KR20180115229A - Operation control apparatus of vacuum pump apparatus and operation control method thereof - Google Patents

Abstract

A vacuum pump that is more compact and lower in cost as compared with prior arts is provided. A vacuum pump assembly (1) includes a main pump (10) and a booster pump (20). Each of the pumps has an intake port (11a, 21a) and an exhaust port (11b, 21b). The intake port (11a) of the main pump (10) intercommunicates with the exhaust port (21b) of the booster pump (20). A switch receives a start instruction for starting the main pump (10). When the switch receives the start instruction and the main pump (10) starts, it is determined based on the start instruction whether the booster pump (20) is started, and the booster pump (20) is started.

Description

TECHNICAL FIELD [0001] The present invention relates to an operation control apparatus for a vacuum pump apparatus,

The present invention relates to an operation control apparatus for a vacuum pump apparatus having a main pump and a booster pump, and to an operation control method.

BACKGROUND ART In recent years, a dry vacuum pump capable of operating at atmospheric pressure and easily obtaining a clean vacuum environment has been used in a wide range of fields as a component of a semiconductor manufacturing facility and a manufacturing facility of a liquid crystal. Conventionally, a pump control section, a pressure sensor, a main pump inverter, and a booster pump inverter are used for operation of a dry vacuum pump incorporating a main pump MP and a booster pump BP. In order to start the booster pump, a pressure sensor is required. The reason is as follows.

The main pump and the booster pump each have an intake port and an exhaust port, and the exhaust port of the booster pump is communicated with the intake port of the main pump. The intake port of the booster pump is the intake side of the vacuum pump device, and the exhaust port of the main pump is the exhaust side of the vacuum pump device. A pressure sensor is disposed in a pipe connecting the exhaust port of the booster pump and the inlet port of the main pump. The pressure sensor detects the pressure in the pipe. The timing of starting the booster pump determines whether the pressure value measured by the pressure sensor is appropriate or not, and if appropriate, the pump control unit outputs a start signal to the booster pump inverter.

The reasons why the main pump and the booster pump are not activated at the same time are as follows. This is because the booster pump can not stably operate the booster pump because the load of the booster pump is large unless the pressure of the pipe between the booster pump and the main pump is set to a vacuum of a predetermined pressure or less. Thus, the booster pump is started after the piping between the main pump and the booster pump is evacuated by the operation of the main pump.

The start and stop of the dry vacuum pump are conventionally performed as follows. The operation of the start switch of the user causes the main pump to start. The pump control section judges whether or not the pressure of the piping between the main pump and the booster pump is a vacuum of a predetermined pressure or less. When it is judged that the vacuum is below the predetermined pressure, the pump control section sends a command to the booster pump inverter to start the booster pump.

When the main pump stops due to the operation of the user's stop switch or the occurrence of an alarm in the main pump, the pump control unit sends a command to the booster pump inverter to stop the booster pump. On the other hand, when the booster pump is stopped by the occurrence of an alarm in the booster pump, the pump control unit judges whether or not to stop the main pump. When it is judged that it is not necessary to stop the main pump, the main pump is not stopped . The reason is as follows. Even if the booster pump is stopped, if the main pump is operating, the rate at which the pressure in the container to be vacuumed is raised can be suppressed. Further, when the stop of the booster pump is stopped due to the reason inherent in the booster pump, the main pump is considered to be normal. Thus, whether to continue operation of the main pump depends on the design of the user or designer of the vacuum system.

Japanese Patent No. 4218756

A conventional vacuum pump and a dry vacuum pump incorporating a booster pump require a pressure sensor and a signal processing circuit of a pressure sensor in order to appropriately start the booster pump. Therefore, an installation space for the pressure sensor is required, and the vacuum pump has been enlarged. Also, due to the cost for the pressure sensor and its signal processing circuit, the vacuum pump was expensive.

An aspect of the present invention is to solve such a problem, and an object of the present invention is to provide a vacuum pump which is smaller in size and lower in cost than conventional ones.

In order to solve the above-mentioned problems, in a first aspect of the present invention, there is provided an operation control device for a vacuum pump device having a main pump and a booster pump, wherein each of the pumps has an inlet port and an exhaust port, Wherein the suction port of the booster pump is an intake side of the vacuum pump device and the exhaust port of the main pump is an exhaust side of the vacuum pump device and the operation control device is operated to start the main pump Wherein the start instruction accepting unit accepts the start instruction and determines whether or not to start the booster pump when the main pump is started based on the start instruction, And a booster pump starting section for starting the booster pump It adopts the castle.

In the present embodiment, the main pump and the booster pump can be started without using the pressure sensor and the signal processing circuit of the pressure sensor and without using the pressure sensor. Therefore, when the start instruction receiving section receives the start instruction and when the main pump is started, the booster pump starting section determines whether or not to start the booster pump based on the start instruction, and activates the booster pump. Since there is no pressure sensor and no signal processing circuit of the pressure sensor, it is possible to provide a vacuum pump that is smaller in size and lower in cost than the conventional one.

