KR20190123454A - A x-ray generating module - Google Patents

Abstract

The present invention relates to an X-ray generating module, and more particularly, to an X-ray generating module which can extend the total surface area of an electrode provided to apply a high voltage, and can improve the total surface area of an electrode that can apply a high voltage to an X-ray generating module more stably than an X-ray generating module having a pin-shaped electrode. The X-ray generating module includes an X-ray generating part, a voltage transferring part, a tube part, and a first terminal part.

Description

X-ray generating module

The present invention relates to an X-ray generating module, and more particularly, extends the total surface area of an electrode of an electrode provided to apply a high voltage, and provides a high voltage to the X-ray generating module more stably than an X-ray generating module having a pin-shaped electrode. The present invention relates to an X-ray generation module having an improved total surface area of an electrode that can be applied.

In general, the static electricity generated in the manufacturing process of a semiconductor or display device is negative, such as a breakdown of the insulating film of the device, or due to the adsorption of fine particles suspended in the production environment, the production yield of the semiconductor and display device is reduced Affect

In order to prevent a decrease in production yields due to the generation of static electricity, various static eliminators are used, and currently used static eliminators include X-ray electrostatic removers using X-ray emission, ion bars using corona discharge, and ion blowers. Etc. are used.

Among these, in the case of the ion bar and the ion blower using a corona discharge, in order to neutralize and remove the static electricity, ions are generated and released to remove the static electricity, and fine particles are formed in the discharge needle electrode provided for the generation of ions. In addition, there is a problem that can be generated and cause secondary pollution.

However, in the case of the X-ray electrostatic eliminator, since the ionization of the atmosphere using X-ray radiation having a high energy, unlike the ion bar and ion blower that induces ion generation using the discharge needle, the static electricity is not provided without the discharge needle electrode. It can be removed by neutralizing.

Therefore, when the static electricity is removed using X-rays, there is no risk of secondary contamination due to the reaction of generating fine particles around the discharge needle. The situation is mainly using the device.

In the case of the X-ray static eliminator, a filament receiving high voltage is embedded as an element for emitting X-rays, and an X-ray tube of a non-metallic material such as ceramic or glass is provided to maintain a vacuum state inside the tube.

In addition, in the manufacture of the X-ray tube, a voltage supply wire or pin-shaped electrode for applying a high voltage to the built-in filament is provided.

In order to bond the wire or pin-shaped electrode with the non-metal material X-ray tube, a plurality of holes are formed in the lower portion of the X-ray tube to penetrate the electrode, and the electrode is passed through the hole, and then the nonmetal The X-ray tube was manufactured by connecting a plurality of the electrodes through metallizing to join a material and a metal material, but there was a problem in that a leakage rate was increased due to the formation of a plurality of holes.

KR 10-1776476 B1

The problem to be solved by the present invention is to solve the above problems, to minimize the formation of holes for connecting the electrodes to reduce the leakage rate, to extend the total surface area of the electrode can apply a more stable high voltage An object of the present invention is to provide an X-ray generating module.

The X-ray generation module of the present invention includes an X-ray generator for generating high X-rays by applying a high voltage, a voltage transmitting unit including a plurality of voltage transmitting members formed of an electrically conductive material to transmit high voltages to the X-ray generating unit, and the X-rays A plurality of tubes configured to surround the generator and the voltage transfer unit, a tube unit formed of an electrically insulating material, and an electrically conductive material electrically connected to each of the plurality of voltage transfer members, and exposed to the outside of the tube unit. And a first terminal portion including a contact exposed surface.

The apparatus may further include a socket configured to receive the tube part to expose the X-ray generating part, to be detachably coupled to the tube part, to be electrically connected to an external power source, and to include a second terminal part corresponding to the first terminal part. It is characterized by.

In more detail, the voltage transfer unit includes a first voltage transfer member electrically connected to one end of the filament of the X-ray generator, and a second voltage transfer member electrically connected to the other end of the filament of the X-ray generator. It is done.

More specifically, the voltage transfer unit is characterized in that the lower end of the first voltage transfer member is disposed above the lower end of the second voltage transfer member.

More specifically, the first terminal portion is electrically connected to the first voltage transfer member, a first terminal positioned at an intermediate height of the tube portion, and the second voltage transfer member are electrically connected to the first terminal portion. And a second terminal located below the terminal.

