TW200401121A - Radiation sensitive composition for color filter, color filter, and color liquid display device - Google Patents
Radiation sensitive composition for color filter, color filter, and color liquid display device Download PDFInfo
- Publication number
- TW200401121A TW200401121A TW092109383A TW92109383A TW200401121A TW 200401121 A TW200401121 A TW 200401121A TW 092109383 A TW092109383 A TW 092109383A TW 92109383 A TW92109383 A TW 92109383A TW 200401121 A TW200401121 A TW 200401121A
- Authority
- TW
- Taiwan
- Prior art keywords
- acid
- pigment
- alkali
- color filter
- radiation
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials For Photolithography (AREA)
- Liquid Crystal (AREA)
- Polymerisation Methods In General (AREA)
- Optical Filters (AREA)
Abstract
Description
200401121 (1) 玫、發明說明 【發明所屬之技術領域】 本發明係有關形成穿透型或反射型之彩色液晶顯示元 件、彩色攝像管元件等所用之彩色濾光片之彩色濾光片用 輻射敏感性組成物、由該組成物形成所構成之彩色濾光片 '及具備該彩色濾光片之液晶顯示元件。 【先前技術】 以往使用輻射敏感性組成物製造彩色濾光片時’在基 板上或預先形成所要圖案之遮光層之基板上塗布輻射敏感 性組成物,乾燥後,將乾燥後之塗膜曝光成所要的圖案, 藉由顯影得到各顔色的像素。 但是如此製得之彩色濾光片在顯影時,未曝光部之基 板上或遮光層上有時會產生殘渣或質地污染,另外顯影後 之後烘烤之像素的表面平滑性或形成之像素對於基板或遮 光層之密著性不足,有塗膜物性較差的問題。其程度係隨 著輻射敏感性組成物中所含之顏料濃度升高而越明顯,特 別是像素之表面平滑性之劣化程度隨著顏料濃度升高而越 明顯’因此很難達成彩色濾光片所需之充分的色濃度。 本發明人等發現含有(A )顔料、(B )鹼可溶性樹 脂、(C )多官能性單體、(D )輻射敏感性聚合引發劑 及(E )溶媒之彩色濾光片用輻射敏感性組成物,且(A )顔料預先分散於(B )鹼可溶性樹脂之一部分或全部溶 解於(E )溶媒之一部分或全部所成之溶液,可解決上述 -6 - (2) (2)200401121 問題。 但是近年對於彩色液晶顯示元件之顯示品質要求嚴格 ’因此對於像素之表面平滑性、對於基板之密著性或顯影 性等’要求更高性能。 [發明欲解決的問題] 本發明係提供像素之表面平滑性及密著性優異,且具 有優異之顯影性之彩色濾光片用輻射敏感性組成物,更具 體而言,係提供像素之表面平滑性與對於基板及遮光層之 密著性優異,且顯影時未曝光部之基板上及遮光層上不會 產生殘渣或質地污染之彩色濾光片用輻射敏感性組成物。 [解決問題的方法] 依據本發明時,上述問題可藉由一種彩色濾光片用輻 射敏感性組成物,其係含有(A )顏料、(B )鹼可溶性 樹脂、(C )多官能性單體、(D )輻射敏感性聚合引發 劑及(E )溶媒,且(A )顏料預先分散於(B )鹼可溶性 樹脂之一部分或全部溶解於(E )溶媒之一部分或全部所 成之溶液中的彩色濾光片用輻射敏感性組成物’其特徵係 含有預先分散(A )顔料時所用之(B )鹼可溶性樹脂爲 具有-NR2基(但是R係相互獨立之氫原子、碳數1〜1 8 之烷基、碳數2〜18之烯基、碳數2〜]8之炔基、烯丙基 或碳數6〜1 8之芳基)之鹼可溶性樹脂來達成。 以下詳細說明本發明。 (3) (3)200401121 (A )顏料 本發明之顔料其色調並無特別限定,可根據所得彩色 瀘光片之用途來適當選擇,可爲有機顏料或無機顏料。 刖 述之 .有標 :顏 料,例如於色 彩指數 ( C.]-; The So ci et) ,〇 f Dyers an d Colourists 公 司 發 行 ) 中 被分類 成顏 (Pi g m e η 1)之 化 合物,具體 而言例 如有下 述以色: 彩指 數 編號 的化 合物 〇 c. I.顏 料黃 83 、c . I.顏料黃]2 8 C . I. 顏 料黃1: 38、 C. 1.顏 料黃 13 9' C . I.顔料黃1 5 0、 C _ .I .顏 料 -i=f- 頁 15 1' C . ].顏 料黃 15 2、 C . I.顏料黃1 5 3、 C. .I .顏 料 -fc#- 頁 154、 C . 1_顏 料黃 15 5' C _ I.顔料黃1 5 6、 C . .] .顏 料 黃 166 ' C . I.顏 料黃 ]6 8、 C . ].顏料黃1 7 5、 C . I .顔 料 頁 185; C . I.顏: 料紫 1 9 、C . I.顔料紫 23 、 C .I. 顏 、|/、1 私 紫29、 C . I.顏 料紫 32、 C. I.顏料紫3 6、 C. 1 .11 i料 紫 3 8 ; C . I.顏 料紅 1 7 7、C . 1.顏料 .紅 202 、1 C. I. 顏料紅 206 C. I .顏料 紅 2 0 7、 C . I.顏料紅 :2丨 38 C. ]. 顔 料紅 09、 C . I.顏 料紅 2 15' C . I.顔料紅2 1 6、 C. .1 .顏 料 紅 22 0 ' C . I.顏 料紅 22 4、 C. I.顔料紅2 2 6、 C. ,] .顏 料 紅 242 ' C . I.顏 料紅 24 3 ' C . I.顏料紅2 4 5、 C . .I .顏 料 紅 254、 C. I.顏 料紅 2 5 5、 C. I.顏料紅2 6 4、 C. .I .顏 料 紅 2 6 5 ; C . 1.顏 ,料藍 15、 C . ].顏料藍]5 • 3 X C .I. 顏 料 藍15 : 4、 C . I.顏 料藍 15: 6、 C . I.顏料藍 60 > C. I.顏 料綠 7、 C . I.顏料綠 36 J C. I.顔 料黑 1 、 C. I.顏料黑 Ί。 (4) (4)200401121 前述無機顏料之具體例有氧化鈦、硫酸鋇、碳酸耗、 氧化鋅、硫酸鉛、黃色鉛、鋅黃、紅色氧化鐵(In) 鎘紅、群青、普魯士藍 '氧化鉻綠、鈷綠、琥珀 '酞黑、 合成鐵黑、碳黑等; 本發明之顏料對於彩色濾光片要求高精密之發色及耐 熱性,因此發巴丨生較咼,且耐熱性高之有機顔料及/或碳 黑爲佳。 本發明中’顏料可單獨或混合二種以上來使用。 本發明中,必驽時可與染料、天然色素等倂用。 本發明中’則述各顔料可依需要以聚合物將其粒子表 面改質來使用。顏料之粒子表面之改質之聚合物例如有日 本特開平8 一 2 5 9 8 7 6號公報等所記載之聚合物或市 售之各種顔料分散用之聚合物或低聚物等。 本發明中’顔料預先分散於後述之(B )含胺基之含 鹼可溶性樹脂之一部分或全部溶解於後述之(E )溶媒之 一部分或全部之溶液中。 本發明中’顏料分散時使用(B )含有含胺基之鹼可 溶性樹脂之鹼可溶性樹脂之一部分時’該含胺基之鹼可溶 性樹脂與輻射敏感性組成物調製時所用的含胺基之鹼可溶 性樹脂可相同或不同,但是顏料分散時使用之含胺基之驗 可溶性樹脂理想爲下述之含胺基之鹼可溶性樹脂(I ) ' 含胺基之鹼可溶性樹脂(]1 )、含胺基之鹼可溶性樹脂( ]π )等。如前述必要時,在顏料分散時及輻射敏感性組 成物調製時也可使用含胺基之鹼可溶性樹脂以外之鹼可溶 -9- (5) (5)200401121 性樹脂,此時之含胺基之鹼可溶性樹脂以外之鹼可溶性樹 脂可與顏料分散時及輻射敏感性組成物調製時相同或不同 0 顏料分散時使用之含胺基之鹼可溶性樹脂及含胺基之 鹸可溶性樹脂以外之鹼可溶性樹脂可單獨使用或混合2種 以上來使用。 只要顏料可在前述溶液中均勻分散,即可適當選擇顏 料分散時之(B )成分的使用量,對於顏料1 00重量份時 ,通常使用3 0〜5 0 0重量份,理想爲5 0〜3 0 0重量份,更 理想爲7 0〜2 0 0重量份。 本發明中,顏料分散時使用(E )溶媒之一部分時, 該一部分使用之(E )溶媒與輻射敏感性組成物調製時所 使用之剩餘的(E )溶媒可相同或不同,顏料分散時所使 用之(E )溶媒例如有乙二醇單甲醚醋酸酯、丙二醇單甲 醚、丙二醇單甲醚醋酸酯、丙二醇單乙醚醋酸酯、二乙二 醇二甲醚、二乙二醇甲基乙醚、環己酮' 2 —庚酮、3 —庚 酮、2 —羥基丙酸乙酯、3 —甲氧基丙酸乙酯、3 —乙氧基 丙酸甲酯、3 —乙氧基丙酸乙酯、3 —甲基一3 —甲氧基丁 基丙酸酯、醋酸正丁酯、醋酸異丁酯、甲酸正戊酯、醋酸 異戊酯、丙酸正丁酯、酪酸乙酯、酪酸異丙酯、酪酸正丁 酯、丙酮酸乙酯等。 顏料分散時使用(E )溶媒可單獨使用或混合2種以 上來使用。 只要顔料可在前述溶液中均勻分散,即可適當選擇顏 -10- (6) (6)200401121 料分散時之(ε )成分的使用量,對於顔料]〇 〇重量份時 ’通常使用5 0〜2 〇 〇 〇重量份,理想爲】〇 〇〜],〇 〇 〇重量份 〇 顔料分散時,以前述範圍之使用量使用(B )成分及 (E )成分’可達成顔料之良好的分散狀態,同時可得到 基板及遮光層之粘著性優異之輻射敏感性組成物,且可形 成表囬平滑性等優異之像素。 顏料·分散法只要顏料可均勻分散於前述溶液時,即可 ί木用適當的方法’但是顏料分散時,可不將顏料粒子粉碎 或微細化進行分散的方法’例如可採用以玻璃球磨機、輥 磨機等之分散機分散的方法。 以%璃球磨機進行顏料分散時,例如使用直徑〇. 5至 之玻璃珠或氧化鈦珠粒等,混合顏料、(Β)成分 及()成为有時將再添加其他顔料分散劑之混合液投 入球磨機中進行顏料分散。 朱U之充塡车通常爲5 〇至8 〇容量%,混合液之投入 ^ «又爲硏磨機谷量之2G i遵左右,分散時間—般爲 .寺以球磨機進行顏料分散時,以冷卻水等冷卻 的狀態下進行爲佳。 顏料分散使用輥磨機,n 塔機日寸’例如使用3軸輥磨機、?軸 輥磨機等,混合薙Μ , 、 〜4 ( Β )成分及(£ )成分,有時將 再添加其他顏料分散卿丨5、、θ λ、 片 '此α液投入輥磨機中進行顔料分 散。 … 牵比磨機之輕之間隔以7 η h以1 M m以下爲佳’剪切力一般 -11 - (7) 200401121 爲]osdyn/sec左右,分散時間—般爲約2至4小時。 本發明之顏料分散時,(B )含有含胺基之鹼可溶性 樹脂之驗可溶性樹脂對於顔料具有極佳分散劑的作用,且 证||33射敏感丨生組成物之頒影性或塗膜物性等之.觀點’不使 用(B )成分以外之顏料分散劑(以下稱爲「其他顏料分 散劑」)較佳,但是也可倂用其他顏料分散劑。200401121 (1) Description of the invention [Technical field to which the invention belongs] The present invention relates to radiation for a color filter for forming a color filter for a transmissive or reflective color liquid crystal display element, a color camera tube element, etc. A sensitive composition, a color filter formed by the composition, and a liquid crystal display element including the color filter. [Previous technology] In the past, when a color filter was manufactured using a radiation-sensitive composition, a radiation-sensitive composition was coated on a substrate or a substrate in which a light-shielding layer having a desired pattern was previously formed, and after drying, the dried coating film was exposed to Pixels of each color are obtained by developing the desired pattern. However, during the development of the color filter thus produced, residues or texture pollution may sometimes occur on the substrate or the light-shielding layer of the unexposed part. In addition, the surface smoothness of the pixels baked after development or the formed pixels are opposite to the substrate Or the adhesion of the light-shielding layer is insufficient, and there is a problem that the physical properties of the coating film are poor. The degree is more obvious as the concentration of the pigment contained in the radiation-sensitive composition increases, especially the degree of deterioration of the surface smoothness of the pixel is more obvious as the concentration of the pigment increases. Therefore, it is difficult to achieve a color filter The required full color density. The present inventors have found that radiation sensitivity for color filters containing (A) pigment, (B) alkali-soluble resin, (C) polyfunctional monomer, (D) radiation-sensitive polymerization initiator, and (E) solvent The composition and the solution in which (A) pigment is dispersed in part (B) of alkali-soluble resin in part or all are dissolved in part or all of (E) solvent, can solve the above problem of -6-(2) (2) 200401121 . However, in recent years, the display quality of color liquid crystal display elements has become stricter. Therefore, higher performance is required for the surface smoothness of the pixels, the adhesion to the substrate, and the developability. [Problems to be Solved by the Invention] The present invention provides a radiation-sensitive composition for a color filter, which is excellent in surface smoothness and adhesion of a pixel and has excellent developability, and more specifically, provides a surface of a pixel A radiation-sensitive composition for color filters that is excellent in smoothness and adhesion to a substrate and a light-shielding layer, and does not produce residues or texture pollution on the substrate and the light-shielding layer of an unexposed portion during development. [Method for solving the problem] According to the present invention, the above problem can be solved by a radiation-sensitive composition for a color filter, which contains (A) a pigment, (B) an alkali-soluble resin, and (C) a polyfunctional monomer. Polymer, (D) a radiation-sensitive polymerization initiator and (E) a solvent, and (A) a pigment previously dispersed in a part or all of (B) an alkali-soluble resin dissolved in a part or all of a solution formed by (E) a solvent The color-sensitive radiation-sensitive composition for color filters' is characterized by containing (B) an alkali-soluble resin used when a pigment (A) is dispersed in advance, which has a -NR2 group (but R is an independent hydrogen atom and a carbon number of 1 to 1). 1 8 alkyl group, alkenyl group with 2 to 18 carbon atoms, alkynyl group with 2 to 8 carbon atoms, allyl group, or alkali soluble resin with 6 to 18 carbon atoms). The present invention is described in detail below. (3) (3) 200401121 (A) Pigment The color tone of the pigment of the present invention is not particularly limited, and can be appropriately selected according to the application of the obtained color calender sheet, and may be an organic pigment or an inorganic pigment. Described. Marked: Pigments, for example, compounds classified as pigments (Pi gme η 1) in the color index (C.)-; The So ci et, issued by Of Dyers an d Colourists, specifically and specifically For example, there are the following colors: Color Index Numbered Compounds: 0. I. Pigment Yellow 83, c. I. Pigment Yellow] 2 8 C. I. Pigment Yellow 1: 38, C. 1. Pigment Yellow 13 9 ' C. I. Pigment Yellow 1 50, C_.I. Pigment-i = f-page 15 1'C.]. Pigment Yellow 15 2, C. I. Pigment Yellow 1 5 3, C. .I. Pigment -fc #-Page 154, C. 1_Pigment Yellow 15 5 'C_I. Pigment Yellow 1 5 6, C..]. Pigment Yellow 166' C. I. Pigment Yellow] 6 8, C.]. Pigment Yellow 1 7 5, C. I. Pigment Page 185; C. I. Color: Material Violet 19, C. I. Pigment Purple 23, C. I. Color, | /, 1 Private Purple 29, C. I. Pigment Violet 32, CI Pigment Violet 3 6, C. 1.11 i Material Violet 3 8; C. I. Pigment Red 1 7 7, C. 1. Pigment. Red 202, 1 CI Pigment Red 206 C. I. Pigment Red 2 0 7, C. I. Pigment Red: 2 丨 38 C.]. Pigment Red 09, C. I. Pigment Red 2 15 'C. I. Pigment Red 2 1 6, C. .1. Pigment Red 22 0 'C. I. Pigment Red 22 4, CI Pigment Red 2 2 6, C.,]. Pigment Red 242' C. I. Pigment Red 24 3 'C. I. Pigment Red 2 4 5, C. I. Pigment Red 254, CI Pigment Red 2 5 5, CI Pigment Red 2 6 4, C.. I. Pigment Red 2 6 5; C. 1. Color, Material Blue 15, C.]. Pigment Blue] 5 • 3 XC.I.Pigment Blue 15: 4, C.I.Pigment Blue 15: 6, C.I.Pigment Blue 60 > CI Pigment Green 7, C.I.Pigment Green 36 J CI Pigment Black 1, CI Pigment Black. (4) (4) 200401121 Specific examples of the aforementioned inorganic pigments include titanium oxide, barium sulfate, carbonic acid, zinc oxide, lead sulfate, yellow lead, zinc yellow, red iron oxide (In), cadmium red, ultramarine blue, and Prussian blue. Chrome green, cobalt green, amber 'phthalate black, synthetic iron black, carbon black, etc .; The pigment of the present invention requires high-precision color development and heat resistance for the color filter, therefore, the color of the pigment is relatively high, and the heat resistance is high. Organic pigments and / or carbon black are preferred. The 'pigment' in the present invention may be used alone or in combination of two or more. In the present invention, it can be used with dyes, natural pigments, etc. when necessary. In the present invention, each pigment can be used by modifying the surface of its particles with a polymer as required. Examples of the polymer modified on the surface of the pigment particles include polymers described in Japanese Patent Application Laid-Open No. 8-5 9 8 76, and polymers or oligomers for dispersing various pigments on the market. In the present invention, the 'pigment is previously dispersed in a solution of a part or all of the (B) amine group-containing alkali-containing soluble resin described later in part or all of the (E) solvent described later. In the present invention, "when pigment is dispersed (B) a part of the alkali-soluble resin containing an alkali-soluble resin containing an amine group is used", the amine-containing alkali-containing resin used in the preparation of the amine-group-containing alkali-soluble resin and the radiation-sensitive composition is used The soluble resin may be the same or different, but the amine group-containing test soluble resin used when the pigment is dispersed is preferably the following amine group-containing alkali-soluble resin (I) 'amine group-containing alkali-soluble resin (] 1), amine-containing Base-soluble resin (] π) and the like. As necessary, when dispersing pigments and when preparing radiation-sensitive compositions, alkali-soluble resins other than amine-containing alkali-soluble resins can be used. 9- (5) (5) 200401121 Resin, in which case amine-containing resins Alkali-soluble resins other than base-based alkali-soluble resins can be the same or different from pigment-dispersed and radiation-sensitive compositions when formulated. 0 Amine-soluble alkali-soluble resins and amine-containing amidine-soluble resins used when pigments are dispersed The soluble resin can be used alone or in combination of two or more. As long as the pigment can be uniformly dispersed in the aforementioned solution, the amount of the component (B) used when the pigment is dispersed can be appropriately selected. For 100 parts by weight of the pigment, 30 to 50 parts by weight is usually used, and ideally 50 to 300 parts by weight, more preferably 70 to 200 parts by weight. In the present invention, when a part of the (E) solvent is used when the pigment is dispersed, the remaining (E) solvent used when the (E) solvent and the radiation-sensitive composition are used in this part may be the same or different. The (E) solvent used includes, for example, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, diethylene glycol dimethyl ether, and diethylene glycol methyl ether. , Cyclohexanone '2-heptanone, 3-heptanone, ethyl 2-hydroxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, 3-ethoxypropionate Ethyl ester, 3-methyl-3-methoxybutylpropionate, n-butyl acetate, isobutyl acetate, n-amyl formate, isoamyl acetate, n-butyl propionate, ethyl butyrate, butyrate Isopropyl ester, n-butyl butyrate, ethyl pyruvate and the like. The pigment dispersion (E) solvent can be used alone or as a mixture of two or more. As long as the pigment can be uniformly dispersed in the aforementioned solution, the amount of (ε) component used when the pigment is dispersed can be appropriately selected. For pigments] 〇〇 重量 份 'usually used 5 0 ~ 2,000 parts by weight, ideally [00 ~~], and when the pigment is dispersed, using the (B) component and (E) component in the above-mentioned range of the amount used can achieve good pigment dispersion. State, at the same time, a radiation-sensitive composition having excellent adhesion between the substrate and the light-shielding layer can be obtained, and a pixel having excellent surface back smoothness and the like can be formed. Pigment · dispersion method As long as the pigment can be uniformly dispersed in the aforementioned solution, a suitable method can be used. 'However, when the pigment is dispersed, the pigment particles can be dispersed without pulverizing or miniaturizing the pigment particles.' For example, a glass ball mill or a roller mill can be used. Dispersing method of disperser. When the pigment is dispersed in a% glass ball mill, for example, glass beads or titanium oxide beads having a diameter of 0.5 to 5 are used, and the pigment, (B) component, and () may be mixed into a liquid mixture in which another pigment dispersant is added. Pigment dispersion was performed in a ball mill. Zhu U's charging car is usually 50 to 80% by volume, and the mixed liquid is put in ^ «It is about 2Gi of the honing mill's grain volume, and the dispersion time is generally. When the pigment is dispersed by a ball mill, the It is preferable to perform it in a cooling state such as cooling water. Roller mills are used for pigment dispersion. For example, a three-axis roller mill is used. Shaft roller mill, etc., mixing 薙, ~ 4 (Β) components and (£) components, and sometimes adding other pigment dispersions, 5, θ λ, tablets' This α liquid is put into the roller mill for Pigment dispersion. … The lighter interval of the draft mill is preferably 7 η h and less than 1 M m. The shearing force is generally -11-(7) 200401121. It is about osdyn / sec, and the dispersion time is generally about 2 to 4 hours. When the pigment of the present invention is dispersed, (B) the test-soluble resin containing an alkali-soluble resin containing an amine group has an excellent dispersant effect on the pigment, and proves that the || Viewpoints such as physical properties: It is preferable not to use pigment dispersants (hereinafter referred to as "other pigment dispersants") other than the component (B), but other pigment dispersants may be used.