The reason why the operation is possible without the pressure sensor is as follows. Conventionally, the reason why the main pump and the booster pump are not activated at the same time is that if the pressure in the piping between the booster pump and the main pump is not a vacuum of a predetermined pressure or less, the load of the booster pump is large, This is because the pump can not be operated stably. Conventionally, the booster pump is started after the piping between the main pump and the booster pump is evacuated by the operation of the main pump.

It is presumed that the pressure between the main pump and the booster pump becomes a level at which the booster pump can be started when the number of revolutions exceeds a predetermined value after a predetermined time elapses after the main pump is started. This is because the volume of the intake side (upper side) of the main pump is not infinite. On the suction side of the vacuum pump device, a container to be vacuumed is provided. The dry vacuum pump evacuates the gas in the container to make the inside of the container vacuum. Since the volume of the vessel is finite, the volume of the intake side (upper side) of the main pump is not infinite. From the above, if it is known that a predetermined time has elapsed after starting the main pump, the booster pump can be safely started. Further, when a short time has elapsed after the main pump has been stopped, the degree of vacuum in the piping is not largely lowered, so that the booster pump can be started safely immediately after the main pump is started.

The time for starting the booster pump or the number of revolutions of the main pump for starting can be determined by experiment or the like. However, when there is an unexpected situation, that is, when the volume of the container is much larger than the assumption at the time of designing the pump, or when the container is not sealed by a mistake or the like, If there is influx, there are the following countermeasures. In such a case, even if the main pump becomes a predetermined number of revolutions, the pressure between the main pump and the booster pump may not reach a vacuum sufficient to stably operate the booster pump even after a predetermined time elapses. In this case, since the current flowing through the motor for the booster pump becomes large, the current of the motor for the booster pump is detected by the inverter device of the booster pump, and the booster pump overcurrent alarm is generated. Booster pump When an over-current alarm is detected, stop the booster pump. Further, a signal indicating the stop of the booster pump is transmitted from the digital output section of the inverter device for the booster pump to the digital input section of the main pump inverter device, thereby stopping the main pump and stopping the pump system safely.

In the second aspect, the booster pump starting unit determines that the booster pump can be started when the start instruction accepting unit receives the start instruction, and activates the booster pump. Configuration.

In the third aspect, the booster pump startup section determines that the booster pump can be started when the start instruction reception section receives the start instruction and a predetermined time elapses, And the operation control device is characterized in that the operation control device is used.

In the fourth aspect, the booster pump startup unit may start the booster pump when the start instruction reception unit receives the start instruction and the number of revolutions of the main pump is equal to or greater than a predetermined number over the predetermined time period And the booster pump is started up. The operation control device is characterized in that the booster pump is started.

In the fifth aspect, the booster pump startup section may be configured such that the startup instruction accepting section receives the start instruction, while the rotation number of the main pump is equal to or greater than a predetermined number over the predetermined time, And when the current value of the motor is equal to or smaller than a predetermined value, it is determined that the booster pump can be started, and the booster pump is started.

In the present embodiment, it is determined that the booster pump can be started when the current value of the motor for driving the main pump is equal to or smaller than the predetermined value. Whether or not the pressure between the main pump and the booster pump can not be actually measured because the pressure sensor is absent determines whether or not the pressure required for stable operation of the booster pump has reached a presumption based on the results of experiments or the like. One method for improving the accuracy of this guess is the method of the present embodiment. In this embodiment, after the main pump reaches a predetermined number of revolutions, the current of the main pump is monitored. When the predetermined time elapses after the current of the main pump drops to a predetermined value, the booster pump is started.

The current flowing in the main pump motor is proportional to the flow rate of the gas introduced into the main pump. That is, when operation is started and the pressure in the vessel is high in the near future, the main pump current is high. When the gas in the vessel is exhausted and the pressure higher than the main pump is lowered, the current of the main pump is lowered. From this fact, it is possible to infer the pressure on the upper side of the main pump with higher precision than that assumed based on the number of revolutions and the time, which is estimated based on the number of revolutions and the current and time. Therefore, it is possible to reliably grasp that the condition for starting the rotation of the booster pump is established, and it is possible to reduce the possibility of alarm occurrence at the start of the booster pump.

In the sixth aspect, the operation control device includes a stop instruction accepting unit for accepting a stop instruction for stopping the main pump, and a stop instruction accepting unit for accepting the stop instruction. When the main pump stops, And a booster pump stop section for determining whether or not to stop the pump based on the stop instruction and stopping the booster pump.

In the seventh aspect, the operation control device includes a main pump abnormality detection unit for detecting an abnormality of the main pump, and a control unit for stopping the main pump and the booster pump when the main pump abnormality detection unit detects an abnormality of the main pump And an abnormality stopping section for stopping the abnormality when the abnormality is detected.