In more detail, the first terminal may include a through hole for evacuation formed at a center thereof so that the second voltage transmission member penetrates downwardly without contacting the first terminal;

At least a portion of the tube portion comprises a first contact exposed surface penetrating in the thickness direction in the thickness direction exposed on the outer peripheral surface of the tube portion.

In more detail, the first terminal may further include a first contact area extension in which the first voltage transmitting member is in electrical contact and extends upwardly from the escape hole.

In more detail, the second terminal may include a second contact exposure surface through which at least a portion thereof penetrates in the thickness direction of the tube portion and is exposed to an outer circumferential surface of the tube portion.

In more detail, the second terminal further includes a second contact area extension in which the second voltage transmitting member is in electrical contact and extends upwardly.

In more detail, the tube portion has a hollow cylindrical shape with an open lower portion, and the second terminal is provided to seal the open lower portion of the tube portion.

In more detail, the X-ray generation module includes a pillar-shaped socket provided to protect the tube part from external impact, and the first terminal part is formed on the inner wall surface of the socket to improve the discharge total area. It is characterized in that it further comprises a second terminal portion provided at a position corresponding to the position so as to be forcibly fitted or screwed together the socket and the tube portion.

More specifically, the second terminal portion is provided with at least one to have an annular shape, the outer periphery is bound to the inner wall of the socket, the inner periphery is in contact with the first contact surface exposed surface and the second contact surface exposed surface It is characterized by receiving a voltage.

More specifically, a screw thread is formed on the outer surfaces of the first contact exposed surface and the second contact surface exposed surface of the first terminal portion, and the second terminal portion has one side surface for securing the discharge total surface area and improving the bonding force. It is seated on the socket, the other side is characterized in that the thread of a shape corresponding to the shape of the thread formed on the first contact exposed surface and the second contact exposed surface is formed.

More specifically, the socket further includes an insulating portion made of a non-conductive material on the inner wall surface of the socket, wherein the insulating portion is exposed to the first contact to electrically space the upper and lower portions of the second terminal portion. And a position corresponding to the surface and a position corresponding to the second contact exposure surface.

According to the above-described means for solving the problem, the X-ray generation module with improved surface area of the electrode of the present invention is an electrode for applying a high voltage, by a fixing structure applied to fix the pin-shaped electrode used in the existing X-ray tube By minimizing the leakage rate, it provides the effect of significantly improving the quality reliability of X-ray tubes.

In addition, the present invention provides an effect of enabling a more stable application of a high voltage by ensuring the improved surface area of the electrode through the electrode portion having a plate shape.

In addition, the present invention, when the socket is coupled, the fitting coupling and screw coupling is provided to enable, compared to the pin-shaped electrode, to minimize the mechanical deformation of the electrode portion, the effect of enabling a more stable and robust socket coupling To provide.

1 is a perspective view illustrating an X-ray generation module according to an embodiment of the present invention.
2 is a cross-sectional view illustrating a front surface of an X-ray generation module according to an embodiment of the present invention.
3 is a cross-sectional view illustrating a state in which a socket of an X-ray generating module is coupled according to an embodiment of the present invention.
Figure 4 is a cross-sectional view showing a state in which the socket of the X-ray generating module is coupled according to another embodiment of the present invention.
5 is a cross-sectional view illustrating a state in which a socket of an X-ray generating module is coupled according to another embodiment of the present invention.

Hereinafter, the technical spirit of the present invention will be described in more detail with reference to the accompanying drawings.

In addition, the accompanying drawings are only examples illustrated in order to explain the technical idea of the present invention in more detail, the technical idea of the present invention is not limited to the accompanying drawings.

The embodiments of the present invention may be modified in various other forms, and the scope of the present invention is not limited to the embodiments described below.

In addition, the shape and size of the elements in the drawings may be exaggerated for more clear explanation.

X-ray generation module 1000 according to the present invention, as shown in FIG. 1, which is a perspective view of the X-ray generation module of the present invention, the X-ray, includes a tube part 300 and a first terminal part 400. X-rays are emitted to an upper end of the tube part 300, and the first terminal part 400 is formed along the outer circumference of the tube part at the middle and the lower end thereof.

In addition, the outer circumferential diameter of the first terminal portion 400 may be equal to or larger than the outer circumferential diameter of the tube portion. Preferably, the first terminal portion 400 is prevented from being separated from the tube portion 300. The outer circumference of the first terminal portion 400 may be larger than the outer circumference of the tube portion 300.

In addition, the shape of the tube portion 300 has a cylindrical shape as a whole and has a hollow cylindrical shape with an open lower portion, but may be provided to have each column shape.

