl的偏析和機械加工性中 也存在著問題，因而不優選。又，在鎂合金的情況中，出 於強度、加工性的平衡，尤其優選Mg_Al_Zn系（例如八㈣ AZ91)、Mg-Ag系（例如ASTM QE22)、呦稀土類元素系。 又，優選托盤3的厚度在平面部為4〜ig職的範圍， 進-步為5〜範圍。通過使平面部的厚度為4_ (更 優選為5賴）以上，使料造時㈣融液流動不產生問題， 尤其是在面積大的平面部中，能夠使熔融液充分地填充， 因而能夠降低缺陷的產生。又，通過 、’ 遇堤使千面部的厚度為10 m m (更優選為8 m m)以下，能夠抑制凝固時的收縮量且不容 易產生因收縮而引起的缺陷。又，還能夠防止冷二= 增大，提高強度和生隸。除此之外，能夠謀求輕型二： 並且’對於平面部之外的彎曲部和外周 〇矛凡其要求剛性 10 201100306 而能夠為從剛性面 的部分，可不限定於上述厚度的範圍 探討的所期望的厚度。 而且，在不能通過i次的鑄造而禱造托盤3整體時， 可以按照分割的構造製作並通過焊接或黏結、螺絲以及鉚 釘等連接手段而將各個部分接合’構成托# 3…有接人 料處理工時所涉及的部分變得不利，除了模為小型也: 得去所引起的成本降低之外，由& i個的鑄造物小而在鑄In the case of the nature, the cost, and the like, the rn of the raw material 2 6^7 -rf- /s BE I material 2 is preferably ❹ABS resin or propylene resin, and is more preferable if the charge prevention property is imparted. The cover 2 is suitably manufactured by vacuum forming. However, in addition to vacuum forming, it is also possible to form (4) an empty shape by applying air ink from the resin side to the mold side, and both of the pressure forming and vacuum forming. It can be manufactured by combined vacuum forming, and can be considered in consideration of the forming enthalpy of the material, the complexity of the shape, and the like. Further, a molding method other than the above molding method may be selected. Two grip portions 20 are provided on the opposite short sides of the cover/, respectively. Put two. Dual use: The components of the cover 2 are opened and closed from the tray 3. If the grip portion 20 is configured to have the same strength, it may be used for transporting the entire 201100306 dense member storage container 1. However, since excessive rigidity = two is necessary, it is generally preferable to limit only The A 1 X meter grip unit 20 is opened. Further, in this embodiment, the grip portion 2 which is made of a different member of the cover 2 is bolted. It is also possible to shape the constituent member of the cover 2 to have a shape of P, which is fixed to the cover after molding. Further, the mounting position may be provided only on both long sides of the cover 2 or on the two short sides and the two long sides. Q is a molded body of aluminum, aluminum alloy or magnesium alloy having a concave portion on the cover 2 side. As the method of manufacturing the tray 3, casting, press working, or the like is preferably used, and (four) casting is particularly preferable. It has the advantage of being able to obtain a smooth and clean surface when stamped and applied. In this case, as a material, general alloys for stretching, A1_Cu, A·, A% =, lanthanide, and A1-Zn-Mg alloys can be used, but molding, welding, etc. From the viewpoint of workability, it is particularly preferable to select Μ·% (10) 5000 series) and A1-Mg_Si system (10) 6 〇〇〇). In the case of the town alloy, the press formability is inferior to that of the alloy, but in the case of using the hot press, the Mg-Al-Zn-based AZ31 or the like can be suitably used. However, in the case of performing large-scale molding which is the object of the present invention in the press working, in addition to the high processing cost of the mold, the press machine used has a pressing force of several hundred tons or more and There is a need for equipment that is almost the same as that of an automobile manufacturing equipment, and thus there is a disadvantage that the manufacturing cost becomes very high. Further, at the time of processing, since a thin plate having the same thickness is used, sufficient rigidity cannot be ensured only by the member. Therefore, there is a need to set a large number of ribs to supplement the lack of rigidity. 9 201100306 On the other hand, in the case of casting, the casting method can be selected as the sand type method, the investment method and the die casting method 4, and the large-sized precision component storage container 1 manufactured can be considered. Choose the best method from these methods, but you can choose the sand casting that is superior in cost. In the casting, even if it is a complex shape of 祯m, 疋, it is possible to obtain a shape almost close to the finished product by one-time forming, and the part that needs mechanical reinforcement is only a fixing mechanism of the film 4 and a mounting hole. . Therefore, casting has the advantage of being very productive. As the material for casting, a general alloy for casting can be suitably used. However, in the case of the alloy, an alloy of Al_Si_Mg, A1_Si_Cu, or ike is particularly preferable. However, even in the case of the AW-based alloy, an alloy containing a large amount of Sl (for example, JIS AC8, AC9®, A c 9 or the like) has a problem in segregation and machinability of Sl, which is not preferable. Further, in the case of a magnesium alloy, a balance between strength and workability is preferable, and Mg_Al_Zn (e.g., octa (A) AZ91), Mg-Ag (e.g., ASTM QE22), and lanthanum rare earth element are particularly preferable. Further, it is preferable that the thickness of the tray 3 is in the range of 4 to ig from the plane portion, and the step is 5 to the range. When the thickness of the flat portion is 4_ (more preferably 5 Å) or more, there is no problem in the flow of the melt during the production (four), and in particular, in the flat portion having a large area, the melt can be sufficiently filled, so that the melt can be lowered. The generation of defects. Further, by the fact that the thickness of the thousand face portion is 10 m or less (more preferably 8 m m) or less, it is possible to suppress the amount of shrinkage during solidification and to cause