In the eighth aspect, the operation control device includes a booster pump abnormality detection unit for detecting an abnormality of the booster pump, and a booster pump abnormality detection unit for stopping the booster pump when the booster pump abnormality detection unit detects an abnormality in the booster pump, And a stopper portion for stopping the pump when the booster pump is abnormal.

In the present embodiment, when the booster pump is stopped, the main pump is not stopped. This is because it is not always necessary to stop the main pump when the booster pump is stopped. Even if the booster pump is stopped, the speed at which the pressure in the container rises can be suppressed if the main pump is operating. Therefore, whether or not the booster pump stops the main pump when the booster pump stops due to the reason inherent in the booster pump, or whether the main pump continues the operation is according to the design concept of the vacuum system. When the user or the like desires to continue the operation of the main pump, it is not necessary to transmit a signal for stopping the booster pump to the digital input section for the main pump from the digital output section for the booster pump. Further, even if a signal is transmitted, the main pump does not need to stop the main pump even if it receives the signal of stopping the booster pump.

In the ninth aspect, the operation control apparatus includes a signal input section that receives a signal for controlling the rotational speed of the main pump and / or the booster pump from the outside. .

In the tenth aspect, in the operation control method for a vacuum pump apparatus having a main pump and a booster pump, each of the pumps has an inlet port and an exhaust port, , The intake port of the booster pump is the intake side of the vacuum pump device and the exhaust port of the main pump is the exhaust side of the vacuum pump device, the operation control method includes a step of accepting a start instruction for starting the main pump And a step of receiving the start instruction and determining whether to start the booster pump when the main pump is started based on the start instruction and starting the booster pump Method is adopted.

1 is a block diagram showing a schematic configuration of a vacuum pump apparatus having an operation control device according to an embodiment of the present invention.
2 is a block diagram showing a schematic configuration of a vacuum pump apparatus having an operation control device according to a comparative example.
3 is a block diagram showing the configuration of the main pump inverter 41. As shown in Fig.
Fig. 4 is a block diagram showing the flow of signals in the inverter control circuit 66. Fig.
5 is a block diagram showing the exchange of signals between the inverter control circuit 66 of the main pump 10 and the inverter control circuit 66 of the booster pump 20. Fig.
6 is a diagram showing the relationship between the start and stop timings of the main pump 10 and the booster pump 20. Fig.
7 is a diagram showing the relationship between the start and stop timings of the main pump 10 and the booster pump 20. Fig.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, the same or equivalent members are denoted by the same reference numerals, and redundant description is omitted.

1 is a block diagram showing a schematic configuration of a vacuum pump apparatus having an operation control device according to an embodiment of the present invention. As shown in the figure, the vacuum pump apparatus 1 is provided with a main pump 10 and a booster pump 20, which are two-axis volumetric dry vacuum pumps. The main pump 10 has a pump section 102 and a motor section (pump drive electric motor) 104. The pump section 102 has an intake port 11a and an exhaust port 11b. The booster pump 20 also has a pump section 202 and a motor section (pump drive electric motor) 204. The pump section 202 includes an intake port 21a and an exhaust port 21b.

The suction port 11a of the main pump 10 is connected to the exhaust port 21b of the booster pump 20 via a connection pipe 31 to communicate with each other. The suction port 21a of the booster pump 20 is connected to an exhaust port (not shown) of a container (not shown) through a connection pipe 92 to constitute the vacuum pump device 1. [ The suction port 11a of the booster pump 20 is set to the suction side of the vacuum pump device 1 and the discharge port 11b of the main pump 10 is set to the exhaust side of the vacuum pump device 1. [ The gas in the vessel is sucked from the suction port 21a of the booster pump 20 as shown by arrow A by operating the motor units 104 and 204 and the pump units 102 and 202 of the main pump 10 and the booster pump 20 Suction). The sucked gas is sucked into the suction port 11a of the main pump 10 from the discharge port 21b of the booster pump 20 and discharged from the discharge port 11b as indicated by the arrow B.

The main pump inverter 41 supplies driving current to the motor section 104 (pump driving electric motor) through the feeder line L1. The booster pump inverter 42 supplies driving current to the motor unit 204 (pump driving electric motor) through the feeder line L2. The main pump inverter 41 and the booster pump inverter 42 transmit signals for starting or stopping via the signal line 50. Details of the signals for starting or stopping will be described later.

The starting and stopping of the vacuum pump apparatus 1 is roughly performed as follows. The start / stop instruction 60 is input to the main pump inverter 41 by the operation of the start / stop switch of the user, and the pump unit 102 is started. The main pump inverter 41 transmits a signal for starting the pump section 202 via the signal line 50. The pump unit 202 is started by this signal.

The stopping is as follows. A signal for stopping the pump section 202 is transmitted to the main pump inverter 41 via the signal line 50 when an alarm is generated in the pump section 102 of the main pump 10 and the pump section 102 is stopped, Lt; / RTI > The pump unit 202 is stopped by this signal.

