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JPS523744A - High-frequency heater - Google Patents

High-frequency heater

Info

Publication number
JPS523744A
JPS523744A JP7922076A JP7922076A JPS523744A JP S523744 A JPS523744 A JP S523744A JP 7922076 A JP7922076 A JP 7922076A JP 7922076 A JP7922076 A JP 7922076A JP S523744 A JPS523744 A JP S523744A
Authority
JP
Japan
Prior art keywords
frequency heater
leakage
heater
frequency
improving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7922076A
Other languages
Japanese (ja)
Inventor
Kyogen Hosokawa
Shigeru Kusuki
Akihisa Takano
Hirobumi Yoshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7922076A priority Critical patent/JPS523744A/en
Publication of JPS523744A publication Critical patent/JPS523744A/en
Pending legal-status Critical Current

Links

Landscapes

  • Constitution Of High-Frequency Heating (AREA)

Abstract

PURPOSE: Improving a screening effect not only to leakage fundamental wave but to leakage high-order one.
COPYRIGHT: (C)1977,JPO&Japio
JP7922076A 1976-07-02 1976-07-02 High-frequency heater Pending JPS523744A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7922076A JPS523744A (en) 1976-07-02 1976-07-02 High-frequency heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7922076A JPS523744A (en) 1976-07-02 1976-07-02 High-frequency heater

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5713072A Division JPS523127B2 (en) 1972-06-07 1972-06-07

Publications (1)

Publication Number Publication Date
JPS523744A true JPS523744A (en) 1977-01-12

Family

ID=13683826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7922076A Pending JPS523744A (en) 1976-07-02 1976-07-02 High-frequency heater

Country Status (1)

Country Link
JP (1) JPS523744A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5421437A (en) * 1977-07-19 1979-02-17 Dainippon Toryo Co Ltd Lubricating coating composition
DE3106786A1 (en) 1981-02-24 1982-09-09 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Microwave heating apparatus
US7291819B2 (en) * 2005-08-22 2007-11-06 Lg Electronics Inc. Heating apparatus using electromagnetic wave
US7301132B2 (en) * 2005-08-22 2007-11-27 Lg Electronics Inc. Heating apparatus using electromagnetic wave
US7429721B2 (en) * 2005-08-22 2008-09-30 Lg Electronics Inc. Heating apparatus using electromagnetic wave
US7554053B2 (en) * 2005-12-23 2009-06-30 Lam Research Corporation Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system
US7679024B2 (en) 2005-12-23 2010-03-16 Lam Research Corporation Highly efficient gas distribution arrangement for plasma tube of a plasma processing chamber
US8048329B2 (en) 2005-12-23 2011-11-01 Lam Research Corporation Methods for implementing highly efficient plasma traps

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4864535A (en) * 1971-11-30 1973-09-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4864535A (en) * 1971-11-30 1973-09-06

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5421437A (en) * 1977-07-19 1979-02-17 Dainippon Toryo Co Ltd Lubricating coating composition
JPS5523592B2 (en) * 1977-07-19 1980-06-24
DE3106786A1 (en) 1981-02-24 1982-09-09 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Microwave heating apparatus
US7291819B2 (en) * 2005-08-22 2007-11-06 Lg Electronics Inc. Heating apparatus using electromagnetic wave
US7301132B2 (en) * 2005-08-22 2007-11-27 Lg Electronics Inc. Heating apparatus using electromagnetic wave
US7429721B2 (en) * 2005-08-22 2008-09-30 Lg Electronics Inc. Heating apparatus using electromagnetic wave
US7554053B2 (en) * 2005-12-23 2009-06-30 Lam Research Corporation Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system
US7679024B2 (en) 2005-12-23 2010-03-16 Lam Research Corporation Highly efficient gas distribution arrangement for plasma tube of a plasma processing chamber
US8048329B2 (en) 2005-12-23 2011-11-01 Lam Research Corporation Methods for implementing highly efficient plasma traps

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