JPS6328427Y2 - - Google Patents
Info
- Publication number
- JPS6328427Y2 JPS6328427Y2 JP1979088787U JP8878779U JPS6328427Y2 JP S6328427 Y2 JPS6328427 Y2 JP S6328427Y2 JP 1979088787 U JP1979088787 U JP 1979088787U JP 8878779 U JP8878779 U JP 8878779U JP S6328427 Y2 JPS6328427 Y2 JP S6328427Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- developed
- turntable
- developing device
- magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000696 magnetic material Substances 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 238000001035 drying Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 238000007667 floating Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
Landscapes
- Photographic Processing Devices Using Wet Methods (AREA)
Description
【考案の詳細な説明】
本考案はニツケル金属の如き磁性材料よりなる
薄型フレームに樹脂フイルムを支持させた被現像
試料を現像する現像装置に関し、簡単な構造にし
て品質のすぐれた現像ができるようにすることを
目的とする。[Detailed description of the invention] The present invention relates to a developing device for developing a sample to be developed in which a resin film is supported on a thin frame made of a magnetic material such as nickel metal. The purpose is to
従来、被現像試料（以下は単に試料と呼ぶ）と
しては比較的厚かつたため剛性があり、屈曲が殆
んどないものが多く現像装置における試料の保持
も単に試料の移動を規制する程度で充分であつた
が、近年、IC・LSI等の高密度実装技術の開発に
ともない試料も薄型化の傾向にある。通常、薄型
化した試料として例えば薄いニツケルフレームに
樹脂フイルムを支持させたものがよく用いられる
が、これが前処理その他の原因により屈曲を生じ
やすく、このため現像処理が均一になされ難く、
現像の品質が劣つたものになり勝ちであつた。 Conventionally, samples to be developed (hereinafter referred to simply as samples) were often relatively thick and therefore rigid, with almost no bending, and the retention of the sample in the developing device was sufficient to simply restrict the movement of the sample. However, in recent years, with the development of high-density packaging technology for ICs, LSIs, etc., samples are becoming thinner. Normally, a thinned sample with a resin film supported on a thin nickel frame is often used, but this tends to bend due to pretreatment or other reasons, making it difficult to develop it uniformly.
The quality of the development was inferior and it was a victory.
本考案は上述のような従来における欠点を除こ
うとするものである。以下に、図示の実施例につ
いて本考案を詳述すすると、第１図に示す如く本
装置は大別して、試料の現像、リンス、乾燥を実
施する現像槽１と現像工程を制御する制御部２よ
り構成されており、現像槽１の内部には現像、リ
ンス、乾燥用スプレーノズル３，４，５及びター
ンテーブル６が具備されている。ターンテーブル
６上には複数個の試料台７が円周上に着脱可能に
載置されている。 The present invention attempts to eliminate the above-mentioned drawbacks of the prior art. The present invention will be described in detail below with reference to the illustrated embodiment.As shown in FIG. The inside of the developer tank 1 is equipped with spray nozzles 3, 4, and 5 for development, rinsing, and drying, and a turntable 6. A plurality of sample stands 7 are removably placed on the circumference of the turntable 6.
第２図および第３図ａ，ｂに示す如く試料台７
には段付位置決めピン８、磁石９、及び試料台取
付ピン１０が具備されている。段付位置決めピン
８の段部（試料載置部）の高さと磁石９の高さと
は略同一であり、試料１１はこの４点によつて試
料台７の上面から浮かせて保持されている。なお
ここで、試料１１について説明すると、試料１１
は図に示すように窓１２を有するニツケル製の薄
いフレーム１３に現像しようとする樹脂フイルム
１４が貼合されたものからなるとともに試料台７
の取付ピン８が通される孔１５が穿設されてい
る。試料１１は上述のように磁性材料であるニツ
ケルからなるフレーム１３を有するので磁石によ
る吸着が可能になつている。したがつて試料１１
は試料台７上において、孔１５に取付ピン８が通
されて位置決めされそして磁石９により吸着され
た状態で保持される。 As shown in Figures 2 and 3 a and b, the sample stage 7
is equipped with a stepped positioning pin 8, a magnet 9, and a sample stage mounting pin 10. The height of the stepped portion (sample mounting portion) of the stepped positioning pin 8 and the height of the magnet 9 are approximately the same, and the sample 11 is held floating above the upper surface of the sample stage 7 by these four points. Here, to explain sample 11, sample 11
As shown in the figure, it consists of a thin frame 13 made of nickel having a window 12 and a resin film 14 to be developed attached thereto, and a sample stage 7.