defects due to shrinkage. In addition, it is also possible to prevent cold two = increase, increase strength and health. In addition to this, it is possible to achieve the lighter weight: and the fact that the bending portion and the outer peripheral portion of the flat portion are required to have a rigidity of 10 201100306, and the portion from the rigid surface can be defined without being limited to the thickness range described above. thickness of. Further, when the entire tray 3 cannot be prayed by the casting of i times, it is possible to manufacture the parts in accordance with the divided structure and join the respective parts by means of welding or bonding, screws, rivets, and the like. The part involved in the processing time becomes unfavorable, except that the mold is small: in addition to the cost reduction caused by the loss, the cast of & i is small and cast
造品質上變得有利，因而在一體成形中有可能產生問題的 情況下’能夠採用分割製造。 如上所述，在採用鑄造，尤其是砂型鑄造的情況下， 鑄造物的表面成為表面粗糙度大的鑄造表面。如果依然為 铸造表面’那冑’在其表面容易積留異物，因而不適合收 納清潔度高的製品。又，由於作為凝固時氣體放出的痕跡 的氣孔等大量存在’因而難以高度地洗淨。因此優選對 鑄造後的托盤3的表面進行研磨或喷砂的平滑化處理，而 且’尤其優選在其平滑化後進行塗裝，使其表面粗糙度為 Ra 10" m以下。這種情況下，由於塗膜必然變厚，因而不 需要鑄造表面的基底處理，能夠更加提高生產性。而且， 在該塗膜中，優選含有導電性物質（炭黑、金屬等）。如果 對塗膜賦予導電性，則能夠有效地防止帶電異物附著於薄 膜4，並且，能夠有效地防止將收納的薄膜4取出時的帶 電和靜電破壞。 在托盤3的相對的兩短邊和兩長邊，分別在單側設有 各兩個把持部30。把持部30用於在搬運托盤3或大型精 11 201100306 密部件收納容器丨時進行把持。在該實施形態中通過螺 栓（圖中未顯示）將作今與托盤3不同的部件而以單體製作 的把持部30連接到托盤3上，但也可以為設法將托盤3的 形狀一體成形的構造。能夠考慮全體的重量而適當設定它 們的位置、形狀。 第3圖是顯示第2圖所示的托盤3及其一部分放大截 面的立體圖。第3圖中所示的一部分放大截面，是沿虛線 X將托盤3切斷後，放大顯示用一點劃線表示的區域a的 圖。如此’與在其内側的内底面32相比，托盤3的外緣 3 1突出形成至罩2側，其背側33與其相反而成為凹形狀。 通過不使外緣31為簡單的厚壁形狀而是使其背側33為凹 形狀’能夠減少伴隨著鑄造時的收縮而產生的缺陷，並且， 忐夠謀求托盤3的輕型化.又，由於外緣31是通過肋效果 而在托盤3上獲得最高剛性的區域，因而最適合於搭載作 為收納物的薄膜4，在使用時優選用銑刀等對其突出面31a 進行平面切削而精加工。 2 .第二實施形態 第二實施形態是使構成大型精密部件收納容器的托盤 和罩的兩者成為紹、鋁合金或鎂合金的鑄造物。 第4圖是收納薄膜的第二實施形態之大型精密部件收 納谷器的分解立體圖。 在該實施形態中，托盤3具有與在第一實施形態中說 明的托盤相同的構造β罩2與托盤3同樣地由鋁、鋁合金 或鎮合金構成，但是，與第一實施形態所述的托盤3同樣 12 201100306 地能夠適當選擇其材質。在此，置 車2和托盤3的材質可以 不一定相同。例如，尤其是為了賭 a 賦予向剛性而使托盤3的 材質為鋁合金’而另一方面，★、甘a 几具疋為了使打開時的輕型 性優異而使罩2的材質為鎂合金。 又，在該實施形態中，在罩2 μ % 皁2上攻有開口部21，而且， 以完全覆蓋該開口部21的方放泣壯+ 07万式文装有樹脂板22。優選樹 脂板22和罩2的間隙由黏結性榭 術月曰等填充而被完全地密 Ο 封，從而不從該間隙產生灰塵且不因與外部通氣而導致異 物侵入大型精密部件收納容器i内。但是，作為樹脂板22 對罩2的固定方法，可以使密封部件（〇形環等）介於樹脂板 22和罩2之間，並將樹脂板22嵌入罩2的内侧。又在 具有這樣的開口部21的實施形態中，出於與上述第一實施 形態所述的托盤3相同的理由，優選罩2的壁厚為4〜i〇 的範圍，更優.選為5〜8 mm的範圍。 在第4圖中的罩2上顯示的虛線區域22a，表示向著箭 頭B的方向而將樹脂板22固定在罩2的内側的狀態。在 此，樹知板22並不限定為1片，也可以個別地在每個開口 部21或共同地在多個開口部21設置多片。開口部21的形 狀不限於第4圖中所示範的矩形，也可以為例如圓形等的 其他形狀。又’如果能夠將開口部21完全地覆蓋，那麼， 樹脂板22可以為任何形狀。而且，在第4圖的示例中，從 開口部21的内側安裝樹脂板22，但也可以從外側安裝。 作為樹脂板22的材質，除了能夠使用ABS樹脂之外，還 能夠使用丙烯樹脂、聚碳酸酯樹脂、PET樹脂等的聚酯系 13 201100306 樹脂，PE、PP等的聚烯烴系樹脂，或者聚苯乙烯樹脂等。 作為來自這些材質的選擇，例如，在第4圖中所示範的罩 2上具備樹脂板22的情況下，為了能夠辨認在内部收納的 薄膜4，優選選擇ABS樹脂、丙烯樹脂、聚碳酸酯樹脂等 的透明性更優異的樹脂。又，更期望使用具有帶電防止性 的樹脂板22。此外，也能夠使用玻璃板等代替樹脂板22， 或者與樹脂板22並用。 另一方面，雖然在該實施形態中並未示範，但也可以 與罩2完全相同地在托盤3設置開口部，並用樹脂板覆蓋 該開口部。在將樹脂板安裝於托盤3的情況下，為了確認 ’尤其是黑 、ABS樹脂 。而且，對 根據收納物 附著在托盤3上的異物’期望樹脂板是有色的 色的。作為它們的材質，能夠使用將丙烯樹脂 著色成煙棕色、煙灰色或黑色等而形成的材質 於這些材料’還更期望賦予帶電防止性。又， 的形狀，有時候能夠使托盤3和罩2為相同的形態，成為 托盤3和罩2無區別的構成。 3 .第三實施形態 第三實施形態與第一實施形態相同，是由鋁、鋁合金 或鎂合金的鑄造物形成托盤且罩為樹脂製的實施形態，是 用扣件將托盤和罩固定的方式的實施形態。 一 第5圖是第三實施形態之大型精密部件收納容器的扣 件附近的一部分截面圖。 、° 如第 2和托盤 (5Α)和（5Β)圖所示，能夠使用扣件4〇作為將罩 固定的扣件，該扣件由能夠固定在罩2側的大 14 201100306 ΟIt is advantageous in terms of quality, and thus it is possible to employ split manufacturing in the case where there is a possibility of causing problems in integral molding. As described above, in the case of casting, especially sand casting, the surface of the casting becomes a casting surface having a large surface roughness. If the casting surface is still 'that', it tends to accumulate foreign matter on its surface, and thus it is not suitable for receiving products with high cleanliness. Further, since a large amount of pores or the like as a trace of gas evolution during solidification is present, it is difficult to wash it highly. Therefore, it is preferable to polish or blast the surface of the cast tray 3 after casting, and it is particularly preferable to carry out coating after smoothing to have a surface roughness of Ra 10 < m or less. In this case, since the coating film is inevitably thickened, the substrate treatment of the cast surface is not required, and the productivity can be further improved. Further, it is preferable that the coating film contains a conductive material (carbon black, metal, or the like). When the coating film is provided with conductivity, it is possible to effectively prevent the charged foreign matter from adhering to the film 4, and it is possible to effectively prevent charging and electrostatic breakdown when the film 4 is taken out. On the opposite short sides and the two long sides of the tray 3, two grip portions 30 are provided on one side, respectively. The grip portion 30 is used to hold the tray 3 or the large-sized container 11 container. In this embodiment, the grip portion 30 made of a single member which is different from the tray 3 is attached to the tray 3 by bolts (not shown), but it is also possible to integrally shape the shape of the tray 3. structure. It is possible to appropriately set their positions and shapes in consideration of the overall weight. Fig. 3 is a perspective view showing the tray 3 shown in Fig. 2 and a part of an enlarged cross section thereof. A part of the enlarged cross section shown in Fig. 3 is a view in which the tray 3 is cut along the broken line X, and the area a indicated by a one-dot chain line is enlarged. Thus, the outer edge 31 of the tray 3 is protruded to the side of the cover 2 as compared with the inner bottom surface 32 on the inner side thereof, and the back side 33 thereof has