In addition, an emission part 500 is formed at the top of the tube part 300, and X-rays are emitted through the emission part 500.

The exit unit 500 includes a first exit flange 510, a second exit flange 520, and an exit window 530, and the first exit flange 510 has a shape through which a center is formed. It is coupled to the upper end of the tube portion 300, is coupled to the upper end of the first output flange 510 coupled to the upper end of the tube portion 300, the second output flange 520 is provided with a through hole in the center is provided.

In addition, an emission window 530 for emitting X-rays is coupled to an upper end of the second emission flange 520 coupled to an upper end of the first emission flange 510, and an X-ray will be described later on the bottom of the emission window 530. Hot electrons generated from the part collide with each other and a target for emitting X-rays to the outside is coated. In addition, the exit window may be made of beryllium (Be), and the target may be made of tungsten (W) metal.

Next, the X-ray generation module according to an embodiment of the present invention will be described in more detail with reference to FIGS. 2 and 3.

First, as shown in FIGS. 2 and 3, the X-ray generating module 1000 of the present invention includes an X-ray generating unit 100, a voltage transmitting unit 200, a tube unit 300, and a first terminal unit 400. do.

First, the X-ray generator 100 may be configured to include a filament 110 disposed inside the tube part 300 to generate hot electrons by applying a high voltage, and the filament 110 to focus hot electrons emitted from the filament 110. While provided to surround 110, a focusing tube 120 made of a conductive metal material including a stainless material, and is provided on the outer peripheral surface of the focusing tube, the getter for maintaining the internal environment of the tube portion 400 in a vacuum state ( Getter 130 is provided.

In particular, the filament 110 provided in the X-ray generating unit 100 is disposed in the inner center of the focusing tube 120, the material used as the filament 110 is tungsten (W), tungsten and red (Re) ), And an alloy of tungsten and thorium dioxide (ThO ₂ ), and the like.

In addition, the focusing tube 120 provided to focus the hot electrons generated from the filament 110 is provided with an open top, and the hot electrons generated from the filament 110 may be formed in the X-ray generating module 1000. It is provided in the tube portion 400 to be discharged upward.

Next, the voltage transmission unit 200 is provided to deliver a high voltage to the filament 110 of the X-ray generator, it is composed of a variety of electrically conductive materials, it may have a plate shape to be suitable for applying a high voltage.

The voltage transfer unit 200 includes a plurality of voltage transfer members, and more specifically, the plurality of voltage transfer members are divided into a first voltage transfer member 210 and a second voltage transfer member 220. .

In particular, the first voltage transmission member 210 is electrically connected to one end of the filament 110 of the X-ray generator 100, and the second voltage transmission member 220 is electrically connected to the other end of the filament 110. Connected.

More specifically, the lower end of the first voltage member 210 electrically connected to one end of the filament 110 is disposed above the lower end of the second voltage member 220, so that the first voltage member ( 210 and the lower end forming position of the second voltage member 220 are provided to be spaced apart from each other in a vertical direction.

Next, as described above, the tube part 300 may have an outer circumferential diameter of the tube part 300 equal to or smaller than an outer circumferential diameter of the first terminal part 400.

In particular, the tube part 300 may be made of a non-conductive material including ceramic, and may be brazed with the first terminal part 400 which will be described later, so that the inside of the tube part 300 maintains a vacuum state. .

Next, the first terminal 400 is electrically connected to the voltage transmitter 200 to receive a high voltage from the outside to provide a high voltage to the filament 110 connected to the voltage transmitter 200. It is characterized in that a plurality of exposed surfaces for contact are formed to improve the total surface area that is electrically conductive and to deliver a more stable high voltage.

In more detail, the first terminal part 400 includes a first terminal 410 disposed at an intermediate height of the tube part 300 and the tube part 300 while the first voltage transmitting member is electrically connected. The second terminal 420 is disposed at the bottom of the).

An evacuation through hole 411 is formed at the center of the first terminal 410.

In particular, the escaping through hole 411 extends downward while the second voltage transmitting member 220 included in the voltage transmitting unit 200 does not contact the first terminal 410. The first terminal 410 and the second terminal 420 are spaced vertically apart from each other through the first terminal 411 having the through-hole 411 for evacuation. The terminal unit 400 can be configured.

In addition, a contact area extension part 412 is formed along the inner circumference of the first terminal 410. Subsequently, the first contact area extension part 412 is provided to expand a contact area with the voltage transmission part 200 to enable the application of a stable high voltage. As described above, the first terminal 410 is provided. It extends upward while being formed along the inner periphery.