其他顔料分散劑例如有聚丙烯酸酯等之聚羧酸酯類; 聚丙龍醋等之關酸之(部分)胺鹽、㈣或院胺鹽萄 ;含羥基之聚丙烯酸酯等之含羥基之聚羧酸酯類或這些^ 改性物;聚胺基甲酸醋類;不飽和聚驢胺類;聚砂氧^ ;長鏈聚胺基H胺龍_類;聚(低㈣基亞胺}與含_ 游離羧基之聚酷反應所得之醯胺或其鹽類,此外尙有下知 商品名者,Disperbyk — 1〇1 ' 同—]3〇 '同—]4〇、同 _ 160、同 _ 161、同一]62、同 | j J 〇 〇、| 口] — 1 6 4 ' 同 一 1 6 5、 同一 166、同一]70、同— U 】71 '同一】82 (以上爲 BeaOther pigment dispersants include polycarboxylates such as polyacrylates; (partial) amine salts of polyacrylic acid, such as polyacrylic acid, amidine, or ammonium salts; hydroxyl-containing polyacrylates, and other hydroxyl-containing polymers Carboxylic acid esters or these modified products; Polyurethanes; Unsaturated polydonamines; Polysuccinolides; Long-chain polyaminoamines; Poly (lowerimine); and Ammonium amine or its salts obtained from the polymerization reaction containing _ free carboxyl groups. In addition, there is no known product name below. 161, the same] 62, the same | j J 〇〇, | mouth] — 1 6 4 'the same 1 6 5, the same 166, the same] 70, the same — U] 71' the same] 82 (the above is Bea
Che mi 公司製);EFKA~47、闩 47、问—47EA、同一 48、同一 49、同一1〇〇、同—450(1;』h 、以上爲EFKA CHEMICALS公頁 製);Solserse ]2〇〇〇、内 .^ 问—]3240 、同-13940 、同— ]7000 、同一20000 ' 同〜2 24000 ' 同一27000、同一2800 (以上爲 ZENEKA公司制丨、 ^ 一叫我)’ BP7n、BP821 (以上味之 素公司製)等。 前述以外之其他顏蚪A # - Μ ^政劑,例如可使用陽離子系、 陰離子系、非離子系、雨攸_ 取Μ _ w 1生、聚矽氧烷系、氟系等之界面 活性劑等。 -12- (8) (8)200401121 這種界面活性劑例如有聚氧乙烯月桂醚、聚氧乙燏硬 脂醯醚 '聚氧乙烯油醚等之聚氧乙烯烷醚類;聚氧乙烯辛 基苯醚、聚氧乙烯壬基苯醚等之聚氧乙烯烷基苯醚類;聚 乙二醇二月桂酸酯、聚乙二醇二硬脂酸酯等之聚乙二醇二 酯類;山梨糖酐脂肪酸酯類;脂肪酸改性聚酯類;三級 胺改性聚胺基甲酸酯類;聚乙烯亞胺類等,及以下商品名 之KP (信越化學工業(股)製)、p〇iyf]ow (共榮公司 化學(股)製)、F 丁〇P(T〇KEM PRODUC 丁S 公司製)、 Megafac (大日本油墨化學工業(股)製)、F]〇rade (住 友3 Μ (股)製)、A s a h i G ar d、S a r fr on e (以上爲旭玻璃 (股)製)等。 這些顏料分散劑可單獨或混合兩種以上使用。 其他之顏料分散劑及顏料可與以酸、鹼、聚合物等處 理後之顏料衍生物併用。 這種顔料衍生物例如有銅社菁衍生物等之藍色顏料或 黃色顔料衍生物等。 這些顏料衍生物可單獨一種或混合兩種以上使用。 其他之顔料分散劑及顔料衍生物之合計使用量係對於 顏料1 0 0重量份時’通常爲5 0重量份以下,理想爲3 0重 量份以下。 本發明中,如前述分散後之顏料之平均粒徑爲〇 . 〇 ]〜 ].0 μ m,更理想爲 0.0 5 〜0.5 μ m。 (B j鹼可溶性樹脂 本發明之鹼可溶性樹脂係含有含-NR2基之鹼可溶性 -13- (9) 樹0曰=下稱爲「含胺基之驗可溶性樹脂」)。 含胺基之鹼可溶性樹脂 本發明之鹼可溶性樹脂亘有本八 . 一’无分之鹼可溶性,且對於 (A )顔料具有分散劑及粘 Τα Μ的作用時,無特別限定, 可爲加成聚合系、縮聚系或加? 刀卩水术寺’理想之含胺基之鹼 可溶性樹脂例如有(】)具有前 @ w :4 -NR2基之乙烯性不飽和 單體(以!稱爲「含胺基乙烯性不飽和單體」)、具有羧 基之乙難不飽和單體、KM立置取代馬來醯亞胺及其他可 共聚之單體之共聚% (以下稱爲「含胺基之驗可溶性樹脂 (π)含胺基乙烯性不飽和單體、具有羧基之乙烯性 不飽和單體' 巨分子單體及其他可共聚之單體之共聚物( 以下稱爲「含胺基之驗可溶性樹g旨(】])丨). (1]1 )含胺基乙烯性不飽和單體、具有羧基之乙烯 性不飽和單體、N-位置取代馬來醯亞胺、巨分子單體及其 他可共聚之單體之共聚物(以下稱爲「含胺基之鹼可溶性 樹脂(111 )」)等。 巨分子單體係指聚合物分子鏈之單終端具有乙燏性不 飽和鍵之單體。 含胺基之鹼可溶性樹脂(I)、含胺基之驗可溶性樹 脂(II )及含胺基之鹼可溶性樹脂(π I )中,「其他可共 聚之單體之共聚物」係不含有含胺基乙烯性不飽和單體、 具有羧基之乙稀性不飽和單體' N-位置取代馬來醯亞胺及 巨分子單體。 -14- (10) (10)200401121 (甲基)丙烯酸2-胺基乙酯、(甲基)丙烯酸2-N-甲基胺基乙酯、(甲基)丙烯酸2 - N -乙基胺基乙酯、( 甲基)丙烯酸2 -N,N -二甲胺基乙酯' (甲基)丙烯酸2 -胺基丙酯、(甲基)丙烯酸 2 -甲基胺基丙酯、(甲基 )丙烯酸2-N-乙基胺基丙酯、(甲基)丙烯酸2-N,N-二 甲胺基丙酯、(甲基)丙烯酸2-N,N-二乙胺基丙酯、( 甲基)丙烯酸 3-胺基丙酯、(甲基)丙烯酸3-N-甲基胺 基丙酯、(甲基)丙烯酸3 -N -乙基胺基丙酯、(甲基) 丙烯酸3-N,N-二甲胺基丙酯、(甲基)丙烯酸3-N,N-二乙胺基丙酯等之含胺基烷基之不飽和羧酸酯類; N-2-胺基乙基(甲基)丙烯酸醯胺、N- ( 2-N、甲基 胺基乙基)(甲基)丙烯酸醯胺、N · ( 2 -N ‘ -乙基胺基乙 基)(甲基)丙燏酸醯胺' N- ( 2-N’,二甲基胺基乙 基)(甲基)丙烯酸醯胺、N - ( 2 -N ’,N ’ -二乙基胺基乙 基)(甲基)丙烯酸醯胺等之含胺基烷基之不飽和醯胺類 ;4 -胺基苯乙烯、4 -N -甲基胺基苯乙烯、4 -N -乙基胺基苯 乙烯、4-N,N -二甲基胺基苯乙烯、4-N,N -二乙基胺基 苯乙烯等之含胺基之芳香族乙烯基化合物等。 這些含胺基乙烯性不飽和單體中,較理想者爲含胺基 烷基之不飽和羧酸酯類,特別理想爲(甲基)丙烯酸2-胺基乙酯、(甲基)丙烯酸2-N-乙基胺基乙酯、(甲基 )丙烯酸2-N,N-二乙胺基乙酯、(甲基)丙烯酸2-胺基 丙酯、(甲基)丙烯酸3-胺基丙酯等。 前述含胺基乙烯性不飽和單體可單獨一種或混合兩種 -15- (11) (11)200401121 以上使用。 含羧基乙烯性不飽和單體,例如有(甲基)丙燃酸、 巴豆酸、α —氯基丙烯酸 '肉桂酸、單[2 一 (甲基)丙稀 醯氧乙基]琥珀酸酯 '單[(2 一 (甲基)丙烧醒氧乙基)J 苯二甲酸醋、ω -续基聚己內醋單(甲基)丙細酸酯等之 單羧酸類; 馬來酸、馬來酸酐、富馬酸' 衣康酸、衣康酸酐、杨^ 康酸、檸康酸酐、中康酸之不飽和一羧酸(酸酐)類;二 價以上之不飽和多元羧酸(酸酐)類等。 這些含羧基之乙烯性不飽和單體中’較理想者爲(甲 基)丙烯酸、單[2 - (甲基)丙烯醯氧乙基]琥拍酸酯、 ω —羧基聚己內酯單(甲基)丙烯酸醋等。 前述含羧基之乙烯性不飽和單體可單獨一種或混合雨 種以上便用。 Ν ''位置取代馬來醯亞胺例如有Ν 一苯基馬來藤亞胺 、Ν -鄰羥基苯基馬來醯亞胺、Ν -間羥基苯基馬來醯亞 胺、Ν〜對羥基苯基馬來醯亞胺、Ν -鄰甲基本基馬來醯 亞胺、Ν -間甲基苯基馬來醯亞胺、Ν 一對甲基苯基馬來 醯亞胺、Ν -鄰甲氧基苯基馬來醯亞胺、Ν —間甲氧基苯 基馬來酿亞胺、Ν -對—氧基苯基馬來釀亞妝等之Ν -位 芳基取代馬來醯亞胺外,尙有Ν -環己基馬來醯亞胺等。 這些Ν -位置取代馬來醯亞胺中,較理想者爲Ν -苯 基馬來醯亞胺' Ν〜對羥基苯基馬來醯亞胺、Ν -環己基 馬來醯亞胺等。 -16- (12) (12)200401121 BU述N〜位置取代馬來醯亞胺可單獨一種或混合兩锺 以上使用。 分子單體之聚合物分子鏈例如有聚苯乙烯、聚(甲 ^ )丙;I希酸甲酷、聚(甲基)丙烯酸正丁酯、(甲基)丙 燦酸甲酯/(甲基)丙烯酸2 _羥乙酯共聚物、聚己內酯、 聚氧乙烯、聚矽氧烷等之分子鏈。 巨分子單體例如可藉由在前述聚合物分子鏈之單終端 具有適當之先質聚合物’與具有可與該官能基反應之相輔 之吕能基之乙烯性不飽和化合物反應來合成。 具有前述官能基之先質聚合物,例如可藉由活性陰離 1 a合、活性陽離子聚合、活性聚合物之終端改性反應、 遠蜜聚合物之合成等方法得到,具有終端官能基之加成聚 〇系樹脂或縮聚系樹脂也可作爲該先質聚合物使用。 具有前述相輔之官能基之乙烯性不飽和化合物可配合 先質聚合物中之官能基之種類適當選擇使用例如(甲基) 丙烧酸等之乙稀性不飽和孩酸 '該乙稀性不飽和孩酸之酸 氯化物、胺基烷酯 '羥基烷酯、縮水甘油酯等之衍生物或 對胺基苯乙烯 '乙烯基縮水甘油醚、烯丙基縮水甘油魅、 對乙烯基苯甲基縮水甘油醚等。 本發明之巨分子單體係在聚甲基丙烯酸甲醒分子鏈之 單終端具有乙烯性不飽和鍵’理想爲具有(甲基)丙稀醯 氧基之巨分子單體(以下稱爲「聚甲基丙烯酸甲酯巨分子 單體j )。理想爲甲基丙烯酸甲酯/2 —羥乙基甲基丙_酸 酯共聚物分子鏈之單終端具有乙烯性不飽和鍵,理想爲具 -17 - (13) (13)200401121 有丙烯醯氧基或甲基丙烯醯氧基之巨分子單體(以下稱爲 「聚(甲基丙烯酸甲酯/2 -羥乙基甲基丙烯酸酯)巨分子 單體」)。 前述巨分子單體可單獨一種或混合雨種以上使用。 此外,其他可共聚之乙烯性不飽和單體例如有苯乙烯 、α -甲基苯乙烯、鄰-乙烯基甲苯、間-乙烯基甲苯、對-乙烯基甲苯、對-氯苯乙烯、鄰-甲氧基苯乙烯、間-甲氧 基苯乙烯、對-甲氧基苯乙烯、節、對-乙烯基苯甲基甲基 醚、對-乙烯基苯甲基縮水甘油基醚等之芳族乙烯基化合 物: ep 、]-甲基節等©類; (甲基)丙豨酸甲酯、(甲基)丙烯酸乙酯、(甲基 )丙烯酸正丙酯、(甲基)丙燏酸異丙酯、(甲基)丙烯 酸正丁酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸第二 丁酯、(甲基)丙烯酸第三丁酯' (甲基)丙烯酸2 -羥 乙酯、(甲基)丙烯酸2 -羥丙酯、(甲基)丙烯酸3 -羥 丙酯、(甲基)丙烯酸 4 -羥丁酯、(甲基)丙烯酸烯丙 酯、(甲基)丙豨酸苯甲酯' (甲基)丙烯酸苯酯' (甲 基)丙烯酸2 -甲氧基乙酯、(甲基)丙烯酸甲氧基二乙 二醇酯、(甲基)丙烯酸甲氧基三乙二醇酯、(甲基)甘 油單丙烯酸酯等之其他不飽和羥酸酯類; (甲基)丙烯酸縮水甘油酯等之不飽和羧酸縮水甘油 酯類; 乙酸乙烯酯、丙酸乙烯酯、丁酸乙烯酯、苯甲酸乙烯 -18- (14) (14)200401121 酯等之羧酸乙烯酯類; 乙烯基甲醚、乙烯基乙醚、烯丙基縮水甘油基醚 '甲 基烯丙基縮水甘油基醚等之不飽和醚類; (甲基)丙烯醯腈、α-氯丙烯醯腈、偏二氰乙烯等 之氰化乙烯基化合物。 (甲基)丙烯醯胺、α -氯丙烯醯胺、Ν - 2 -羥乙基( 甲基)丙烯醯胺等之其他不飽和醯胺類; 馬來醯亞胺' Ν -苯基馬來醯亞胺、Ν -環己基馬來醯亞 胺等不飽和醯亞胺類; 1,3 - 丁二烯、異戊二烯、氯丁二烯等脂族共軛二烯 類等。 這些之其他之可共聚之乙烯性不飽和單體中,較理想 者爲苯乙烯、(甲基)丙烯酸甲酯、(甲基)丙烯酸2 — 羥乙酯、(甲基)丙烯酸苯甲酯、(甲基)丙烯酸苯酯、 (甲基)甘油單丙烯酸酯等。 前述其他之可共聚之乙烯性不飽和單體可單獨一種或 混合兩種以上使用。 本發明中,理想之含胺基之鹼可溶性樹脂(I)之具體 例有 丙烯酸2 -Ν,Ν -二乙胺基乙酯/甲基丙烯酸/Ν -苯基馬 來醯亞胺/苯乙烯/甲基丙烯酸苯甲酯共聚物、 丙烯酸2-Ν,Ν-二乙胺基乙酯/甲基丙烯酸/Ν-苯基馬 來醯亞胺/苯乙烯/甲基丙烯酸苯酯共聚物、 丙烯酸2-Ν,Ν-二乙胺基乙酯/甲基丙烯酸/琥珀酸單 -19 - (15) (15)200401121 (2-丙稀醯氧乙酷)/N-苯基馬來醯亞胺/苯乙烯/甲基丙烯酸 苯甲酯共聚物、 丙烧酸2-N,N-二乙胺基乙酯/甲基丙烯酸/單丙烯酸 羧基聚己円酯/N-苯基馬來醯亞胺/苯乙烯/甲基丙烯酸苯 甲酯共聚物、 丙燦酸2-Ν ’ Ν-二乙胺基乙酯/甲基丙烯酸/Ν_苯基馬 來酿亞胺/苯乙;)%/甲基丙烯酸苯甲酯/單甲基丙烯酸甘油酷 共聚物等。 含胺基之驗可溶性樹脂(1 )中,含胺基之乙烯性不 飽和單體的共聚比例通常爲5〜5 〇重量% ,理想爲】〇〜 4 0重量% 。此時含胺基之乙烯性不飽和單體的共聚比例 未滿5重量%時’顔料之分散性有降低的傾向,若超過 5 0重量%時’製得之共聚物之鹼可溶性降低,未曝光部 之基板上或遮光層上可能產生殘渣或質地污染。 含殘基之乙烯性不飽和單體的共聚比例通常爲5〜5 〇 熏量% ’理想爲]〇 ~ 4 0重量% 。此時含竣基之乙烯性不 飽和單體的共聚比例未滿5重量%時,所製得之輻射敏感 性組成物對於鹸顯影液之溶解性有降低的傾向,若超過 5 0重量%時,以鹼顯影液顯影時’所形成之像素易由基 板上脫落或易造成像素表面膜粗糙的傾向。 N -位置取代馬來醯亞胺的共聚比例通常爲5〜5 〇重 羹% ,理想爲1 0〜4 0重量% 。此時N 一位置取代馬來酿 亞胺的共聚比例未滿5重量%時’製得之像素之耐熱性有 降低的傾向,若超過5 0重量%時’製得之共聚物之鹼 -20 - (16) (16)200401121 可溶性有降低的傾向,未曝光部之基板上或遮光層上可能 產生殘渣或質地污染。 含胺基之鹼可溶性樹脂(Π以凝膠滲透層析(GPC )所測定之換算成聚苯乙烯之重量平均分子量(以下,稱 爲「1^讯」)通常爲],000〜1:000,000,理想爲 2,000〜 500,000,更理想爲 3,000〜]00,000。 如前述之各單體之共聚比例及具有M W之含胺基之鹼 可溶性樹脂(〗)之顏料的分散能力高,對於鹼顯影液具 有優異之溶解性,同時以該單體所製得之硬化物的各種特 性優異,使用該含胺基之鹼可溶性樹脂(1 )之輻射敏感 性組成物係在以鹼顯影液顯影後,未溶解物之殘留極少, 基板上形成像素之部分以外之區域不易產生污染,膜殘留 等,且由該組成物所構成之像素對於鹼顯影液不會過度溶 解,對於基板具有優異之密著性,不必擔心由基板上脫落 〇 理想之含胺基之鹸可溶性樹脂(Π)之具體例: 丙烯酸 2-Ν,Ν-二乙胺基乙酯/甲基丙烯酸/Ν-苯基馬 來醯亞胺/聚(甲基丙烯酸甲酯/甲基丙烯酸2-羥乙酯)巨分 子單體/苯乙烯/丙烯酸苯甲酯共聚物、 丙烯酸 2-Ν,Ν-二乙胺基乙酯/甲基丙烯酸/Ν-苯基馬 來醯亞胺/聚甲基丙烯酸甲酯巨分子單體/苯乙烯/丙烯酸苯 甲酯共聚物、 丙烯酸2-Ν,Ν-二乙胺基乙酯/甲基丙燏酸/Ν-苯基馬 來醯亞胺/聚(甲基丙烯酸甲酯/甲基丙烯酸2-羥乙酯)巨分 -21 - (17) (17)200401121 子單體/苯乙烯/甲基丙烯酸苯酯共聚物、 丙烯酸2 - N,N -二乙胺基乙酯/甲基丙烯酸/N -苯基馬 來醯亞胺/聚甲基丙烯酸甲酯巨分子單體/苯乙烯/丙烯酸苯 酯共聚物、 丙烯酸 2-N,N-二乙胺基乙酯/甲基丙燏酸/N-苯基馬 來醯亞胺/聚(甲基丙烯酸甲酯/甲基丙烯酸2-羥乙酯)巨分 子單體/苯乙烯/甲基丙烯酸 2 -羥乙酯/甲基丙烯酸苯甲酯 共聚物、 丙烯酸 2-N,N-二乙胺基乙酯/甲基丙烯酸/N-苯基馬 來醯亞胺/聚甲基丙烯酸甲酯巨分子單體/苯乙烯/甲基丙烯 酸2 -羥乙酯/甲基丙烯酸苯甲酯共聚物、 丙烯酸 2-N,N-二乙胺基乙酯/甲基丙烯酸/N-苯基馬 來醯亞胺/聚(甲基丙烯酸甲酯/甲基丙烯酸2 -羥乙酯)巨分 子單體/苯乙烯/甲基丙烯酸 2 -羥乙酯/甲基丙烯酸苯酯共 聚物、 丙烯酸 2-N,N-二乙胺基乙酯/甲基丙烯酸/N-苯基馬 來醯亞胺/聚甲基丙燦酸甲酯巨分子單體/苯乙烯/甲基丙烯 酸2 -羥乙酯/甲基丙烯酸苯酯共聚物、 丙烯酸2-N,N-二乙胺基乙酯/甲基丙烯酸/琥珀酸單 (2-丙烯醯氧乙酯)/N-苯基馬來醯亞胺/聚(甲基丙烯酸甲酯 /甲基丙烯酸2-羥乙酯)巨分子單體/苯乙烯/丙烯酸苯甲酯 共聚物、 丙烯酸2-N,N-二乙胺基乙酯/甲基丙烯酸/琥珀酸單 -22 - (18) (18)200401121 (2-丙嫌醒氧乙醋VN-苯基馬來醯亞胺/聚甲基丙烯酸甲酯 巨分子單體/苯乙嫌/丙烯酸苯甲酯共聚物、 丙稀酸2 ' N ’ N ~二乙胺基乙酯/甲基丙烯酸/號珀酸單 (2 -丙燦酸氧乙醋VN —苯基馬來醯亞胺/聚(甲基丙烯酸甲酯 /甲基丙稀酸2-經乙酯)巨分子單體/苯乙烯/甲基丙烯酸苯 酯共聚物、 丙烯酸2 ’ N -二乙胺基乙酯/甲基丙燏酸/琥珀酸單 (2 ·丙烯醯氧乙酯)/N -苯基馬來醯亞胺/聚甲基丙烯酸甲酯 巨分子單體/苯乙烯/丙烯酸苯酯共聚物、 丙烯酸2 - N ’ N -二乙胺基乙酯/甲基丙烯酸/單丙烯酸 ω-孩基聚己內酯/N-苯基馬來醯亞胺/聚(甲基丙烯酸甲酯/ 甲基丙烯酸2 -羥乙酯)巨分子單體/苯乙烯/丙烯酸苯甲酯 共聚物、 丙烯酸2 - N,N -二乙胺基乙酯/甲基丙烯酸/單丙烯酸 ω-羧基聚己內酯/N-苯基馬來醯亞胺/聚甲基丙烯酸甲酯巨 分子單體/苯乙烯/丙烯酸苯甲酯共聚物、 丙烯酸2-N,二乙胺基乙酯/甲基丙烯酸/單丙烯酸 ω -羧基聚己內酯/N —苯基馬來酸亞胺/聚(甲基丙烯酸甲醋/ 甲基丙稀酸2 -羥乙酯)巨分子單體7苯乙烯/甲基丙烯酸苯 酿共聚物、 丙稀酸2 _ N , N -二乙胺基乙酯/甲基丙烯酸/單丙烯酸 ω_竣基聚己內醋/N-苯基馬來醯亞胺/聚甲基丙烯酸甲酯巨 分子單體/苯乙稀/丙稀酸苯酯共聚物' -23- (19) (19)200401121 丙烯酸2 - N ’ N - 一乙胺基乙酯/甲基丙烯酸/N _苯基馬 來醯亞胺/聚(甲基丙細酸甲醋/甲基丙稀酸2 -羯乙醋)巨分 子單體/苯乙嫌/單甲基丙細酸甘油酉旨/甲基丙稀酸苯甲醋共 聚物、 丙烯酸2 - N ’ N -二乙胺基乙酯/甲基丙烯酸/N _苯基馬 來醯亞胺/聚甲基丙烯酸甲酯巨分子單體/苯乙烯/單甲基丙 烯酸甘油酯/甲基丙烯酸苯甲酯共聚物、 丙烯酸2-N ’ N-二乙胺基乙酯/甲基丙烯酸/N-苯基馬 來醯亞胺/聚(甲基丙烯酸甲酯/甲基丙烯酸2 -羥乙酯)巨分 子單體/苯乙烯/單甲基丙烯酸甘油酯/甲基丙烯酸苯酯共聚 物、 丙烯酸2 - N,N -二乙胺基乙酯/甲基丙烯酸/N -苯基馬 來醯亞胺/聚甲基丙烯酸甲酷巨分子單體/苯乙焼/單甲基丙 烯酸甘油酯/甲基丙烯酸苯酯共聚物' 丙烯酸2-N,二乙胺基乙酯/甲基丙烯酸/N -苯基馬 來醯亞胺/聚(甲基丙烯酸甲酯/甲基丙烯酸2-羥乙酯)巨分 子單體/聚甲基丙烯酸甲酯巨分子單體/苯乙烯/甲基丙烯酸 苯甲酯共聚物、 丙烯酸2 - N,N -二乙胺基乙酯/甲基丙烯酸/N -苯基馬 來醯亞胺/聚(甲基丙烯酸甲酯/甲基丙烯酸2-羥乙酯)巨分 子單體/聚甲基丙烯酸甲酯巨分子單體/苯乙烯/甲基丙烯酸 2 -羥乙酯/甲基丙烯酸苯酯共聚物、 丙烯酸2 -N,N -二乙胺基乙酯/甲基丙烯酸/琥珀酸單 -24 - (20) 200401121 (2-丙烯醯氧乙酯)/N-苯基馬來醯亞胺/聚(甲基丙烯酸甲醋 /甲蕋丙烯酸2 -羥乙酯)巨分子單體/聚甲基丙烯酸甲酯巨 分子單體/苯乙烯/丙烯酸苯甲酯共聚物、 丙烯酸2 - N,N -二乙胺基乙酯/甲基丙烯酸/單丙烯酸 ω -羥基聚己內酯/N -苯基馬來醯亞胺/聚(甲基丙烯酸甲酯/ 甲基丙烯酸2 -羥乙酯)巨分子單體/苯乙烯/甲基丙烯酸苯 甲酯共聚物、 丙烯酸2 - Ν,Ν -二乙胺基乙酯/甲基丙烯酸/Ν -苯基馬 來醯亞胺/聚(甲基丙烯酸甲酯/甲基丙烯酸2 -羥乙酯)巨分 子單體/聚甲基丙烯酸甲酯巨分子單體/苯乙烯/甲基丙烯酸 苯甲酯/單甲基丙烯酸甘油酯共聚物等。 含胺基之鹼可溶性樹脂(III )中,含胺基之乙烯性 不飽和單體的共聚比例通常爲5〜5 0重量% ,理想爲10 〜4 0重量% 。此時含胺基之乙烯性不飽和單體的共聚比 例未滿5重量%時’顏料之分散性有降低的傾向,若超過 5 〇重量%時,製得之共聚物之鹼可溶性降低,未曝光部 之基板上或遮光層上可能產生殘渣或質地污染。 Ν —位置取代馬來醯亞胺的共聚比例通常爲5〜5 0重 量% ’理想爲1 0〜4〇重量% 。此時Ν -位置取代馬來醯 亞胺的共聚比例未滿5重量%時,所製得之輻射敏感性組 成物對於鹼顯影液之溶解性有降低的傾向,若g g 5〇 ^ 量!時,以鹸顯影液顯影時’所形成之像素易由基板上月兌 落或易造成像素表面膜粗糙的傾向。 理想爲 巨分子單體的共聚比例通常爲5〜5 0重量% -25 - (21) (21)200401121 ]0〜4 0重量% 。此時巨分子單體的共聚比例未滿5重量 %時’製得之像素之耐熱性有降低的傾向,若超過5 0重 量%時’製得之共聚物之鹸可溶性有降低的傾向,未曝光 部之基板上或遮光層上可能產生殘渣或質地污染。 含胺基之鹼可溶性樹脂(ΠΙ )以凝膠滲透層析( G P C )所測定之換算成聚苯乙烯之重量平均分子量(以 下,稱爲「Μ Λν」)通常爲I : 〇 〇 0〜;U 0 0 0,0 0 0,理想爲 2,000 〜500:000,更理想爲 3,000 〜]00,000。 如前述之各單體之共聚比例及具有M W之含胺基之鹸 可溶性樹脂(III )之顏料的分散能力高,對於鹸顯影液 具有優異之溶解性,同時以該單體所製得之硬化物的各種 特性優異,使用該含胺基之鹼可溶性樹脂(III )之輻射 敏感性組成物係在以鹼顯影液顯影後,未溶解物之殘留極 少,基板上形成像素之部分以外之區域不易產生污染·膜 殘留等,且由該組成物所構成之像素對於鹼顯影液不會過 度溶解,對於基板具有優異之密著性’不必擔心由基板上 脫落。 本發明之含胺基之驗可溶性樹脂更理想爲含胺基乙烯 性不飽和單體(π )、含胺基乙烯性不飽和單體(111 ), 特別理想爲這些巨分子單體爲至少一種選自聚甲基丙烯酸 甲酯巨分子單體及聚(甲基丙稀酸甲醋/甲基丙烯酸2 ·羥 乙醋)巨分子單體群之含胺基之驗可溶性樹脂(11)及含 胺基乙烯性不飽和單體(1 η ) ° 本發明中,含胺基之鹼可溶性樹脂可單獨使用或混合 -26- (22) (22)200401121 2種以上來使用。 含胺基之鹼可溶性樹脂(])〜(Π I )以外之鹸可 溶性樹脂(以下稱爲「其他之鹼可溶性樹脂」)理想爲可 與具有羧基之乙烯性不飽和單體共聚之其他單體之共聚物 (以下稱爲「鹼可溶性樹脂(i )」)。 理想之鹼可溶性樹脂(i )之具體例: 丙烯酸/丙烯酸苯甲酯共聚物、 丙烯酸/丙烯酸苯甲酯/苯乙烯共聚物、 丙烯酸/丙烯酸甲酯/苯乙烯共聚物、 丙烯酸/甲基丙烯酸苯甲酯共聚物、 丙烯酸/甲基丙烯酸苯甲酯/苯乙烯共聚物、 丙烯酸/甲基丙烯酸甲酯/苯乙烯共聚物、 甲基丙烯酸/丙燏酸苯曱酯共聚物、 甲基丙烯酸/丙烯酸苯甲酯/苯乙烯共聚物、 甲基丙烯酸/丙烯酸甲酯/苯乙烯共聚物、 甲基丙烯酸/甲基丙烯酸苯甲酯共聚物、 甲基丙烯酸/甲基丙燏酸苯甲酯/苯乙烯共聚物、 甲基丙烯酸/甲基丙烯酸甲酯/苯乙烯共聚物、 丙烯酸/丙烯酸苯甲酯/丙烯酸2 -羥乙酯共聚物、 丙烯酸/甲基丙烯酸苯甲酯/丙燏酸2 -羥乙酯共聚 物、 丙烯酸/丙烯酸苯甲酯/丙烯酸2-羥乙酯共聚物、 丙烯酸/甲基丙烯酸苯甲酯/甲基丙燏酸2 -羥乙酯 共聚物、 -27- (23) (23)200401121 丙烯酸/ N -苯基馬來醯亞胺/丙烯酸苯甲酯/苯乙 烯共聚物、 丙烯酸/ N -苯基馬來醯亞胺/甲基丙烯酸苯甲酯/ 苯乙烯共聚物、 甲基丙烯酸/丙烯酸苯甲酯/丙烯酸2 -羥乙酯共聚 物、 甲基丙烯酸/甲基丙烯酸苯甲酯/丙烯酸2 -羥乙酯 共聚物、 甲基丙丨希酸/丙烯酸苯甲酯/丙烯酸 2 -羥乙酯共聚 物、 甲基丙烯酸/甲基丙烯酸苯甲酯/甲基丙烯酸2 -羥 乙酯共聚物、 甲基丙烯酸/ N -苯基馬來醯亞胺/丙烯酸苯甲醋/ 苯乙烯共聚物、 甲基丙烯酸/ N -苯基馬來醯亞胺/甲基丙烯酸苯甲 酯/苯乙烯共聚物、 丙烯酸/琥珀酸單(2 -丙烯醯氧乙酯)/ N -苯基 馬來醯亞胺/苯乙烯/丙烯酸烯丙酯共聚物、 丙烯酸/琥珀酸單(2 -甲基丙烯醯氧乙酯)/ N -苯基馬來醯亞胺/苯乙烯/丙烯酸烯丙酯共聚物、 丙烯酸/琥珀酸單(2 -丙烯醯氧乙酯)/ N -苯基 馬來醯亞胺/苯乙烯/甲基丙烯酸烯丙酯共聚物、 丙烯酸/琥珀酸單(2 -甲基丙烯醯氧乙酯)/ N -苯基馬來醯亞胺/苯乙烯/甲基丙烯酸烯丙酯共聚物、 -28 - (24) 200401121 甲基丙烯酸/琥珀酸單(2 -丙烯醯氧乙酯)/ N 苯基馬來醯亞胺/苯乙烯/丙烯酸烯丙酯共聚物、 甲基丙烯酸/琥珀酸單(2 一甲基丙燏醯氧乙醋)/ N —苯基馬來醯亞胺/苯乙烯/丙烯酸烯丙醋共聚物 甲基丙燦酸/號拍酸單(2 —丙烯醯氧乙酯)/ N — 苯基馬來醯亞胺/苯乙稀/甲基丙):希酸燃丙醋共聚物 甲基丙烯酸/號拍酸單〜甲基丙稀醒氧乙酉旨、)/ N -苯基馬來醯亞胺/苯乙烯/甲基丙麵烯丙醋共聚物 苯基(Made by Che mi); EFKA ~ 47, latch 47, Q-47EA, same 48, same 49, same 100, same-450 (1; 『h, above is EFKA CHEMICALS public page system); Solserse] 2. 〇〇 、 内. ^ Question—] 3240, same-13940, same—] 7000, same 20000 'same ~ 2 24000' same 27000, same 2800 (the above are made by ZENEKA company, ^ one call me) 'BP7n, BP821 (Made by Ajinomoto Co., Ltd. above), etc. For other pigments other than the aforementioned, A #-Μ ^ political agents, for example, cationic, anionic, non-ionic, Yu You _ take M _ w 1 raw, polysiloxane based, fluorine based, etc. surfactants Wait. -12- (8) (8) 200401121 Such surfactants include, for example, polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether and the like; polyoxyethylene octane Polyoxyethylene alkyl phenyl ethers such as phenylene ether, polyoxyethylene nonyl phenyl ether; polyethylene glycol diesters such as polyethylene glycol dilaurate, polyethylene glycol distearate; Sorbitan fatty acid esters; fatty acid modified polyesters; tertiary amine modified polyurethanes; polyethyleneimines, etc., and KP (made by Shin-Etsu Chemical Industry Co., Ltd.), p 〇iyf] ow (made by Kyoei Chemical Co., Ltd.), F P〇P (made by TOKEM PRODUC D), Megafac (made by Dainippon Ink Chemical Industry (Stock)), F] 〇rade (Sumitomo 3 M (stock) system, Asahi G ar d, Sar fr on e (the above is the Asahi glass (stock) system) and so on. These pigment dispersants can be used alone or in combination of two or more. Other pigment dispersants and pigments can be used in combination with pigment derivatives treated with acids, bases, polymers, etc. Examples of such pigment derivatives include blue pigments and yellow pigment derivatives such as copper-coated cyanine derivatives. These pigment derivatives may be used alone or in combination of two or more. The total amount of other pigment dispersants and pigment derivatives used is 100 parts by weight of the pigment, and is usually 50 parts by weight or less, and preferably 30 parts by weight or less. In the present invention, the average particle diameter of the pigment after the dispersion as described above is 0.0 μm to 0.1 μm, and more preferably 0.0 5 to 0.5 μm. (Bj Alkali-soluble resin The alkali-soluble resin of the present invention contains an alkali-soluble NR2 group-containing -13- (9) tree 0 = hereinafter referred to as "amine-containing soluble resin"). Alkali-soluble resins containing amine groups The alkali-soluble resins of the present invention are not particularly limited when they are alkali-soluble and have a dispersant and a sticky effect on the (A) pigment. Polymerization, polycondensation or addition? Dian Shui Shu Temple's ideal amine-containing alkali-soluble resin is (), for example, an ethylenically unsaturated monomer with a front @w: 4-NR2 group (referred to as "the amine-containing ethylenically unsaturated monomer" "), Copolymerization percentage of ethylenically unsaturated monomers with carboxyl groups, KM standing substituted maleimide, and other copolymerizable monomers (hereinafter referred to as" amine-containing soluble resin (π) amine-containing Copolymers of ethylenically unsaturated monomers, ethylenically unsaturated monomers with carboxyl groups, macromonomers, and other copolymerizable monomers (hereinafter referred to as "Amino-containing testable soluble tree g (]])丨). (1) 1) Amino ethylenically unsaturated monomers, ethylenically unsaturated monomers with carboxyl groups, N-position substituted maleimide, macromonomers and other copolymerizable monomers Copolymers (hereinafter referred to as "alkali-soluble resins (111) containing amine groups"), etc. Macromolecule single systems refer to