a concave shape opposite thereto. By making the outer edge 31 a simple thick-walled shape and having the back side 33 a concave shape, it is possible to reduce defects caused by shrinkage during casting, and to reduce the weight of the tray 3. The outer edge 31 is a region in which the highest rigidity is obtained on the tray 3 by the rib effect. Therefore, it is most suitable for mounting the film 4 as a storage object. In use, it is preferable to perform surface cutting and finishing of the protruding surface 31a by a milling cutter or the like. 2. Second Embodiment In the second embodiment, both the tray and the cover constituting the large-sized precision component storage container are cast products of aluminum alloy or magnesium alloy. Fig. 4 is an exploded perspective view showing the large precision component receiving hopper of the second embodiment of the accommodating film. In this embodiment, the tray 3 has the same structure as the tray described in the first embodiment. The β cover 2 is made of aluminum, an aluminum alloy or a town alloy similarly to the tray 3, but is the same as described in the first embodiment. The tray 3 can also be appropriately selected from the material of 201100306. Here, the materials of the cart 2 and the tray 3 may not necessarily be the same. For example, in particular, in order to give rigidity to the rigidity of the tray 3, the material of the tray 3 is made of aluminum alloy. On the other hand, the material of the cover 2 is a magnesium alloy in order to make the lightness at the time of opening excellent. Further, in this embodiment, the opening portion 21 is struck on the cover 2 μ% of the soap 2, and the resin plate 22 is placed in a state in which the opening portion 21 is completely covered. It is preferable that the gap between the resin sheet 22 and the cover 2 is completely sealed by the adhesive crucible, etc., so that dust does not generate from the gap and foreign matter does not infiltrate into the large precision component storage container i due to external ventilation. . However, as a method of fixing the cover 2 to the resin sheet 22, a sealing member (a ring or the like) may be interposed between the resin sheet 22 and the cover 2, and the resin sheet 22 may be fitted inside the cover 2. Further, in the embodiment having such an opening portion 21, for the same reason as the tray 3 described in the first embodiment, the thickness of the cover 2 is preferably in the range of 4 to i, and more preferably selected as 5 ~8 mm range. The broken line region 22a displayed on the cover 2 in Fig. 4 indicates a state in which the resin sheet 22 is fixed to the inside of the cover 2 in the direction of the arrow B. Here, the tree 22 is not limited to one piece, and a plurality of pieces may be provided in each of the openings 21 or collectively in the plurality of openings 21 individually. The shape of the opening portion 21 is not limited to the rectangular shape exemplified in Fig. 4, and may be other shapes such as a circular shape. Further, if the opening portion 21 can be completely covered, the resin sheet 22 can have any shape. Further, in the example of Fig. 4, the resin plate 22 is attached from the inside of the opening portion 21, but it may be attached from the outside. As the material of the resin sheet 22, in addition to the ABS resin, a polyester-based 13 201100306 resin such as an acrylic resin, a polycarbonate resin or a PET resin, a polyolefin resin such as PE or PP, or polyphenylene can be used. Vinyl resin, etc. For example, when the resin sheet 22 is provided on the cover 2 exemplified in Fig. 4, in order to be able to recognize the film 4 accommodated therein, it is preferable to select ABS resin, acrylic resin, polycarbonate resin. A resin that is more excellent in transparency. Further, it is more desirable to use the resin sheet 22 having the charge prevention property. Further, a glass plate or the like can be used instead of the resin plate 22 or in combination with the resin plate 22. On the other hand, although not shown in the embodiment, the opening may be provided in the tray 3 in the same manner as the cover 2, and the opening may be covered with a resin plate. In the case where the resin sheet is attached to the tray 3, in order to confirm ', especially black, ABS resin. Further, it is desirable that the resin sheet adhered to the tray 3 according to the storage object to have a colored color. As the material thereof, a material formed by coloring an acrylic resin into smoky brown, smoky or black, etc., can be used, and it is more desirable to impart charge prevention property. Further, the shape of the tray 3 and the cover 2 can be made in the same form, and the tray 3 and the cover 2 can be made indistinguishable. 3. Third Embodiment The third embodiment is an embodiment in which a tray is formed of a cast material of aluminum, an aluminum alloy or a magnesium alloy and the cover is made of a resin, and the tray and the cover are fixed by a fastener, similarly to the first embodiment. The embodiment of the method. Fig. 5 is a partial cross-sectional view showing the vicinity of a fastener of the large-sized precision component storage container of the third embodiment. , ° As shown in the 2nd and the tray (5Α) and (5Β), the fastener 4 can be used as a fastener for fixing the cover, which is fixed by the large side of the cover 2 201100306 Ο