In addition, the first contact area expansion part 412 may be fitted with a focusing tube support step and a focusing tube protruding outward to more firmly support the focusing pipe 120 of the X-ray generator 100 described above. A focus pipe support groove may be formed so as to be provided.

In addition, the first terminal 410 is provided so that at least a portion of the outer circumferential surface thereof penetrates the middle height portion of the tube part 300 in the thickness direction, and the first terminal 410 is used for the first outermost outer surface The exposed surface 413 is formed, and in particular, through the formation of the first contact exposed surface 413, as described above, the surface area capable of conducting electricity can be improved to transmit a more stable high voltage.

The second terminal 420 is positioned below the first terminal 410 and is formed at a position corresponding to the through hole of the first terminal 410. ) Is provided to include a second contact area extension 421 and at least a portion of an outer circumferential surface which is connected to the second contact area 421 and a second contact exposed surface 422 provided to protrude from the outer circumferential surface of the tube portion 300.

Here, the second contact area extension part 421 is electrically connected to the second voltage transmission member 220, and in order to increase the discharge total surface area to more stably apply the high voltage power, the second terminal 420. It extends upward from the upper surface of the.

Next, as shown in Figure 3, in order to protect the tube portion 300 made of a ceramic material against external impact, a socket 600 is provided.

In particular, a second terminal portion 610a is formed on an inner wall of the socket 600 at a position corresponding to the position at which the first terminal portion 400 described above with reference to FIGS. 1 and 2 is formed, After the power is transferred to the first terminal unit 400 through the second terminal unit 610a formed on the inner wall of the socket 600, finally, the high-voltage power can be more stably supplied to the X-ray generator 100. do.

In this case, the second terminal portion 610a may be formed of a conductive material having a deformable electrical conductivity. The second terminal portion 610a may be provided to have a ring shape protruding toward the center of the socket 600, and the ring-shaped second terminal portion ( 610a) an inner side surface and an outer side surface of the first terminal unit 400 are in contact with each other.

In this case, the inner circumferential side surface of the second terminal portion 610a may be provided to have a diameter in contact with the first contact exposure surface 413 and the second contact exposure surface 422.

In particular, the second terminal portion 610a is provided to be deformable by an external force and have a restoring force, so that the first terminal portion 400 and the second terminal portion 610a can be fitted by interference, thereby, The tube portion 300 and the socket 600 can be easily coupled to each other.

In addition, an impact preventing member 620 may be provided on the inner bottom surface of the socket 600 to prevent the tube portion 300 and the first terminal portion 400 from being damaged by an external force. As the material of the member, an elastic polymer material having excellent impact absorption force can be used.

Next, the X-ray generation module according to another embodiment of the present invention will be described in more detail with reference to FIG. 4.

As shown in FIG. 4 according to another embodiment of the present invention, in the outer circumferential shape of the first contact exposed surface 413 and the second contact exposed surface 422, the upper diameter is narrow and the lower It is possible to further improve the discharge total area between the first terminal portion 400 and the second terminal portion 610a by having a tapered shape inclined upwardly downward to widen the diameter.

In addition, in the tapered shape, as it progresses from the upper side to the lower side, the narrower the formation, the simpler, the first terminal portion 400 from the second terminal portion 610a may be provided so as not to be separated easily.

Next, the X-ray generation module according to another embodiment of the present invention will be described in more detail with reference to FIG. 5.

Referring to FIG. 5 according to another embodiment of the present invention, a second terminal portion 610b and an insulating portion 630 having threads formed on the inner circumferential surface of the socket 600 are provided.

Threads are also formed on the first contact exposed surface 413 and the second contact exposed surface 422 so as to mutually screw with the threaded second terminal portion 610b, whereby a larger discharge total surface area is obtained. It is possible to ensure, and at the same time it is possible to further improve the coupling force between the first terminal portion 400 and the second terminal portion 610b including the first contact exposed surface and the second contact exposed surface.

In addition, as the insulating part 630 may have a current having a different directionality from the first contact exposed surface 413 and the second contact exposed surface 422, the second terminal portion 610b. It is preferable to use a non-conductive material as it is provided to electrically separate the upper and lower portions of the electrode.

