KR101240399B1 - Scanning thermal microscope and temperature profiling method using the same - Google Patents

Abstract

The present invention relates to a scanning probe thermal microscope and a temperature profiling method using the same that can profile the quantitative temperature, thermal properties, etc. of the specimen by scanning the specimen. In particular, the present invention provides a probe having a tip capable of injecting a specimen; A driving power supply for heating the probe tip so that the probe tip is driven in an active mode; A drive mechanism for controlling the probe tip height position so that the probe tip can be driven in a contact mode in contact with the specimen and in a non-contact mode spaced from the specimen; A control unit for controlling the driving power supply unit and the driving mechanism unit so that the probe tip is driven in an active mode or an inactive mode to scan a specimen in a contact mode or a non-contact mode, respectively; A probe probe thermal microscope and a temperature profiling method using the same may include a specimen temperature measuring unit configured to measure the temperature of the specimen from the thermoelectric voltage generated at the tip of the probe due to the scanning of the specimen.

Description

Scanning thermal microscope and temperature profiling method using the same

The present invention relates to a scanning probe thermal microscope and a temperature profiling method using the same that can profile the quantitative temperature, thermal properties, etc. of the specimen by scanning the specimen.

Because nanomaterials such as carbon nanotubes and graphene have excellent electrical and thermal properties, it is expected that electronic devices using these nanomaterials may replace silicon-based electronic devices in the future. . Therefore, it is important to analyze the thermal properties of these nanomaterials, to analyze the behavior of nanodevices composed of nanomaterials, and to measure and analyze the thermal resistance of nanomaterials or interfaces between nanodevices and surrounding insulation materials. However, the thermal measurement at the nanoscale required for this analysis remains a challenge.

Scanning thermal microscopy (SThM) is one of the devices that can be used for thermal measurements at these nanoscales because of its high spatial resolution. SThM is a device that obtains a temperature distribution or thermal component by scanning a probe equipped with a sharp tip thermometer in passive or active mode and scanning the surface of the specimen.

However, the conventional SThM has significant problems in its use in quantitative local thermal analysis because of the non-locality of the measurement. That is, as shown in FIG. 1, the signal measured by the conventional SThM is generated not only through thermal contact between the tip 4a of the probe 4 and the specimen 2, but also the specimen 2 and the probe 4. This is because most of the heat transfer through the air in between.

In addition, even when measuring only from the heat flux passing through the contact point between the probe tip 4a and the test piece 2, the probe tip 4a and the test piece may differ due to the difference in surface characteristics such as the shape of the test piece 2 and hydrophilicity / hydrophobicity. If heat transfer between the contacts of (2) is disturbed, quantitative measurement becomes difficult.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and overcomes the locality of measurement and at the same time the scanning probe thermal microscope and the temperature using the same can measure the temperature distribution quantitatively even when the heat transfer characteristics of the surface change. Its purpose is to provide a profiling method.

The present invention to solve the above problems is a probe having a tip capable of injecting a specimen; A driving power supply for heating the probe tip so that the probe tip is driven in an active mode; A drive mechanism for controlling the probe tip height position so that the probe tip can be driven in a contact mode in contact with the specimen and in a non-contact mode spaced from the specimen; A control unit for controlling the driving power supply unit and the driving mechanism unit so that the probe tip is driven in an active mode or an inactive mode to scan a specimen in a contact mode or a non-contact mode, respectively; The probe probe thermal microscope can include a; a specimen temperature measuring unit for measuring the temperature of the specimen from the thermoelectric voltage generated at the tip of the probe due to the scanning of the specimen.

The probe tip may be made in a thermocouple manner.

The driving power supply unit may be formed in an AC power supply method to heat the probe tip AC power.

The specimen temperature measurement unit may be made of a Wheatstone bridge circuit.

In addition, the present invention is the probe tip driven at the first temperature (T1) is in contact with the specimen and in a state of being spaced a predetermined height from the specimen, respectively, by scanning the specimen, the contact mode temperature (Tc1) of the specimen and the Measuring the non-contact mode temperature Tnc1 of the specimen; The test tip is driven at a temperature different from the first temperature T1 and a second temperature T2 different from each other at the same position as the first temperature of the specimen and spaced a predetermined height from the specimen. Scanning to measure the contact mode temperature (Tc2) of the specimen and the non-contact mode temperature (Tnc2) of the specimen; And obtaining a quantitative temperature (Ts) of the specimen from the measured contact mode temperatures (Tc1, Tc2) and the non-contact mode temperatures (Tnc1, Tnc2) of the specimen by linear extrapolation. The temperature profiling method using the scanning probe thermal microscope can be presented.