G 致垂直的端面24等上的固定部41和能夠固定在托盤3侧 的大致垂直的端面34等上的驅動部42構成。又，在罩2 側疋事先不能固定扣件的構成部件的形狀的情況下，例 如如第5(5B)圖中所示，使用僅通過托盤3側的大致垂直 的端面34就能構固定的扣件5〇，能夠將扣件“的一部分 掛在罩2的端部25上’並連接罩2和托盤3。這樣，能夠 根據罩2和托盤3的固定位置的形狀而適當選擇罩2和托 盤3的連接手段。在該實施形態中，示範了固定在軍2和 托盤上或固疋在托盤3上的扣件4〇、％，但通過能夠從 托盤3或罩2完全 取下的夾子等，也能夠連接罩2和托盤 3 〇 又，如第5 (5A)和（5B)圖所示’在托盤3的突出面31&， 固定有用於將薄膜4保持在托盤3的保持4 5。_在圖 中僅顯示了1個保持具5,但通常沿著托盤3的外緣31而 固定有多個。只要能夠可靠地固定使得薄膜4在輪送中不 在托盤3内移動，保持具5就能夠利用各種的形式。在該 不例中，通過將由保持具5支樓的銷插入設在薄心的框 架的側面的非貫通的圓孔，從而固定薄膜4❶ 4 .附屬的構造例 第6圖是用於說明本發明的各實施形態之大型精密部 件收納容器的附隨構造的一部分截面圖。 作為防止異物從外部向大型精密部件收納容器】内侵 入的手段，在罩2和托盤3的嵌合面夹有以墊片6〇代表的 -封件，優選通過如箭頭F所示地將罩2和托盤3嵌人而 15 201100306 使相互的接合面貼緊。作為同樣的手段，能夠選擇其他的 在外周的全周上貼附黏著帶等的方法。 又，當在大型精密部件收納容器丨的内外產生氣壓差 時’為了使罩2和托盤3的嵌合解除變容易，設置用於調 整内外氣屢的貫通孔，'且，為了防止空氣的流入時的異 物的侵入，也能夠具備過濾器26。 又’在托盤3的底面固定小輪7〇，能夠使得大型精密 部件收納容器1的移動容易。 5 ·第四實施形態 第四實施形態與第—實施形態相同，是由鋁、鋁合金 或鎮合金的禱造物形成托盤且罩為樹脂製的實施形態，是 收納代替薄膜的光遮罩的實施形態。 在第一、第二以及第三的各實施形態中已經示範了關 於收納大型的薄膜4的示例’但是，作為成為對象的收納 物，不僅可以應用薄膜4，還可以應用要求高度的清潔性 的指，例如光遮罩或光遮罩用玻璃基板等。但是，光遮 罩等矛薄膜4的兩者存在著大的重量差。例如㈣匪χ 1780mm χ i7mm的石英玻璃基板的重量是大約 但與該石英玻璃基板相應的1526 mm χ m8mm χ 8_ 的薄膜4的重量是大約3 kg。因此，對收納光遮罩等的玻 璃部件的裳哭& 〜 。而5 ，使其為按照第一、第二以及第三的各 f #構成’同時’有必要對個別的部件進行對應於 光遮罩等的玻璃部件的設計。 疋收納作為大型精密部件的光遮罩時的第四實 16 201100306 施形態之大型精密部件收納容器的分解立體圖。 如第7圖所示，第四實施形態之大型精密部件收納容 器1與第一實施形態相同，是薄的大致箱型的容器，具備 罩2和托盤3。罩2和托盤3能夠開閉，在將它們嵌合關 閉的狀態下所形成的空間内，能夠收納光遮罩6。又，為 了在輸送時使光遮罩6不移動，在托盤3設置固定機構， 使用該固定機構，將光遮罩6固定在托盤與罩2和托 盤3的材質、構造、尺寸等相關的内容，與第一施 & 相同，因而省略其說明。 ό .第五實施形態 第五實施形態與第二實施形態相同，是構成大型精密 部件收納容器的托盤和罩的兩者為鋁、鋁合金或鎖合金的 鑄造物的實施形態’是收納代替薄膜的光遮罩的實施形態。 第8圖是收納作為大型精密部件的光遮罩時的第五實 施形態之大型精密部件收納容器的分解立體圖。 〇 在該實施形態中’罩2和托盤3具有與在第二實施形 態中說明的罩和托盤相同的材質和構造。又，在罩2設有 開口部21，而且，以完全覆蓋該開口部21的方式安裝有 樹脂板22。優選樹脂板22和罩2的間隙由黏結性樹脂等 填充而被完全地密封，從而不從該間隙產生灰塵且不因與 外部通氣而導致異物侵入大型精密部件收納容器1内。而 且’也能夠使樹脂板22為透明度高的材質，由此能夠從外 部容易地辨認内部的光遮罩6的收納狀況。出於與上述第 一實施形態所述的托盤3相同的理由，優選罩2的壁厚為 17 201100306 4〜1〇mm的範圍，更優選為5〜8mm的範圍。 一 „ ®是第7圖或第8圖中所示的大型精密部 谷器中的光遮罩的固定應槐 疋機構附近的一部分截面圖。 如在第9 (9A)和（9B)圖中所示，在托盤3的突 3U，固定有用於將# 出面 、'先遮罩6保持在托盤3的保持 然在圖中僅顯示了 i個保垃s 7雖 個保持具7，但為了固定重 的薄膜4大的光遮罩^说、 ϊ比上述 、 ，優選在托盤3具備薄膜4的固| 所需要的個數以上的保捭1 幻固疋 持具7。如第9(9C)圖放大所示，伴 持具7具有以分別用傾 “ 月络m + 灭者先遮罩6的上下兩面的外 周緣的方式固定的固定機構的卜 田俅得具7具有.本體部71， 疋在犬出面31a;上方突出邱 部的办HP山 大出# 72，插入該本體部Π的内 ,工間並犬出至該本體部71的上方；下方 從該本體部71的下 。卩3， 74 " 勹托盤3的内侧突出；可動突出邱 ，從本體部71的内部的空間 ° ,Α @向著托盤3的内側突屮，并 構成為能夠在上方突出部72和 側大出，並 彈,Η： "丨， 出4 7 3之間移動； =體(例如，彈簧)75’使該可動突出 動 及螺釘76,貫通Π上方，以 可動突出部74的上面。二!/72的螺絲孔，並抵接於 盤3的内側而白 *出部73具有其上面向著托 们内側而向下傾斜的傾斜面。 其下面向著托盤3的内側而向η 了動突出部74具有 螺絲76而向著了動〜 °上傾斜的傾斜面。如果旋轉 τ /〇而向者可動突出部74 彈性體75 ’則可動突出部74抗拒 菔/5而移動至下方。另—太 方向碇韓蟫鮮7/； ΒΙ ’如果沿與上述相反的 知轉螺絲76,則可動突出 力而移動至上方。如此，通 I?體75 _ β卸可動突出部74的高廑， 18 201100306 從而能夠在與下方突出部73之間，從上下方向夾著各種厚 度的光遮罩6的上下兩面的外周緣，可靠地固定光遮罩6。 此外’與上述不同，彈性體75也可以位於上方突出部Μ 和可動突出部74之間而使可動突出部74偏向下方。 7 ·各實施形態之作用和效果 ο 依照上述各實施形態’在大型精密部件收納容器^中， 由於由鋁、鋁合金或鎂合金構成托盤3和罩2令的至少托 盤3，因而能夠獲得輕型且高剛性的收納容器。又，尤其 是通過利用鑄造法來製造大型精密部件收納容器i，從: 能夠不使用複雜的增強A杜 日5^卩件通過—次㈣造就獲得接近 於最終形狀的形狀且高剛性的收納容器。所以，能夠獲得 裝配工時極少的低成本的收納容器。又，通過使利用禱造 來製造的托盤3或托盤3和罩2的兩者的平面部的厚度為 4〜1〇職（更優選為5〜8叫，能夠抑制缺陷的產生，提高 〇 強度和生產性並謀求輕型化。而且，通過向塗膜賦予導電 性’能約有效地防止帶電異物附著於大型精密部件，並且， 能夠有效地防止將收納的大型精密部件取出時的帶電和靜 電破壞。除此之外’通過施加用帶電防止性塗料使得表面 粗糙度成為Ra 10" m以下的塗裝，能夠大幅地減少異物向 “的大型精密部件的附著。又，通過使托盤3的外緣Η :托盤3的内底面32突出並使其背側33為凹形狀，能夠 減少伴隨著鑄造時的 收縮而產生的缺陷，並且，能夠謀求 盤3的較型化。而且，通過在鑄造物（把盤3或者罩2和 托盤3的兩者)設置開口部21，用樹脂板22將該開口部a 19 201100306 密閉，並用黏結性樹脂將間隙完全地封閉，能夠防止異物 向大型精密部件的附著並獲得更進-步的輕型化。如果樹 月曰板22為透明度咼的材質’那麼，能夠從外容易地確認收 納物(薄膜4、光遮罩6等)的收納狀況。 、下°兒月本發明的實施形態。但是，本發明不限於 該實施例。 以納薄膜4為目的’製作如第^圖中所示的外觀的 大型精密部件收納容器該容器的大小為寬mo mm、 深謂随、高度（從托盤3的底面至罩2的頂面）18〇職。 以下說明罩2和托盤3的詳細情況。 在第10圖中，與收納的薄膜—起，顯示了在該實施例 申製造的大型精密部件收納容器的分解立體圖。 使用厚度3 mm的經過帶電防止處理的透明丙烯樹 脂，通過真空成形法而-體成形罩2。成形後，在進行罩2 的周圍的修邊之後，除去毛刺和飛邊，在兩短邊的侧面， 用螺栓（圖中未顯示）從内側將用於搬運的把手Μ安裝在各 兩個位置。使用Al_Si_Mg系的鎿造用銘合金⑽Α 通過砂型鑄造來製造托盤3。 在鑄造中’使用々碳棒電爐在大氣中進行Ai_si_Mg系 的鑄造用IS合金⑽AC4CH)的母材熔解，出於減少成形後 的氣體孔等的多孔性缺陷的目的，通真办 ^ 、. 丹工泉對坩堝内進 行減壓，在減少熔融液内的氣體後進行鑄造。砂型，尤其 是考慮使得中央的薄壁部的熔融液流動良 '、 一 民开在中央部和 兩短邊的周緣部的合計三個位置設置直 %退又，為了防 20 201100306 止縮孔而相充足的胃σ。在三㈣置同時進輯解液供 給，冷卻後，從砂型取出㈣3,通過大型加工中心而進 行直洗道的除去、外尺寸的精加工、搭载薄膜4的突出面 31a的平面加工以及用於安裝固定具5的孔加工。然後，使 用介面活性劑和自來水進行洗淨，除去鑄造和機械加工時 附著的鏵砂、切削油、異物’而且，通過大型的烤爐進行 加熱，完全地除去水分。 〇 接著’進行鑄造物的外觀檢查，在確認沒有裂痕和縮 孔等的鑄造缺陷之後，在清潔的環境下，將托盤3保持登 立，通過喷霧法而塗布黑色的帶電防止性塗料（商品名： EC-〇6/Nagase chemteX株式會社製）並使其乾燥。在塗裝 時，將-次的塗布量控制為塗膜1〇心程度，從而不發生 垂落而引起的塗膜的厚度不均和外觀不卜乾燥後，反 復進行再次塗裝，3次塗裝後的最終膜厚為大約3〇〜，心 在托盤3的4個位置的開口部37，從上側覆蓋另外準 Ο 備的148〇_Xl65〇mmx3随的帶電防止黑色ABS樹脂板 36(商品名：Toyolacparel/東麗株式會社製)由環氧系黏合 劑（商品名：刪7/小西株式會社製）黏結固定。此外，在此 時’為了在樹脂板36和托盤3不產生間陈，以充分地遍佈 至端4的方式塗布黏合劑。而且，在黏合劑硬化後，在托 盤3上將固定具5调整至能夠嵌合在薄膜4的框架的指定 安裝孔的位置，並用螺栓進行安裝。然後，安裝把手3〇和 扣件40，作為托盤3和罩2的連接手段。 關於托盤3 ’在用觸針式表面粗糙度測定機來測量塗裝 21 201100306G is a fixing portion 41 on the vertical end surface 24 or the like, and a driving portion 42 that can be fixed to the substantially vertical end surface 34 on the side of the tray 3 or the like. Moreover, when the shape of the component of the fastener is not fixed in advance on the side of the cover 2, for example, as shown in the fifth (5B), the substantially vertical end surface 34 on the side of the tray 3 can be used to be fixed. The fastener 5 is capable of hanging a part of the fastener "on the end portion 25 of the cover 2" and connecting the cover 2 and the tray 3. Thus, the cover 2 can be appropriately selected according to the shape of the fixed position of the cover 2 and the tray 3. The connecting means of the tray 3. In this embodiment, the fasteners 4, % fixed on the military 2 and the tray or fixed on the tray 3 are exemplified, but the clips can be completely removed from the tray 3 or the cover 2 Alternatively, it is also possible to connect the cover 2 and the tray 3, and as shown in the fifth (5A) and (5B) diagrams, 'the protruding surface 31 & of the tray 3 is fixed with the holding for holding the film 4 on the tray 3 5 5 Only one holder 5 is shown in the drawing, but a plurality of holders 5 are usually fixed along the outer edge 31 of the tray 3. As long