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JPS5533289A - Temperature controller - Google Patents

Temperature controller

Info

Publication number
JPS5533289A
JPS5533289A JP10657578A JP10657578A JPS5533289A JP S5533289 A JPS5533289 A JP S5533289A JP 10657578 A JP10657578 A JP 10657578A JP 10657578 A JP10657578 A JP 10657578A JP S5533289 A JPS5533289 A JP S5533289A
Authority
JP
Japan
Prior art keywords
temperature
atmosphere
thermistor
water
specific place
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10657578A
Other languages
Japanese (ja)
Inventor
Katsuaki Takahashi
Toshiyuki Sagusa
Hiroshi Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10657578A priority Critical patent/JPS5533289A/en
Publication of JPS5533289A publication Critical patent/JPS5533289A/en
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Temperature (AREA)

Abstract

PURPOSE: To make temperature control at a specific place possible by providing temperature detecting elements in an atmosphere and at the circumference of the specific place respectively and by connecting these elements in series when controlling the temperature at the specific place isolated from the atmosphere by heating or cooling.
CONSTITUTION: Water 1, a thermal conductor, is poured into container 5 and thermistor 3 and material 7, a temperature controlled object, are placed under this water to control heating cooler 2 by detecting the temperature of the water by thermistor 3, thereby keeping the temperature at external point 6 of material 7 constant. In this case, another thermistor 9 is provided to in atmosphere 4, and thermistor 3 under the water mentioned above and thermistor 9 in the atmosphere are connected in series so as to control the heating cooler via control circuit 8, thereby suppressing the drift of the material object due to temperature variation in the atmosphere.
COPYRIGHT: (C)1980,JPO&Japio
JP10657578A 1978-08-30 1978-08-30 Temperature controller Pending JPS5533289A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10657578A JPS5533289A (en) 1978-08-30 1978-08-30 Temperature controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10657578A JPS5533289A (en) 1978-08-30 1978-08-30 Temperature controller

Publications (1)

Publication Number Publication Date
JPS5533289A true JPS5533289A (en) 1980-03-08

Family

ID=14437024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10657578A Pending JPS5533289A (en) 1978-08-30 1978-08-30 Temperature controller

Country Status (1)

Country Link
JP (1) JPS5533289A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57164553U (en) * 1981-04-14 1982-10-16
JPS57164552U (en) * 1981-04-14 1982-10-16
JPH0653298A (en) * 1990-01-24 1994-02-25 Internatl Business Mach Corp <Ibm> Temperature control system of dry interface thermal chuck for semiconductor wafer test
JP2012134910A (en) * 2010-12-24 2012-07-12 Seiko Epson Corp Temperature control circuit, thermostatic oven type piezoelectric oscillator, electronic equipment, and temperature control method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57164553U (en) * 1981-04-14 1982-10-16
JPS57164552U (en) * 1981-04-14 1982-10-16
JPH0653298A (en) * 1990-01-24 1994-02-25 Internatl Business Mach Corp <Ibm> Temperature control system of dry interface thermal chuck for semiconductor wafer test
JP2012134910A (en) * 2010-12-24 2012-07-12 Seiko Epson Corp Temperature control circuit, thermostatic oven type piezoelectric oscillator, electronic equipment, and temperature control method

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