monomers having an ethylenically unsaturated bond at the single terminal of the polymer molecular chain. Bases containing amine groups Soluble resin (I), amine-containing soluble resin (II), and amine-containing alkali-soluble resin (π I ), "Copolymers of other copolymerizable monomers" does not contain amine-containing ethylenically unsaturated monomers, ethylenically unsaturated monomers with carboxyl groups, and N-position substituted maleimidine and macromolecules Monomer. -14- (10) (10) 200401121 2-aminoethyl (meth) acrylate, 2-N-methylaminoethyl (meth) acrylate, 2-N-(meth) acrylic acid Ethylaminoethyl, 2-N, N-dimethylaminoethyl (meth) acrylate '2-aminopropyl (meth) acrylate, 2-methylaminopropyl (meth) acrylate , 2-N-ethylaminopropyl (meth) acrylate, 2-N, N-dimethylaminopropyl (meth) acrylate, 2-N, N-diethylamino (meth) acrylate Propyl ester, 3-aminopropyl (meth) acrylate, 3-N-methylaminopropyl (meth) acrylate, 3-N-ethylaminopropyl (meth) acrylate, (methyl ) 3-N, N-dimethylaminopropyl acrylate, 3-N, N-diethylaminopropyl (meth) acrylate, and other unsaturated carboxylic acid esters containing amine alkyl groups; N-2 -Aminoethyl (meth) acrylamide, N- (2-N, methylaminoethyl) (methyl Ammonium acrylate, N · (2-N'-ethylaminoethyl) (meth) ammonium propionate'N- (2-N ', dimethylaminoethyl) (meth) acrylic acid Unsaturated amidoamines containing amine alkyl groups such as amidine, N- (2-N ', N'-diethylaminoethyl) (meth) acrylate, amidoamine, etc .; 4-amine styrene, 4-N-methylaminostyrene, 4-N-ethylaminostyrene, 4-N, N-dimethylaminostyrene, 4-N, N-diethylaminostyrene, etc. Amine group-containing aromatic vinyl compounds, etc. Among these amine group-containing ethylenically unsaturated monomers, preferred are unsaturated carboxylic acid esters containing amine alkyl groups, and especially (meth) acrylic acid 2 -Aminoethyl, 2-N-ethylaminoethyl (meth) acrylate, 2-N, N-diethylaminoethyl (meth) acrylate, 2-aminopropyl (meth) acrylate Esters, 3-aminopropyl (meth) acrylate, and the like. The aforementioned amino group-containing ethylenically unsaturated monomers may be used alone or in combination of -15- (11) (11) 200401121 or more. Carboxy-containing ethylenically unsaturated monomers, for example, (meth) propionic acid, crotonic acid, α-chloroacrylic acid 'cinnamic acid, mono [2-mono (methyl) propanoyloxyethyl] succinate' Mono [(2 mono (methyl) propanone) ethyl phthalate, ω-continuous polycaprolactone mono (meth) propionate and other monocarboxylic acids; maleic acid, horse Maleic anhydride, fumaric acid, itaconic acid, itaconic anhydride, poplar acid, citraconic anhydride, mesaconic acid, unsaturated monocarboxylic acids (anhydrides); unsaturated polycarboxylic acids (anhydrides) of more than two valences Class, etc. Among these carboxyl group-containing ethylenically unsaturated monomers, (preferably) (meth) acrylic acid, mono [2- (meth) acryloxyethyl] succinate, ω-carboxy polycaprolactone mono ( (Meth) acrylic acid and so on. The aforementioned carboxyl group-containing ethylenically unsaturated monomers may be used singly or in combination of two or more kinds. Examples of the male stilbene substituted at the '' position include N-phenylmaleimide, N-o-hydroxyphenylmaleimide, N-m-hydroxyphenylmaleimide, N ~ p-hydroxyl Phenylmaleimide, N-o-methylbenzylmaleimide, N-m-methylphenylmaleimide, N-methylphenylmaleimide, N-o-methyl N-position aryl substituted maleimide of oxyphenyl maleimide, N-m-methoxyphenyl maleimide, N-p-oxyphenyl maleimide In addition, there are N-cyclohexylmaleimide and the like. Among these N-position substituted maleimides, the N-phenylmaleimide'N ~ p-hydroxyphenylmaleimide, N-cyclohexylmaleimide and the like are more preferable. -16- (12) (12) 200401121 BU mentioned N ~ position substituted maleimide can be used alone or in combination of two or more. The molecular chain of the polymer of the molecular monomer is, for example, polystyrene, poly (methyl) propane; I methylformate, poly (meth) acrylate, methyl (meth) propionate / (methyl) ) Molecular chain of 2-hydroxyethyl acrylate copolymer, polycaprolactone, polyoxyethylene, polysiloxane, etc. Macromonomers can be synthesized, for example, by reacting an appropriate precursor polymer at a single terminal of the aforementioned polymer molecular chain with an ethylenically unsaturated compound having a Lunengyl group which can react with the functional group. The precursor polymer having the foregoing functional group can be obtained, for example, by methods such as active anion ionization, living cationic polymerization, terminal modification reaction of the living polymer, and synthesis of a far polymer. Polymerization-based resins or polycondensation-based resins can also be used as the precursor polymer. The ethylenically unsaturated compound having the aforementioned complementary functional group may be appropriately selected according to the type of the functional group in the precursor polymer, and an ethylenically unsaturated acid such as (meth) propionic acid is used. Unsaturated acid chlorides, derivatives of amino alkyl esters, hydroxy alkyl esters, glycidyl esters, etc. or p-aminostyrene 'vinyl glycidyl ether, allyl glycidol, p-vinyl benzyl Glycidyl ether and the like. The macromolecule single system of the present invention has an ethylenically unsaturated bond at a single terminal of a polymethacrylic acid molecular chain, and is desirably a macromonomer having a (meth) acryloxy group (hereinafter referred to as "poly Macromolecular monomer of methyl methacrylate j). Ideally, methyl methacrylate / 2-hydroxyethylmethylpropionate copolymer has a single terminal ethylenic unsaturated bond, and is preferably -17. -(13) (13) 200401121 Macromolecular monomers with propylene or methacryloxy (hereinafter referred to as "poly (methyl methacrylate / 2-hydroxyethyl methacrylate)" macromolecules monomer"). The aforementioned macromonomers can be used alone or in combination. In addition, other copolymerizable ethylenically unsaturated monomers include, for example, styrene, α-methylstyrene, o-vinyltoluene, m-vinyltoluene, p-vinyltoluene, p-chlorostyrene, ortho- Aromatics such as methoxystyrene, m-methoxystyrene, p-methoxystyrene, knots, p-vinylbenzyl methyl ether, p-vinylbenzyl glycidyl ether, etc. Vinyl compounds: ep,]-methyl, etc. ©; methyl (meth) propionate, ethyl (meth) acrylate, n-propyl (meth) acrylate, isopropyl (meth) propionate Propyl ester, n-butyl (meth) acrylate, isobutyl (meth) acrylate, second butyl (meth) acrylate, third butyl (meth) acrylate '2-hydroxyethyl (meth) acrylate Ester, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, allyl (meth) acrylate, (meth) acrylic acid Benzyl acid 'phenyl (meth) acrylate' 2-methoxyethyl (meth) acrylate, methoxydiethylene glycol (meth) acrylate, (methyl ) Other unsaturated hydroxy acid esters such as methoxytriethylene glycol acrylate, (meth) glycerol monoacrylate, etc .; Unsaturated carboxylic acid glycidyl esters such as (meth) glycidyl acrylate; vinyl acetate Esters, vinyl propionate, vinyl butyrate, vinyl benzoate, carboxylic acid vinyl esters such as 18- (14) (14) 200401121 esters; vinyl methyl ether, vinyl ether, allyl glycidyl ether Unsaturated ethers such as' methallyl glycidyl ether; (meth) acrylic acid nitriles, α-chloroacrylic acid nitriles, vinyl cyanide compounds such as vinylidene chloride. (Meth) acrylamide, α-chloroacrylamide, N-2-hydroxyethyl (meth) acrylamide and other unsaturated amines; maleimide 'N-phenylmaleimide Unsaturated fluorene imines such as fluorene imine, N-cyclohexyl maleimide, and aliphatic conjugated diene such as 1,3-butadiene, isoprene, chloroprene, etc. Of these other copolymerizable ethylenically unsaturated monomers, styrene, methyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, benzyl (meth) acrylate, Phenyl (meth) acrylate, (meth) glycerol monoacrylate, and the like. The aforementioned other copolymerizable ethylenically unsaturated monomers may be used alone or in combination of two or more. In the present invention, specific examples of the ideal amine-containing alkali-soluble resin (I) include 2-N, N-diethylaminoethyl acrylate / methacrylic acid / N-phenylmaleimide / styrene / Benzyl methacrylate copolymer, 2-N, N-diethylaminoethyl acrylate / methacrylic acid / N-phenylmaleimide / styrene / phenylmethacrylate copolymer, acrylic acid 2-N, N-diethylaminoethyl / methacrylic acid / succinic acid mono-19-(15) (15) 200401121 (2-propanyloxyethyl) / N-phenylmaleimide / Styrene / benzyl methacrylate copolymer, 2-N, N-diethylamino propionate / methacrylic acid / carboxy polyhexamethylene monoacrylate / N-phenylmaleimide / Styrene / benzyl methacrylate copolymer, 2-N'N-diethylaminopropionic acid / methacrylic acid / N_phenylmaleimide / phenethyl;)% / A Benzyl acrylate / glycerol monomethacrylate copolymer and the like. In the amine group-containing soluble resin (1), the copolymerization ratio of the amine group-containing ethylenically unsaturated monomer is usually 5 to 50% by weight, and ideally is 0 to 40% by weight. At this time, when the copolymerization ratio of the ethylenically unsaturated monomer containing an amine group is less than 5% by weight, the dispersibility of the pigment tends to decrease. If it exceeds 50% by weight, the alkali solubility of the copolymer obtained is reduced, and Residues or texture contamination may occur on the substrate of the exposed part or on the light-shielding layer. The copolymerization ratio of the residue-containing ethylenically unsaturated monomer is usually 5 to 50% of the amount of smoked, and is desirably 0 to 40% by weight. At this time, when the copolymerization ratio of the ethylenically unsaturated monomer containing the end group is less than 5% by weight, the solubility of the prepared radiation-sensitive composition to the rubidium developer tends to decrease. If it exceeds 50% by weight, When developing with an alkaline developer, the formed pixels tend to fall off the substrate or tend to cause the surface film of the pixels to become rough. The copolymerization ratio of N-position substituted maleimide is usually 5 to 50% by weight, preferably 10 to 40% by weight. At this time, when the copolymerization ratio of N-substituted maleimine is less than 5% by weight, the heat resistance of the produced pixel tends to decrease. If it exceeds 50% by weight, the base-20 of the copolymer obtained is -(16) (16) 200401121 The solubility tends to decrease, and residues or texture pollution may occur on the substrate or light-shielding layer of the unexposed area. Amino-group-containing alkali-soluble resin (the weight-average molecular weight of polystyrene converted to polystyrene measured by gel permeation chromatography (GPC) (hereinafter, referred to as "1 ^") is usually], 000 ~ 1: 000,000 , Ideally 2,000 ~ 500,000, more preferably 3,000 ~] 00,000. As mentioned above, the copolymerization ratio of each monomer and the pigment dispersing ability of the alkali-soluble resin () with MW containing amine group is high, and it has an alkali developing solution. Excellent solubility and various characteristics of the hardened product obtained from the monomer. The radiation-sensitive composition using the alkali-soluble resin (1) containing the amine group is not dissolved after being developed with an alkali developer. The residue of the object is extremely small, and the area other than the pixel forming portion on the substrate is unlikely to cause pollution, film residue, etc., and the pixel composed of the composition will not excessively dissolve the alkali developing solution, and has excellent adhesion to the substrate. Worry about falling off from the substrate. Specific examples of ideal amine-containing fluorene-soluble resins (Π): 2-N, N-diethylaminoethyl acrylate / methacrylic acid / N-phenylmaleimide / Poly (methyl Methyl acrylate / 2-hydroxyethyl methacrylate) macromonomer / styrene / benzyl acrylate copolymer, 2-N, N-diethylaminoethyl acrylate / methacrylic acid / N-phenyl Maleimide / polymethyl methacrylate macromonomer / styrene / benzyl acrylate copolymer, 2-N, N-diethylaminoethyl acrylate / methacrylic acid / N-benzene Maleimide / poly (methyl methacrylate / 2-hydroxyethyl methacrylate) macro-21-(17) (17) 200401121 sub-monomer / styrene / phenyl methacrylate copolymer 2, 2-N, N-diethylaminoethyl acrylate / methacrylic acid / N-phenylmaleimide / polymethyl methacrylate macromonomer / styrene / phenyl acrylate copolymer, acrylic acid 2-N, N-diethylaminoethyl / methylpropionic acid / N-phenylmaleimide / poly (methyl methacrylate / 2-hydroxyethyl methacrylate) macromonomer / Styrene / 2-hydroxyethyl methacrylate / benzyl methacrylate copolymer, 2-N, N-diethylaminoethyl acrylate / methacrylic acid / N-phenylmaleimide / Polymethyl methacrylate macromonomer / benzene Ene / 2-hydroxyethyl methacrylate / benzyl methacrylate copolymer, 2-N, N-diethylaminoethyl acrylate / methacrylic acid / N-phenylmaleimide / poly ( Methyl methacrylate / 2-hydroxyethyl methacrylate) macromonomer / styrene / 2-hydroxyethyl methacrylate / phenyl methacrylate copolymer, 2-N, N-diethylamine acrylate Ethyl ester / methacrylic acid / N-phenylmaleimide / polymethyl propionate macromonomer / styrene / 2-hydroxyethyl methacrylate / phenyl methacrylate copolymer , 2-N, N-diethylaminoethyl acrylate / methacrylic acid / mono (2-propenyloxyethyl) succinate / N-phenylmaleimide / poly (methyl methacrylate / 2-hydroxyethyl methacrylate) macromonomer / styrene / benzyl acrylate copolymer, 2-N, N-diethylaminoethyl acrylate / methacrylic acid / succinic acid mono-22-(18 ) (18) 200401121 (2-propanone ethyl acetate VN-phenylmaleimide / polymethyl methacrylate macromonomer / phenethyl ether / benzyl acrylate copolymer, acrylic acid 2 'N' N ~ Diethylaminoethyl / methacrylic acid / number Acid mono (2-propanoic acid ethoxylate VN —phenylmaleimide / poly (methyl methacrylate / methacrylic acid 2-via ethyl ester) macromonomer / styrene / methyl Copolymer of phenyl acrylate, 2 'N-diethylaminoethyl acrylate / methylpropionic acid / succinic acid mono (2 · propenyloxyethyl) / N-phenylmaleimide / polymethyl Methyl acrylate macromonomer / styrene / phenyl acrylate copolymer, 2-N'N-diethylaminoethyl acrylate / methacrylic acid / ω-kidney polycaprolactone / N-phenyl acrylic acid Maleimide / poly (methyl methacrylate / 2-hydroxyethyl methacrylate) macromonomer / styrene / benzyl acrylate copolymer, 2-N, N-diethylaminoethyl acrylate Ester / methacrylic acid / monoacrylic omega-carboxy polycaprolactone / N-phenylmaleimide / polymethyl methacrylate macromonomer / styrene / benzyl acrylate copolymer, acrylic acid 2- N, diethylaminoethyl / methacrylic acid / ω-carboxy polycaprolactone monoacrylate / N-phenylmaleimide / poly (methyl methacrylate / methacrylic acid 2-hydroxyethyl Ester) macromonomer 7 styrene / Methacrylic acid benzene copolymer, acrylic acid 2_N, N-diethylaminoethyl / methacrylic acid / monoacrylic omega_endyl polycaprolactone / N-phenylmaleimide / Polymethyl methacrylate macromonomer / styrene / phenyl acrylic copolymer '-23- (19) (19) 200401121 acrylic 2-N' N-monoethylaminoethyl / methacrylic acid / N _Phenylmaleimide / Poly (methylpropionate / methacrylic acid 2-methylacetate) macromonomer / Phenylacetate / monomethylpropionate / Methacrylic acid benzoic acid copolymer, 2-N'N-diethylaminoethyl acrylate / methacrylic acid / N-phenylmaleimide / polymethyl methacrylate macromonomer / Styrene / glyceryl monomethacrylate / benzyl methacrylate copolymer, 2-N'N-diethylaminoethyl acrylate / methacrylic acid / N-phenylmaleimide / poly ( Methyl methacrylate / 2-hydroxyethyl methacrylate) macromonomer / styrene / glyceryl monomethacrylate / phenyl methacrylate copolymer, 2-N, N-diethylaminoethyl acrylate Ester / methacrylic acid / N-phenylmaleimide / poly Methyl Acrylic Macromonomer / Phenylacetate / Glyceryl Mono Methacrylate / Phenyl Methacrylate Copolymer '2-N, Diethylamino Ethyl Acetate / N-Phenyl Malay醯 imine / poly (methyl methacrylate / 2-hydroxyethyl methacrylate) macromonomer / polymethyl methacrylate macromonomer / styrene / benzyl methacrylate copolymer, acrylic acid 2-N, N-diethylaminoethyl / methacrylic acid / N-phenylmaleimide / poly (methyl methacrylate / 2-hydroxyethyl methacrylate) macromonomer / poly Methyl methacrylate macromonomer / styrene / 2-hydroxyethyl methacrylate / phenyl methacrylate copolymer, 2-N, N-diethylaminoethyl acrylate / methacrylic acid / succinic acid Mono-24-(20) 200401121 (2-propenyloxyethyl) / N-phenylmaleimide / poly (methyl methacrylate / 2-methyl ethyl methacrylate) macromonomer / Polymethyl methacrylate macromonomer / styrene / benzyl acrylate copolymer, 2-N, N-diethylaminoethyl acrylate / methacrylic acid / ω-hydroxypolycaprolactone / N-Phenylmaleimide / poly (methyl methacrylate / 2-hydroxyethyl methacrylate) macromonomer / styrene / benzyl methacrylate copolymer, acrylic acid 2-Ν, Ν- Diethylaminoethyl / methacrylic acid / N-phenylmaleimide / poly (methyl methacrylate / 2-hydroxyethyl methacrylate) macromonomer / polymethyl methacrylate giant Molecular monomer / styrene / benzyl methacrylate / glyceryl monomethacrylate copolymer and the like. In the amine group-containing alkali-soluble resin (III), the copolymerization ratio of the amine group-containing ethylenically unsaturated monomer is usually 5 to 50% by weight, and preferably 10 to 40% by weight. At this time, when the copolymerization ratio of the ethylenically unsaturated monomer containing an amine group is less than 5% by weight, the dispersibility of the pigment tends to decrease. If it exceeds 50% by weight, the alkali solubility of the obtained copolymer decreases. Residues or texture contamination may occur on the substrate of the exposed part or on the light-shielding layer. The copolymerization ratio of the N-position-substituted maleimide is usually 5 to 50% by weight, and is desirably 10 to 40% by weight. At this time, when the copolymerization ratio of the N-position-substituted maleimide imine is less than 5% by weight, the solubility of the prepared radiation-sensitive composition to the alkali developer tends to decrease, if the amount of g g is 50 ^! At this time, the pixels formed when developing with the "developing solution" tend to be easily lost from the substrate or tend to cause the surface film of the pixels to be rough. Ideally, the copolymerization ratio of the macromonomer is usually 5 to 50% by weight -25-(21) (21) 200401121] 0 to 40% by weight. At this time, when the copolymerization ratio of the macromonomer is less than 5% by weight, the heat resistance of the produced pixel tends to decrease. If it exceeds 50% by weight, the solubility of the copolymer obtained by the preparation tends to decrease. Residues or texture contamination may occur on the substrate of the exposed part or on the light-shielding layer. The weight-average molecular weight (hereinafter referred to as "M Λν") of polyamine converted into polystyrene measured by gel permeation chromatography (GPC) based on the amino-soluble alkali-soluble resin (III) is usually I: 〇000〜; U 0 0 0, 0 0 0, ideally 2,000 to 500: 000, more preferably 3,000 to] 00,000. For example, the copolymerization ratio of each monomer and the pigment dispersing ability of the ammonium-soluble ammonium-soluble resin (III) with MW are high, and it has excellent solubility for the amaranth developer, and at the same time hardened by the monomer The various properties of the object are excellent, and the radiation-sensitive composition using the alkali-soluble resin (III) containing the amine group has little residue of undissolved matter after development with an alkali developing solution, and it is not easy for areas other than the portion where pixels are formed on the substrate. Pollution, film residues, etc. occur, and the pixels composed of this composition do not dissolve excessively to the alkali developer, and have excellent adhesion to the substrate. 'There is no need to worry about falling off from the substrate. The amine group-soluble soluble resin of the present invention is more preferably an amine group-containing ethylenically unsaturated monomer (π) and an amine group-containing ethylenically unsaturated monomer (111), and it is particularly desirable that these macromolecular monomers are at least one kind. Amine-group-soluble soluble resin (11) selected from polymethyl methacrylate macromonomer and poly (methyl methacrylate / methacrylic acid 2 · hydroxyethyl acetate) macromonomer group and Amine ethylenically unsaturated monomer (1 η) ° In the present invention, the amine group-containing alkali-soluble resin can be used alone or as a mixture of two or more of -26- (22) (22) 200401121. Amino-soluble alkali-soluble resins (]) to (Π I) other soluble resins (hereinafter referred to as "other alkali-soluble resins") are preferably other monomers that can be copolymerized with ethylenically unsaturated monomers having a carboxyl group. Copolymer (hereinafter referred to as "alkali soluble resin (i)"). Specific examples of the ideal alkali-soluble resin (i): acrylic acid / benzyl acrylate copolymer, acrylic acid / benzyl acrylate / styrene copolymer, acrylic acid / methyl acrylate / styrene copolymer, acrylic acid / benzene methacrylic acid Methyl ester copolymer, acrylic acid / benzyl methacrylate / styrene copolymer, acrylic acid / methyl methacrylate / styrene copolymer, methacrylic acid / phenyl methacrylate copolymer, methacrylic acid / acrylic acid Benzyl ester / styrene copolymer, methacrylic acid / methyl acrylate / styrene copolymer, methacrylic acid / benzyl methacrylate copolymer, methacrylic acid / benzyl methacrylate / styrene Copolymer, methacrylic acid / methyl methacrylate / styrene copolymer, acrylic acid / benzyl acrylate / 2-hydroxyethyl acrylate copolymer, acrylic acid / benzyl methacrylate / propionate 2-hydroxyethyl Ester copolymer, acrylic acid / benzyl acrylate / 2-hydroxyethyl acrylate copolymer, acrylic acid / benzyl methacrylate / methylpropionate 2-hydroxyethyl copolymer, -27- (23) (23 200401121 acrylic / N-phenyl horse Fluorene imine / benzyl acrylate / styrene copolymer, acrylic acid / N-phenylmaleimide / benzyl methacrylate / styrene copolymer, methacrylic acid / benzyl acrylate / acrylic acid 2- Hydroxyethyl copolymer, methacrylic acid / benzyl methacrylate / 2-hydroxyethyl acrylate copolymer, methacrylic acid / benzyl acrylate / 2-hydroxyethyl acrylate copolymer, methacrylic acid / Benzyl methacrylate / 2-hydroxyethyl methacrylate copolymer, methacrylic acid / N-phenylmaleimide / benzoic acid acrylate / styrene copolymer, methacrylic acid / N-benzene Methyl maleimide / benzyl methacrylate / styrene copolymer, acrylic acid / succinic acid mono (2-propenyloxyethyl) / N-phenylmaleimide / styrene / acrylic acid allyl Ester copolymer, acrylic acid / succinic acid mono (2-methacryloxyethyl) / N-phenylmaleimide / styrene / allylic acrylate copolymer, acrylic acid / succinic acid mono (2-propylene Ethoxyethyl) / N-phenylmaleimide / styrene / allyl methacrylate copolymer, acrylic acid / succinic acid (2-Methacryloxyethyl) / N-phenylmaleimide / styrene / allyl methacrylate copolymer, -28-(24) 200401121 methacrylic acid / succinic acid mono (2 -Acryloxyethyl) / N-phenylmaleimide / styrene / allyl acrylate copolymer, methacrylic acid / succinic acid mono (2-methylpropoxyethyl acetate) / N-benzene Methyl maleimide / styrene / acrylic acid allyl vinegar copolymer methyl propanoic acid / battery acid mono (2-propenyloxyethyl) / N-phenylmaleimide / styrene (Methacrylic acid): Glycolic acid, Propylene acetate copolymer, Methacrylic acid / Acrylic acid mono-methyl acetic acid,) / N-phenylmaleimide / Styrene / Methylpropene Acrylic acid copolymer phenyl
N 丙稀酸/號拍酸單一(2 一丙稀_乙i旨)/ ΐχΐ 馬來醯亞胺/丙烯酸苯甲醋/苯乙_共聚物 丙烯酸,琥珀酸單(2 -甲基丙烯醯氧乙酯) 苯基馬來醯亞胺/丙烯酸苯甲酯苯乙纟希共聚物 —苯基 丙烯酸/琥珀酸單(2 -馬來醯亞胺/甲基丙烯酸苯甲 丙烯酸/琥珀酸單(2 -苯基馬來醯亞胺/甲基丙烯酸 甲基丙烯酸/琥珀酸單 苯基馬來醯亞胺/丙烯酸苯甲 甲基丙烯酸/琥珀酸單 丙烯醯氧乙酯)/ ] 醋/苯乙烯共聚物、 甲基丙烯醯氧乙酯)/ N 苯甲酯/苯乙烯共聚物、 2〜丙烯醯氧乙酯)/ N @ /苯乙烯共聚物、 甲基丙烯醯氧乙醋) N —苯基馬來醒亞胺/丙嫌酸苯甲酯/苯乙稀共聚物 丙烯醯氧乙酯) 酯/苯乙烯共聚物^ 甲基丙烯醯氧乙酉_ 、N Acrylic acid / Acrylic acid single (2 Acrylic acid), ΐχΐ Maleimide / Acrylic acid acetophenone / Ethyl acetic acid_copolymer acrylic acid, Succinic acid mono (2-Methacrylic acid) Ethyl) phenylmaleimide / benzyl acrylate acetophenone copolymer-phenylacrylic acid / succinic acid mono (2 -maleimide / methacrylic acid benzoic acid / succinic acid mono (2 -Phenylmaleimide / methacrylic acid methacrylic acid / succinic acid monophenylmaleimide / benzyl methacrylic acid / succinic acid monoacrylic acid ethyl ester) /] vinegar / styrene copolymerization Material, methacrylic acid ethyl ester) / N phenyl methyl ester / styrene copolymer, 2 to propylene ethoxymethyl ester) / N @ / styrene copolymer, methacrylic acid ethyl acetate) N —phenyl Malaysian imine / benzyl propionate / styrene copolymer propylene oxide ethyl ester) Ester / styrene copolymer ^ methacrylic acid ethoxylate _ 、
N 甲基丙烯酸/琥珀酸單(2 苯基馬來醯亞胺/甲基丙烯酸苯EJ3 甲基丙烯酸/琥珀酸單(2 - -29- (25) (25)200401121 N ~苯基馬來醯亞胺/甲基丙烯酸苯甲酯/苯乙稀共聚物1 丙烯酸/ N -苯基馬來醯亞胺/丙烯酸本甲醋/單丙 烯酸甘油酯/苯乙烯共聚物、 丙烯酸/ N -苯基馬來醯亞胺/丙烯酸苯甲單丙 •烯酸甘油酯/苯乙烯共聚物、 丙烯酸/ N —苯基馬來醯亞胺/甲基丙烯酸苯甲醋/ 單甲基丙烯酸甘油酯/苯乙烯共聚物、 丙烯酸/ N -苯基馬來醯亞胺/甲基丙燏酸苯甲醋/ 單甲基丙烯酸油酯/苯乙烯共聚物、 甲基丙烯酸/ Ν -苯基馬來醯亞胺/丙烯酸苯甲醋/ 單丙烯酸甘油酯/苯乙烯共聚物、 甲基丙烯酸/ Ν -苯基馬來醯亞胺/丙烯酸苯甲酯/ 單丙晞酸甘油酯/苯乙烯共聚物、 甲基丙烯酸/ Ν -苯基馬來醯亞胺/甲基丙烯酸苯甲 酯/單甲基丙烯酸甘油酯/苯乙烯共聚物、 甲基丙烯酸/ Ν -苯基馬來醯亞胺/甲基丙烯酸苯甲 酯/單甲基丙烯酸甘油酯/苯乙烯共聚物等。 鹼可溶性樹脂(i )中,含羧基之乙烯性不飽和單體 的共聚比例通常爲5〜50重量% ,理想爲]0〜40重量% 。此時含羧基之乙烯性不飽和單體的共聚比例未滿5重量 %時,製得之輻射敏感性組成物對於鹼顯影液之溶解性有 降低的傾向’若超過5 0重量%時’以鹼顯影液顯影時’ 所形成之像素易由基板上脫落或易造成像素表面膜粗糙的 -30 - (26) 200401121 傾向。 鹼可溶性樹脂(i )之M w通常爲],〇 〇 〇〜 理想爲2J00〜500,〇〇〇’更理想爲3:000〜]00 本發明中,其他之鹼可溶性樹脂可單獨使 種以上來使用。 本發明之其他之鹼可溶性樹脂的使用比例 溶性樹脂整體,理想爲使用5 0重量%以下,: 重量%以下。 本發明之鹼可溶性樹脂之合計使用量係荖 分]0 0重量份時,一般使用3 0〜5 0 0重量份 〜3 0 0重量份。本發明中,在此範圍內使用( 得到對於基板及遮光層之密著性、顯影性等優 感性組成物。 本發明中,顏料係預先分散於將(B )含 鹼可溶性樹脂之鹼可溶性樹脂之一部分或全咨 )溶媒之一部分或全部所成之溶液,以下更具 明之(B )成分之使用形態。 (1 )構成輻射敏感性組成物之鹼可溶性 分用於顏料分散時,剩餘部分用於調製輻射敏 時之形態: 此形態係顏料分散時所用之鹼可溶性樹脂 )含胺基之鹼可溶性樹脂所構成的情形或(乙 鹼可溶性樹脂與其他鹼可溶性樹脂之混合物的 )情形之其他鹼可溶性樹脂之使用比例理想爲 ],000,000 > ;000 » 用或混合2 係對於鹼可 匿理想爲3 0 丨於(A )成 ,理想爲5 0 B )成分可 異之輻射敏 有含胺基之 5溶解於(E 體說明本發 樹脂之一部 感性組成物 有僅由(甲 )含胺基之 情形,(乙 使用50重 -31 - (27) (27)200401121 量%以下,更理想爲3 0重量%以下。用於調製輻射敏感 性組成物時之鹼可溶性樹脂僅有(甲)含胺基之鹸可溶性 樹脂的情形或(乙)含胺基之鹼可溶性樹脂與其他鹼可溶 性樹脂之混合物的情形或僅有(丙)其他鹼可溶性樹脂的 情形,(乙)情形之其他鹼可溶性樹脂之使用比例理想爲 使用5 0重量%以下,更理想爲3 0重量%以下。 (2 )構成輻射敏感性組成物之鹼可溶性樹脂之全部 用於顏料分散之形態: 此形態下,鹼可溶性樹脂有僅由(甲)含胺基之鹼可 溶性樹脂所構成的情形或(乙)含胺基之鹼可溶性樹脂與 其他鹼可溶性樹脂之混合物的情形,(乙)情形之其他鹼 可溶性樹脂之使用比例理想爲使用5 0重量%以下,更理 想爲3 0重量%以下。 (C )多官能性單體 本發明中之多官能性單體爲具有2個以上聚合性不飽 和鍵之單體。 多官能性單體可例舉如: 乙二醇、丙二醇等烷二醇之二(甲基)丙烯酸酯類; 聚乙二醇、聚丙二醇等聚烷二醇之二(甲基)丙烯酸 酯類; 甘油、三羥甲基丙烷、季戊四醇、二季戊四醇等3價 以上之多元醇之聚(甲基)丙烯酸酯或這些之二羧酸改質 物; 聚酯、環氧樹脂、胺基甲酸酯樹酯、醇酸樹脂、聚矽 -32 - (28) 200401121 氧烷樹酯、螺烷樹酯等寡聚(甲基)丙烯酸酯類; 雨末端羥基聚-],3 - 丁二烯、兩末端羥基聚異戊二嫌 、雨末端羥基聚己內酯等之兩末端羥基化聚合物之二(甲 基)丙烯酸酯類,此外尙有 三[2 -(甲基)丙烯醯氧基乙基]磷酸酯等。 這些多官能性單體中,較理想者爲3價以上多元醇之 聚(甲基)丙烯酸酯類或這些之二羧酸改質物,具體而言 例如有三羥甲基丙烷三丙燔酸酯、三羥甲基丙烷三甲基丙 烯酸酯、季戊四醇三丙烯酸酯、季戊四醇三甲基丙烯酸酯 、季戊四醇四丙烯酸酯、季戊四醇四曱基丙烯酸酯、二季 戊四醇五丙烯酸酯、二季戊四醇五甲基丙烯酸酯、二季戊 四醇六丙烯酸酯、二季戊四醇六甲基丙烯酸酯, 以下述式(]) ch2ococh=ch2 h2c=chcooch2—C-CH2OCOCH2CH2COOH (1) ch2ococh=ch2 表示之化合物,下 ch3 IH2C=CCOOCH2— H3IICOCIIΗ3 2)cioc20oc—c CCH2C iH20—cH20 ^c —c·—οN methacrylic acid / succinic acid mono (2 phenylmaleimide / phenyl methacrylate EJ3 methacrylic acid / succinic acid mono (2--29- (25) (25) 200401121 N ~ phenylmaleic acid Imine / benzyl methacrylate / styrene copolymer 1 acrylic acid / N-phenylmaleimide / methacrylic acid methyl ester / glyceryl monoacrylate / styrene copolymer, acrylic acid / N-phenyl horse Copolymer of lymeimide / benzyl acrylate monoglyceride / styrene, acrylic acid / N-phenylmaleimide / benzoic acid methacrylate / glyceryl monomethacrylate / styrene copolymer Material, acrylic acid / N-phenylmaleimide / methacrylic acid benzoate / oleyl methacrylate / styrene copolymer, methacrylic acid / N-phenylmaleimide / acrylic acid Benzoacetate / Glyceryl monoacrylate / styrene copolymer, Methacrylic acid / N-phenylmaleimide / Benzyl acrylate / Glyceryl monopropionate / styrene copolymer, Methacrylic acid / N -Phenylmaleimide / benzyl methacrylate / glyceryl monomethacrylate / styrene copolymer, methacrylic acid / N-phenylmaleimide Amine / benzyl methacrylate / glyceryl monomethacrylate / styrene copolymer, etc. In the alkali-soluble resin (i), the copolymerization ratio of the ethylenically unsaturated monomer containing a carboxyl group is usually 5 to 50% by weight, Ideally] 0 to 40% by weight. At this time, when the copolymerization ratio of the ethylenically unsaturated monomer containing a carboxyl group is less than 5% by weight, the solubility of the prepared radiation-sensitive composition to the alkali developer tends to decrease. ' If it exceeds 50% by weight, the pixels formed when 'developed with an alkali developing solution' tend to fall off from the substrate or tend to cause a rough -30-(26) 200401121 of the pixel surface film. M w of the alkali-soluble resin (i) Normally, 〇〇〇〜 ~ Ideally 2J00 ~ 500,00 ′ ′, more preferably 33: 00 ~] 00 In the present invention, other alkali-soluble resins can be used alone or in combination. Other bases of the present invention Use ratio of soluble resin The entire soluble resin is preferably used in an amount