The first temperature T1 drive is an inactive mode drive that does not heat the probe tip, and the second temperature T2 drive is an active mode that heats the probe tip with an AC power of higher frequency than the thermal time constant of the probe. Can be driven.

By the linear extrapolation, the equation is as follows.

x is the predetermined position of the specimen to be scanned by the probe tip, Ts is the quantitative temperature of the specimen, Tc1 is the contact mode temperature (Tc1) of the specimen when driving the first temperature, Tc2 is the contact mode temperature of the specimen when driving the second temperature, Tj1 Is the difference between the contact mode temperature Tc1 of the specimen and the non-contact mode temperature Tnc1 of the specimen when the first temperature is driven, and Tj2 is the contact mode temperature Tc2 of the specimen and the non-contact mode temperature Tnc2 of the specimen when the second temperature is driven. It can be characterized by the difference.

 The present invention can propose a technique for measuring the quantitative temperature distribution even in a situation where Gts is disturbed due to a change in the shape of the specimen surface or hydrophilicity / hydrophobicity, and thus the thermal properties of the nanomaterial and the nanomaterial It can be widely used in.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic diagram illustrating the thermal conduction between probe and specimen.
Figure 2 is a schematic diagram of the thermal conductivity in the contact mode, non-contact mode of the probe-test specimen.
Figure 3 is a schematic view of the contact area according to the contact position of the probe specimen.
4 is a view schematically illustrating the state of the probe contact according to the contact position of the probe-test piece
FIG. 5 is a diagram schematically illustrating FIG. 4. FIG.
FIG. 6 is a schematic representation of the hydrophilic / hydrophobic state of a probe-sample. FIG.
7 is a graph showing the linearity of contact mode temperature and temperature jump of a specimen.
8 is a block diagram of a scanning probe thermal microscope according to the present invention.
9 is a graph showing the thermoelectric effect of the probe.
10 is a graph showing the measurement results of the scanning probe thermal microscope according to the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The temperature profile method using the scanning probe thermal microscope according to the present invention can be made as follows.

The heat flux passing through the tip 4a of the probe 4 is expressed by Equation 1 below.

Here, Q _ts , C, Tnc and Tc are the heat flux between the probe and the specimen 2, the thermal conductivity inside the probe 4, the non-contact mode temperature of the specimen 2, and the contact mode temperature of the specimen 2, respectively. For reference, as shown in FIG. 2A, the non-contact mode temperature of the specimen 2 is measured by the probe in a state where the probe tip 4a is vertically spaced vertically from the scanning point of the specimen 2. As the temperature of the test piece 2, there is no heat transfer through the contact between the probe tip 4a and the test piece 2, so it is a measurement temperature generated by heat transfer by air. As shown in (b) of FIG. 2, the contact mode temperature of the test piece 2 is the temperature of the test piece 2 measured by the probe while the probe tip 4a is in contact with the scanning point d of the test piece 2. As a measurement temperature generated by heat transfer through the contact between the probe tip 4a and the specimen 2 and heat transfer through the air.

Now, Q _ts And the relationship between the quantitative temperature Ts on the surface of the specimen (2). It is clear that Q _ts is linearly proportional to the difference between Tc and Ts in the contact mode and can be expressed as Equation 2 below.

Where G _ts is the thermal conductivity between the probe and the point of contact of the specimen 2 surface.

Equations 1 and 2 above are summarized as Equation 3 below.

는 무차원 상수로써, C/G_ts로 정의된다. here,

Is a dimensionless constant defined by C / G _ts .

However, as shown in FIGS. 3 to 6, the heat transfer between the tip of the probe 4a and the contact of the test piece 2 may differ due to differences in the surface shape of the test piece 2 and the surface characteristics hydrophilicity and hydrophobicity of the test piece 2. In the case of this disturbance, it is difficult to quantitatively measure by the equation (3). That is, when comparing (a) (b) (c) of Figure 3, the contact area between the probe tip (4a) and the specimen (2) may vary depending on the contact position of the probe tip (4a) and the specimen (2) Therefore, it can be seen that G _ts is not a constant having a constant value but a variable. (A) (b) and (c) of FIG. 5 respectively show the contacts '①', '②', between the probe tip 4a and the specimen 2, as shown in FIG. 4 during scanning of the specimen 2; It is shown that the thermal contact area of the probe tip 4a and the specimen 2 at ③ can be changed. FIG. 6 shows that the thermal contact area may vary depending on the hydrophilicity and hydrophobicity of the specimen 2.