as the film 4 can be reliably fixed so that the film 4 does not move in the tray 3 during the rotation, the holder 5, it is possible to use various forms. In this example, by inserting the pin of the 5th floor of the holder into the thin The fixing film 4 is a non-penetrating circular hole on the side of the frame of the core. FIG. 6 is a partial cross-sectional view for explaining the accompanying structure of the large-sized precision component storage container according to each embodiment of the present invention. As means for preventing intrusion of foreign matter from the outside into the large-sized precision component storage container, a seal represented by a spacer 6〇 is interposed between the cover 2 and the mating surface of the tray 3, and the cover is preferably placed as indicated by an arrow F. 2 and the tray 3 is inlaid and 15 201100306. The joint surfaces are adhered to each other. As a similar means, it is possible to select another method of attaching an adhesive tape or the like to the entire circumference of the outer circumference. When a difference in pressure between the inside and the outside is generated, the through hole for adjusting the internal and external air is provided in order to facilitate the engagement of the cover 2 and the tray 3, and the filter can be provided to prevent the intrusion of foreign matter during the inflow of air. Further, the small wheel 7 is fixed to the bottom surface of the tray 3, and the movement of the large-sized precision component storage container 1 can be facilitated. 5. The fourth embodiment and the fourth embodiment are related to the first embodiment. It is an embodiment in which a tray is formed of a prayer material of aluminum, an aluminum alloy, or a town alloy, and the cover is made of a resin, and is an embodiment in which a light mask is used instead of the film. In the first, second, and third embodiments, The example of the large-sized film 4 has been exemplified. However, as the object to be stored, not only the film 4 but also a finger requiring a high degree of cleanability, such as a light mask or a glass substrate for a light mask, etc., can be applied. However, there is a large difference in weight between the spear film 4 such as a light mask. For example, the weight of the quartz glass substrate of (1) 匪χ 1780 mm χ i7 mm is approximately 1526 mm χ m8 mm χ 8_ corresponding to the quartz glass substrate. The weight of the film 4 is about 3 kg. Therefore, the crying & ~ of the glass parts that house the light mask and the like. On the other hand, it is necessary to design the glass members corresponding to the light mask or the like for the individual members in accordance with the first, second, and third f #constitutions.第四The fourth real thing when storing a light mask as a large-sized precision component 16 201100306 An exploded perspective view of a large-sized precision component storage container. As shown in Fig. 7, the large-sized precision component housing container 1 of the fourth embodiment is a thin substantially box-shaped container, and includes a cover 2 and a tray 3, as in the first embodiment. The cover 2 and the tray 3 can be opened and closed, and the light mask 6 can be housed in a space formed in a state in which they are fitted and closed. Moreover, in order to prevent the light mask 6 from moving during transportation, a fixing mechanism is provided on the tray 3, and the fixing means is used to fix the light mask 6 to the material, structure, size, and the like of the tray, the cover 2, and the tray 3. It is the same as the first application &第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五 第五The embodiment of the light mask. Fig. 8 is an exploded perspective view of the large-sized precision component storage container according to the fifth embodiment in which a light shield as a large-sized precision component is housed. 〇 In this embodiment, the cover 2 and the tray 3 have the same material and construction as the cover and the tray described in the second embodiment. Further, the cover 2 is provided with an opening portion 21, and the resin plate 22 is attached so as to completely cover the opening portion 21. It is preferable that the gap between the resin sheet 22 and the cover 2 is filled with a resin or the like and is completely sealed, so that dust does not generate from the gap and foreign matter does not intrude into the large-sized precision component storage container 1 due to external ventilation. Further, the resin plate 22 can be made of a material having high transparency, whereby the storage state of the internal light mask 6 can be easily recognized from the outside. For the same reason as the tray 3 according to the first embodiment, the thickness of the cover 2 is preferably in the range of 17 201100306 4 to 1 mm, and more preferably in the range of 5 to 8 mm. A „ ® is a partial cross-section of the vicinity of the fixed dam mechanism of the light mask in the large precision barn shown in Fig. 7 or Fig. 8. As shown in the 9th (9A) and (9B) As shown, in the projection 3U of the tray 3, the holding for holding the #出面, 'the first mask 6 on the tray 3 is fixed. However, only the i holding sheets 7 are shown in the figure, but the holder 7 is fixed. The light film of the heavy film 4 is larger than the above, and it is preferable that the tray 3 is provided with the number of the protective film 1 of the film 1 which is required to have a solid film of the film 4, as in the 9th (9C). As shown in the enlarged view, the accommodating device 7 has a main body portion 71 having a fixing mechanism for fixing the outer peripheral edges of the upper and lower surfaces of the front cover 6 respectively. The dog is out of the face 31a; the upper part of the section of the Qiu Department is HP Hill Road Out #72, inserted into the body portion, the work room and the dog are discharged to the upper portion of the body portion 71; the lower portion is below the body portion 71.