1000: X-ray generation module
100: X-ray generator
110: filament
120: focusing tube
130: getter
200: voltage transfer unit
210: first voltage transmission member
220: second voltage transmission member
300 tube portion
400: first terminal portion
410: first terminal
411: escape hole
412: first contact area extension
413: exposed surface for first contact
420: second terminal
421: second contact area extension
422: exposed surface for the second contact
500: exit part
510: first exit flange
520: second exit flange
530: exit window
600: socket
610a: second terminal portion
610b: second terminal portion
620: shockproof member
630: insulation

Claims (14)

An X-ray generating unit generating X-rays by applying a high voltage;
A voltage transfer unit including a plurality of voltage transfer members formed of an electrically conductive material to transfer a high voltage to the X-ray generator;
A tube part configured to surround the X-ray generator and the voltage transmission part, the tube part including an electrically insulating material;
And a first terminal part made of an electrically conductive material so as to be electrically connected to each of the plurality of voltage transmission members, the first terminal part including a plurality of contact exposed surfaces exposed to the outside of the tube part.
An X-ray generating unit generating X-rays by applying a high voltage;
A voltage transfer unit including a plurality of voltage transfer members formed of an electrically conductive material to transfer a high voltage to the X-ray generator;
A tube part configured to surround the X-ray generator and the voltage transmission part, the tube part including an electrically insulating material;
A first terminal part made of an electrically conductive material to be electrically connected to each of the plurality of voltage transmission members, the first terminal part including a plurality of contact exposed surfaces exposed to the outside of the tube part; And
An X-ray generation unit including a socket accommodating the tube unit to expose the X-ray generating unit, and detachably coupled to the tube unit, and electrically connected to an external power source and having a second terminal unit corresponding to the first terminal unit. module. The method according to claim 1 or 2,
The voltage transfer unit,
A first voltage transmission member electrically connected to one end of the filament of the X-ray generator;
And a second voltage transmission member electrically connected to the other end of the filament of the X-ray generator. The method of claim 3, wherein
The voltage transfer unit,
And a lower end of the first voltage transmitting member is disposed above the lower end of the second voltage transmitting member. The method of claim 3, wherein
The first terminal portion,
A first terminal electrically connected to the first voltage transmitting member and positioned at a middle height of the tube part;
And a second terminal electrically connected to the second voltage transmitting member and positioned below the first terminal. The method of claim 5,
The first terminal,
An evacuation through hole formed at a center thereof so that the second voltage transmission member penetrates downwardly without being in contact with the first terminal;
And an at least part of the first contact exposed surface penetrating the middle height portion of the tube portion in a thickness direction and exposed to an outer circumferential surface of the tube portion. The method of claim 6,
The first terminal,
And a first contact area extension part in electrical contact with the first voltage transmitting member and extending upwardly from the escape hole. The method of claim 5,
The second terminal,
And an at least part of the second contact exposed surface penetrating in the thickness direction of the tube portion and exposed to an outer circumferential surface of the tube portion. The method of claim 8,
The second terminal,
And a second contact area extension part in electrical contact with the second voltage transmission member and extending upward. The method of claim 8,
The tube portion is a hollow cylindrical shape of the lower opening,
The second terminal,
X-ray generation module, characterized in that provided to seal the open lower portion of the tube. The method of claim 2,
The X-ray generation module,
It includes a pillar-shaped socket provided to protect the tube portion from external impact,
In order to improve the discharge total area, the socket inner wall further includes a second terminal portion provided at a position corresponding to the position at which the first terminal portion is formed so that the socket and the tube portion can be mutually interference-fitted or screwed together. X-ray generation module, characterized in that. The method of claim 11,
The second terminal portion,
While at least one is provided to have a ring shape, the outer periphery is bound to the inner wall of the socket, the inner periphery is in contact with the first contact surface exposed surface and the second contact surface exposed surface X-ray generation module characterized in that the voltage is applied . The method of claim 10,
Threads are formed on the outer surfaces of the first contact exposed surface and the second contact exposed surface of the first terminal portion,
The second terminal portion,
In order to secure the discharge surface area and improve the coupling force, one side is seated in the socket, and the other side is formed with a thread having a shape corresponding to the shape of the thread formed on the first contact exposed surface and the second contact exposed surface. X-ray generation module, characterized in that. The method of claim 12,
The socket is
Further comprising an insulating portion made of a non-conductive material on the inner wall surface of the socket,
The insulation portion,
The X-ray generation module, characterized in that formed between the position corresponding to the first contact exposed surface and the position corresponding to the second contact exposed surface to electrically separate the upper and lower portions of the second terminal portion.

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