)를 몰라도 시편(2)의 정량적인 온도를 계측할 수 있도록 다음과 같은 널포인트기법(null point method)을 제시할 수 있다. 즉, 수학식 3에서 무차원 상수(

)가 어떤 값을 갖더라도, Tj가 0이 되면, Q_ts가 0이 되며 이때 Tc가 Ts와 같아짐을 확인할 수 있다. 여기서, Tj는 시편(2)의 접촉모드 온도(Tc)와 시편(2)의 비접촉모드 온도(Tnc)의 차이이며, 이를 '온도 점프'라 할 수 있다.Thus, dimensionless constants (

Without knowing), the following null point method can be proposed to measure the quantitative temperature of the specimen (2). That is, in equation 3, the dimensionless constant (

No matter what value), if Tj becomes 0, Q _ts becomes 0 and Tc equals Ts. Here, Tj is a difference between the contact mode temperature Tc of the test piece 2 and the non-contact mode temperature Tnc of the test piece 2, which may be referred to as a 'temperature jump'.

In practice, however, it is a very difficult task to adjust the temperature of the probe tip 4a until the temperature jump Tj becomes zero.

)가 시편(2)의 어느 특정 위치에서 일정한 값을 갖는 경우에 Tc가 Tj에 비례하는 선형성을 가짐을 전제할 수 있으며, 하여 탐침 첨단(4a)의 온도를 다르게 각각 가열한 후 그에 상응하는 시편(2)의 접촉모드 온도(Tc)와 온도 점프(Tj)를 계측하고, 계측한 데이터를 선형적으로 외삽한 후 Tj가 0이 될 때의 Tc, 즉 Ts를 산출할 수 있다. By the way, a dimensionless constant (

) Can be assumed to have a linearity proportional to Tj when a certain value at a particular position of the specimen (2), so that the temperature of the probe tip (4a) is heated differently, and then the corresponding specimen The contact mode temperature Tc and the temperature jump Tj of (2) are measured, and after linearly extrapolating the measured data, Tc when Tj becomes 0, that is, Ts can be calculated.

However, the above method is effective when the part to be quantitatively measured is one point of the specimen (2), but is not suitable when the temperature distribution is to be obtained even when the G _ts of the surface of the specimen (2) changes continuously. not.

Therefore, the above linear extrapolation can be extended as follows so that it can be suitable even when obtaining a temperature distribution (i.e., temperature profiling).

That is, as shown in FIG. 7, the probe tip 4a is heated to two different temperatures, namely the first temperature T1 and the second temperature T2 at a particular location x ₀ of the specimen 2. The temperature jumps Tj1 and Tj2 corresponding to the respective cases can be measured. Next, from these data, Tc when Tj becomes 0 can be obtained by extrapolating on the assumption that linearity of Tc and Tj is proportional. In this case, when Tj becomes 0, Tc is equal to Ts, and thus Equation 3 can be derived from Equation 3 below.

In Equation 4 above, x ₀ represents an arbitrary point of the specimen 2, so that Equation 5 may be derived from Equation 4.

On the other hand, Equation 5 can be rewritten as Equation 6 below.

As can be seen from Equation 6 above, Equation 7 can be derived as a result.

Finally, by substituting Equation 7 into Equation 6, Equation 8 below can be obtained.

)에 해당하는 부분을 연속적으로 계측하면서 연속적으로 온도를 계측하는 것과 동일한 과정을 거치고 있음을 알 수 있다. 따라서, 수학식 8에 의해 시편(2)의 표면 형상이나 시편(2)의 표면 특성 친수성 소수성 같은 차이에 의해서 탐침 첨단(4a)과 시편(2)의 접점 사이의 열전달이 교란되는 경우에도 정량적 온도분포 계측이 가능해질 수 있다.Here, Equation 5 is derived from the principle of the null point technique described above, but the dimensionless constant (

It can be seen that it is going through the same process as measuring temperature continuously while continuously measuring the part corresponding to). Accordingly, quantitative temperature is obtained even when the heat transfer between the tip of the probe 4a and the contact of the specimen 2 is disturbed by the difference in the surface shape of the specimen 2 or the hydrophilic hydrophobicity of the specimen 2 by Equation 8 Distribution measurements can be made.