卩3, 74 " the inner side of the cymbal tray 3 is protruded; the movable bulge is protruded from the inner space of the main body portion 71, Α @ toward the inner side of the tray 3, and is configured to be able to protrude from the upper protruding portion 72 and the side And, Η: "丨, move between 4 7 3; = body (for example, spring) 75' causes the movable projection and screw 76 to pass over the top of the jaw to move the upper portion of the projection 74. The screw holes of the second !/72 abut against the inner side of the disk 3 and the white *the outlet portion 73 has an inclined surface which is inclined downward toward the inner side of the holder. The lower surface of the tray 3 has a screw 76 toward the n-moving projection portion 74 toward the inner side of the tray 3, and is inclined toward the inclined surface. If the τ / 〇 is rotated and the movable portion 74 of the elastic member 75 ′ is moved, the movable projection 74 is moved to the lower side against the 菔/5. On the other hand, if the direction of the screw 76 is opposite to the above, the movable force can be moved to the upper side. In this way, the high-profile of the movable projection 74 is released, and the outer peripheral edge of the upper and lower surfaces of the light mask 6 of various thicknesses can be sandwiched between the lower projections 73 and the lower projections 73. The light mask 6 is reliably fixed. Further, unlike the above, the elastic body 75 may be located between the upper protruding portion Μ and the movable protruding portion 74 to bias the movable protruding portion 74 downward. 7. Actions and Effects of the Embodiments According to the above-described embodiments, in the large-sized precision component storage container, since at least the tray 3 of the tray 3 and the cover 2 is made of aluminum, aluminum alloy or magnesium alloy, light weight can be obtained. Highly rigid storage container. Further, in particular, by manufacturing a large-sized precision component storage container i by a casting method, it is possible to obtain a storage container having a shape close to the final shape and having high rigidity without using a complicated reinforcing A Dui 5 member. . Therefore, it is possible to obtain a low-cost storage container which is extremely small in assembly work. In addition, the thickness of the flat portion of the tray 3 or the tray 3 and the cover 2 which are manufactured by using the prayer is 4 to 1 (more preferably 5 to 8), and the occurrence of defects can be suppressed, and the strength of the flaw can be improved. In addition, it is possible to effectively prevent the charged foreign matter from adhering to the large-sized precision component by imparting conductivity to the coating film, and it is possible to effectively prevent charging and electrostatic breakdown when the large-sized precision component is taken out. In addition, by applying a charge-preventing paint to a coating having a surface roughness of Ra 10 < m or less, it is possible to greatly reduce the adhesion of foreign matter to "large precision parts. Further, by making the outer edge of the tray 3 Η : The inner bottom surface 32 of the tray 3 protrudes and the back side 33 has a concave shape, which can reduce defects caused by shrinkage during casting, and can further reduce the size of the disk 3. The opening portion 21 is provided in the disk 3 or the cover 2 and the tray 3, and the opening portion a 19 201100306 is sealed by the resin plate 22, and the gap is completely closed by the adhesive resin, thereby preventing foreign matter. The adhesion to the large-sized precision parts is further improved. If the tree slab 22 is a material of transparency ', the storage of the storage items (the film 4, the light mask 6, etc.) can be easily confirmed from the outside. The present invention is not limited to the embodiment. The invention is not limited to the embodiment. The large-sized precision component storage container having the appearance as shown in Fig. 2 is used for the purpose of the nano film 4 The width is mm, the depth is the height, and the height (from the bottom surface of the tray 3 to the top surface of the cover 2) is 18. The details of the cover 2 and the tray 3 will be described below. In Fig. 10, the film is stacked. An exploded perspective view of the large-sized precision component storage container manufactured in the embodiment is shown. The transparent acryl resin having a thickness of 3 mm and subjected to the charge prevention treatment is used to form the cover 2 by vacuum forming. After the molding, the cover is formed. After the trimming around 2, the burrs and the flash are removed, and the handles for transport are attached to the two positions from the inside by bolts (not shown) on the sides of the two short sides. The Al_Si_Mg system is used. Made with the name Gold (10) 托盘 The tray 3 is manufactured by sand casting. In the casting, the base material of the Ai_si_Mg-based casting IS alloy (10) AC4CH is melted in the atmosphere using a tantalum carbon rod electric furnace, and the porosity