of 50% by weight or less: 5% by weight or less. The total amount of the alkali-soluble resin used in the present invention is a centimeter] When 0 0 parts by weight, 30 to 50 are generally used 0 parts by weight to 3 0 0 weight In the present invention, it is used within this range (to obtain a superior composition such as adhesion to a substrate and a light-shielding layer, and developability. In the present invention, the pigment is previously dispersed in the alkali-soluble property of the (B) alkali-soluble resin. A part or all of the resin) a part or all of a solvent solution, the following is more clear about the use of the component (B). (1) When the alkali-soluble component constituting the radiation-sensitive composition is used for pigment dispersion, the remaining part Used to modulate the form when radiation sensitive: This form is the case of alkali-soluble resins used when pigments are dispersed) alkali-soluble resins containing amine groups or (mixtures of ethyl-soluble resins and other alkali-soluble resins) The use ratio of alkali-soluble resin is ideally], 000,000 >; 000 »Use or mix 2 is ideal for alkali concealment, which is 3 0 丨 in (A), ideally 50 B) Radiation sensitive ingredients with different components 5 of amine group is dissolved in (E body indicates that one part of the resin composition of this hair is composed of (A) only containing amine group, (B used 50 weight -31-(27) (27) 200401121% by weight or less) More preferably is 30 wt% or less. The alkali-soluble resin used for the modulation of radiation-sensitive compositions is only (A) the case of amine-containing osmium-soluble resins or (B) the amine-containing alkali-soluble resins and other alkali-soluble resins or only (C) In the case of other alkali-soluble resins, the use ratio of the other alkali-soluble resins in (B) is preferably 50% by weight or less, and more preferably 30% by weight or less. (2) All the alkali-soluble resins constituting the radiation-sensitive composition are used in the form of pigment dispersion: In this form, the alkali-soluble resins may be composed only of (a) alkali-soluble resins containing amine groups or (b) In the case of a mixture of an alkali-soluble resin containing an amine group and another alkali-soluble resin, the use ratio of the other alkali-soluble resin in the case of (B) is preferably 50% by weight or less, and more preferably 30% by weight or less. (C) Polyfunctional monomer The polyfunctional monomer in the present invention is a monomer having two or more polymerizable unsaturated bonds. Examples of the polyfunctional monomer include di (meth) acrylates of alkanediols such as ethylene glycol and propylene glycol; di (meth) acrylates of polyalkanediols such as polyethylene glycol and polypropylene glycol Poly (meth) acrylates of trivalent or higher polyhydric alcohols such as glycerin, trimethylolpropane, pentaerythritol, and dipentaerythritol, or modified products of these dicarboxylic acids; polyesters, epoxy resins, and urethane trees Esters, alkyd resins, polysilicon-32-(28) 200401121 oligomeric (meth) acrylates such as oxalane resins, spirane resins; rain-terminated hydroxy poly-], 3-butadiene, both ends Di (meth) acrylates of hydroxylated polymers such as hydroxypolyisoprene, rain-terminated hydroxypolycaprolactone, etc. In addition, there is tris [2- (meth) acryloxyethyl] phosphate Esters, etc. Among these polyfunctional monomers, poly (meth) acrylates of trivalent or higher polyhydric alcohols or modified products of these dicarboxylic acids are preferred, and specific examples thereof include trimethylolpropane tripropionate, Trimethylolpropane trimethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, pentaerythritol tetraacrylate, pentaerythritol tetramethyl acrylate, dipentaerythritol pentaacrylate, dipentaerythritol pentamethacrylate, two Pentaerythritol hexaacrylate and dipentaerythritol hexamethacrylate are represented by the following formula (): ch2ococh = ch2 h2c = chcooch2-—C-CH2OCOCH2CH2COOH (1) ch2ococh = ch2, and ch3 IH2C = CCOOCH2— H3IICOCIIΗ3 2) cioc20oc— c CCH2C iH20—cH20 ^ c —c · —ο
C ΗC Η
C Ηοο C 2 Η 2 C 2 Η ^ Η (2 表示之化合物等,特別是三羥甲基丙烷三丙烯酸酯、 季戊四醇三丙烯酸酯及二季戊四醇六丙烯酸酯,其像素層 強度高、像素表面之平滑性優異,且未曝光部之基板上及 -33- (29) (29)200401121 遮光層上不易發生質地污染等。 這些多官能性單體可單獨使用或混合二種以上使用。 本發明中,有時前述多官能性單體可與單官能性單體 倂用。 上述單官能性單體之具體例除了前述含胺基之鹼可溶 性樹脂(〗)〜(π η所例示之含胺基之乙烯性不飽和單 體、含羧基之乙烯性不飽和單體、Ν位取代馬來醯亞胺或 其他可共聚之乙烯性不飽和單體外,以及市售品 Μ - 5 3 0 0 、Μ-54 00 (商品名,東亞合成公司製)等。 這些單官能性單體可單獨使用或混合2種以上來使用 〇 單官能性單體之使用比例係對於單官能性單體與多官 能性單體之合計使用量時,一般爲90重量%以下,較理 想爲5 0重量%以下。此種情況下若單官能性單體之使用 比例超過 9 0重量%時,所得像素之強度或表面平滑性恐 不足。 本發明之多官能性單體與單官能性單體之合計使用量 係對於(Β )成分]0 0重量份時,一般使用5〜5 0 0重量份 ,較理想爲2 0〜3 0 0重量份。此種情況時,上述合計使用 量若未滿5重量份時,像素之強度及表面平滑性有降低之 傾向,另一方面若超過5 00重量份時,例如鹼顯影性降低 或未曝光部分之基板上及遮光層容易產生表面不潔或膜殘 留等之情況。 (D )光聚合起始劑 -34- (30) (30)200401121 本發明之光聚合起始劑係指經可見光、紫外線、遠紫 外線、電子線、X射線等輻射線照射產生分解或鍵結開裂 ,使自由基、陽離子、陰離子等之上述(C)多官能性單 體開始聚合之活性基之化合物。 這種光聚合起始劑例如有聯二咪唑系化合物、苯偶姻 系化合物、苯乙酮系化合物、二苯甲酮系化合物、α -二 酮系化合物、多核醌系化合物、噻噸酮系化合物、三啡系 化合物等。 前述聯二咪唑系化合物之具體例有 2,2’-雙(2-氯苯基)-4,4.,5,5’-四(4-乙氧羰基 苯基)-1,2 ;-聯二咪唑、 2,2、雙(2-溴苯基)-4,4,,5,5、四(4-乙氧羰基 苯基)-1,2 ’ -聯二咪唑、 2,2·-雙(2-氯苯基)-4,4:,5,5’ -四苯基-1,2·- 聯二咪唑、 2,2’-雙(2,4-二氯苯基)-4,4,,5,5’-四苯基-1 ,2 ’ -聯二咪唑、 2,2、雙(2,4,6 -三氯苯基)-4,4,,5,5,-四苯 基· 1,2 ’ -聯二咪唑、 2,2’-雙(2,4-二溴苯基)-4,4,,5,5’ -四苯基-] ,2、聯二咪唑、 2,2’-雙(2,4,6-三溴苯基)-4,4,,5,5’ -四苯 基-1,2 ·-聯二咪唑等。 這些聯二咪唑系化合物對於溶媒之溶解性優異,不會 -35- (31) (31)200401121 產生未溶解物或析出物等異物,而且感度髙,即使僅少量 能量曝光亦可充分進行硬化反應,由於對比高,未曝光部 位不產生硬化反應,因此曝光後之塗膜對於顯影液明顯區 分爲不溶性之硬化部分與對於顯影液具高溶解性之未硬化 部分,藉此可依據期望序列配置無凹陷之高精密度之像素 陣歹y 。 上述苯偶因系化合物之具體例有苯偶因、苯偶因甲醚 、苯偶因乙醚、苯偶因異丙醚、苯偶因異丁醚、甲基一 2 一苯甲醯基苯甲酸酯等。 上述苯乙酮系化合物之具體例有 2,2 -二甲氧基- 2 —苯基苯乙酮、2 —羥基一 2 -甲基—1—苯基丙烷酮 、1 一 (4 —異丙基苯基)—2 —經基一 2 -甲基丙院一]— 酮、4一 (2 —羥基乙氧基)苯基一 (2 -羥基一 2-丙基) 酮、2,2 —二甲氧基苯乙酮、2,2 —二乙氧基苯乙酮、2 —甲基—(4 —甲基硫苯基)一 2 —嗎啉—]一丙院—1 一酮 、2 —苯甲基一2 —二甲基胺基—1 — ( 4 —嗎啉苯基)丁烷 一 1一酮、1—羥基環己基苯基酮、2,2 —二甲氧基一],2 一二苯基乙烷一 1—酮等。 上述二苯甲酮系化合物之具體例有4,4’-雙(二甲 基胺基)二苯甲酮、4,4’ 一雙(二乙基氨基)二苯甲酮 等。 上述α -二酮系化合物之具體例有丁二酮、聯苯酮、 甲基苯甲醯基甲酸酯等。 上述多核醌系化合物之具體例有蒽醌、2 -乙基蔥醌 -36- (32) (32)200401121 、2 —第三丁基蒽醌、],4 —萘醌等。 前述咕吨酮系化合物之具體例有咕吨酮、噻吨酮、2 -氯苯噻吨酮等。 上述三畊系化合物之具體例有 ],3,5-三(三氯甲基)-3-三畊、 1,3-雙(三氯甲基)-5- ( 2-氯苯基)-s-三畊、 1,3 -雙(三氯甲基)-5 - ( 4 -氯苯基)-s -三畊' 1,1 -雙(三氯甲基)-2 - ( 3 -甲氧基苯基)-s -三哄' 1,3 -雙(三氯甲基)-5 - ( 4 -甲氧基苯基)-s -三D井、 2 - ( 2 -呋喃乙叉)-4,6 -雙(三氯甲基)-s -三啡、 2-(4 -甲氧基苯乙烯基)-4,6 -雙(三氯甲基)-s -三 U井、 , 2-(3· 4 -二甲氧基苯乙烯基)-4,6 -雙(三氯甲基 )-S -二 D井 ' 2- (4 -甲氧基萘基)-4,6-雙(三氯甲基)-S-三啡、 2-(2-溴-4-甲基苯基)-4,6-雙(三氯甲基)-s-三畊 -37 - 1 〇 2 本發明光聚合起始劑之使用量係對於(C )多官能性 單體與必要時所使用之單官能性單體之合計1 00重量份時 ,通常使用〇.〇】〜200重量份,理想爲〗〜120重量份, 3 - ( 2 -硫苯基乙叉)-4,6 -雙(三氯甲基)-s -三畊等 4 本發明之光聚合起始劑可單獨一種或混合兩種以上使 用。 (33) (33)200401121 更理想爲1〜]〇 〇重量份。此時光聚合起始劑之使用量未 滿 0.0]重量份時,曝光之硬化不足,可能難以獲得像素 依據所望排列配置之像素陣列,另一方面若超過2 0 0重量 份時,形成之像素在顯影時有容易自基板脫落,未曝光部 之基板上或遮光層上容易產生質地污染、膜殘留等。 本發明中,前述光聚合起始劑必要時可倂用一種以上 之增感劑、硬化促進劑或高分子光架橋及增感劑等。 (E )溶媒 本發明之溶媒係分散或溶解於構成輻射敏感性組成物 之上述(A)〜(D)成分,不與這些成分反應,且具有 適當揮發性者時,則無特別限定,此類溶媒可具體例舉如 乙二醇單甲基醚、乙二醇單乙基醚、乙二醇單正丙基 醚、乙二醇單正丁基醚、二乙二醇單甲基醚、二乙二醇單 乙基醚、二乙二醇單正丙基醚、二乙二醇單正丁基醚、三 乙二醇單甲基醚、三乙二醇單乙基醚、丙二醇單曱基醚、 丙二醇單乙基醚、丙二醇單正丙基醚、丙二醇單正丁基醚 、二丙二醇單甲基醚、二丙二醇單乙基醚、二丙二醇單正 丙基醚、二丙二醇單正丁基醚、三丙二醇單甲基醚、三丙 二醇單乙基醚等(聚)烷二醇單烷基醚類; 乙二醇單甲基醚乙酸酯、乙二醇單乙基醚乙酸酯、二 乙二醇單甲基醚乙酸酯、二乙二醇單乙基醚乙酸酯、丙二 醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯等(聚)烷二 醇單烷基醚乙酸酯類; 二乙二醇單二甲基醚、二乙二醇甲基乙基醚、二乙二 -38- (34) (34)200401121 醇二乙基醚、四氫呋喃等其他醚類; 甲基乙基酮、環己酮、2 -庚酮、3 -庚酮等酮類; 2-羥基丙酸甲酯、2-羥基丙酸乙酯等乳酸烷酯類; 2 -羥基-2 -甲基丙酸乙酯' 3 -甲氧基丙酸甲酯、3 -甲氧 基丙酸乙酯、3 -乙氧基丙酸甲酯、3 -乙氧基丙酸乙酯、乙 氧基乙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯 、甲基-3—甲氧基丁基乙酸酯、3_甲基-3—甲氧基丁基丙 酸酯、乙酸乙酯、乙酸正丙酯、乙酸異丙酯、乙酸正丁酯 、乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙酸正丁酯' 丁酸乙酯、丁酸正丙酯、丁酸異丙酯、丁酸正丁酯、丙酮 酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙醯乙酸甲酯、乙 醯乙酸乙酯、2-氧代丁酸乙酯等其他酯類; 甲苯、二甲苯等芳族烴類; N-甲基毗咯烷酮' N,N-二甲基甲醯胺、N,N-二甲 基乙醯胺等醯胺類等。 ’ 這些溶媒中,就溶解性、顏料分散性及塗布性等觀點 而言,以乙二醇單甲基醚乙酸酯、丙二醇單甲基醚、丙二 醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯、二乙二醇二 甲基醚、二乙二醇甲基乙基醚、環己酮、2 -庚酮、3 -庚酮 、2 -羥基丙酸乙酯、3 -甲氧基丙酸乙酯、3 -乙氧基丙酸甲 酯、3 -乙氧基丙酸乙酯、3 -甲基-3 -甲氧基丁基丙酸酯、乙 酸正丁酯、乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙酸 正丁酯、丁酸乙酯、丁酸異丙酯、丁酸正丁酯、丙酮酸乙 酯等較佳。 -39- (35) (35)200401121 上述溶媒可單獨亦可2種以上混合使用。 又,上述溶媒可與苯甲基乙基醚、二正己基醚、丙酮 基丙酮、異佛爾酮、己酸、辛酸 -辛醇、1 -萘酚、苯甲 醇、乙酸苯甲酯、苯甲酸乙酯、草酸二乙酯、馬來酸二乙 酯、r - 丁內酯、碳酸乙烯酯、碳酸丙烯酯、乙二醇單苯 基醚乙酸酯等高沸點溶媒倂用。 這些高沸點溶媒中,較理想者爲7 - 丁內酯等。 這些高沸點溶媒可單獨亦可2種以上混合使用。 本發明之溶媒之使用量並無特別限制,但就製得之輻 射敏感性組成物之塗布性及安全性等觀點而言,該組成物 除去溶媒以外之各成分之合計濃度一般爲5至5 0重量% ,更理想爲]〇至4 0重量%之量。 添加劑 本發明之彩色濾光片用輻射敏感性組成物視需要可含 有各種添加劑。 上述添加劑例如有改善彩色濾光片用輻射敏感性組對 鹼顯影液之溶解特性,且具有更進一步抑制顯影後之未溶 解物殘留作用的有機酸。 這種有機酸理想爲分子中具有1個以上之羧基之脂族 菝酸或含苯基之羧酸。 上述脂族羧酸例如有甲酸、乙酸、丙酸、丁酸、戊酸 、三甲基乙酸、己酸、二乙基乙酸、庚酸、辛酸等脂族單 羧酸類; 草酸、丙二酸、琥珀酸、戊二酸' 己二酸、庚二酸、 -40- ¢36) ¢36)200401121 辛二酸 '壬二酸' 癸二酸、巴西二酸、甲基丙二酸、乙基 丙二酸、二甲基丙二酸、甲基琥珀酸、四甲基琥珀酸、環 己基二羧酸、衣康酸、檸康酸、馬來酸、富馬酸、中康酸 等脂族二羧酸類; 丙三羧酸、烏頭酸、樟腦三酸等脂族三羧酸類等。 上述含苯基之羧酸例如有羧基直接與苯基結合之芳族 菝酸或羧基經由碳鏈而連接於苯基之菝酸等,含苯基之羧 酸例如有苯甲酸、甲苯甲酸、枯茗酸、二甲基苯甲酸、三 甲基苯甲酸等芳族單羧酸類; 鄰-苯二甲酸、間-苯二甲酸、對-苯二甲酸等芳族二 羧酸類; 偏苯三酸、均苯三酸、偏苯四甲酸、均苯四甲酸等 3 價以上之芳族多羧酸類;或 苯基乙酸、氫阿托酸、氫肉桂酸、苦杏仁酸、苯基琥 珀酸、阿托酸、肉桂酸、肉桂叉二酸、香豆酸、傘形酸等 〇 這些有機酸中,就對鹼之溶解性、對下述溶媒之溶解 性以及防止未曝光部分之基板及遮光層上產生表面質地污 染或膜殘留等觀點而言,丙二酸、己二酸、衣康酸、檸康 酸、富馬酸、中康酸、苯二甲酸等之脂族二羧酸類及芳族 二羧酸類爲佳。 上述有機酸可單獨使用亦可2種以上混合使用。 有機酸之使用量係對於輻射敏感性組成物整體時,通 常使用1 〇重量%以下,較理想爲5重量%以下,更理想爲 (37) (37)200401121 1重量%以下。此時有機酸之使用量超過1 〇重量^。時,形 成之像素對基板之接著性有降低之傾向。 前述有機酸以外之添加劑之具體例有 銅酞菁衍生物等藍色顏料衍生物或黃色顏料衍生物等 之分散助劑; 玻璃、氧化鋁等塡充劑; 聚乙烯醇、聚乙二醇單烷基醚類、聚(氟烷基丙烯酸 酯)類等之高分子化合物; 非離子系、陽離子系、陰離子系等界面活性劑: 乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷、乙烯基 參(2 -甲氣基乙氧,基)i夕院、N-(2 -胺乙基)-3 -胺基丙基 甲基二甲氧基矽烷、N - ( 2 -胺乙基)-3 -胺基丙基三甲氧 基矽烷、3 -胺基丙基三乙氧基矽烷、3 -環氧丙基三甲氧基 矽烷、3 -環氧丙基甲基二甲氧基矽烷、2 - ( 3,4 -環氧基 環己基)乙基三甲氧基矽烷、3 -氯丙基甲基二甲氧基矽烷 、3 -氯丙基三甲氧基矽烷、3 -甲基丙烯醯氧基丙基三甲氧 基矽烷、3 -锍基丙基三甲氧基矽烷等接著促進劑; 2,2-硫雙(4 -甲基-6-第三丁基酚)、2,6-二-第三 丁基酚等抗氧化劑; 2 - ( 3 -第三丁基-5 -甲基-2 -羥苯基)-5 -氯苯并三唑、 烷氧基二苯甲酮類等紫外線吸收劑; 聚丙烯酸鈉等抗凝劑; 環氧化合物、三聚氰胺化合物、二疊氮化合物等。 本發明之彩色濾光片用輻射敏感性組成物可根本解決 -42 - (38) (38)200401121 前述課題所舉之像素之表面平滑性 '密著性及顯影性。 像素之表面平滑性係依下述數式(])所定義之R a 來評價,C Ηοο C 2 Η 2 C 2 Η ^ Η (The compounds represented by 2 etc., especially trimethylolpropane triacrylate, pentaerythritol triacrylate, and dipentaerythritol hexaacrylate, have high pixel layer strength and smooth pixel surface It has excellent properties, and is less prone to texture contamination on the substrate of the unexposed part and on the -33- (29) (29) 200401121. These polyfunctional monomers can be used alone or in combination of two or more. In the present invention, The above-mentioned polyfunctional monomer may be used in combination with a monofunctional monomer. Specific examples of the above-mentioned monofunctional monomer include the above-mentioned amine-group-containing alkali-soluble resins () and (π η-exemplified amine-group-containing In addition to ethylenically unsaturated monomers, ethylenically unsaturated monomers containing carboxyl groups, maleinimine substituted with N-position or other copolymerizable ethylenically unsaturated monomers, and commercially available products M-5300, M -54 00 (trade name, manufactured by Toa Kosei Co., Ltd.), etc. These monofunctional monomers can be used singly or in combination of two or more types. The proportion of the monofunctional monomer is based on the monofunctional monomer and polyfunctionality. When the total amount of monomers is used It is generally 90% by weight or less, and more preferably 50% by weight or less. In this case, if the use ratio of the monofunctional monomer exceeds 90% by weight, the strength or surface smoothness of the obtained pixel may be insufficient. The total amount of polyfunctional monomers and monofunctional monomers used is (for the (B) component) 0 to 0 parts by weight, usually 5 to 500 parts by weight, and more preferably 20 to 300 parts by weight In this case, if the total usage is less than 5 parts by weight, the strength and surface smoothness of the pixel tends to decrease. On the other hand, if it exceeds 500 parts by weight, for example, the alkali developability is reduced or the unexposed portion is reduced. The substrate and the light-shielding layer are liable to cause surface uncleanness or film residue. (D) Photopolymerization initiator -34- (30) (30) 200401121 The photopolymerization initiator of the present invention refers to visible light, ultraviolet light, Radicals such as extreme ultraviolet rays, electron beams, and X-rays are active compounds that decompose or bond to crack and cause radicals, cations, and anions of the above (C) polyfunctional monomers to polymerize. This photopolymerization Initiator Imidazole-based compounds, benzoin-based compounds, acetophenone-based compounds, benzophenone-based compounds, α-diketone-based compounds, polynuclear quinone-based compounds, thioxanthone-based compounds, triphine-based compounds, etc. Specific examples of the imidazole-based compound include 2,2'-bis (2-chlorophenyl) -4,4,5,5'-tetrakis (4-ethoxycarbonylphenyl) -1,2; -biimidazole , 2, 2, bis (2-bromophenyl) -4,4,4,5,5, tetrakis (4-ethoxycarbonylphenyl) -1,2'-biimidazole, 2,2 · -bis ( 2-chlorophenyl) -4,4:, 5,5'-tetraphenyl-1,2 · -biimidazole, 2,2'-bis (2,4-dichlorophenyl) -4,4 ,, 5,5'-tetraphenyl-1,2'-biimidazole, 2,2, bis (2,4,6-trichlorophenyl) -4,4,5,5, -tetrabenzene 1,2'-biimidazole, 2,2'-bis (2,4-dibromophenyl) -4,4,5,5'-tetraphenyl-], 2, biimidazole, 2,2'-bis (2,4,6-tribromophenyl) -4,4,5,5'-tetraphenyl-1,2 · -biimidazole and the like. These biimidazole compounds are excellent in the solubility of the solvent, do not produce foreign matter such as undissolved matter or precipitates in -35- (31) (31) 200401121, and the sensitivity is high, and the hardening reaction can be fully performed even with a small amount of energy exposure Due to the high contrast, no hardening reaction occurs in the unexposed areas, so the exposed coating film is clearly distinguished from the insoluble hardened part of the developer and the unhardened part with high solubility for the developing solution, so that the High precision pixel array 歹 y. Specific examples of the aforementioned benzoin-based compounds include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, methyl-2 2-benzylbenzyl benzyl Esters and so on. Specific examples of the aforementioned acetophenone-based compound include 2,2-dimethoxy-2-phenylacetophenone, 2-hydroxy-2-methyl-1-phenylpropanone, and 1- (4-isopropyl Phenyl) -2—Ethyl-2-methylpropanone-1] —ketone, 4-((2-hydroxyethoxy) phenyl- (2-hydroxy-2-propyl) ketone, 2,2— Dimethoxyacetophenone, 2,2-diethoxyacetophenone, 2-methyl— (4-methylthiophenyl) —2—morpholine —]-Yiyuan-1—one-one, 2 -Benzyl-1,2-dimethylamino-1, 1- (4-morpholinylphenyl) butane-1, one, 1-hydroxycyclohexylphenyl ketone, 2,2-dimethoxyl], 2 diphenylethane-one and so on. Specific examples of the benzophenone-based compound include 4,4'-bis (dimethylamino) benzophenone, 4,4'-bis (diethylamino) benzophenone, and