Hereinafter, the scanning probe thermal microscope according to the present invention using the above Equation 5 may be configured as follows.

That is, as shown in Fig. 8, the scanning probe thermal microscope according to the present invention includes: a probe 4 having a tip 4a capable of scanning the specimen 2; A driving power supply unit 10 for heating the probe tip 4a so that the probe tip 4a can be driven in an active mode; Drive mechanism for controlling the probe tip 4a height position so that the probe tip 4a can be driven respectively in the contact mode in contact with the specimen 2 and in the non-contact mode spaced from the specimen 2 (not shown). )Wow; A control unit for controlling the driving power supply unit 10 and the driving mechanism unit so that the probe tip 4a is driven in the active mode or the inactive mode to scan the specimen 2 in the contact mode and the non-contact mode, respectively; It may include; the specimen temperature measuring unit 20 for measuring the temperature of the specimen 2 from the thermoelectric voltage generated in the probe tip (4a) due to the scanning of the specimen (2).

The thermometer of the probe tip 4a can be made by the thermocouple method in that the sensitivity and the spatial resolution are much better than the heat resistance method.

The driving power supply unit may be made of an AC power supply method so that the probe tip 4a can be stably heated by an AC power source rather than a DC power source.

The drive mechanism part has a mechanical configuration for controlling the position of the probe in a vertical direction as well as front and rear, left and right directions, and the driving part for driving a driven body in various technical fields including a robot is a known technology. In order not to obscure the subject matter, further description is omitted.

The specimen temperature measuring unit 20 is a direct current thermoelectric voltage generated in the thermocouple of the probe tip 4a is a direct current, so that the measurement can be made without disturbing the drive AC voltage, the Wheatstone bridge circuit (22) It may include. That is, although the driving AC voltage is a very small value, the DC drift voltage includes a DC drift voltage, and the DC drift voltage of the AC driving voltage included in the thermoelectric voltage measured through the Wheatstone bridge circuit 22 can be removed. In addition, the signal to noise ratio can be maximized by amplifying by a preamplifier 24 and attenuating 60 Hz noise using the noise filter 25, for example. Therefore, the direct current thermoelectric voltage from the thermocouple enters the SAM (signal access module) 26, so that the quantitative temperature of the specimen 2 at the same time as the shape signal of the surface of the specimen 2 obtained by scanning probe microscopy or The temperature distribution can be measured. On the other hand, a DC power supply can be used to heat the sample.

The quantitative temperature profiling method using the scanning probe thermal microscope according to the present invention configured as described above is as follows.

First, the probe tip 4a may be driven at the first temperature T1. In this case, the probe tip 4a may be driven in an inactive mode in which the probe is not heated to drive the probe tip 4a at the first temperature T1.

In this manner, the probe is driven in an inactive mode, and the tip tip 4a is in contact with a predetermined point of the specimen 2 and the tip tip 4a is vertically spaced vertically from the predetermined point of the specimen 2. Each of the specimens 2 can be scanned to measure the contact mode temperature Tc1 of the specimen 2 and the non-contact mode temperature Tnc1 of the specimen 2.

Next, the probe tip 4a may be driven at a second temperature T2 different from the first temperature T1. In this case, the probe tip 4a may be driven in an active mode in which the probe tip 4a is heated at the second temperature T2.

The active mode may be achieved in the following manner. That is, when the thermocouple of the probe is heated with an AC power source having a sufficiently high frequency (˜100 kHz) relative to the probe's thermal time constant (0.1 to 1 msec), the periodic component can be almost ignored among temperature fluctuations inside the probe. Since the thermoelectric voltage generated by the thermocouple is DC, the temperature of the probe contact can be measured without disturbing the driving AC voltage.

In this manner, the probe is driven in the active mode, with the probe tip 4a in contact with a predetermined point of the specimen 2 and the probe tip 4a vertically spaced vertically at a predetermined point of the specimen 2. Each of the specimens 2 can be scanned to measure the contact mode temperature Tc2 of the specimen 2 and the non-contact mode temperature Tnc2 of the specimen 2.

