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JPS5176968A - KISOSEICHOHO - Google Patents

KISOSEICHOHO

Info

Publication number
JPS5176968A
JPS5176968A JP14886774A JP14886774A JPS5176968A JP S5176968 A JPS5176968 A JP S5176968A JP 14886774 A JP14886774 A JP 14886774A JP 14886774 A JP14886774 A JP 14886774A JP S5176968 A JPS5176968 A JP S5176968A
Authority
JP
Japan
Prior art keywords
kisoseichoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14886774A
Other languages
Japanese (ja)
Inventor
Yoshio Iuchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14886774A priority Critical patent/JPS5176968A/en
Publication of JPS5176968A publication Critical patent/JPS5176968A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP14886774A 1974-12-27 1974-12-27 KISOSEICHOHO Pending JPS5176968A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14886774A JPS5176968A (en) 1974-12-27 1974-12-27 KISOSEICHOHO

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14886774A JPS5176968A (en) 1974-12-27 1974-12-27 KISOSEICHOHO

Publications (1)

Publication Number Publication Date
JPS5176968A true JPS5176968A (en) 1976-07-03

Family

ID=15462495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14886774A Pending JPS5176968A (en) 1974-12-27 1974-12-27 KISOSEICHOHO

Country Status (1)

Country Link
JP (1) JPS5176968A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60109222A (en) * 1983-11-18 1985-06-14 Nec Corp Device for vapor growth of compound semiconductor of iii-v group
JP2011021278A (en) * 2003-04-16 2011-02-03 Cree Inc Method and apparatus for controlling formation of deposit in deposition system and deposition system and method including the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60109222A (en) * 1983-11-18 1985-06-14 Nec Corp Device for vapor growth of compound semiconductor of iii-v group
JP2011021278A (en) * 2003-04-16 2011-02-03 Cree Inc Method and apparatus for controlling formation of deposit in deposition system and deposition system and method including the same

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