Nothing Special   »   [go: up one dir, main page]

SG11201500800XA - Abrasive element precursor with precisely shaped features and method of making thereof - Google Patents

Abrasive element precursor with precisely shaped features and method of making thereof

Info

Publication number
SG11201500800XA
SG11201500800XA SG11201500800XA SG11201500800XA SG11201500800XA SG 11201500800X A SG11201500800X A SG 11201500800XA SG 11201500800X A SG11201500800X A SG 11201500800XA SG 11201500800X A SG11201500800X A SG 11201500800XA SG 11201500800X A SG11201500800X A SG 11201500800XA
Authority
SG
Singapore
Prior art keywords
making
abrasive element
precisely shaped
shaped features
element precursor
Prior art date
Application number
SG11201500800XA
Inventor
Duy K Lehuu
Noah O Shanti
Junqing Xie
Kathryn R Bretscher
Vincent W Nehring
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of SG11201500800XA publication Critical patent/SG11201500800XA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/0064—Moulds characterised by special surfaces for producing a desired surface of a moulded article, e.g. profiled or polished moulding surfaces
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/632—Organic additives
    • C04B35/634—Polymers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/38—Non-oxide ceramic constituents or additives
    • C04B2235/3817—Carbides
    • C04B2235/3821—Boron carbides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/604—Pressing at temperatures other than sintering temperatures
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6587—Influencing the atmosphere by vaporising a solid material, e.g. by using a burying of sacrificial powder
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/77—Density
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
    • C04B2235/786—Micrometer sized grains, i.e. from 1 to 100 micron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/94—Products characterised by their shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
SG11201500800XA 2012-08-02 2013-07-31 Abrasive element precursor with precisely shaped features and method of making thereof SG11201500800XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261678661P 2012-08-02 2012-08-02
PCT/US2013/052817 WO2014022453A1 (en) 2012-08-02 2013-07-31 Abrasive element precursor with precisely shaped features and method of making thereof

Publications (1)

Publication Number Publication Date
SG11201500800XA true SG11201500800XA (en) 2015-04-29

Family

ID=50028486

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201500800XA SG11201500800XA (en) 2012-08-02 2013-07-31 Abrasive element precursor with precisely shaped features and method of making thereof

Country Status (8)

