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JPH0370330U - - Google Patents

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Publication number
JPH0370330U
JPH0370330U JP11562190U JP11562190U JPH0370330U JP H0370330 U JPH0370330 U JP H0370330U JP 11562190 U JP11562190 U JP 11562190U JP 11562190 U JP11562190 U JP 11562190U JP H0370330 U JPH0370330 U JP H0370330U
Authority
JP
Japan
Prior art keywords
wavelength
light
measured
wavelength side
spectral image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11562190U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11562190U priority Critical patent/JPH0370330U/ja
Publication of JPH0370330U publication Critical patent/JPH0370330U/ja
Pending legal-status Critical Current

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  • