JPS60224010A - Three dimensional automatic measuring machine - Google Patents

Abstract

PURPOSE:To perform correctly the guide of a table by providing a table on a base stand via air bearings utilizing a guide member. CONSTITUTION:Between a base stand 10 and a table 50, a driving mechanism 60 to drive the table 50 in a Y axis direction is provided. This table 50 is regulated and guided by position regulating means of X and Z axes directions consisting of guide members 11, 12 and air bearings 51, 53, 54. And the guide member 11 is fitted to the base stand 10 with its straightness corrected by a bend correcting member 40 arranged at least >= three sets in a Y axis direction, and also the guide members 11, 12 are made up with a stone like member and the secular change is prevented.

Description

[Detailed Description of the Invention] [Technical Field] The present invention relates to a three-dimensional measuring machine that measures the shape of an object to be measured by bringing a contact point into three-dimensional contact with the object. The present invention relates to an automatic three-dimensional measuring machine that automatically moves a measuring element and a measuring element relative to each other for measurement.

[Background Art] Generally, the movement mechanism of the probe in a coordinate measuring machine is to sequentially stack structures on each three-dimensional axis, but in the case of the so-called automatic type, the stacking method is used. In this case, since the probe-side mechanism becomes a load on the next mechanism, a high-output drive source is required, leading to an increase in the size of the entire device.

Furthermore, this is disadvantageous in terms of accuracy assurance, and also has the disadvantage of poor measurement efficiency due to the moving speed.

In order to solve this problem, the present applicant! ±, instead of moving the measuring head three-dimensionally, the measuring head side moves two-dimensionally and the object to be measured is moved one-dimensionally, resulting in a relative three-dimensional movement. We are proposing a three-dimensional measuring machine. According to this, the probe holding side moving mechanism becomes lighter and smaller due to the reduction in the moving direction, and the above-mentioned drawbacks are solved. However, a new problem arose in the table moving mechanism.

In other words, compared to the movable parts of other moving mechanisms, the table that is the movable part of the table moving type is larger, so the overall accuracy is l
This means that it is difficult to ensure linearity of movement for measuring instruments that require a measurement of pm or less.

On the other hand, in order to move a flat table horizontally, it is often done to use a so-called one-sided reference table with one side of the table as the reference in consideration of thermal deformation. It's not a good idea. This is because the contraction and expansion themselves affect the measurement accuracy, and at that time, the other side away from the reference region is greatly affected. This has the problem that parallel movement is difficult due to the arrangement of the drive shafts, that is, if the feed screw shaft serving as the drive shaft is arranged on one side, the other side is greatly affected by the bending of this shaft.

In addition, the guidance on the fixed side of the table is generally guided in the extension direction of a V groove, but this is one of the three orthogonal axes.
Because it is difficult to adjust the position regulation in each axis direction of the two axes perpendicular to the groove, it is recommended for practical use in coordinate measuring machines that require accurate adjustment of the position regulation in each axis direction. There is no. In this sense, it can be said that the table moving type was not used in conventional coordinate measuring machines.

In addition, when using a moving table type in a coordinate measuring machine, it is necessary to ensure the reliability of table guidance, that is, guarantee straight guidance, and guarantee that the table will not change over time. Gender is also required.

[Object of the Invention] The object of the present invention is to provide an automatic 3D measurement system that can exhibit the features of table moving type automatic 3D measurement, has a straight guide, does not deteriorate over time, and is equipped with a movement guide mechanism that is easy to process. To provide measuring equipment.