Country Link
US (1) US9956664B2 (en)
EP (1) EP2879837B1 (en)
JP (1) JP6474346B2 (en)
KR (1) KR102089382B1 (en)
CN (2) CN104918751B (en)
SG (1) SG11201500800XA (en)
TW (1) TWI643707B (en)
WO (1) WO2014022453A1 (en)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101607883B1 (en) 2010-12-31 2016-03-31 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 Abrasive particles having particular shapes and methods of forming such particles
CN103702800B (en) 2011-06-30 2017-11-10 圣戈本陶瓷及塑料股份有限公司 Include the abrasive product of silicon nitride abrasive particle
WO2013003831A2 (en) 2011-06-30 2013-01-03 Saint-Gobain Ceramics & Plastics, Inc. Liquid phase sintered silicon carbide abrasive particles
KR101704411B1 (en) 2011-09-26 2017-02-08 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming
CN104125875B (en) 2011-12-30 2018-08-21 圣戈本陶瓷及塑料股份有限公司 Shape abrasive grain and forming method thereof
CN104114327B (en) 2011-12-30 2018-06-05 圣戈本陶瓷及塑料股份有限公司 Composite molding abrasive grains and forming method thereof
BR112014017050B1 (en) 2012-01-10 2021-05-11 Saint-Gobain Ceramics & Plastics, Inc. molded abrasive particle
WO2013106602A1 (en) 2012-01-10 2013-07-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
EP2830829B1 (en) 2012-03-30 2018-01-10 Saint-Gobain Abrasives, Inc. Abrasive products having fibrillated fibers
BR112014029317B1 (en) 2012-05-23 2022-05-31 Saint-Gobain Ceramics & Plastics, Inc Molded abrasive particles and methods of forming them
CN104411459B (en) 2012-06-29 2018-06-15 圣戈本陶瓷及塑料股份有限公司 The method of abrasive grain and this particle of formation with specific shape
EP2879838B1 (en) 2012-08-02 2023-09-13 3M Innovative Properties Company Abrasive articles with precisely shaped features and method of making thereof
CN108015685B (en) 2012-10-15 2020-07-14 圣戈班磨料磨具有限公司 Abrasive particles having a particular shape
CN104994995B (en) 2012-12-31 2018-12-14 圣戈本陶瓷及塑料股份有限公司 Granular materials and forming method thereof
JP6155384B2 (en) 2013-03-29 2017-06-28 サンーゴバン アブレイシブズ，インコーポレイティド Abrasive particles having a particular shape and method for forming such particles
CN105228820B (en) 2013-05-17 2017-08-29 3M创新有限公司 Reactant mixture, porous granule and preparation method
TW201502263A (en) 2013-06-28 2015-01-16 Saint Gobain Ceramics Abrasive article including shaped abrasive particles
CA3114978A1 (en) 2013-09-30 2015-04-02 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and methods of forming same
JP6290428B2 (en) 2013-12-31 2018-03-07 サンーゴバン アブレイシブズ，インコーポレイティド Abrasive articles containing shaped abrasive particles
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
EP3131706B8 (en) 2014-04-14 2024-01-10 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
CN106457521A (en) 2014-04-14 2017-02-22 圣戈本陶瓷及塑料股份有限公司 Abrasive article including shaped abrasive particles
WO2015184355A1 (en) 2014-05-30 2015-12-03 Saint-Gobain Abrasives, Inc. Method of using an abrasive article including shaped abrasive particles
US20160144477A1 (en) * 2014-11-21 2016-05-26 Diane Scott Coated compressive subpad for chemical mechanical polishing
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US9707529B2 (en) 2014-12-23 2017-07-18 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
US9676981B2 (en) 2014-12-24 2017-06-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle fractions and method of forming same
TWI634200B (en) 2015-03-31 2018-09-01 聖高拜磨料有限公司 Fixed abrasive articles and methods of forming same
CN116967949A (en) 2015-03-31 2023-10-31 圣戈班磨料磨具有限公司 Fixed abrasive article and method of forming the same
CN115781499A (en) 2015-06-11 2023-03-14 圣戈本陶瓷及塑料股份有限公司 Abrasive article including shaped abrasive particles
EP3313614A4 (en) * 2015-06-25 2019-05-15 3M Innovative Properties Company Vitreous bond abrasive articles and methods of making the same
US20170335155A1 (en) 2016-05-10 2017-11-23 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles and methods of forming same
EP4071224A3 (en) 2016-05-10 2023-01-04 Saint-Gobain Ceramics and Plastics, Inc. Methods of forming abrasive articles
TWI621502B (en) * 2016-08-18 2018-04-21 中國砂輪企業股份有限公司 Double chemical mechanical polishing trimming system and method thereof
US11230653B2 (en) 2016-09-29 2022-01-25 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
KR102581481B1 (en) 2016-10-18 2023-09-21 삼성전자주식회사 Method of chemical mechanical polishing, method of manufacturing semiconductor device and apparatus of manufacturing semiconductor
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
CN110719946B (en) 2017-06-21 2022-07-15 圣戈本陶瓷及塑料股份有限公司 Particulate material and method of forming the same
US20190351527A1 (en) * 2018-05-17 2019-11-21 Entegris, Inc. Conditioner for chemical-mechanical-planarization pad and related methods
US11331767B2 (en) 2019-02-01 2022-05-17 Micron Technology, Inc. Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods
KR20220116556A (en) 2019-12-27 2022-08-23 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. Abrasive articles and methods of forming same
KR20220120669A (en) 2019-12-27 2022-08-30 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. Abrasive articles and methods of forming same
CN114213130A (en) * 2022-01-24 2022-03-22 郑州嵩山硼业科技有限公司 Preparation method of boron carbide microcrystalline abrasive body
CN114292109A (en) * 2022-01-25 2022-04-08 郑州嵩山硼业科技有限公司 Preparation method of silicon carbide microcrystalline abrasive body
CN115229670B (en) * 2022-05-25 2024-10-29 广东金鉴实验室科技有限公司 Grinding part for LED failure detection