Here, the probe contacts are not exactly point heating because they are heated by the Joule effect. However, the Joule heating is proportional to the square of the current density and the contact of the probe can be very close to the point heating because the current density is greatest when passing through the contact point of the probe tip 4a of a predetermined diameter. Although Equation 5 above is theoretically rigorously derived, considerable effort is required to minimize measurement noise in order to measure the temperature distribution of the surface of the specimen 2 using Equation 5 in practice. Since Tj is generated only by Q _ts , its value is quite small and is affected by external noise relative to Tc generated by Q _ts and Q _air (ie, heat flux through air). Therefore, in order to minimize the influence of external noise in the measurement of Tj, the probe should be heated to the highest temperature possible within the stable signal range to increase the difference between Tj1 and Tj2. It may be advantageous to drive.

Next, from the contact mode temperatures Tc1 and Tc2 of the test piece 2 and the non-contact mode temperatures Tnc1 and Tnc2 of the test piece 2 measured as described above, the quantitative temperature of the test piece 2 by linear extrapolation ( Ts) can be obtained. That is, the contact mode temperatures Tc1 and Tc2 of the test piece 2 and the non-contact mode temperatures Tnc1 and Tnc2 of the test piece 2 measured as described above are substituted into the above equation (5), whereby Profiling of the temperature Ts is possible.

On the other hand, the non-contact mode Tnc of the specimen 2 can be measured by the following method for more accurate measurement. That is, two temperature distributions are measured at different heights in order to calculate the non-contact mode Tnc of the specimen 2 at a temperature measured at a position where the clearance height at the surface of the specimen 2 without the influence of Q _ts is zero. It can be interpolated by extrapolation by the following equation.

Where T _l is the local temperature measured at the height of '0' just before the probe tip 4a contacts the specimen 2, and T _l1 and T _l2 are the above-mentioned clearance heights of l1, l2 in the non-contact mode. When measured temperature.

The effectiveness and accuracy of the effects of the scanning probe thermal microscope and the temperature profiling method using the same according to the present invention as described above can be verified as described below.

The first verification of the effect of the present invention can be made as follows.

First, the thermoelectric coefficient of the probe is measured.

To this end, a 5 μm wide aluminum heat source can be used to easily and accurately control the temperature through a temperature coefficient of resistance (TCR). This heat source specimen 2 was made in 4-probe configuration on Pyrex glass and the temperature and dissipated power of the heat source can be accurately determined by measuring the voltage and current acting on the heat source.

After the temperature of the heat source is kept constant, the thermoelectric voltage generated at the contact point of the probe is first measured while bringing the probe closer to the heat source in an inactive mode. As the probe approaches the heat source, the heat transfer through the air causes the measured thermoelectric voltage to increase due to the temperature rise of the probe. The moment the probe contacts the heat source, the thermoelectric voltage rises rapidly from Vnc to Vc by Qts. The difference between Vnc _c and Vc, Vj, can be seen from FIG. 9. In the active mode, Vc and Vj were obtained by the same method, and the Vc and Vj values are shown in Fig. 2. Where Vnc is the thermoelectric voltage in the non-contact mode, and Vc is the thermoelectric voltage in the contact mode.

Based on the two points, Vc and Vj can be used to extrapolate the linearity of Vc to the point where Vj = 0. As can be seen from Equation 3 above, when Tj = 0, Tc is Ts and can be expressed as Equation 9 below.

Here, Tb is the temperature of the cantilever base of the probe measured from the thermocouple attached to the probe holder of an atomic force microscope. Since the cantilever base is located in the silicon body, it is assumed that Tb is equal to the temperature of the silicon body. Vc when Ts = 76.7 ^o C and Vj = 0 measured by TCR in Equation 9 above 1561.6 ㎶, Tb measured separately using thermocouple = 17.25 ^o C, it can be seen that the thermoelectric coefficient of the probe is about 26.3㎶ / K.

Although the thermoelectric coefficient of the probe differs from those of chromium (Cr) and gold (Au) at room temperature of about 20 ㎶ / K, it is confirmed that the measured thermoelectric coefficient is effective through repeated experiments. Can be.

The second verification of the present invention can be made as follows.