[Structure of the Invention] The present invention uses a base as a hair-like member made of natural stone or ceramic inx, and also provides a table so as to be automatically driven in the Y-axis direction, which is an axis in a horizontal plane. It is connected to the feed screw shaft supported on the base side at the middle in the width direction of the table perpendicular to the driving direction, and two mutually parallel shafts perpendicular to the X-axis are connected to the center of the base in the width direction.
A first guide member made of a hair-like member having two guide surfaces is arranged in the Y-axis direction, and the straightness of the first guide member is corrected with at least three sets of curved edge stop members arranged in the Y-axis direction. The first guide member is attached to the base at both sides of the first guide member in the X-axis direction, and two mutually parallel guide members perpendicular to the Z-axis direction
A pair of second guide members made of hair-like members having two guide surfaces are fixed to a base along the Y-axis direction, and the table utilizes each guide member of the first and second guide members. The feed screw shaft is guided in the Y-axis direction via an air bearing, and by placing the feed screw shaft in the middle of the table in the width direction, the influence of bending of the screw shaft is reduced compared to when the screw shaft is guided on one side. The position of the first and second guide members is reduced by approximately half, and the position in the X and Z axis directions is guided by the respective guide surfaces of the first and second guide members in a straight manner. By making it a member, it reduces deterioration over time, and by providing the first and second guide members separately, it is possible to adjust each axis and achieve accurate table feeding. It is made easy.

[Example] Hereinafter, one embodiment of the present invention will be described based on the drawings.

In FIGS. 1 and 2 showing the overall configuration, a base lO made of a hair-like material such as natural stone or ceramics is horizontally installed on an installation floor l via a plurality of leveling jigs 30. This base lO is formed into a substantially convex shape, and
A first guide member ll, which is made of a ciliary member similar to that of the base lO and forms a guide surface in the Y-axis direction, is fixed to the center of the upper surface of this convex-shaped base lO with screws. On both sides of the guide member 11, a pair of flat second guide members 12, also made of ciliary members, are symmetrically fixed with screws in a state protruding from the upper surface of the convex portion of the base 10. There is. At this time, the base 1 of the guide member 11 and the second guide member 12
The structure for fixing to the base 10 is as shown in FIG.
A fixing fitting 14 adhesively fixed in a blind hole 13 provided in the
This is done by passing through the first guide member 11 or the second guide member 12 and pushing the bolt 2 h16 into the draw hole. Furthermore, in this specification, the X-axis direction means the left-right direction in FIG. 2, the Y-axis direction means the direction perpendicular to the plane of the paper in the same figure, and the X-axis direction means the vertical direction in the same figure. , these x, y, and z axes are three axes that are orthogonal to each other, with the X and Y axes being horizontal axes and the X axis direction being vertical.

As shown in FIG. 4, the leveling jig 30 includes a base 31 having a substantially concave side surface, and a base 31 having a substantially concave side surface.
A sliding piece 33 is slidably housed inside and has an inclined surface 32 formed on the upper surface thereof, and is screwed into the rising portion of the base 31 so as to be movable back and forth, and the sliding piece 33 is moved forward and backward along the bottom surface of the base 31. The bolt 34 is provided in the side walls on both sides of the base 31 so as to be slidable in the vertical direction, and has an inclined surface 35 that engages with the inclined surface 32 of the sliding piece 33 and comes into contact with the lower surface of the base 10. By turning the bolt 34, the double-ended slope 32.3
5, the height position of the base 10 relative to the installation floor 1 can be adjusted, and the horizontal position of the base 10 can be determined.

On both sides of the first guide member 11, a plurality of pairs, for example, three or more pairs, in fact, about 16 to 32 pairs of bend correction means 40 are disposed to maintain the straightness of the first guide member 11. It has become. As shown in FIG. 5, this bend correction means 40 is adhesively fixed to the side surface of the groove 17 formed on the upper surface of the base 10, and has an inclined surface 41 on the surface opposite to this fixed surface. A parallel guide surface 18 for restricting the movement of the first guide member 11 in the X-axis direction, which has a fixed piece 42 and an inclined surface 43 that is engaged with the inclined surface 41 of the fixed piece 42 and is opposite to the inclined surface 43. a movable piece 45 having a vertical surface 44 that comes into contact with the base lO; a fixing metal fitting 47 that is adhesively fixed in a blind hole 19 formed in the base lO and has a tapped hole 46 in the center; Bolt 4 that passes through and is screwed into the tapped hole of the fixed metal Jt47
8, and by adjusting the screwing amount of the bolt 48, the position where the Ml The straightness of the member 11 can be corrected.