the like. Specific examples of the α-diketone-based compound include butanedione, benzophenone, and methylbenzophenylate. Specific examples of the polynuclear quinone-based compound include anthraquinone, 2-ethylallinoquinone-36- (32) (32) 200401121, 2-tert-butylanthraquinone, and 4-naphthoquinone. Specific examples of the glutathione-based compound include glutathione, thioxanthone, and 2-chlorobenzothioxanthone. Specific examples of the above-mentioned three-tillage compounds are], 3,5-tris (trichloromethyl) -3-three-tillage, 1,3-bis (trichloromethyl) -5- (2-chlorophenyl)- s-Sangen, 1,3-bis (trichloromethyl) -5-(4-chlorophenyl) -s-Sangen '1,1 -bis (trichloromethyl) -2-(3-methyl Oxyphenyl) -s-trioxo '1,3-bis (trichloromethyl) -5- (4-methoxyphenyl) -s-tri-D, 2- (2-ethylfuranyl) -4,6-bis (trichloromethyl) -s-triphorphine, 2- (4-methoxymethoxystyryl) -4,6-bis (trichloromethyl) -s-tri-U well, 2- (3 · 4-dimethoxystyryl) -4,6-bis (trichloromethyl) -S-di-D '' (2- (4-methoxynaphthyl) -4,6- Bis (trichloromethyl) -S-trimorphine, 2- (2-bromo-4-methylphenyl) -4,6-bis (trichloromethyl) -s-Sangen-37-1 〇2 When the photopolymerization initiator of the present invention is used in an amount of 100 parts by weight with respect to a total of (C) the polyfunctional monomer and the monofunctional monomer used when necessary, it is generally used in the range of 0.00 to 200 parts by weight. Ideally, it is ~ 120 parts by weight, 3- (2-thiophenylethylidene) -4,6-bis (trichloromethyl) -s-Sangen, etc. 4 The photopolymerization initiator of the present invention may be used singly or in combination of two or more. (33) (33) 200401121 More preferably, it is 1 to] 〇 〇 part by weight. At this time, when the amount of the photopolymerization initiator is less than 0.0 parts by weight, the curing of the exposure is insufficient, and it may be difficult to obtain a pixel array in which pixels are arranged in a desired arrangement. On the other hand, if it exceeds 2000 parts by weight, the formed pixels During development, it is easy to fall off from the substrate, and texture pollution, film residue, etc. are easily generated on the substrate or the light-shielding layer of the unexposed portion. In the present invention, as the photopolymerization initiator, if necessary, one or more sensitizers, hardening accelerators, polymer optical bridges, sensitizers, and the like may be used. (E) Solvent The solvent of the present invention is not particularly limited if it is dispersed or dissolved in the above-mentioned components (A) to (D) constituting a radiation-sensitive composition, and does not react with these components and has appropriate volatility. Specific examples of the solvent include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether, Diethylene glycol monoethyl ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monofluorene Ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether (Poly) alkanediol monoalkyl ethers such as alkyl ether, tripropylene glycol monomethyl ether, and tripropylene glycol monoethyl ether; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate , Diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl (Poly) alkanediol monoalkyl ether acetates such as ether acetate; diethylene glycol monodimethyl ether, diethylene glycol methyl ethyl ether, diethylene glycol-38- (34) (34 200401121 Alcohol diethyl ether, tetrahydrofuran and other ethers; methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone and other ketones; methyl 2-hydroxypropionate, 2-hydroxypropionic acid Alkyl lactates such as ethyl ester; 2-hydroxy-2-methyl propionate '3-methyl methoxypropionate, 3- 3-methoxypropionate, 3-ethyl ethoxypropionate , Ethyl 3-ethoxypropionate, ethyl ethoxyacetate, ethyl hydroxyacetate, methyl 2-hydroxy-3-methylbutanoate, methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutylpropionate, ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, isobutyl acetate, n-amyl formate, isoamyl acetate, N-butyl propionate 'ethyl butyrate, n-propyl butyrate, isopropyl butyrate, n-butyl butyrate, methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl ethyl acetate , Ethyl acetate, ethyl 2-oxobutanoate and other esters; toluene, dimethyl And other aromatic hydrocarbons; N-methyl-pyrrolidone adjoin 'N, N- dimethylformamide, N, N- dimethyl acyl amines such as acetamide and the like. '' Among these solvents, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, and propylene glycol monoethyl ether are used in terms of solubility, pigment dispersibility, and coatability. Ether ether acetate, diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, cyclohexanone, 2-heptanone, 3-heptanone, ethyl 2-hydroxypropionate, 3-methyl Ethyloxypropionate, Methyl 3-ethoxypropionate, Ethyl 3-ethoxypropionate, 3-Methyl-3-methoxybutylpropionate, n-butyl acetate, isopropyl acetate Butyl, n-amyl formate, isoamyl acetate, n-butyl propionate, ethyl butyrate, isopropyl butyrate, n-butyl butyrate, ethyl pyruvate and the like are preferred. -39- (35) (35) 200401121 The above solvents can be used alone or in combination of two or more. The solvent can be used with benzylethyl ether, di-n-hexyl ether, acetone, acetone, isophorone, hexanoic acid, octanoic acid-octanol, 1-naphthol, benzyl alcohol, benzyl acetate, and benzoic acid. High boiling point solvents such as ethyl acetate, diethyl oxalate, diethyl maleate, r-butyrolactone, ethylene carbonate, propylene carbonate, and ethylene glycol monophenyl ether acetate are used. Among these high-boiling solvents, 7-butyrolactone and the like are preferable. These high boiling point solvents may be used alone or in combination of two or more. The amount of the solvent used in the present invention is not particularly limited, but from the viewpoints of coating properties and safety of the prepared radiation-sensitive composition, the total concentration of the components except the solvent is generally 5 to 5 0% by weight, more preferably in an amount of 0 to 40% by weight. Additives The radiation-sensitive composition for a color filter of the present invention may contain various additives as necessary. The above-mentioned additives include, for example, organic acids which improve the solubility of the radiation-sensitive group for color filters in alkaline developers, and further inhibit the residual effect of undissolved matter after development. This organic acid is preferably an aliphatic acetic acid or a phenyl-containing carboxylic acid having one or more carboxyl groups in the molecule. The aliphatic carboxylic acids include, for example, aliphatic monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, valeric acid, trimethylacetic acid, hexanoic acid, diethylacetic acid, heptanoic acid, and octanoic acid; oxalic acid, malonic acid, Succinic acid, glutaric acid 'adipic acid, pimelic acid, -40- ¢ 36) ¢ 36) 200401121 suberic acid, azelaic acid, sebacic acid, azelaic acid, methylmalonic acid, ethylpropyl Dibasic acid, dimethylmalonic acid, methylsuccinic acid, tetramethylsuccinic acid, cyclohexyl dicarboxylic acid, itaconic acid, citraconic acid, maleic acid, fumaric acid, mesaconic acid and other aliphatic dicarboxylic acids Carboxylic acids; aliphatic tricarboxylic acids such as glyceric acid, aconitic acid, and camphoric acid. The phenyl-containing carboxylic acid includes, for example, an aromatic carboxylic acid in which a carboxyl group is directly bonded to a phenyl group, or a carboxylic acid in which a carboxyl group is connected to a phenyl group through a carbon chain, and the phenyl-containing carboxylic acid includes, for example, benzoic acid, toluic acid, and Aromatic monocarboxylic acids such as acetic acid, dimethylbenzoic acid, and trimethylbenzoic acid; aromatic dicarboxylic acids such as phthalic acid, iso-phthalic acid, and terephthalic acid; trimellitic acid, Aromatic polycarboxylic acids, such as trimesic acid, trimellitic acid, pyromellitic acid, and the like, which are trivalent or higher; or phenylacetic acid, hydroatomic acid, hydrocinnamic acid, picric acid, phenylsuccinic acid, atto Acid, cinnamic acid, cinnamic acid, coumaric acid, umbellic acid, etc. Among these organic acids, they are soluble in alkali, soluble in the following solvents, and prevent the substrate and the light-shielding layer from being generated in the unexposed part. From the viewpoints of surface texture pollution or film residue, aliphatic dicarboxylic acids and aromatic dicarboxylic acids such as malonic acid, adipic acid, itaconic acid, citraconic acid, fumaric acid, mesaconic acid, phthalic acid, and the like Acids are preferred. These organic acids may be used alone or in combination of two or more. The amount of the organic acid used is generally 10% by weight or less, more preferably 5% by weight or less, and more preferably (37) (37) 200401121 1% by weight or less for the entire radiation-sensitive composition. At this time, the amount of organic acid used exceeds 10% by weight ^. At this time, the formed pixel tends to have lower adhesion to the substrate. Specific examples of additives other than the aforementioned organic acids include dispersion aids such as blue pigment derivatives such as copper phthalocyanine derivatives and yellow pigment derivatives; fillers such as glass and alumina; polyvinyl alcohol and polyethylene glycol monomers. Polymer compounds such as alkyl ethers and poly (fluoroalkyl acrylates); non-ionic, cationic, and anionic surfactants: vinyltrimethoxysilane, vinyltriethoxysilane, ethylene Ginseng (2-methylaminoethoxy, aryl), N- (2-aminoethyl) -3-aminopropylmethyldimethoxysilane, N- (2-aminoethyl) -3 -aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-epoxypropyltrimethoxysilane, 3-epoxypropylmethyldimethoxysilane, 2 -(3,4-Epoxycyclohexyl) ethyltrimethoxysilane, 3-chloropropylmethyldimethoxysilane, 3-chloropropyltrimethoxysilane, 3-methacryloxy Adhesives such as propyltrimethoxysilane, 3-methylpropyltrimethoxysilane; 2,2-thiobis (4-methyl-6-tert-butylphenol), 2,6-di- three Antioxidants such as phenol; 2-(3 -Third-butyl-5-methyl-2 -hydroxyphenyl) -5 -chlorobenzotriazole, alkoxybenzophenones and other ultraviolet absorbers; Anticoagulants such as sodium acrylate; epoxy compounds, melamine compounds, diazide compounds, etc. The radiation-sensitive composition for a color filter of the present invention can fundamentally solve the problem of surface smoothness, adhesion, and developability of the pixels mentioned in the aforementioned problems. The surface smoothness of a pixel is evaluated according to R a defined by the following formula (]),
〔但是R a係沿著像素之中心線之平均粗糙度(A ) ,L爲測定長度、y爲由像素之中心線至粗糙度曲線之距 離(A ) , X爲測定長度方向之位置座標〕。 R a値之上陨以往認爲5 0 A即足夠’但是現在要求 3 〇 A以下。 使用本發明之彩色濾光片用輻射敏感性組成物,通常 像素之R a値可在3 0 A以下,理想爲2 0 A以下,(])像 素與液晶之接觸面積增加,雜質由著色層滲入液晶,(2 )可適當抑制因像素面之粗糙造成液晶支配向不良等之不 良影響等’可得到不會產生影像殘留或顯示不均等之顯示 不良,極佳高品質之彩色液晶顯示元件等。 調製彩色濾光片用輻射敏感性組成物的方法 本發明之彩色濾光片用輻射敏感性組成物如前述,( A )顔料預先分散於(B )含胺基之鹼可溶性樹脂之鹼可 溶性樹脂之一部分或全部溶解於(E )溶媒之一部分或全 部所成之溶液’將製得之顔料分散液與(C )多官能性單 體及(D )光聚合引發劑’及必要時添加(B )鹼可溶性 樹脂之剩餘部分及(E )溶媒之剩餘部分,經混合調製而 成。 -43 * (39) (39)200401121 顏料分散步驟後之各成分之混合方法無特別限定’可 使用一般混合方法。 彩色濾光片之形成方法 其次說明使用本發明之彩色濾光片用輻射敏感性組成 物形成彩色濾光片的方法。 在基板之表面上’視需要形成遮光層以區分形成像素 部分’此基板上塗布例如將紅色顏料分散之輻射敏感性組 成物之液狀組成物後,進行預烘烤使溶媒蒸發形成塗膜。 其次,將此塗膜經由光罩照輻射線後,使用鹼性顯影液顯 影,溶解除去塗膜的未曝光部,其後進行後烘烤,可形成 以所定排列配置紅色像素圖案之像素陣列。 另外,使用綠色或藍色顏料被分散之各輻射敏感性組 成物之液狀組成物後,與前述相同進行塗布、預烘烤、曝 光及顯影,其後進行後烘烤,在相同基板上形成綠色像素 陣列及藍色的像素陣列,可得到基板上配置紅色、綠色及 藍色三原色之像素陣列的彩色濾光片。但是形成彩色濾光 片時之各色之像素圖案之形成順序未被限定如上述。 形成彩色濾光片時所使用的基板例如有玻璃、聚矽氧 烷、聚碳酸酯、聚酯、芳香族聚醯胺,聚醯胺亞胺、聚醯 亞胺等。對於這些基板視需要可實施矽烷偶合劑等之藥品 處理、電漿處理、離子電鍍、濺鍍、氣相反應法、真空蒸 鍍等適當之前處理。 將輻射敏感性組成物之液狀組成物塗布於基板時,可 採用旋轉塗布、流涎塗布、輥塗布等適當之塗布法。 -44 - (40) (40)200401121 塗布厚度係乾燥後之膜厚,通常爲〇 .】〜〗Ομηι,較 佳爲〇 · 2〜5 · 0 μ m,特佳爲0 . 2〜3 . 0 μ m。 製作彩色瀘光片時所使用之輻射線例如可使用可見光 線、紫外線、遠紫外線、電子射線、X射線等,且以波長 爲]9 0〜4 5 0 n m範圍之幅射線爲佳。 輻射線之曝光能量理想爲1 〇〜]〇,〇〇〇 m c m 2。 又,前述鹼顯影液例如以碳酸鈉、氫氧化鈉、氫氧化鉀、 氫氧化四甲基銨、膽鹼、1,8 -二氮雜雙環-〔5 . 4 . 0〕-7 -十一烯、],5 -二氮雜雙環-〔4 · 3 . 0〕- 5 -壬烯等之水 溶液爲佳。 前述鹼顯影液中可添加適量之甲醇、乙醇等之水溶性 有機溶媒或界面活性劑等。鹼顯影後,通常進行水洗。 顯影處理法可應用淋洗顯影法、噴霧顯影法、浸漬顯 影法、攪拌顯影法等,顯影條件以常溫下5〜3 0 0秒爲 佳。 由本發明之彩色濾光片用輻射敏感性組成物所形成之 彩色濾光片例如可用於穿透型或反射型之彩色液晶顯示元 件、彩色攝像管元件,色彩感知器等,若用於彩色液晶顯 示元件時,非常適用於薄膜電晶體(TFT )方式彩色液晶 顯示裝置之驅動用基板上形成像素。 【實施方式】 [發明之實施形態] ].本發明之彩色濾光片用輻射敏感性組成物,其係含 -45 - (41) (41)200401121 有(A) 、 (B) 、 ( C ) 、 (D)及(E)成分,且(a) 成分預先分散於將(B )成分之〜部分或全部溶解於(E )成分之一部分或全部所成之溶液者,本發明之理想的組 成物如下述(甲)〜(丁)。 (甲)(B )成分爲含有至少一種選自含胺基之鹼可 溶性樹脂(Ϊ )、含胺基之鹼可溶性樹脂(]1 )及含胺基 之鹼可溶性樹脂(ΠΙ )群之彩色濾光片用輻射敏感性組 成物。 (乙)如前述(甲)之彩色濾光片用輻射敏感性組成 物’其中構成(B )成分之含胺基之鹼可溶性樹脂(π ) 及含胺基之鹸可溶性樹脂(IΠ )之巨分子單體爲由至少 一種選自聚甲基丙烯酸甲酯巨分子單體及聚(甲基丙烯酸 甲酯/甲基丙烯酸2 —羥乙酯)巨分子單體群所構成之鹼可 溶性共聚物。 (丙)前述(甲)或(乙)之彩色濾光片用輻射敏感 性組成物’其中(C )成分爲由至少一種選自三羥甲基丙 院二丙燃酸醋、季戊四醇三丙烯酸醋及二季戊四醇六丙烧 酸酯群所構成。 (丁)前述(甲)、(乙)或(丙)之彩色濾光片用 輻射敏感性組成物’其中(A )成分爲有機顏料及/或碳黑 〇 本發明之理想的彩色濾光片係 (戊)由前述(甲)〜(丁)中任一項之彩色濾光片 用輻射敏感性組成物所形成之彩色濾光片所構成, -46 - (42) (42)200401121 本發明之更理想的彩色濾光片係 (己)由前述(甲)〜(丁)中任一項之彩色濾光片 用輻射敏感性組成物所形成,且像素之Ra値爲3 0 A以下 之彩色濾光片所構成。 本發明之理想的彩色液晶顯示元件係 (庚)具備前述(戊)或(己)之彩色濾光片之彩色 液晶顯示元件。 [實施例] 以下舉實施例具體說明本發明之實施形態。但是本發 明不受此實施例所限制。 實施例1 將(A)成分之C. I.顏料綠36之60重量份及C. I.顔料 黃1 50之30重量份,(B)成分之甲基丙烯酸2-N,N-二乙 胺基乙酯/甲基丙烯酸/聚甲基丙烯酸甲酯巨分子單體/甲基 丙烯酸苯甲酯/甲基丙烯酸 2 -羥乙酯共聚物(共聚重量比 =15/15/10/45/]5、Mw=10,000)之 90 重量份,(E)成分之 丙二醇單甲基醚乙酸酯之2 0 0重量份的混合物,以球磨機 處理分散顏料,調製顏料分散液。調製顏料分散液時,球 之塡充率爲6 0容量% ,混合物之塡充率爲4 0容量% ,分 散時間爲3小時。 其次將製得之顏料分散液與(C )成分之二季戊四醇 六丙烯酸酯6 0重量份,(D )成分之2 —苯甲基一 2 —二 甲基胺基一]一 (4 —嗎啉苯基)丁烷—1 —酮5 0重量份, -47 - (43) (43)200401121 (E )成分之3 -乙氧基丙酸乙酯1,5 0 0重量份混合,調 製輻射敏感性組成物之液狀組成物。 接著使用旋轉塗布機將前述液狀組成物塗布於表面上 形成有防止鈉離子溶出之 s i 02膜之鈉鈣玻璃基板表面上 ,然後於8 0 r預焙烤1 〇分鐘,形成膜厚2.0 μηΊ之塗膜。 將該基板冷卻至室溫後,使用高壓水銀燈經由光罩(]L3 S 之線間距圖案),對塗膜照射包括3 6 5 n;m、405 ηηι及436 nm各波長之輻射線,以],〇〇〇]/cm2之曝光量進行曝光。 然後將該基板浸漬於23 t之〇.〇 4%氫氧化鈉水溶液構成之 溶液中1分鐘進行顯影後,以超純水洗淨並風乾。其後於 2 3 (TC之烤箱內進行烘烤3 0分鐘,於基板上形成綠色之條 狀彩色濾光片。 製得之基板以光學顯微鏡觀察,確認線寬1〇μ™以上 之圖案全部密著於基板,未曝光部之基板上無殘渣。又, 使用投光器觀察此基板,未曝光部之基板上也無殘渣。像 素之R a値爲2 2 A,表面平滑性極優異。此基板之未曝光 部表面使用含乙醇之淸潔面紙(商品名、東麗(股)製 ]e n s e c 1 e a n e r )擦拭]0次,該淸潔面紙無綠色著色。 實施例2 除了將實施例1之(A)成分改爲C. I.顏料藍15:6之 90重量份,(B)成分之甲基丙烯酸2-N,N-二乙胺基乙酯/ 甲基丙烯酸/N-苯基馬來醯亞胺/聚甲基丙烯酸甲酯巨分子 單體/苯乙烯/甲基丙燏酸苯甲酯共聚物(共聚重量比 -48 - (44) (44)200401121 = 2 0/1 0/2 0 / 1 5 /2 0/ 1 5 ' M w二]5:000)之 90 重量份,(E)成分 之丙二醇單甲基醚乙酸酯之2 00重量份的混合物,與實施 例]相同以球磨機處理分散顏料,調製顏料分散液外,其 餘與實施例]同樣調製輻射敏感性組成物之液狀組成物, 於基板上形成藍色之條狀彩色濾光片。 製得之基板以光學顯微鏡觀察,確認線寬]〇μηι以上 之圖案全部密著於基板,未曝光部之基板上無殘渣。又, 使用投光器觀察此基板,未曝光部之基板上也無殘渣。像 素之Ra値爲2 0 A,表面平滑性極優異。此基板之未曝光 部表面使用含乙醇之淸潔面紙(商品名、東麗(股)製 I e n s e c 1 e a η e r )擦拭1 0次,該淸潔面紙無綠色著色。 實施例3 除了將實施例1之(A)成分改爲C. I.顏料紅177之 1 〇〇重量份,(B)成分之甲基丙烯酸2-N,N-二乙胺基乙酯 /甲基丙烯酸/N -苯基馬來醯亞胺/單甲基丙燏酸甘油酯/苯 乙烯/甲基丙烯酸苯甲酯共聚物(共聚重量比 -2 0/15 /2 0/10/ 1 5 /2 0 ' Mw = 28:000)之 90 重量份,(E)成分 之丙二醇單甲基醚乙酸酯之2 00重量份的混合物,與實施 例]相同以球磨機處理分散顏料,調製顏料分散液外,其 餘與實施例]同樣調製輻射敏感性組成物之液狀組成物, 於基板上形成紅色之條狀彩色濾光片。 製得之基板以光學顯微鏡觀察,確認線寬]以上 之圖案全部密著於基板,未曝光部之基板上無殘澄。又, -49- (45) (45)200401121 使用投光器觀察此基板,未曝光部之基板上也無殘渣。像 素之Ra値爲2 3 A,表面平滑性極優異。此基板之未曝光 部表面使用含乙醇之淸潔面紙(商品名、東麗(股)製 ]e n s e c 1 e a n e 1·)擦拭]0次,該淸潔面紙無綠色著色。 實施例4 除了將實施例1之(A)成分改爲C.].顏料藍]5:6之 90重量份,(B)成分之甲基丙烯酸2-N,N-二乙胺基乙酯/ 甲基丙烯酸/N-苯基馬來醯亞胺/聚(甲基丙烯酸甲酯巨分子 單體/苯乙烯/甲基丙烯酸苯甲酯共聚物(共聚重量比 = 20/20/20/10 /】0/10/10、M w=17,000)之 90 重量份,(E)成 分之丙二醇單甲基醚乙酸酯之2 0 0重量份的混合物,與實 施例]相同以球磨機處理分散顏料,調製顏料分散液外, 其餘與實施例1同樣調製輻射敏感性組成物之液狀組成物 ,於基板上形成紅色之條狀彩色濾光片。 製得之基板以光學顯微鏡觀察,確認線寬]〇 μ m以上 之圖案全部密著於基板,未曝光部之基板上無殘渣。又: 使用投光器觀察此基板,未曝光部之基板上也無殘渣。像 素之Ra値爲]9A,表面平滑性極優異。此基板之未曝光 部表面使用含乙醇之淸潔面紙(商品名、東麗(股)製 1 e n s e c j e a n e 1·)擦拭]0次,該淸潔面紙無綠色著色。 比較例1 除了使用鹸可溶性樹脂之甲基丙燏酸/甲基丙烯酸2 - -50- (46) (46)200401121 羥乙酯/甲基丙烯酸苯甲酯/聚甲基丙烯酸甲酯巨分子單體 共聚物(共聚重量比5/] 5/60/] 0、Mw = 2 0:000)之90重量 份取代實施例】之(B)成分外,其餘與實施例]同樣調製 輻射敏感性組成物之液狀組成物,於基板上形成綠色之條 狀彩色濾光片。 製得之基板以光學顯微鏡觀察,確認線寬25μ】·η以上 之圖案全部密著於基板,但是線寬20μ!π以下之圖案由基 板上剝離,未曝光部之基板上有一些殘渣。又,使用投光 器觀察此基板,未曝光部之基板上有一些殘渣。像素之 Ra値爲 3 9 A,表面平滑性稍差。此基板之未曝光部表面 使用含乙醇之淸潔面紙(商品名、東麗(股)製lense cleaner )擦拭5次,該淸潔面紙雖無綠色著色:但是擦拭 ]〇次時,該淸潔面紙有綠色著色。 比較例2 除了實施例1之顏料分散液調製時,使用攪拌葉片之 混合處理聚代球磨機之分散處理外,其餘與實施例1同樣 調製輻射敏感性組成物之液狀組成物,於基板上形成綠色 之條狀彩色濾光片。 製得之基板以光學顯微鏡觀察,線寬30μηι以下之圖 案由基板上剝離。使用投光器觀察此基板,未曝光部之基 板上有質地污染。像素之Ra値爲63Α,表面平滑性稍差 。此基板之未曝光部表面使用含乙醇之淸潔面紙(商品名 、東麗(股)製lense cleaner)擦拭5次,該淸潔面紙有 -51 - (47) (47)200401121 綠色著色。 比較例3 除了不預先將實施例1之(A )成分、(B )成分及 (E )成分,而將(A )〜(E )各成分暫時混合,調製輻 射敏感性組成物之液狀組成物外,其餘與實施例]同樣於 基板上形成綠色之條狀彩色濾光片。 製得之基板以光學顯微鏡觀察,線寬40μηι以下之圖 案由基板上剝離,未曝光部之基板上有許多殘渣。使用投 光器觀察此基板,未曝光部之基板上有明顯之質地污染。 像素之Ra値爲8 8 A,表面平滑性極差。此基板之未曝光 部表面使用含乙醇之淸潔面紙(商品名、東麗(股)製 】e n s e c I e a n e r )擦拭1次,該淸潔面紙有綠色著色。 [發明之效果] 本發明之彩色濾光片用輻射敏感性組成物,(A )顏 料預先分散於特定之(B )鹼可溶性樹脂溶解於(E )溶 媒所成之溶液中,可形成表面平滑性及對於基板及遮光層 之密著性優異的像素,且顯影時未曝光部之基板上及遮光 層上不會產生殘渣或質地污染之優異特性。因此,本發明 之彩色濾光片用輻射敏感性組成物極適合於製造電子工業 領域之彩色液晶顯示元件用之彩色濂光片之各·種彩色濂光 片。 -52[But R a is the average roughness (A) along the center line of the pixel, L is the measured length, y is the distance from the center line of the pixel to the roughness curve (A), and X is the position coordinate in the length direction] . It was previously thought that 50 A was sufficient, but it is now required to be below 30 A. Using the radiation-sensitive composition for a color filter of the present invention, the R a 値 of a pixel can generally be less than 30 A, preferably less than 20 A. ()) The contact area between the pixel and the liquid crystal is increased, and impurities are caused by the coloring layer. Infiltrating into liquid crystal, (2) It can appropriately suppress the adverse effects of poor liquid crystal domination due to the roughness of the pixel surface, etc. 'It is possible to obtain display defects that do not cause image retention or display unevenness, and excellent high-quality color liquid crystal display elements, etc. . Method for modulating radiation-sensitive composition for color filter The radiation-sensitive composition for color filter of the present invention is as described above, (A) pigment is previously dispersed in (B) alkali-soluble resin containing amine-group-containing alkali-soluble resin A part or all of the solution dissolved in (E) a part or all of the solvent 'the pigment dispersion liquid prepared with (C) the polyfunctional monomer and (D) the photopolymerization initiator' and if necessary added (B ) The remainder of the alkali-soluble resin and (E) the remainder of the solvent are prepared by mixing. -43 * (39) (39) 200401121 There is no particular limitation on the method of mixing the components after the pigment dispersing step. A general mixing method can be used. Method for forming color filter Next, a method for forming a color filter using the radiation-sensitive composition for a color filter of the present invention will be described. A light-shielding layer is formed on the surface of the substrate as necessary to distinguish the pixel portions. After coating a liquid composition such as a radiation-sensitive composition in which a red pigment is dispersed, the substrate is pre-baked to evaporate the solvent to form a coating film. Next, after this coating film is irradiated with radiation through a photomask, it is developed using an alkaline developer to dissolve and remove the unexposed portions of the coating film, and then post-baking to form a pixel array in which red pixel patterns are arranged in a predetermined arrangement. In addition, after using a liquid composition of each radiation-sensitive composition in which a green or blue pigment is dispersed, coating, pre-baking, exposure, and development are performed in the same manner as described above, and then post-baking is performed on the same substrate The green pixel array and the blue pixel array can obtain color filters in which pixel arrays of three primary colors of red, green and blue are arranged on a substrate. However, the formation order of the pixel patterns of the respective colors when forming the color filter is not limited as described above. Examples of the substrate used when forming the color filter include glass, silicone, polycarbonate, polyester, aromatic polyimide, polyimide, polyimide, and the like. For these substrates, if necessary, chemical treatment such as a silane coupling agent, plasma treatment, ion plating, sputtering, vapor phase reaction method, vacuum evaporation, etc. may be performed as appropriate. When the liquid composition of the radiation-sensitive composition is applied to a substrate, a suitable coating method such as spin coating, drool coating, or roll coating can be used. -44-(40) (40) 200401121 The coating thickness is the thickness of the film after drying, and is usually 0.] ~ 〖0μηι, preferably 0 · 2 ~ 5 · 0 μm, particularly preferably 0.2 ~ 3. 0 μm. The radiation used in making the color phosphor film can be, for example, visible light, ultraviolet, far ultraviolet, electron rays, X-rays, and the like, and it is preferable that the radiation is in the range of 90 to 450 nm. The exposure energy of the radiation is desirably 100-1000 m c m 2. The alkali developing solution is, for example, sodium carbonate, sodium hydroxide, potassium hydroxide, tetramethylammonium hydroxide, choline, 1,8-diazabicyclo- [5.4.0] -7-11. Aqueous solutions of ene,], 5 -diazabicyclo- [4.3.0] -5 -nonene and the like are preferred. An appropriate amount of a water-soluble organic solvent such as methanol, ethanol, or a surfactant may be added to the alkali developing solution. After alkali development, it is usually washed with water. As the development treatment method, a shower development method, a spray development method, an immersion development method, and a stirring development method can be applied. The development conditions are preferably 5 to 300 seconds at room temperature. The color filter formed by the radiation-sensitive composition for a color filter of the present invention can be used in, for example, a transmissive or reflective color liquid crystal display element, a color camera tube element, a color sensor, and the like. In the case of a display element, it is very suitable for forming pixels on a driving substrate of a thin film transistor (TFT) type color liquid crystal display device. [Embodiment] [Embodiments of the invention]]. The radiation-sensitive composition for a color filter of the present invention, which contains -45-(41) (41) 200401121, including (A), (B), (C ), (D) and (E) components, and (a) component is previously dispersed in a solution obtained by dissolving part or all of (B) component to part or all of (E) component, which is ideal for the present invention The composition is as follows (a) to (d). (A) (B) The component is a color filter containing at least one group selected from the group consisting of amine-group-containing alkali-soluble resins (、), amine-group-containing alkali-soluble resins () 1), and amine-group-containing alkali-soluble resins (Π1). Radiation-sensitive composition for light sheets. (B) The radiation-sensitive composition for a color filter as described in (A) above, in which the amine group-containing alkali-soluble resin (π) and the amine-group-containing fluorene-soluble resin (IΠ) constituting the component (B) are huge. The molecular monomer is an alkali-soluble copolymer composed of at least one kind selected from a polymethyl methacrylate macromonomer and a poly (methyl methacrylate / 2-hydroxyethyl methacrylate) macromonomer group. (C) The radiation-sensitive composition for color filters (a) or (b) above, wherein the component (C) is at least one selected from the group consisting of trimethylolpropanedioic acid and pentaerythritol triacrylate And dipentaerythritol hexapropionate group. (D) The radiation-sensitive composition for a color filter described in (A), (B), or (C) above, wherein the component (A) is an organic pigment and / or carbon black. The ideal color filter of the present invention The series (e) is composed of a color filter formed by the radiation-sensitive composition for a color filter according to any one of (a) to (d), -46-(42) (42) 200401121 The present invention A more desirable color filter system (H) is formed of the radiation-sensitive composition for a color filter according to any one of (A) to (D), and the Ra 値 of the pixel is 30 A or less. Consists of color filters. An ideal color liquid crystal display element of the present invention is a color liquid crystal display element including the aforementioned (penta) or (di) color filter. [Examples] The following describes the embodiments of the present invention in detail. However, the present invention is not limited by this embodiment. Example 1 (A) 60 parts by weight of CI Pigment Green 36 and 30 parts by weight of CI Pigment Yellow 1 50, and (B) 2-N, N-diethylaminoethyl methacrylate / formaldehyde Acrylic acid / polymethyl methacrylate macromonomer / benzyl methacrylate / 2-hydroxyethyl methacrylate copolymer (copolymerization weight ratio = 15/15/10/45 /) 5, Mw = 10,000 ) Of 90 parts by weight, and (E) a mixture of 200 parts by weight of propylene glycol monomethyl ether acetate, a ball mill was used to disperse the pigment to prepare a pigment dispersion. When the pigment dispersion was prepared, the filling ratio of the balls was 60% by volume, the filling ratio of the mixture was 40% by volume, and the dispersion time was 3 hours. Next, the obtained pigment dispersion liquid and 60 parts by weight of dipentaerythritol hexaacrylate of component (C), 2-benzyl-1, 2-dimethylamino-1]-(4-morpholine) of component (D), 50 parts by weight of phenyl) butane-1-one, -47-(43) (43) 200401121 (E) 3-ethoxypropionic acid ethyl ester 1,500 parts by weight are mixed to modulate radiation sensitivity Liquid composition of sexual composition. Next, the aforementioned liquid composition was coated on the surface of a soda-lime glass substrate having a si 02 film preventing the dissolution of sodium ions on the surface using a spin coater, and then pre-baked at 80 r for 10 minutes to form a film thickness of 2.0 μηΊ. Coating film. After the substrate was cooled to room temperature, the coating film was irradiated with radiation with wavelengths of 3 6 5 n; m, 405 ηηι, and 436 nm through a photomask (] L3 S line spacing pattern) using a high-pressure mercury lamp. And exposure at an exposure amount of 0.000 / cm2. Then, the substrate was immersed in a solution of 23 t of a 4% sodium hydroxide aqueous solution for 1 minute, and then developed, and then washed with ultrapure water and air-dried. Thereafter, baking was performed in an oven at 23 ° C for 30 minutes, and green strip-shaped color filters were formed on the substrate. The obtained substrate was observed with an optical microscope to confirm that all the patterns having a line width of 10 μ ™ or more Adhered to the substrate, there is no residue on the substrate of the unexposed portion. Also, when this substrate is observed using a light projector, there is no residue on the substrate of the unexposed portion. The pixel R a 値 is 2 2 A, and the surface is extremely smooth. This substrate The surface of the unexposed part was wiped with an alcohol-containing cleansing paper (trade name, manufactured by Toray Co., Ltd.] ense 1 eaner) 0 times, and the cleansing paper had no green coloration. Example 2 Except that Example 1 of ( A) 90% by weight of CI Pigment Blue 15: 6, (B) 2-N, N-diethylaminomethacrylate / methacrylic acid / N-phenylmaleimide / Polymethyl methacrylate macromonomer / styrene / benzyl methacrylate copolymer (copolymerization weight ratio -48-(44) (44) 200401121 = 2 0/1 0/2 0/1 5/2 0/1 5 'M w 2] 0:50 parts by weight, (E) a mixture of 200 parts by weight of propylene glycol monomethyl ether acetate, and Example] A ball mill was used to disperse the pigment, and the pigment dispersion liquid was prepared, and the rest was the same as in Example 1. The liquid composition of the radiation-sensitive composition was prepared to form a blue stripe-shaped color filter on the substrate. The substrate was observed with an optical microscope, and it was confirmed that the pattern with a line width of more than 0 μm was closely adhered to the substrate, and there was no residue on the substrate in the unexposed portion. When the substrate was observed using a light projector, there was no residue on the substrate in the unexposed portion. Pixel The Ra 値 is 20 A, and the surface is extremely smooth. The surface of the unexposed part of this substrate is wiped 10 times with a cleansing paper containing ethanol (trade name, I ensec 1 ea η er made by Toray Industries, Ltd.), This facial cleansing paper has no green coloration. Example 3 Except that the component (A) of Example 1 was changed to 100 parts by weight of CI Pigment Red 177, and the component (B) was 2-N, N-diethyl methacrylate Aminoethyl ester / methacrylic acid / N-phenylmaleimide / glyceryl monomethylpropionate / styrene / benzyl methacrylate copolymer (copolymerization weight ratio -2 0/15 / 2 0/10/1 5/2 0 'Mw = 28: 000), 90 parts by weight, (E) ingredient A mixture of 200 parts by weight of propylene glycol monomethyl ether acetate was treated in the same manner as in Example 1. The ball mill was used to disperse the pigment, and the pigment dispersion liquid was prepared, and the rest were the same as in Example 1. The liquid composition of the radiation-sensitive composition was prepared. A red stripe-shaped color filter is formed on the substrate. The obtained substrate is observed with an optical microscope to confirm that the patterns above the line width are all adhered to the substrate, and there is no residue on the substrate in the unexposed portion. Moreover, -49- (45) (45) 200401121 observed this substrate with a light projector, and there was no residue on the substrate in the unexposed portion. The Ra 値 of the pixel is 2 3 A, and the surface smoothness is extremely excellent. The surface of the unexposed part of this substrate was wiped with ethanol-containing facial cleansing paper (trade name, manufactured by Toray Industries, Inc.) e n s e c 1 e a n e 1 ·) 0 times, and the facial cleansing paper was not colored in green. Example 4 In addition to changing the component (A) of Example 1 to C.]