The same aluminum heat source as in the first verification is used for the specimen (2). Ts obtained by substituting Tc1, Tnc1 measured in the inactive mode and Tc2 and Tnc2 measured in the active mode into Equation 8 may be represented as shown in FIGS. 10 (a) and 10 (b), respectively.

As can be seen in 10 (b), when viewed in comparison with a measurement with a scanning probe thermal microscope from the heat source surface Ts and the TCR a temperature of 76.3 ^o C measured with, seen that a fairly accurate measurement within the error of about 1 ^o C Can be.

Therefore, the present invention can propose a technique for measuring the quantitative temperature distribution even in the situation where Gts is disturbed due to the change in the shape of the surface of the specimen (2) or the properties of hydrophilicity and hydrophobicity. It can be widely used for thermal characterization of materials.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention.

2; Psalm 4; probe
4a; Probe tip 10; Drive power supply
20; Specimen Temperature Measurement

Claims (7)

A probe having a tip capable of injecting a specimen;
A driving power supply for heating the probe tip so that the probe tip is driven in an active mode;
A drive mechanism for controlling the probe tip height position so that the probe tip can be driven in a contact mode in contact with the specimen and in a non-contact mode spaced from the specimen;
A control unit for controlling the driving power supply unit and the driving mechanism unit so that the probe tip is driven in an active mode or an inactive mode to scan a specimen in a contact mode or a non-contact mode, respectively;
As a scanning probe thermal microscope comprising: a specimen temperature measuring unit for measuring the temperature of the specimen from the thermoelectric voltage generated at the tip of the probe due to the scanning of the specimen,
Further comprising a temperature profiling unit for obtaining the quantitative temperature of the specimen by linear extrapolation from the temperature measured in the contact mode of the specimen and the temperature measured in the non-contact mode of the specimen,
Equation by the linear extrapolation method is as follows,

x is the predetermined position of the specimen to be scanned by the probe tip, Ts is the quantitative temperature of the specimen, Tc1 is the contact mode temperature of the specimen when driving the first temperature in inactive mode operation, and Tc2 is the temperature of the specimen during the second temperature driving, which is active mode driving. The contact mode temperature, Tj1 is the difference between the contact mode temperature of the specimen and the non-contact mode temperature of the specimen when the first temperature is driven, Tj2 is the difference between the contact mode temperature of the specimen and the non-contact mode temperature of the specimen when the second temperature is driven Scanning probe thermal microscope. The method according to claim 1,
The probe tip is a scanning probe thermal microscope, characterized in that the thermocouple method. The method according to claim 1,
The driving power supply unit is a scanning probe thermal microscope, characterized in that made in the AC power drive method to heat the AC power to the probe tip. The method according to claim 1,
The probe temperature measuring unit is a scanning probe thermal microscope, characterized in that the Wheatstone bridge circuit system. Measuring the contact mode temperature of the specimen and the non-contact mode temperature of the specimen by scanning the specimen while the probe tip driven at the first temperature is in contact with the specimen and spaced a predetermined height from the specimen;
When the probe tip driven at a second temperature different from the first temperature is in contact with the same position as the first temperature of the specimen and is spaced a predetermined height from the specimen, the specimen is scanned by contact with the specimen. Measuring a mode temperature and a non-contact mode temperature of the specimen;
A temperature profiling method using a scanning probe thermal microscope, comprising: obtaining a quantitative temperature of the specimen by linear extrapolation from the measured contact mode temperature of the specimen and the non-contact mode temperature of the specimen.
Equation by the linear extrapolation method is as follows,

x is the predetermined position of the specimen to be scanned by the probe tip, Ts is the quantitative temperature of the specimen, Tc1 is the contact mode temperature of the specimen when driving at the first temperature, Tc2 is the contact mode temperature of the specimen when driving the second temperature, and Tj1 is the first The difference between the contact mode temperature of the specimen and the non-contact mode temperature of the specimen during temperature driving, Tj2 is the temperature profile using the scanning probe microscope, characterized in that the difference between the contact mode temperature of the specimen and the non-contact mode temperature of the specimen during the second temperature driving Ring way. The method according to claim 5,
The first temperature drive is an inactive mode drive that does not heat the probe tip,
The second temperature driving method is a temperature profiling method using a scanning probe thermal microscope, characterized in that the active mode driving to heat the probe tip with an AC power of a frequency higher than the thermal time constant of the probe. delete

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