A metal table 50 is provided on the base 10 so as to be movable in the Y-axis direction. An air bearing 51 facing the parallel guide surface 18 of the first guide member 11 is attached to the lower surface of the table 50 via a bracket 52, and
Upper guide surface 2 of the parallel guide surfaces 20 for regulating axial movement
A relatively large air bearing 53 facing the parallel guide surface 20 is provided, and an air bearing 54 facing the lower guide surface 20 of the parallel guide surface 20 is installed via a plastic shaft 55. Ring 51, 53.54
This allows the table 50 to move on the base 10 with a slight force, and the movement in the X-axis direction is regulated by the action of the first guide member 11 and the air bearing 51. Guide member 12 and air bearing 53°5
4, the movement in the X-axis direction is adjusted and restricted for each axis, and straight movement is possible only in the Y-axis direction.

Further, between the base 10 and the table 50, a table 5 is provided.
A Y-axis direction drive mechanism 60 is provided for driving 0 in the Y-axis direction. As shown in FIG. 6, this Y-axis direction drive mechanism 60 includes a motor 62 fixed to the base 10 via a plastic lift 61, and a pole screw shaft connected to the output shaft of this motor 62. a screw shaft 64; and a socket member 6 movably screwed onto the feed screw shaft 64 and fixed to the table 50 via a bladder 65.
6, and the table 50 can be driven in the Y-axis direction by driving the motor 62. At this time, the feed screw shaft 64 is disposed within the groove zl of the first guide member 11, so that the feed screw shaft 64 is positioned approximately in the middle of the table 50 in the width direction, that is, in the X-axis direction. ing.

As shown in FIG.
The zero point position for measuring the origin position of the table 50, that is, the absolute position, is provided on the first guide member 11 side. The zero setting means 80 includes a zero mark 81 and a detection switch 82 provided on the table 50 side. Further, the movement range of the table 50 is controlled by a dock 85 provided on the base 10 and a limit switch (not shown) provided on the table 50 side.

In FIG. 2, pillars 9 are provided on both sides of the base lO.
0 is fixed. The structure of fixing the support column 90 to the base 10 is such that a substantially pestle-shaped fastener 23 is inserted into a through-hole 24 inserted into a plurality of holes 22 provided along both sides of the base 10 in the Y-axis direction. A bolt 25 that is screwed through the
It is carried out by Each of these pillars 90 is made of metal such as iron, and a beam 100 as a non-movable object side structure made of a hair-like member similar to the base 10 is horizontally fixed between the upper ends of these pillars 90. has been done. This g
The fixing structure between too and the pillar 90 is similar to the fixing structure between the pillar 90 and the base 10, and the beam 10 is made of natural stone or the like.
A hole 101 provided on the zero side, a substantially pestle-shaped tightening fitting 102 made of a metal material inserted into the hole 101, and a beam 10.
The bolt 104 is inserted through a through hole 103 provided on the zero side and screwed into a tapped hole of the fastening fitting 102.

A slider 110 is supported on the beam 100 so as to be movable in the X-axis direction, and the slider 110 is moved along the X-axis by an A kite rail 105 for guiding the slider 110 in the X-axis direction and a scale 106 for detecting the amount of movement of the slider 110 are provided on the back side of the beam 100, respectively.

As shown in FIG. 7, the slider 110 includes a bearing box 112 for guiding in the X-axis direction, which is provided so as to surround the lOO, and has air bearings 111 facing each square surface of the beam 100. , a pair of upper and lower bearing boxes 114 for Z-axis direction guidance, which are attached to the front surface of this X-axis direction guide bearing box 112 and have air bearings 113 arranged in a rectangular planar shape inside; A Z-axis structure 180 inserted into the bearing box 114 so as to be movable in the X-axis direction, and the bearing box 11 for guiding in the X-axis direction.
2, and a Z-axis drive mechanism 140 supported by a support frame 115 erected on the support frame 115; A locking device 160 is provided to prevent the structure 180 from falling.