A hole 15 is drilled through which the mounting pin 8 of is passed. Since the sample 11 has the frame 13 made of nickel, which is a magnetic material, as described above, it can be attracted by a magnet. Therefore, sample 11
is positioned on the sample stage 7 by passing the mounting pin 8 through the hole 15, and is held in an attracted state by the magnet 9.
以上のような試料の保持において、試料を試料
台上面に直接載置すると試料裏面に囲り込んだ現
像液が充分乾燥しないが、試料を浮かせて保持す
ることにより試料裏面への現像液の流入を減少せ
しめ充分な試料乾燥ができる。又、試料１１は段
付位置決めピン８によつて位置決めされているた
め遠心力等の外力によつて移動することがない。
さらに試料１１は前工程によつて屈曲しているこ
とが多いが、磁石９により試料１１のソリ等を矯
正して保持することができるため、試料の屈曲に
によつて生ずる凹部に現像液が溜ることがなく、
現像液の流れが円滑となり現像品質を向上せしめ
ている。なお段付位置決めピン８を磁性材料で構
成することも可能であり同様の効果がある。試料
台７のターンテーブル６への取付けは、試料台７
に設けられた試料台取付ピン１０をターンテーブ
ル６の孔６′に挿入することによつて行なつてい
る。このため大きさの異なる試料の場合、試料台
７を交換することによつてターンテーブル６に取
付可能となる。 When holding a sample as described above, if the sample is placed directly on the top of the sample stage, the developer enclosed on the back of the sample will not dry sufficiently, but by holding the sample floating, the developer will flow to the back of the sample. This allows for sufficient sample drying. Further, since the sample 11 is positioned by the stepped positioning pin 8, it will not be moved by external forces such as centrifugal force.
Furthermore, although the sample 11 is often bent due to the previous process, the magnet 9 can correct the warpage of the sample 11 and hold it. Does not accumulate,
The flow of the developer becomes smooth, improving development quality. Note that it is also possible to configure the stepped positioning pin 8 with a magnetic material, and the same effect can be obtained. To attach the sample stand 7 to the turntable 6, attach the sample stand 7 to the turntable 6.
This is done by inserting the sample stage mounting pin 10 provided in the turntable 6 into the hole 6' of the turntable 6. Therefore, samples of different sizes can be attached to the turntable 6 by replacing the sample stage 7.
さらには、別な実施例として第４図に示す如
く、試料１１を複数個の磁石９だけで試料台面上
より浮かせて保持し、試料１１の位置決めは他の
位置決めピン１６で行なつても同様の効果が得ら
れる。なお図中、第２図、第３図ａ，ｂに共通す
る要素には同一記号を付し、説明は省略する。 Furthermore, as another example, as shown in FIG. 4, the sample 11 may be held floating above the sample stage surface using only a plurality of magnets 9, and the sample 11 may be positioned using other positioning pins 16. The effect of this can be obtained. In the drawings, elements common to FIG. 2 and FIGS. 3a and 3b are given the same symbols, and explanations thereof will be omitted.