When an alarm occurs in the pump unit 202 of the booster pump 20 and the booster pump is stopped, the main pump 10 is not stopped. At this time, the booster pump 20 is started once more by the retry function of the booster pump inverter 42. [

When the main pump 10 is stopped by the operation of the start / stop switch of the user, the main pump inverter 41 transmits a signal for stopping the pump unit 202 via the signal line 50. The pump unit 202 is stopped by this signal. Further, the booster pump inverter 42 has a function of controlling the booster pump rotation speed by the external analog voltage 62.

Here, for comparison with the present embodiment, Fig. 2 shows a vacuum pump apparatus 52 requiring a pressure sensor for starting the booster pump. 2 is a block diagram showing a schematic configuration of a vacuum pump apparatus 52 having an operation control apparatus according to a comparative example. A pressure sensor 54 is disposed in a connection pipe 31 connecting the exhaust port 2lb of the pump section 202 of the booster pump 20 and the intake port 11a of the pump section 102 of the main pump 10 . The pressure sensor 54 detects the pressure in the connection pipe 31. The pressure detected by the pressure sensor 54 is sent to the pump control unit 56. The pump control section 56 determines whether or not the pressure value measured by the pressure sensor 54 is an appropriate value in order to detect the timing at which the pump section 202 of the booster pump 20 is started. When the pressure value is appropriate, the pump control section 56 outputs the start signal 58 to the booster pump inverter 421.

The main pump inverter 41 in this embodiment will be described with reference to Fig. 3 is a block diagram showing the configuration of the main pump inverter 41. As shown in Fig. The booster pump inverter 42 has substantially the same configuration as that of the main pump inverter 41. Other points will be mentioned in the following description of the main pump inverter 41. The main pump inverter 41 and the booster pump inverter 42 have the same configuration and operation as those of the main pump inverter 41 without mention of the booster pump inverter 42. [

The main pump inverter 41 includes an inverter main circuit 64 for supplying an AC current to the motor unit 104 to drive the motor unit 104 and an inverter main circuit An inverter control circuit 66 for indirectly driving the motor section 104 and a power source 68 inputted to the main pump inverter 41 for controlling the inverter control circuit 66 And a control circuit power supply 70 for generating a low-voltage direct-current power supply. In general, 100 V, 200 V, and 400 V of AC are input to the main pump inverter 41. On the other hand, the inverter control circuit 66 is driven with 3.3V, 5V, 12V, or the like of DC. The inverter control circuit 66 records an alarm detection based on an input signal to the inverter control circuit 66, a display, a target rotation speed, and the like, or records the operation history of the inverter. The inverter control circuit 66 of the main pump 10 and the inverter control circuit 66 of the booster pump 20 and the switch 86 constitute a drive control device.

The main pump inverter 41 further has an alarm detection section 72, a temperature detection section 74, a current detection section 76 and a revolution number detection section 78. When the motor unit 104 exceeds a predetermined current, temperature, or rotation number, or when the specified rotation number is not reached even after a predetermined time has elapsed since the pump unit 102 was started, And outputs the alarm detection signal 108 to the digital signal detection unit 80. The processing of the alarm detection signal 108 in the digital signal detection unit 80 will be described later.

The current, temperature, and number of rotations are detected by the following current detector 76, temperature detector 74, and rotation number detector 78. The current detection unit 76, the temperature detection unit 74 and the rotation number detection unit 78 output the detection results to the alarm detection unit 72 as shown in Fig. Fig. 4 is a block diagram showing the flow of signals in the inverter control circuit 66. Fig.

The temperature detector 74 receives a temperature signal from a temperature sensor provided outside the main pump inverter 41 and converts it into temperature information in a predetermined format. And transfers the converted information to the alarm detection unit 72. [ The temperature detection unit 74 is a CPU having an analog circuit or an A / D conversion function. By measuring the temperature of each part of the main pump 10, the load of the pump can be estimated. The temperature sensor is installed, for example, in the main body of the pump section 102 or the motor section 104. The temperature sensor is disposed between the front end of the intake port 21a of the booster pump 20 and the booster pump 20 and between the main pump 10 and the booster pump 20 and the rear end of the exhaust port 11b of the main pump 10 And may be installed in the pipe 94.

The current detector 76 receives a signal from the current sensor and converts it into current information in a predetermined format. And transfers the converted information to the alarm detection unit 72. [ The current detection unit 76 is a CPU having an analog circuit or an A / D conversion function. The current sensor is, for example, installed in the output section or the input section of the main pump inverter 41 and the motor section 104. The current sensor is, for example, a Hall current detector. The Hall current detector measures the current by measuring the magnetic flux (magnetic flux) generated in proportion to the current in a noncontact manner by a combination of the magnetic core and the magnetic sensor (Hall element).