The Z-axis direction drive mechanism 140
A relatively large motor 141, for example 4 mm or more, is rotatably driven by the motor 141 via a timing heald 142 and is rotatably supported at its upper and lower ends on the upper and lower parts of the support frame 115, respectively. A feed screw shaft 145 having a helical pitch of 2, and a nut member 1 supported by the feed screw shaft 145 so as to be movable in the axial direction.
46, and the guide rail 147 is rotatably supported by the nut member 146 and is attached to the wall surface (not shown) on the front side in FIG. 4 of the support frame 115. a pair of rollers 148 that guide the nut member 146 along the guide rail 147 so that it can move easily in the Z-axis direction but cannot rotate;
A connecting plate 149 is fixed to the Z-axis structure 180, and a feed screw shaft 145 is connected to the upper and lower surfaces of the protruding end of the connecting plate 149 so that the feed screw shaft 145 cannot be moved in the axial direction but can be easily moved in the radial direction. A fixed bracket 152 is provided, and the Z-axis structure 180 can be driven in the Z-axis direction via the bracket 152 by driving the motor 141. At this time, the influence of bending, eccentricity, etc. of the feed screw shaft 145 is absorbed by the portion of the feed screw shaft 145 that cannot move in the axial direction but is movable in the radial direction with respect to the connecting plate 149, and Only the movement of the nut member 146 in the Z-axis direction is transmitted.

The Z-axis structure 180 includes a hollow housing 181 that is made of a square tube and serves as a Z-axis member.
1 includes an air balance mechanism 190 and a probe attachment/detachment mechanism 200. This air balance mechanism 190 is
The cylinder 191 is fixed to the housing 181 and has an open bottom end, and the piston 192 is housed in the cylinder 191 and supported by the support frame 115 via a piston rod 194.
By supplying compressed air between the piston 192 and the upper part of the cylinder 191, the Z
By supporting the weight of the shaft structure 180, the load on the feed screw shaft 145 side due to the own weight of the Z-axis structure 180 is reduced. Further, a Z-axis direction movement amount detection means consisting of a scale and a detector (not shown) is provided between the housing 181 and the support frame 115, and the amount of axial movement of the Z-axis structure 180 is detected. It looks like this.

The probe attachment/detachment mechanism 200 includes a rotatable Z spindle 220 therein, and a probe holder 250 (see FIG. 1.2) is inserted into the probe attachment hole provided at the lower end of the Z spindle 220 for measurement. A touch signal probe 280 having a child 281 is attached.

A probe stocker 290 is provided on the table 50 at one end thereof, that is, at the rear right side in FIG. This probe stocker 290 has a holding plate 29 attached to the table 50 at a predetermined distance via a holding stand 291.
3 (see FIG. 2), and this holding plate 293 is provided with a large number of U-shaped notches 292 that are open toward the other end of the table 50, that is, toward the left front side in FIG. A probe holder 250 having a predetermined touch signal probe 280 is mounted and supported in the notch 292 in a predetermined mounting attitude.

Although the reference numeral 310 in FIG. 1 is shown in a simplified diagram,
A printer, which has a display section 311 and is not shown, C
A control device 320 is placed on the table 50 and has peripheral devices such as an RT, and further has a computer system with an internal calculation function, storage function, etc., and controls the movement of each part according to a predetermined program. The object to be measured, reference numeral 26, is a bellows force/couple that protects the Y-axis direction drive mechanism 60 from dust, reference numeral 27t.
It's a side cover.

Next, the operation of this embodiment will be explained.

In response to a command from the control device 320, the table 50 is driven by the Y-axis direction drive mechanism 60, the probe stroke/force 290 is positioned below the Z spindle 220, and in this state, the slide pol l O and Z-axis structure are The object 180 is moved in the X and Z axis directions and placed in a predetermined probe holder 25 on the probe stocker 290 at the lower end of the Z spindle 220.
Insert and fix 0. The probe holder 250 is attached to the Z spindle 220 by a probe attachment/detachment mechanism (not shown) provided within the Z spindle 220.

Next, when the table 50 is moved backward, the probe holder 250 is removed from the probe stocker 290, and measurement by the touch signal probe 280 becomes possible. In this state, while moving the two-axis structure 180, slider 110, and table 50 in the z, x, and y-axis directions according to commands from the control device 31O, the probe 28 of the touch signal probe 280 is moved to the target object 320. The shape of the object to be measured 320 is measured by sequentially contacting the measurement points, and the result is displayed on the display section 311 of the control device 320 and printed out.