以上の実施例に詳述したように本考案によれば
試料台に位置決めピンと磁石とを突設して、試料
を試料台から離間して吸着保持することにより、
試料裏面への現像液の流入付着が少なく、かつ充
分な乾燥が可能となり現像品質が向上する。又、
試料の屈曲を矯正して保持することができるため
現像液の流れが円滑となり現像ムラを生じにく
い。 As detailed in the above embodiments, according to the present invention, positioning pins and magnets are provided protruding from the sample stage to attract and hold the sample at a distance from the sample stage.
The inflow of the developer to the back surface of the sample reduces adhesion, and sufficient drying becomes possible, improving the development quality. or,
Since the curvature of the sample can be corrected and held, the flow of the developer becomes smooth and uneven development is less likely to occur.
第１図は本考案の実施例である現像装置の一部
断面正面図、第２図は上記現像装置の要部をなす
試料台とその試料台に保持される被現像試料を示
す斜視図、第３図ａおよびｂはそれぞれ上記試料
台に上記被現像試料が保持された状態を示す平面
図および一部断面正面図、第４図は上記試料台の
変形とその試料台に保持される試料を示す斜視図
である。
１……現像槽、３……現像用スプレーノズル、
４……リンス用スプレーノズル、５……乾燥用ス
プレーノズル、６……ターンテーブル、７……試
料台、８，１６……位置決めピン、９……磁石、
１０……試料取付ピン、１１……被現像試料、１
３……フレーム、１４……樹脂フイルム。
FIG. 1 is a partially sectional front view of a developing device according to an embodiment of the present invention, and FIG. 2 is a perspective view showing a sample stage forming the main part of the developing device and a sample to be developed held on the sample stage. FIGS. 3a and 3b are a plan view and a partially sectional front view showing the sample to be developed held on the sample stand, respectively, and FIG. 4 is a deformation of the sample stand and the sample held on the sample stand. FIG. 1...Developer tank, 3...Developing spray nozzle,
4... Spray nozzle for rinsing, 5... Spray nozzle for drying, 6... Turntable, 7... Sample stand, 8, 16... Positioning pin, 9... Magnet,
10... Sample mounting pin, 11... Sample to be developed, 1
3...Frame, 14...Resin film.
Claims (1)
像試料をターンテーブル上に載置し、回転させ
ながら現像液を噴射して現像する現像装置であ
つて、前記ターンテーブルに脱着可能に配設さ
れた試料台に突設され、被現像試料を位置決め
する位置決めピンと、同じく試料台に突設され
た磁石よりなり、被現像試料を前記試料台の上
面と離間した状態で吸着保持することを特徴と
する現像装置。 (2) 位置決めピンは段付ピンであつて、段部の高
さを磁石と同一にすることにより、これらが共
働して被現像試料を前記試料台の上面と離間し
た状態で吸着保持することを特徴とする実用新
案登録請求の範囲第１項記載の現像装置。[Claims for Utility Model Registration] (1) A developing device that develops a sample supported by a frame made of a magnetic material by placing it on a turntable and spraying a developer while rotating it, which comprises: It consists of a positioning pin protruding from a sample stand removably disposed on the turntable and for positioning the sample to be developed, and a magnet also protruding from the sample stand to separate the sample to be developed from the top surface of the sample stand. A developing device that is characterized by being adsorbed and held in a fixed state. (2) The positioning pin is a stepped pin, and by making the height of the stepped portion the same as the magnet, they work together to attract and hold the sample to be developed in a state separated from the top surface of the sample stage. A developing device according to claim 1 of the utility model registration claim.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979088787U JPS6328427Y2 (en) | 1979-06-28 | 1979-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979088787U JPS6328427Y2 (en) | 1979-06-28 | 1979-06-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS567934U JPS567934U (en) | 1981-01-23 |
| JPS6328427Y2 true JPS6328427Y2 (en) | 1988-08-01 |
Family