Family Cites Families (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3765300A (en) * 1967-05-22 1973-10-16 Carborundum Co Dense carbide composite for armor and abrasives
NL8403179A (en) * 1984-10-18 1986-05-16 Philips Nv METHOD FOR MANUFACTURING AN OPTICAL FIBER INCLUDING A PLASTIC COATING AND OPTICAL FIBER WITH PLASTIC COATING MADE BY THE METHOD
US5152917B1 (en) 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
JPH05177550A (en) 1991-12-26 1993-07-20 I N R Kenkyusho:Kk Grinding wheel
JP2642573B2 (en) * 1991-12-27 1997-08-20 日本碍子株式会社 SiC based sintered body
US5435816A (en) 1993-01-14 1995-07-25 Minnesota Mining And Manufacturing Company Method of making an abrasive article
ES2134930T3 (en) 1993-09-13 1999-10-16 Minnesota Mining & Mfg ABRASIVE ARTICLE, METHOD FOR MANUFACTURING THE SAME, METHOD FOR USING THE SAME FOR THE FINISHING AND PRODUCTION TOOL.
US5453312A (en) * 1993-10-29 1995-09-26 Minnesota Mining And Manufacturing Company Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface
JP3261687B2 (en) 1994-06-09 2002-03-04 日本電信電話株式会社 Pad conditioner and method of manufacturing the same
US5692950A (en) * 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
US6021559A (en) 1996-11-01 2000-02-08 3M Innovative Properties Company Methods of making a cube corner article master mold
US6368198B1 (en) 1999-11-22 2002-04-09 Kinik Company Diamond grid CMP pad dresser
US6364749B1 (en) 1999-09-02 2002-04-02 Micron Technology, Inc. CMP polishing pad with hydrophilic surfaces for enhanced wetting
TW467802B (en) 1999-10-12 2001-12-11 Hunatech Co Ltd Conditioner for polishing pad and method for manufacturing the same
US6632127B1 (en) 2001-03-07 2003-10-14 Jerry W. Zimmer Fixed abrasive planarization pad conditioner incorporating chemical vapor deposited polycrystalline diamond and method for making same
JP2003103464A (en) 2001-09-28 2003-04-08 Mitsubishi Materials Corp Diamond coating dresser
US6642127B2 (en) 2001-10-19 2003-11-04 Applied Materials, Inc. Method for dicing a semiconductor wafer
US20030109204A1 (en) 2001-12-06 2003-06-12 Kinik Company Fixed abrasive CMP pad dresser and associated methods
JP2004001152A (en) 2002-06-03 2004-01-08 Tokyo Seimitsu Co Ltd Dresser, dressing method, polishing device, and polishing method
CN1720119A (en) 2003-01-15 2006-01-11 三菱麻铁里亚尔株式会社 Cutting tool for soft material
US7089081B2 (en) 2003-01-31 2006-08-08 3M Innovative Properties Company Modeling an abrasive process to achieve controlled material removal
US20050025973A1 (en) 2003-07-25 2005-02-03 Slutz David E. CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same
US8393934B2 (en) 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US8398466B2 (en) 2006-11-16 2013-03-19 Chien-Min Sung CMP pad conditioners with mosaic abrasive segments and associated methods
US8622787B2 (en) 2006-11-16 2014-01-07 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
TW200726582A (en) 2005-10-04 2007-07-16 Mitsubishi Materials Corp Rotary tool for processing flexible materials
JP4624293B2 (en) 2006-03-31 2011-02-02 株式会社ノリタケスーパーアブレーシブ CMP pad conditioner
US7410413B2 (en) * 2006-04-27 2008-08-12 3M Innovative Properties Company Structured abrasive article and method of making and using the same
US20080153398A1 (en) 2006-11-16 2008-06-26 Chien-Min Sung Cmp pad conditioners and associated methods
US8083820B2 (en) * 2006-12-22 2011-12-27 3M Innovative Properties Company Structured fixed abrasive articles including surface treated nano-ceria filler, and method for making and using the same
US20080233845A1 (en) * 2007-03-21 2008-09-25 3M Innovative Properties Company Abrasive articles, rotationally reciprocating tools, and methods
KR20090013369A (en) 2007-08-01 2009-02-05 주식회사 세라코리 Abrasives preventing detachment of abrasives materials
KR20100087297A (en) 2007-09-28 2010-08-04 치엔 민 성 Cmp pad conditioners with mosaic abrasive segments and associated methods
US20090123795A1 (en) 2007-11-13 2009-05-14 Chuah P E Christopher J Condensate drainage subsystem for an electrochemical cell system
KR20100106328A (en) 2007-11-13 2010-10-01 치엔 민 성 Cmp pad dressers
US8382557B2 (en) 2007-11-14 2013-02-26 Saint-Gobain Abrasives, Inc. Chemical mechanical planarization pad conditioner and methods of forming thereof
US8080073B2 (en) 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
KR20100133415A (en) 2008-03-10 2010-12-21 모간 어드밴스드 세라믹스, 인코포레이티드 Non-planar cvd diamond-coated cmp pad conditioner and method for manufacturing
KR100887979B1 (en) 2008-03-28 2009-03-09 주식회사 세라코리 Conditioning disk with a linear pattern for polishing pad
KR101020870B1 (en) 2008-09-22 2011-03-09 프리시젼다이아몬드 주식회사 Cmp conditioner coated with diamond film and method of producing the same
PL2174751T3 (en) * 2008-10-10 2014-12-31 Center For Abrasives And Refractories Res & Development C A R R D Gmbh Abrasive grain agglomerates, method for their manufacture and their application
JP2010125567A (en) * 2008-11-28 2010-06-10 Mitsubishi Materials Corp Cmp pad conditioner
WO2010063647A1 (en) 2008-12-03 2010-06-10 Struers A/S Abrasive disc
CA3081239C (en) 2008-12-17 2022-09-20 3M Innovative Properties Company Shaped abrasive particles with grooves
JP2010221386A (en) 2009-03-25 2010-10-07 Mitsubishi Materials Corp Substrate coating film, manufacturing method of substrate coating film, and cmp pad conditioner
US8801497B2 (en) 2009-04-30 2014-08-12 Rdc Holdings, Llc Array of abrasive members with resilient support
US8905823B2 (en) 2009-06-02 2014-12-09 Saint-Gobain Abrasives, Inc. Corrosion-resistant CMP conditioning tools and methods for making and using same
WO2011028700A2 (en) 2009-09-01 2011-03-10 Saint-Gobain Abrasives, Inc. Chemical mechanical polishing conditioner
JP2011161584A (en) 2010-02-12 2011-08-25 Shingijutsu Kaihatsu Kk Grinding tool
KR101091030B1 (en) 2010-04-08 2011-12-09 이화다이아몬드공업 주식회사 Method for producing pad conditioner having reduced friction
US20120171935A1 (en) 2010-12-20 2012-07-05 Diamond Innovations, Inc. CMP PAD Conditioning Tool
CN104684686A (en) 2012-08-02 2015-06-03 3M创新有限公司 Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof
EP2879838B1 (en) 2012-08-02 2023-09-13 3M Innovative Properties Company Abrasive articles with precisely shaped features and method of making thereof

