JPS62115027U - - Google Patents
Info
- Publication number
- JPS62115027U JPS62115027U JP125386U JP125386U JPS62115027U JP S62115027 U JPS62115027 U JP S62115027U JP 125386 U JP125386 U JP 125386U JP 125386 U JP125386 U JP 125386U JP S62115027 U JPS62115027 U JP S62115027U
- Authority
- JP
- Japan
- Prior art keywords
- air conditioning
- air
- clean room
- clean
- filter unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004378 air conditioning Methods 0.000 claims 3
- 239000000428 dust Substances 0.000 claims 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP125386U JPS62115027U (fi) | 1986-01-09 | 1986-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP125386U JPS62115027U (fi) | 1986-01-09 | 1986-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62115027U true JPS62115027U (fi) | 1987-07-22 |
Family
ID=30778990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP125386U Pending JPS62115027U (fi) | 1986-01-09 | 1986-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62115027U (fi) |
-
1986
- 1986-01-09 JP JP125386U patent/JPS62115027U/ja active Pending