. Pigment Blue] 5: 6 and 90 parts by weight, (B) 2-N, N-diethylaminoethyl methacrylate / Methacrylic acid / N-phenylmaleimide / poly (methyl methacrylate macromonomer / styrene / benzyl methacrylate copolymer (copolymerization weight ratio = 20/20/20/10 /] 90 parts by weight of 0/10/10, M w = 17,000), a mixture of 200 parts by weight of propylene glycol monomethyl ether acetate of the component (E), the same as in Example] dispersing the pigment with a ball mill Except that the pigment dispersion liquid was prepared, the rest of the liquid composition of the radiation-sensitive composition was modulated in the same manner as in Example 1 to form a red strip-shaped color filter on the substrate. The obtained substrate was observed with an optical microscope to confirm the line width ] All patterns above 0 μm are closely adhered to the substrate, and there is no residue on the substrate in the unexposed portion. Also: When this substrate is observed using a light projector, there is no residue on the substrate in the unexposed portion. The Ra of the pixel is 9A, and the surface is smooth Excellent performance. The surface of the unexposed part of this substrate is made of ethanol-containing cleansing paper (trade name, made by Toray Industries, Ltd.) 1 e nsecjeane 1 ·) Wipe] 0 times, this cleansing paper has no green coloring. Comparative Example 1 Except for methacrylic acid / methacrylic acid using soluble resin 鹸 2--50- (46) (46) 200401121 hydroxyethyl ester / 90 parts by weight of benzyl methacrylate / polymethyl methacrylate macromonomer copolymer (copolymerization weight ratio 5 /] 5/60 /] 0, Mw = 2 00:00) instead of the examples] (B) Except for the components, the rest is the same as in the Example] The liquid composition of the radiation-sensitive composition is modulated to form a green strip-shaped color filter on the substrate. The obtained substrate was observed with an optical microscope and the line width was confirmed to be 25 μ 】 · All the patterns above η are closely adhered to the substrate, but the patterns with a line width of 20μ! Π or less are peeled off from the substrate, and there is some residue on the substrate of the unexposed portion. Furthermore, this substrate is observed with a light projector, and the substrate of the unexposed portion is on the substrate. There are some residues. The Ra of the pixel is 3 9 A, and the surface smoothness is slightly inferior. The surface of the unexposed part of this substrate is cleaned with ethanol-containing cleansing paper (trade name, lens cleaner made by Toray Co., Ltd.) 5 times. Although this cleansing paper has no green coloring: but wipe it] 〇 This cleansing paper has a green coloration. Comparative Example 2 A radiation-sensitive composition was prepared in the same manner as in Example 1 except that the pigment dispersion liquid of Example 1 was prepared, and the dispersion treatment of a mixing ball mill was used. The liquid composition forms a green strip-shaped color filter on the substrate. The prepared substrate is observed with an optical microscope, and a pattern with a line width of 30 μm or less is peeled from the substrate. The substrate is observed with a light projector, and the substrate in the unexposed portion is observed. There is texture pollution. The Ra 値 of the pixel is 63A, and the surface smoothness is slightly worse. The surface of the unexposed part of this substrate was wiped 5 times with an alcohol-containing cleansing paper (trade name, lens cleaner manufactured by Toray Industries, Inc.). The cleansing paper had -51-(47) (47) 200401121 green coloring. Comparative Example 3 Except that the components (A), (B), and (E) of Example 1 were not previously prepared, the components (A) to (E) were temporarily mixed to prepare a liquid composition of the radiation-sensitive composition. Except the object, the rest is the same as in the embodiment], and a green strip-shaped color filter is formed on the substrate. The obtained substrate was observed with an optical microscope, and a pattern having a line width of 40 μm or less was peeled off from the substrate, and there were many residues on the substrate in the unexposed portion. Observing this substrate with a light projector, there was obvious texture contamination on the substrate in the unexposed area. The Ra 値 of the pixel is 8 8 A, and the surface smoothness is extremely poor. The surface of the unexposed portion of this substrate was wiped once with a cleansing paper (trade name, manufactured by Toray Industries, Inc.) [n s e c I e a n e r] containing ethanol, and the cleansing paper was colored green. [Effect of the invention] In the radiation-sensitive composition for a color filter of the present invention, the (A) pigment is dispersed in advance in a solution of a specific (B) alkali-soluble resin dissolved in the (E) solvent to form a smooth surface. Pixels that are excellent in adhesion and adhesion to the substrate and the light-shielding layer, and have no residue or texture pollution on the substrate and the light-shielding layer of the unexposed portion during development. Therefore, the radiation-sensitive composition for color filters of the present invention is extremely suitable for manufacturing various types of color phosphors for color phosphors used in color liquid crystal display elements in the field of electronics industry. -52
Claims (1)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002197111A JP4428911B2 (en) | 2002-07-05 | 2002-07-05 | Radiation sensitive composition for color filter, color filter and color liquid crystal display element |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200401121A true TW200401121A (en) | 2004-01-16 |
Family
ID=31704968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW092109383A TW200401121A (en) | 2002-07-05 | 2003-04-22 | Radiation sensitive composition for color filter, color filter, and color liquid display device |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4428911B2 (en) |
KR (1) | KR101027883B1 (en) |
TW (1) | TW200401121A (en) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4496818B2 (en) * | 2004-03-30 | 2010-07-07 | Jsr株式会社 | Radiation sensitive composition for color filter, color filter, and color liquid crystal display device |
JP2005316388A (en) * | 2004-03-30 | 2005-11-10 | Jsr Corp | Radiation sensitive composition for color filter, color filter and color liquid crystal display |
JP2005300994A (en) * | 2004-04-13 | 2005-10-27 | Jsr Corp | Radiation sensitive composition for forming colored layer, color filter and color liquid crystal display panel |
JP4556479B2 (en) * | 2004-04-27 | 2010-10-06 | Jsr株式会社 | Radiation-sensitive composition for forming colored layer, color filter, and liquid crystal display panel |
JP2006047686A (en) * | 2004-08-04 | 2006-02-16 | Jsr Corp | Radiation-sensitive composition for color filter, its preparation method, color filter and color liquid crystal display |
JP4584009B2 (en) * | 2005-04-18 | 2010-11-17 | 富士フイルム株式会社 | Photocurable composition and color filter using the same |
JP4635935B2 (en) * | 2006-03-29 | 2011-02-23 | Jsr株式会社 | Radiation-sensitive composition for forming colored layer, color filter, and color liquid crystal display element |
CN101082684B (en) * | 2006-06-02 | 2011-01-19 | 富士胶片株式会社 | Paint dispersion combination, optical solidification combination, filter produced thereof and producing method |
JP5371449B2 (en) | 2008-01-31 | 2013-12-18 | 富士フイルム株式会社 | Resin, pigment dispersion, colored curable composition, color filter using the same, and method for producing the same |
JP5479163B2 (en) | 2009-03-31 | 2014-04-23 | 富士フイルム株式会社 | Colored curable composition for color filter, color filter, method for producing the same, and solid-state imaging device |
JP2012003225A (en) | 2010-01-27 | 2012-01-05 | Fujifilm Corp | Polymerizable composition for solder resist and method for forming solder resist pattern |
TWI543993B (en) | 2010-03-25 | 2016-08-01 | 富士軟片股份有限公司 | Black curable composition, light-shielding color filter for a solid-state imaging device and method of producing the same, solid-state imaging device, wafer level lens, and camera module |
JP5417364B2 (en) | 2011-03-08 | 2014-02-12 | 富士フイルム株式会社 | Curable composition for solid-state imaging device, photosensitive layer, permanent pattern, wafer level lens, solid-state imaging device, and pattern forming method using the same |
KR101622990B1 (en) | 2011-09-14 | 2016-05-20 | 후지필름 가부시키가이샤 | Colored radiation-sensitive composition for color filter, pattern forming method, color filter and method of producing the same, and solid-state image sensor |
JP5934664B2 (en) | 2012-03-19 | 2016-06-15 | 富士フイルム株式会社 | Colored radiation-sensitive composition, colored cured film, color filter, colored pattern forming method, color filter manufacturing method, solid-state imaging device, and image display device |
JP5775479B2 (en) | 2012-03-21 | 2015-09-09 | 富士フイルム株式会社 | Colored radiation-sensitive composition, colored cured film, color filter, pattern forming method, color filter manufacturing method, solid-state imaging device, and image display device |
JP6302650B2 (en) | 2012-11-30 | 2018-03-28 | 富士フイルム株式会社 | Curable resin composition, method for forming dye-containing layer using the same, method for producing image sensor chip, and image sensor chip |
WO2014084288A1 (en) | 2012-11-30 | 2014-06-05 | 富士フイルム株式会社 | Curable resin composition, and image-sensor-chip production method and image sensor chip using same |
JP6170673B2 (en) | 2012-12-27 | 2017-07-26 | 富士フイルム株式会社 | Composition for color filter, infrared transmission filter, method for producing the same, and infrared sensor |
JP6162084B2 (en) | 2013-09-06 | 2017-07-12 | 富士フイルム株式会社 | Colored composition, cured film, color filter, method for producing color filter, solid-state imaging device, image display device, polymer, xanthene dye |
JP2016126155A (en) * | 2014-12-26 | 2016-07-11 | 花王株式会社 | Method for producing photosensitive coloring composition for color filter |
WO2021039205A1 (en) | 2019-08-29 | 2021-03-04 | 富士フイルム株式会社 | Composition, film, near-infrared cut-off filter, pattern formation method, laminate, solid-state imaging element, infrared sensor, image display device, camera module and compound |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5961711A (en) | 1996-12-16 | 1999-10-05 | Dainichiseika Color & Chemicals Mfg. Co., Ltd. | Pigment dispersant, pigment dispersion, and pigment dispersion for color filter |
JP4024955B2 (en) * | 1999-02-15 | 2007-12-19 | 富士フイルム株式会社 | Pigment dispersant, pigment dispersion composition containing the same, and colored photosensitive composition |
JP2000310707A (en) * | 1999-04-27 | 2000-11-07 | Jsr Corp | Radiation sensitive composition for color filter and color filter |
JP2002131523A (en) | 2000-10-20 | 2002-05-09 | Jsr Corp | Radiation sensitive composition for color liquid crystal display device, and liquid crystal display device |
-
2002
- 2002-07-05 JP JP2002197111A patent/JP4428911B2/en not_active Expired - Fee Related
-
2003
- 2003-04-22 TW TW092109383A patent/TW200401121A/en unknown
- 2003-07-04 KR KR1020030045131A patent/KR101027883B1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP4428911B2 (en) | 2010-03-10 |
JP2004037986A (en) | 2004-02-05 |
KR101027883B1 (en) | 2011-04-07 |
KR20040004171A (en) | 2004-01-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW200401121A (en) | Radiation sensitive composition for color filter, color filter, and color liquid display device | |
JP4282783B2 (en) | Radiation sensitive composition for color filter | |
US5866298A (en) | Radiation sensitive composition for color filters | |
JP3940535B2 (en) | Radiation sensitive composition for black resist | |
TWI675254B (en) | Blue photosensitive resin composition, blue color filter and display device having the same | |
JP4998735B2 (en) | Radiation sensitive composition, color filter, black matrix, and liquid crystal display device | |
KR101961219B1 (en) | A colored photosensitive resin composition | |
US9274423B2 (en) | Fluorine-based resins and photosensitive resin composition comprising the same | |
TWI416254B (en) | Photosensitive resin composition | |
TW200914992A (en) | Radiation-sensitive composition for forming colored layer, color filter and color liquid crystal display device | |
JP3767552B2 (en) | Radiation-sensitive composition, black matrix, color filter, and color liquid crystal display device | |
KR20150025674A (en) | A colored photosensitive resin composition | |
TW200523676A (en) | Radiation sensitive composition, microlens, process for forming the microlens and use of the microlens | |
TW200839441A (en) | Radiation sensitive composition for forming a colored layer, color filter and color liquid crystal display device | |
JP2006058385A (en) | Radiation sensitive composition for black resist | |
JP3807108B2 (en) | Radiation sensitive composition for color filter | |
TWI223104B (en) | Barrier rib for color filter by ink jet method | |
TWI767904B (en) | Colored photosensitive resin composition and color filter comprising the same | |
JP4075243B2 (en) | Radiation sensitive composition for color filter and color filter | |
TW201835122A (en) | Black photo sensitive resin composition, color filter comprising column spacer, black matrix or black column spacer prepared by using the composition, and display device comprising the color filter for improving adhesion of the black matrix or black column spacer | |
TW558652B (en) | Radiation sensitive composition for color filters, production process therefor, color filter and color liquid crystal display element | |
KR20150109952A (en) | Colored Photosensitive Resin Composition and Color Filter Comprising the Same | |
JP3661399B2 (en) | Radiation sensitive composition for color filter | |
TWI424270B (en) | Positive-type photosensitive resin composition, and interlayer insulator and microlens produced from the composition | |
KR102319892B1 (en) | Colored photosensitive resin composition, color filter and image display device using the same |