The rotation number detection section 78 obtains the rotation number of the motor from the motor current obtained from the current detection section 76. The rotation number detecting section 78 estimates the position of the magnetic pole of the motor from the deformation of the waveform of the motor current and continuously estimates the position of the motor magnetic pole to obtain the rotation number of the motor. Instead of using the motor current, a magnetic pole sensor or a rotation number sensor may be provided in the motor, and the sensor signal obtained by these sensors may be received by the rotation number detection section to detect the motor rotation number. In this case, since the phase (phase) of the motor can be grasped with high precision more easily than the estimated number of rotations from the current, the motor can be more stably controlled.

The main pump inverter 41 further has a voltage frequency control section 100, a digital signal detection section 80, a digital signal output section 82 and an analog signal detection section 84. The voltage frequency control unit 100 controls the inverter main circuit 64 to apply an electric signal having a predetermined frequency and voltage to the motor unit 104. [ The voltage frequency control unit 100 controls the inverter main circuit 64 to start or stop the motor unit 104. [

The digital signal detecting unit 80 detects a switch signal 88 (analog signal or digital signal) from the switch 86 for starting and stopping the vacuum pump apparatus 1, a digital signal A start / stop signal, and a digital signal (TH temperature signal, alarm generation signal, etc.) from the upper (lower) device. The digital signal detection unit 80 determines whether or not to start the booster pump 20 based on the start instruction when the main pump 10 is started and controls the booster pump startup unit , But this point will be described later.

The switch 86, which is a start instruction accepting unit for accepting a start instruction for starting the main pump 10, outputs a switch signal 88. [ The start instruction is input by the user of the vacuum pump apparatus 1 by operating the switch 86. [ The switch 86 is used to instruct the user to start and stop the main pump 10. That is, the switch 86 is a stop instruction accepting section for accepting a stop instruction for stopping the main pump. The stop instruction is input by the user of the vacuum pump apparatus 1 by operating the switch 86. [ Whether the instruction is a start instruction or a stop instruction is identified by, for example, whether the voltage of the switch signal 88 is a high level or a low level.

The digital signal detecting section 80 of the main pump inverter 41 discriminates whether the switch signal 88 from the switch 86 is at the high level or the low level. And outputs the start signal or the stop signal as the signal 106 to the voltage frequency control unit 100 based on the identification result. Whether the signal 106 is a start instruction or a stop instruction is identified, for example, by whether the voltage of the signal 106 is a high level or a low level. The voltage frequency control unit 100 receiving the signal 106 controls the inverter main circuit 64 to start or stop the main pump 10. Further, the digital signal detecting section 80 outputs the identification result to the digital signal output section 82.

The digital signal detection unit 80 of the booster pump inverter 42 detects a start / stop signal which is a digital signal output from the digital signal output unit 82 of the main pump inverter 41. [ The digital signal detecting section 80 of the booster pump inverter 42 which receives the start / stop signal which is a digital signal outputted from the digital signal output section 82 of the main pump inverter 41 discriminates whether it is a start signal or a stop signal . And outputs a start signal or a stop signal to the voltage frequency control unit 100 of the booster pump inverter 42 based on the identification result. The voltage frequency control unit 100 receiving these signals controls the inverter main circuit 64 to start or stop the booster pump 20.

The digital signal detecting section 80 can receive the signal from the switch 86 or the start signal / stop signal based on the digital signal. (In the case of the main pump inverter 41) according to the switch 86 and to start / stop by the digital signal (in the case of the booster pump inverter 42), a) And b) a method of externally inputting a digital signal according to which instruction.

The digital signal detection unit 80 of the main pump inverter 41 and the booster pump inverter 42 detects the TH temperature signal, the alarm generation signal, and the like. The TH (thermal protector) is a temperature sensor for preventing overheating of the motor and is a temperature sensor in which the internal contact of the temperature sensor is opened when the motor temperature reaches a predetermined temperature. The digital signal detecting unit 80 detects that the internal contact of the temperature sensor is opened from the TH temperature signal. As a method of detecting the open state, for example, there is a method of configuring the circuit so that the TH temperature signal changes from a low level to a high level when the circuit is opened.

The digital signal output section 82 receives a start stop signal from the digital signal detection section 80 and outputs a digital signal (start (stop) signal 96) to the upper (lower) device. 5, the digital signal output section 82 of the main pump inverter 41 outputs the start (stop) signal 96 to the digital signal detection section 80 of the booster pump inverter 42 . The digital signal output section 82 of the booster pump inverter 42 outputs an alarm generation signal to the digital signal output section 82 of the booster pump inverter 42. 5 is a block diagram showing the exchange of signals between the inverter control circuit 66 of the main pump 10 and the inverter control circuit 66 of the booster pump 20. Fig.

The digital signal detecting section 80 of the main pump inverter 41 receives the start instruction from the start instruction accepting section (switch 86) and, when the pump section 102 of the main pump inverter 41 is started, Is a booster pump startup unit that determines whether or not to start the pump unit 202 of the inverter 42 based on a start instruction and starts the pump unit 202. [ The determination method may be varied depending on the use, condition, and characteristics of the vacuum pump apparatus 1.

