JPS5045571A - - Google Patents
Info
- Publication number
- JPS5045571A JPS5045571A JP9546773A JP9546773A JPS5045571A JP S5045571 A JPS5045571 A JP S5045571A JP 9546773 A JP9546773 A JP 9546773A JP 9546773 A JP9546773 A JP 9546773A JP S5045571 A JPS5045571 A JP S5045571A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9546773A JPS5528425B2 (en) | 1973-08-25 | 1973-08-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9546773A JPS5528425B2 (en) | 1973-08-25 | 1973-08-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5045571A true JPS5045571A (en) | 1975-04-23 |
| JPS5528425B2 JPS5528425B2 (en) | 1980-07-28 |
Family
ID=14138446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9546773A Expired JPS5528425B2 (en) | 1973-08-25 | 1973-08-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5528425B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5372574A (en) * | 1976-12-10 | 1978-06-28 | Fujitsu Ltd | Patterning method for resist |
| JPS5498179A (en) * | 1978-01-20 | 1979-08-02 | Nippon Telegr & Teleph Corp <Ntt> | Preparation of minute circuits and elements |
| JPS5669835A (en) * | 1979-11-09 | 1981-06-11 | Japan Electronic Ind Dev Assoc<Jeida> | Method for forming thin film pattern |
| JPS5687326A (en) * | 1979-12-17 | 1981-07-15 | Sony Corp | Method of forming wiring |
-
1973
- 1973-08-25 JP JP9546773A patent/JPS5528425B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5372574A (en) * | 1976-12-10 | 1978-06-28 | Fujitsu Ltd | Patterning method for resist |
| JPS5498179A (en) * | 1978-01-20 | 1979-08-02 | Nippon Telegr & Teleph Corp <Ntt> | Preparation of minute circuits and elements |
| JPS5669835A (en) * | 1979-11-09 | 1981-06-11 | Japan Electronic Ind Dev Assoc<Jeida> | Method for forming thin film pattern |
| JPS5687326A (en) * | 1979-12-17 | 1981-07-15 | Sony Corp | Method of forming wiring |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5528425B2 (en) | 1980-07-28 |