ID=29321963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979088787U Expired JPS6328427Y2 (en) | 1979-06-28 | 1979-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6328427Y2 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8865737B2 (en) | 2006-08-28 | 2014-10-21 | Eisai R&D Management Co., Ltd. | Antitumor agent for undifferentiated gastric cancer |
| US8952035B2 (en) | 2007-11-09 | 2015-02-10 | Eisai R&D Management Co., Ltd. | Combination of anti-angiogenic substance and anti-tumor platinum complex |
| US8962650B2 (en) | 2011-04-18 | 2015-02-24 | Eisai R&D Management Co., Ltd. | Therapeutic agent for tumor |
| US8962655B2 (en) | 2007-01-29 | 2015-02-24 | Eisai R&D Management Co., Ltd. | Composition for treatment of undifferentiated gastric cancer |
| US8969344B2 (en) | 2005-08-02 | 2015-03-03 | Eisai R&D Management Co., Ltd. | Method for assay on the effect of vascularization inhibitor |
| US9006256B2 (en) | 2006-05-18 | 2015-04-14 | Eisai R&D Management Co., Ltd. | Antitumor agent for thyroid cancer |
| US9012458B2 (en) | 2010-06-25 | 2015-04-21 | Eisai R&D Management Co., Ltd. | Antitumor agent using compounds having kinase inhibitory effect in combination |
| US9334239B2 (en) | 2012-12-21 | 2016-05-10 | Eisai R&D Management Co., Ltd. | Amorphous form of quinoline derivative, and method for producing same |
| US9504746B2 (en) | 2004-09-17 | 2016-11-29 | Eisai R&D Management Co., Ltd. | Pharmaceutical compositions of 4-(3-chloro-4-(cyclopropylaminocarbonyl)aminophenoxy)-7-methoxy-6-quinolinecarboxamide |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5077864A (en) * | 1973-10-09 | 1975-06-25 | ||
| JPS5441301B2 (en) * | 1974-10-08 | 1979-12-07 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5441301U (en) * | 1977-08-24 | 1979-03-19 |
-
1979
- 1979-06-28 JP JP1979088787U patent/JPS6328427Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5077864A (en) * | 1973-10-09 | 1975-06-25 | ||
| JPS5441301B2 (en) * | 1974-10-08 | 1979-12-07 |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9504746B2 (en) | 2004-09-17 | 2016-11-29 | Eisai R&D Management Co., Ltd. | Pharmaceutical compositions of 4-(3-chloro-4-(cyclopropylaminocarbonyl)aminophenoxy)-7-methoxy-6-quinolinecarboxamide |
| US8969344B2 (en) | 2005-08-02 | 2015-03-03 | Eisai R&D Management Co., Ltd. | Method for assay on the effect of vascularization inhibitor |
| US9006240B2 (en) | 2005-08-02 | 2015-04-14 | Eisai R&D Management Co., Ltd. | Method for assay on the effect of vascularization inhibitor |
| US9006256B2 (en) | 2006-05-18 | 2015-04-14 | Eisai R&D Management Co., Ltd. | Antitumor agent for thyroid cancer |
| US8865737B2 (en) | 2006-08-28 | 2014-10-21 | Eisai R&D Management Co., Ltd. | Antitumor agent for undifferentiated gastric cancer |
| US8962655B2 (en) | 2007-01-29 | 2015-02-24 | Eisai R&D Management Co., Ltd. | Composition for treatment of undifferentiated gastric cancer |
| US8952035B2 (en) | 2007-11-09 | 2015-02-10 | Eisai R&D Management Co., Ltd. | Combination of anti-angiogenic substance and anti-tumor platinum complex |
| US9012458B2 (en) | 2010-06-25 | 2015-04-21 | Eisai R&D Management Co., Ltd. | Antitumor agent using compounds having kinase inhibitory effect in combination |
| US8962650B2 (en) | 2011-04-18 | 2015-02-24 | Eisai R&D Management Co., Ltd. | Therapeutic agent for tumor |
| US9334239B2 (en) | 2012-12-21 | 2016-05-10 | Eisai R&D Management Co., Ltd. | Amorphous form of quinoline derivative, and method for producing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS567934U (en) | 1981-01-23 |
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