6, the digital signal detecting unit 80 of the main pump inverter 41 is turned off after the switch 86 receives the start instruction, and after a predetermined time 90 (when the booster pump is started Delay time) has elapsed, it is determined that the booster pump 20 can be started, and the booster pump 20 is started. At this time, the digital signal detecting section 80 sends a signal for starting the booster pump 20 to the digital signal output section 82. The digital signal output section 82 sends a start signal to the digital signal detection section 80 of the booster pump 20. 6 is a diagram showing the relationship between the start and stop timings of the main pump 10 and the booster pump 20. Fig.

Here, the predetermined time 90 may be 0 second. That is, the digital signal detection unit 80 of the main pump inverter 41 determines that the booster pump 20 can be started when the switch 86 receives the start instruction, and activates the booster pump 20 There is a case. When the elapsed time is short after the booster pump 20 is stopped, the vacuum degree in the connection pipe 31 is not lowered, so that the booster pump 20 can be started immediately.

The digital signal detecting unit 80 of the main pump inverter 41 is turned on when the switch 86 receives the start instruction and when the number of revolutions of the main pump 10 exceeds the predetermined number over a predetermined time, 20 can be started, and the booster pump 20 may be started. The rotation number is sent from the rotation number detection unit 78 to the digital signal detection unit 80 as the signal 110. [ It is considered that the degree of vacuum in the coupling pipe 31 is reliably reduced by considering the number of revolutions.

The digital signal detecting unit 80 of the main pump inverter 41 detects that the rotation speed of the main pump 10 is equal to or greater than the predetermined number after the switch 86 receives the start instruction, It may be determined that the booster pump 20 can be started and the booster pump 20 is started when the current value of the motor for driving the pump is equal to or smaller than the predetermined value. The current value is sent from the current detecting section 76 to the digital signal detecting section 80 as the signal 112. [ It is considered that the degree of vacuum in the coupling pipe 31 is more reliably reduced by considering the current value and the number of revolutions of the motor.

The inverter control circuit 66 of the main pump inverter 41 includes a stop instruction reception portion (switch 86) for receiving a stop instruction for stopping the main pump 10 and a stop instruction reception portion A booster pump stop section (digital signal detecting section 80) for stopping the booster pump 20 is determined by determining whether or not to stop the booster pump 20 when the main pump 10 stops, . In this case, as shown by the time 114 in Fig. 6, the booster pump 20 is stopped at the same time as the main pump 10 is stopped.

At this time, the digital signal detecting unit 80 sends a stop signal to the voltage frequency control unit 100 to stop the main pump 10, and outputs the stop signal to the digital signal output unit 82 to stop the booster pump 20. [ As shown in FIG.

The operation control device includes a main pump abnormality detecting section (an alarm detecting section 72 of the main pump 10) for detecting an abnormality of the main pump 10 and an alarm detecting section 72 for detecting abnormality of the main pump 10 (The main pump 10 and the digital signal detecting unit 80 of the booster pump 20) for stopping the main pump 10 and the booster pump 20 when the main pump 10 is stopped. That is, the main pump 10 and the digital signal detecting unit 80 of the booster pump 20 respectively apply the main inverter 10 and the inverter main circuit 64 of the booster pump 20 to the voltage frequency control unit 100, .

The main pump 10 is stopped from the alarm detection unit 72 of the main pump 10 to the digital signal detection unit 80 and from the digital signal detection unit 80 to the voltage frequency control unit 100 A signal flows, and the main pump 10 is stopped. The stoppage of the booster pump 20 is detected by the alarm detection unit 72 of the main pump 10 from the digital signal detection unit 80 to the digital signal output unit 82, A signal flows from the signal output section 82 to the digital signal detection section 80 of the booster pump 20 to the voltage frequency control section 100 from the digital signal detection section 80 and the booster pump 20 is stopped.

The operation control device includes a booster pump abnormality detecting section (an alarm detecting section 72 of the booster pump 20) for detecting an abnormality of the booster pump 20 and a booster pump abnormality detecting section (The digital signal output unit 82 of the booster pump 20) when the booster pump abnormally stops the booster pump and does not stop the main pump.

At this time, in order to stop the booster pump 20, a signal flows from the alarm detection unit 72 of the booster pump 20 to the digital signal detection unit 80, from the digital signal detection unit 80 to the voltage frequency control unit 100 , The booster pump 20 is stopped. The stop signal does not flow from the booster pump 20 to the main pump 10. [ Whether the main pump is stopped or not is determined according to the design concept of the vacuum pump apparatus 1 as described above.

The operation control device includes a signal input section (analog signal detection section 84) from which a signal for controlling the rotational speed of the main pump 10 and / or the booster pump 20 is externally input. Hereinafter, this will be described. In the analog signal detecting section 84 shown in Fig. 3, a signal is input analogously from the outside. The signal may be a current signal, for example, 4 to 20 mA. Also, the signal may be a voltage signal such as 0 to 5V, 1 to 10V. The target rotation speed of the motor unit 104 or the motor unit 204 is changed by the input signal. For example, when 4 mA is changed by a 20 mA signal, when 4 mA is inputted, the pump target rotation speed is lowered. The target number of revolutions is increased in proportion to the input current, and the rated number of revolutions is set at 20 mA. The pump user can reduce the power consumption of the pump by reducing the number of revolutions of the pump in a situation where the pump exhaust performance is not required.