defects such as gas pores after molding are reduced. The purpose is to pass the real thing ^,. Dan Gongquan decompresses the inside of the crucible and casts it after reducing the gas in the melt. The sand type, especially considering the flow of the melt in the thin part of the center, is a good one. In the central part and the peripheral part of the two short sides, the total position of the three parts is set to be straight and retracted, in order to prevent the 20 00 00 306 from the shrinkage hole, the stomach sufficiency is sufficient. At the same time, the three (four) sets are simultaneously supplied with the solution supply, after cooling, The (4) 3 is taken out from the sand mold, and the straight wash lane is removed by a large machining center, the outer dimension is finished, the plane surface of the projecting surface 31a on which the film 4 is mounted, and the hole processing for mounting the fixture 5 are performed. Then, it is washed with an interface active agent and tap water to remove cerium, cutting oil, and foreign matter adhered during casting and machining, and is heated by a large oven to completely remove water. Then, the appearance inspection of the cast product is carried out, and after confirming that there are no casting defects such as cracks and shrinkage cavities, the tray 3 is held in a clean environment, and a black anti-static paint (trade name) is applied by a spray method. : EC-〇6/Nagase chemteX Co., Ltd.) and dried. At the time of coating, the coating amount of the coating is controlled to the degree of the coating film 1 so that the thickness of the coating film does not fall and the appearance is not dried, and the coating is repeated again, and the coating is repeated three times. After the final film thickness is about 3 〇, the opening 37 of the heart at the four positions of the tray 3, and the 148 〇 X X X X X X X x x x ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( : (Toyolacparel / Toray Co., Ltd.) is bonded and fixed by an epoxy adhesive (product name: 77/小西株式会社). Further, at this time, in order to prevent the resin sheet 36 and the tray 3 from being interposed, the adhesive is applied so as to be sufficiently spread over the end 4. Further, after the adhesive is hardened, the fixture 5 is adjusted to the position where the predetermined mounting hole of the frame of the film 4 can be fitted to the tray 3, and is attached by bolts. Then, the handle 3A and the fastener 40 are attached as a connecting means for the tray 3 and the cover 2. About the tray 3 'measuring the coating with a stylus surface roughness measuring machine 21 201100306
面的表面粗經度之後，RH 工、取.^ 為不反映出原來的鑄造 表面的、平滑且清潔的平面。 u, B S ^ ^ ^ a ，外觀上也是適度的無光 澤狀，目視異物檢查是容易且 W且的又’關於重量測量 的結果，罩2為大約23 kg，拓船。 置里別重 人 盤3和ABS樹脂板（8 kg) 口起來為41 kg，大型精密部 丁叹肩今器1的總重量為64 kg，此夠極度輕型地進行精加工。 .AA ^ ^ 而且，除了由專業技術 者進仃的鑄造工序和機械加工工 序之外，即使包含ABS樹 月曰板36的黏結，組裝所需的工 吁马作業者2人進行大概1 小時，相對於現有產品，能夠大幅地縮短工時。 將如此地製造的大型精密部件收納容器i的罩2和托 盤3搬入等級10的潔淨室内，在使用介面活性劑和⑽ 製海綿而充分地擦洗乾淨後1純水進行洗務再通過自 然乾燥而使其完全乾燥。然& ’在暗室内進行異物檢查和 外觀檢查。由於罩2是樹脂型真空成形品，因而尤其 沒有問題。關於托盤3，在塗裝面、樹脂板％的表面 以及铸造物和ABS樹脂板36的接合部的全部中，也均為 清潔的狀態，除了縮孔、溶融液流動痕跡、氣泡等的禱造 缺陷之外’也完全看不見接合部的黏結缺陷，$良好的外 觀。 因此，進而，對大型精密部件收納容器丨進行將另外 製作的薄膜4收納並輸送的試驗。關於在此所使用的薄膜 4 ’使用外尺寸為1526 mm X P48 mm'内尺寸為1493 mm mm、南度為6.2 mm的實施過黑色氧化銘處理的 A5052鋁合金製薄膜框架，並在其單端面形成作為遮罩黏 22 201100306 著層的寬6 mm、高2 mm的矽酮黏著層，而且在相反側的 端面用石夕酮黏著劑貼附通過金屬型塗料法而成膜的厚度為 的氟樹脂薄膜。此外，遮罩黏著層由被切斷加工成與 上述薄膜框架大致相同尺寸的形狀且塗布有氟變性矽酮分 型劑的厚度為125# m @ PET薄臈製的分離層保護。在暗 室内對該薄膜4進行異物檢查，將附著的異物的位置正確 Ο 地記載到圖中之後，將該薄冑4收納於所製造的大型精密 部件收納容器1内。 在薄膜4的收納之後，當續由a々也 交Ί忒由兩名作業員搬送該大型 精密部件收納容H丨，在通常的處置中，完全感覺不到該 容器1的變形或發聲。於是，進而，在兩長邊側各配置3 名作業者，由這6個擔當人科兮士并丨 调褥田人對忒大型精密部件收納容器i 故意試著施加扭曲’但内部的薄膜依然保持平自，沒有看 見邊膜發生褶皺或鬆弛等的暗 — J咁不谷器1的變形的徵兆。 接著，用帶電防止PE劁句驻黑机α , Μ包裝帶對收納、薄膜4的大型精 =收納容器\進行二重包裝，然⑨，從潔淨室搬出， 送試驗=楞紙板相進行包裝。實施三次輸送試驗，該輸 送试驗疋將該包裝物用貨車運送從 斗士、如士 * ’縣同崎市至褐岡縣 北九洲市為止的往復距離（大概u 卄七人壯A 里’使用高速公路） 並包含裝卸，然後’再將包裝物收 的薄膜4進行外觀檢杳牙 /、净室内，對内部 疋叮规械查和檢查附著 , 土 了耆"物的有無的試驗。結 果在相框架和薄膜上均完全 膜f·沾s此 货兄知傷。又’關於 、的異物，位置、個數均為與輸送前相比〜 的狀態。從這些結果確認… Φ #件收納容器1輕 23 201100306 型，製造時的裝配工時少，同時，對於以清潔的狀態輸送 以薄膜4為代表的大型精密部件而言，具有充分的剛性。 產業上的利用可能性 能夠利用本發明來收納或搬運例如薄膜或玻璃製光遮 罩等的精密基板。 【圖式簡單說明】 第1圖是第—實施形態之大型精密部件收納容器的立 體圖。 帛2圖是將薄膜收納在第}圖所示的大型精密部件收 納谷器内時的分解立體圖。 第3圖是顯示第2圖所示的托盤及其一部分放大載面 的立體圖。 第4圖是收納薄膜的第二實施形態之大型精密部件收 納容器的分解立體圖。 第5圖是第三實施形態之大型精密部件收納容器的扣 件附近的一部分截面圖。 第6圖疋用於說明本發明的各實施形態之大型精密 件收納容器的附隨構造的一部分截面圖。 ° 第7圖疋收納作為大型精密部件的光遮罩時的第四 施形g之大型精密部件收納容器的分解立體圖。 第8圖疋收納作為大型精密部件的光遮罩時的第五 施形悲之大型知密部件收納容器的分解立體圖。 第圖疋第7圖或第8圖令所示的大型精密部件收納 24 201100306 容器中的光遮罩的固定機構附近的一部分截面圖 第ίο圖是通過本發明的實施形態製造的大型精密部件 收納容器的分解立體圖，是與所收納的薄膜共同顯示的圖。 【主要元件符號說明】 1大型精密部件收納容器 2罩 3托盤 〇 4薄膜（大型精密部件的一例） 6光遮罩（大型精密部件的一例） 21開口部 2 2樹脂板 31 外緣 32内底面 33背侧 U 3 6 ABS樹脂板 37開口部 25After the rough surface of the surface, the RH is taken as a smooth, clean surface that does not reflect the original cast surface. u, B S ^ ^ ^ a , the appearance is also moderately non-glossy, visual inspection of foreign matter is easy and W's as a result of weight measurement, the cover 2 is about 23 kg, the boat. The weight of the plate 3 and the ABS resin plate (8 kg) is 41 kg, and the large precision part of the Dingshou shoulder device 1 has a total weight of 64 kg, which is extremely lightly finished. .AA ^ ^ Moreover, in addition to the casting process and machining process advanced by the skilled person, even if the bonding of the ABS tree raft 36 is included, the two workers required for the assembly will take about 1 hour. Compared with existing products, it can greatly shorten the working hours. The cover 2 and the tray 3 of the large-sized precision component storage container i manufactured in this manner are carried