Also Published As

Publication number Publication date
CN108177094B (en) 2021-01-15
US9956664B2 (en) 2018-05-01
TWI643707B (en) 2018-12-11
WO2014022453A1 (en) 2014-02-06
TW201410390A (en) 2014-03-16
JP2015527941A (en) 2015-09-24
KR102089382B1 (en) 2020-03-16
EP2879837A1 (en) 2015-06-10
EP2879837A4 (en) 2016-05-25
CN104918751B (en) 2020-03-10
CN108177094A (en) 2018-06-19
EP2879837B1 (en) 2018-09-19
JP6474346B2 (en) 2019-02-27
US20150209933A1 (en) 2015-07-30
CN104918751A (en) 2015-09-16
KR20150038332A (en) 2015-04-08

Similar Documents

Publication Publication Date Title
SG11201500800XA (en) Abrasive element precursor with precisely shaped features and method of making thereof
SG11201500802TA (en) Abrasive articles with precisely shaped features and method of making thereof
SG11201500713PA (en) Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof
EP2689253A4 (en) Microfluidic devices and methods of manufacture and use
EP2807375A4 (en) Manifold and methods of manufacturing same
GB201117522D0 (en) Visor and method of manufacture
EP2866975A4 (en) Abrasive article and method of forming
EP2670866A4 (en) Biomarkers and methods of use thereof
EP2736701A4 (en) Manufacturing method of structure and manufacturing apparatus
EP2726247A4 (en) Abrasive article and method of making
IL230650A (en) Methylphenidate-prodrugs and processes of making and using the same
EP2866972A4 (en) Abrasive article and method of forming
GB201312669D0 (en) Microneedles and method of manufacture
EP2877388A4 (en) B-pillar and method of manufacturing it
GB201207208D0 (en) Compound and method of manufacture
GB201518612D0 (en) Filter and method of manufacture
GB201107828D0 (en) Assembly and method of manufacture thereof
EP2844364A4 (en) Seam-sealed filters and methods of making thereof
PL2681375T3 (en) Connecting element and method of manufacturing
GB201102969D0 (en) Microfluidic devices and methods of manufacture thereof
GB2509246B (en) Component and method of formation thereof
PL2903448T3 (en) Hard confectionary and method of manufacture thereof
GB201203196D0 (en) Filter assembly and method of manufacture thereof
EP2782670A4 (en) Coper-zicornia catalyst and method of use and manufacture
GB201109387D0 (en) Filter assembly and method of manufacture thereof