The number of revolutions may be changed by a digital signal instead of the analog signal. In this case, whether to use the target rotation speed A or the target rotation speed B set in advance in the inverter device is determined by the digital signal. By inputting a plurality of digital signals into the system, the number of revolutions can be increased. For example, if you have 3 systems, you can select 2 of 3 patterns of approval. The motor unit 104 or the motor unit 204 is controlled by selecting the number of revolutions out of eight target revolutions H set at the target revolutions A set in advance in the inverter apparatus. By inputting a plurality of digital signals into the system, it is possible to configure the system more inexpensively than when the external rotation command circuit is an analog circuit.

According to the present embodiment, the operation control method for the vacuum pump apparatus 1 including the main pump 10 and the booster pump 20 can be implemented. In this method, as already described, each of the pumps has an inlet port and an exhaust port, the inlet port of the main pump communicates with the outlet port of the booster pump, the inlet port of the booster pump is the inlet side of the vacuum pump device, This is the exhaust side of the vacuum pump device.

As shown in Fig. 7, the operation control method receives a start instruction for starting the main pump 10 (step 1). When the main pump 10 is started, it is determined whether or not to start the booster pump 20 based on the start instruction, and the booster pump 20 is started (step 2). After the booster pump 20 is started, the analog voltage is input to the booster pump 20 from the outside, thereby controlling the number of revolutions of the booster pump 20 (step 3). 7 is a diagram showing the relationship between the start and stop timings of the main pump 10 and the booster pump 20. Fig.

With respect to the stop of the booster pump 20, the stop instruction accepting section receives the stop instruction and the main pump is stopped (step 4). The digital signal detecting unit 80 determines whether or not to stop the booster pump 20 based on the stop instruction and stops the booster pump 20 when it is determined that the booster pump 20 is to stop (Step 5). The main pump 10 and the booster pump 20 can be stopped when the main pump abnormality detecting unit detects an abnormality of the main pump 10 (step 6).

Although the embodiments of the present invention have been described above, the embodiments of the invention described above are intended to facilitate understanding of the present invention and are not intended to limit the present invention. It is needless to say that the present invention can be modified and improved without departing from the gist of the present invention, and the present invention includes equivalents thereof. It is also possible to omit any combination or omission of each component described in the claims and the specification in a range capable of solving at least a part of the above problems or at least a part having an effect.

As described above, the present invention has the following aspects.

[Mode 1]

1. An operation control apparatus for a vacuum pump apparatus having a main pump and a booster pump,

Wherein each of the pumps has an intake port and an exhaust port, an inlet port of the main pump is connected to an exhaust port of the booster pump, an inlet port of the booster pump is an intake port of the vacuum pump device, Which is the exhaust side,

The operation control device includes:

A start instruction accepting unit for accepting a start instruction for starting the main pump,

Wherein the start instruction accepting section receives the start instruction and determines whether to start the booster pump when the main pump is started based on the start instruction and activates the booster pump Wherein the operation control device comprises:

[Mode 2]

Wherein the booster pump starting section determines that the booster pump can be started when the start instruction receiving section receives the start instruction and starts the booster pump.

[Mode 3]

The booster pump starting section determines that the booster pump can be started when the start instruction accepting section receives the start instruction and elapses a predetermined time and starts the booster pump The operation control device according to the first aspect.

[Mode 4]

The booster pump starting section determines that the booster pump can be started when the start instruction accepting section receives the start instruction and the number of revolutions of the main pump is greater than a predetermined number over the predetermined time, And the booster pump is started.

[Mode 5]

Wherein the booster pump starting section is configured to start the booster pump after the start instruction accepting section receives the start instruction and while the rotation number of the main pump is equal to or larger than a predetermined number over the predetermined time, The booster pump is started, and when it is judged that the booster pump can be started, the booster pump is started.

[Mode 6]

The operation control device includes:

A stop instruction accepting unit for accepting a stop instruction for stopping the main pump;

Wherein the stop instruction accepting unit receives the stop instruction and determines whether or not to stop the booster pump when the main pump stops, based on the stop instruction, and stops the booster pump And the operation control device according to any one of the first to fifth aspects.

[Mode 7]

The operation control device includes:

A main pump abnormality detecting unit for detecting abnormality of the main pump,

And an abnormality stopping unit for stopping the main pump and the booster pump when the main pump abnormality detecting unit detects an abnormality of the main pump. .

[Mode 8]

The operation control device includes:

A booster pump abnormality detecting unit for detecting abnormality of the booster pump,

Characterized by comprising a booster pump abnormality stopping section for stopping the booster pump and not stopping the main pump when the booster pump abnormality detecting section detects an abnormality of the booster pump And the operation control device.

