JPS4848334A - - Google Patents
Info
- Publication number
- JPS4848334A JPS4848334A JP9135272A JP9135272A JPS4848334A JP S4848334 A JPS4848334 A JP S4848334A JP 9135272 A JP9135272 A JP 9135272A JP 9135272 A JP9135272 A JP 9135272A JP S4848334 A JPS4848334 A JP S4848334A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US18747871A | 1971-10-07 | 1971-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4848334A true JPS4848334A (ja) | 1973-07-09 |
Family
ID=22689163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9135272A Pending JPS4848334A (ja) | 1971-10-07 | 1972-09-13 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS4848334A (ja) |
| DE (1) | DE2248840A1 (ja) |
| FR (1) | FR2156005A1 (ja) |
| GB (1) | GB1344972A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2496703A1 (fr) * | 1980-12-24 | 1982-06-25 | Labo Electronique Physique | Source d'evaporation de manganese sur substrat dans le vide, notamment sur substrat de couche photosensible dans un tube photo-electrique et procede de fabrication |
| US7329436B2 (en) | 2004-11-17 | 2008-02-12 | United Technologies Corporation | Vapor deposition of dissimilar materials |
| KR100611673B1 (ko) * | 2005-01-31 | 2006-08-10 | 삼성에스디아이 주식회사 | 박막 형성 방법 및 유기전계발광소자의 제조 방법 |
-
1972
- 1972-09-13 JP JP9135272A patent/JPS4848334A/ja active Pending
- 1972-09-20 GB GB4343172A patent/GB1344972A/en not_active Expired
- 1972-09-27 FR FR7235072A patent/FR2156005A1/fr not_active Withdrawn
- 1972-10-05 DE DE19722248840 patent/DE2248840A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2156005A1 (ja) | 1973-05-25 |
| DE2248840A1 (de) | 1973-04-12 |
| GB1344972A (en) | 1974-01-23 |