into a clean room of class 10, and are sufficiently scrubbed with a surfactant and a sponge made of (10), and then washed with pure water and then naturally dried. Make it completely dry. However, &' performs a foreign object inspection and visual inspection in a dark room. Since the cover 2 is a resin type vacuum molded article, it is particularly problem free. In the tray 3, the surface of the coating surface, the surface of the resin sheet, and the joint portion of the cast product and the ABS resin sheet 36 are also in a clean state, except for the shrinkage of pores, flow marks of molten liquid, bubbles, and the like. In addition to the defects, the bonding defects of the joints are not completely visible, and the appearance is good. Therefore, a test for storing and transporting the separately produced film 4 to the large-sized precision component storage container 。 was carried out. For the film 4' used here, a film frame of A5052 aluminum alloy with an outer dimension of 1526 mm X P48 mm' inner dimension of 1493 mm mm and a south degree of 6.2 mm treated with black oxide is used. The end face is formed as a cover layer of the adhesive layer of 6 mm and 2 mm in length, and the thickness of the film formed by the metal coating method is attached to the end face on the opposite side. Fluororesin film. Further, the mask adhesive layer is protected by a separation layer made of a film having a shape substantially the same as that of the above-mentioned film frame and coated with a fluorine-denatured anthrone-type release agent and having a thickness of 125 # m @ PET. The film 4 is subjected to foreign matter inspection in a dark room, and the position of the adhered foreign matter is accurately described in the drawing, and then the sheet 4 is housed in the large-sized precision component storage container 1 to be manufactured. After the storage of the film 4, the large-sized precision component accommodating capacity H 搬 is conveyed by two workers, and the deformation or sound of the container 1 is not felt at all during normal handling. Then, three operators were placed on each of the two long sides, and the six gentlemen and the 褥田人 deliberately tried to apply distortion to the large precision component storage container i, but the inner film remained Since the smear, there is no sign of the deformation of the smear, such as wrinkles or slacks. Next, the PE spoofing black machine α is used to prevent the PE 劁 驻 驻 驻 , 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 。 。 。 。 。 。 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜 薄膜Three transport tests were carried out, and the transport test was carried out by truck in a reciprocating distance from the fighters, the village of Tosaki, and the city of Kita-Kyushu, Ganggang County (about u 卄 seven people in the A) We use the expressway) and include the loading and unloading, and then the film 4 of the package is subjected to the inspection of the appearance of the teeth, the clean room, the internal inspection and inspection, and the test of the presence or absence of the object. The result is complete on the phase frame and the film. In addition, the foreign matter, the position, and the number of the foreign objects are compared with the state before the conveyance. It is confirmed from these results that the large-sized precision parts represented by the film 4 are sufficiently rigid, and the assembly time is small. Industrial Applicability The present invention can be used to store or transport a precision substrate such as a film or a glass light-shielding. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a large-sized precision component storage container according to a first embodiment. Fig. 2 is an exploded perspective view showing the film when it is housed in a large precision part shown in Fig. Fig. 3 is a perspective view showing the tray shown in Fig. 2 and a part of the enlarged loading surface thereof. Fig. 4 is an exploded perspective view showing the large-sized precision component accommodating container of the second embodiment of the accommodating film. Fig. 5 is a partial cross-sectional view showing the vicinity of a fastener of the large-sized precision component storage container of the third embodiment. Fig. 6 is a partial cross-sectional view for explaining an accompanying structure of a large-sized precision container storage container according to each embodiment of the present invention. Fig. 7 is an exploded perspective view of the large precision component storage container in the fourth embodiment when the light mask is used as a large precision component. Fig. 8 is an exploded perspective view showing the fifth large-sized compact component storage container in the case of accommodating a light mask as a large-sized precision component. Fig. 7 is a large-sized precision component housing shown in Fig. 7 or Fig. 8. A part of the cross-sectional view of the vicinity of the fixing mechanism of the light mask in the container is shown in Fig. 8 is a large-sized precision component housing manufactured by the embodiment of the present invention. The exploded perspective view of the container is a view displayed together with the stored film. [Explanation of main component symbols] 1 large precision component storage container 2 cover 3 trays 〇 4 film (an example of large precision parts) 6 light mask (an example of a large precision component) 21 opening 2 2 resin plate 31 inner edge 32 inner bottom surface 33 back side U 3 6 ABS resin sheet 37 opening portion 25