[Mode 9]

The operation control device according to any one of claims 1 to 8, characterized in that the operation control device comprises a signal input part for externally inputting a signal for controlling the rotational speed of the main pump and / Device.

[Mode 10]

An operation control method for a vacuum pump apparatus having a main pump and a booster pump,

Wherein each of the pumps has an intake port and an exhaust port, an inlet port of the main pump is connected to an exhaust port of the booster pump, an inlet port of the booster pump is an intake port of the vacuum pump device, Which is the exhaust side,

The operation control method includes:

A step of receiving a start instruction for starting the main pump;

And a step of accepting the start instruction and determining whether or not to start the booster pump when the main pump is started based on the start instruction to start the booster pump .

One… Vacuum pump device
41 ... Main pump inverter
42 ... Booster pump inverter
64 ... Inverter main circuit
66 ... Inverter control circuit
72 ... An alarm detector
74 ... The temperature detector
76 ... Current detector
78 ... The rotation-
80 ... Digital signal detector
82 ... The digital signal output section
84 ... The analog signal detector
86 ... switch

Claims (12)

In a vacuum pump apparatus having a main pump and a booster pump,
Wherein each of the pumps has an intake port and an exhaust port, an inlet port of the main pump is connected to an exhaust port of the booster pump, an inlet port of the booster pump is an intake port of the vacuum pump device, Which is the exhaust side,
The vacuum pump device includes:
An instruction accepting unit for accepting a start instruction for starting the main pump or a stop instruction for stopping the main pump and outputting a switch signal,
A main pump inverter that receives the output switch signal to start or stop the main pump and outputs a start / stop signal for instructing start / stop of the booster pump,
And a booster pump inverter for detecting start / stop signals output from the main pump inverter to start or stop the booster pump. The method according to claim 1,
Wherein the main pump inverter is configured to be capable of outputting a start signal for instructing start-up of the booster pump after the main pump is started, and the booster pump inverter is connected to the start signal output from the main pump inverter And the booster pump is started based on the determination whether or not to start the booster pump. In the vacuum pump apparatus having the main pump and the booster pump,
A main pump inverter for controlling operation of the main pump,
A booster pump abnormality detecting unit for detecting an abnormality during operation of the booster pump and a booster pump abnormality detecting unit for stopping the booster pump when the booster pump abnormality detecting unit detects an abnormality of the booster pump, And a stop part in the case of a booster pump abnormality that does not stop the main pump. 4. The method according to any one of claims 1 to 3,
Wherein the booster pump inverter determines that the booster pump can be started when the start instruction receiving unit receives the start instruction and starts the booster pump. 4. The method according to any one of claims 1 to 3,
The booster pump inverter determines that the booster pump can be started when the start instruction accepting section receives the start instruction and elapses after a predetermined time elapses to start the booster pump Vacuum pump device. 6. The method of claim 5,
The booster pump inverter determines that the booster pump can be started when the start instruction receiving unit receives the start instruction and the number of revolutions of the main pump is more than a predetermined number over the predetermined time, And the booster pump is started. The method according to claim 6,
Wherein the booster pump inverter is configured such that the start instruction accepting section receives the start instruction and further determines that the rotation number of the main pump is equal to or larger than a predetermined number over the predetermined time and that the current value of the motor Is smaller than a predetermined value, it is determined that the booster pump can be started, and the booster pump is started. The method of claim 3,
The vacuum pump device includes:
Wherein the stop instruction accepting unit receives the stop instruction and determines whether or not to stop the booster pump when the main pump stops, based on the stop instruction, and stops the booster pump And the vacuum pump device. 4. The method according to any one of claims 1 to 3,
The vacuum pump device includes:
A main pump abnormality detecting unit for detecting abnormality of the main pump,
And an abnormality stopping section for stopping the main pump and the booster pump when the main pump abnormality detecting section detects an abnormality of the main pump. 3. The method according to claim 1 or 2,
The vacuum pump device includes:
A booster pump abnormality detecting unit for detecting abnormality of the booster pump,
And a booster pump abnormality stopping section for stopping the booster pump and not stopping the main pump when the booster pump abnormality detecting section detects an abnormality of the booster pump. 4. The method according to any one of claims 1 to 3,
Wherein the vacuum pump device comprises a signal input part for externally inputting a signal for controlling the rotational speed of the main pump and / or the booster pump. An operation control method for a vacuum pump apparatus having a main pump and a booster pump,
Wherein each of the pumps has an intake port and an exhaust port, an inlet port of the main pump is connected to an exhaust port of the booster pump, an inlet port of the booster pump is an intake port of the vacuum pump device, Which is the exhaust side,
The operation control method includes:
A step of receiving a start instruction for starting the main pump;
And a step of accepting the start instruction and determining whether or not to start the booster pump when the main pump is started based on the start instruction to start the booster pump .

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