According to this embodiment, which has two series, by making the table 50 movable, the movable part having the probe 281 is made a lightweight part after the slider 110, and the deflection due to the weight of the movable part on the probe 281 side is reduced. It is possible to significantly reduce the amount of noise and improve measurement accuracy. Movable table 5
0, the drive screw shaft 64 is connected to the table 5.
Since it is arranged in the middle of 0, particularly in the center, it is possible to reduce errors at the side edges of the table 50 caused by bending of the feed screw shaft 64, etc., compared to a case where it is arranged on one side.

In addition, when guiding the table 50 in the Y-axis direction, the movement in the X-axis direction perpendicular to the Y-axis and in the X-axis direction is restricted as follows.
a first guide member 11 and a second guide member 12, respectively
Since each part is controlled separately, it is possible to guide with extremely high precision compared to the structure where the grooves are used for regulation. At this time, 1. Since the second guide members 11 and 12 are both manufactured separately from the base lO, their respective guide surfaces 18 and 20 can be easily formed into parallel surfaces, and the first guide member 11 can be straightened by the bending correction means 40, so that more accurate guidance can be achieved from this point of view as well. Furthermore, since both the first and second guide members 11, 12 are hair-like members made of natural stone or the like, there is very little deterioration over time, and accuracy can be guaranteed for many years. Additionally, the table 50 is supported by air bearings 51 and 53.
．． 54, the load on the Y-axis direction drive mechanism 60 can be reduced. Furthermore, the feed screw shaft 64 is connected to the table 5.
Since the air bearings 51 and 53 are arranged in the width direction of
．． 54 can be absorbed by slight deflection of the feed screw shaft 64.

Note that the motor 141 as a drive source in the above embodiment
．． 162 is not limited to an AC, DC, or pulse motor, but may also be an air motor, a hydraulic motor, or the like.

As described above, according to the present invention, it is possible to provide a movement guide mechanism that is effective for realizing a table moving type automatic three-dimensional measuring machine.

[Brief explanation of the drawing]

Fig. 1 is a perspective view showing the overall configuration of an embodiment of the present invention, Fig. 2 is a partially cutaway front view, and Figs. 3 to 5 are enlarged views showing the main parts of Fig. 2. , FIG. 6 is an enlarged side view of the Y-axis direction drive mechanism, and FIG. 7 is an enlarged side view with a portion of the slider cut away. 10... Base, 11.12... A first member forming a guide surface in the Y-axis direction and constituting X and X-axis position regulating means;
Second guide member, 18.20... Parallel guide surface, 40.
...Bending correction means, 50...Table, 51.53
．． 54... Air bearing, 60... Y-axis direction drive mechanism, 180... Z-axis structure, 220... Z spindle, 280... Touch signal probe, 281...
Measuring element, 310...control device, 320...object to be measured. Agent Patent attorney Minoru Kinoshita (and 1 other person) Figure 1 Figure 2 Figure 3 Figure 6 -), -50 -■

Claims (1)

[Claims] (1) Of the three mutually orthogonal x, y, and z axes, the Y axis is the axis in the horizontal plane, and the Z axis has a touch signal probe at the tip and is automatically driven in the X and X axis directions relative to the base. An automatic three-dimensional measuring machine equipped with a spindle and a table that is automatically driven in the Y-axis direction, wherein the base is formed of a hair-like member made of natural stone or ceramics, and the base is moved in the width direction of the base, that is, in the A first guide member made of a ciliary member having two mutually parallel guide surfaces perpendicular to the X axis is disposed at the center in the axial direction along the Y axis direction. It is attached to the base via at least three sets of bend correction means arranged in the axial direction, and has two mutually parallel guide surfaces orthogonal to the X-axis direction at positions on both sides of the first guide member in the X-axis direction. A pair of second guide members made of ciliary members are fixed to the base along the Y-axis direction, and
The table is guided movably in the Y-axis direction to the base via an air hair ring using each guide surface of the first and second guide members, and a An automatic three-dimensional measuring machine characterized in that the table is threadedly connected to a drive screw shaft rotatably supported on a base side.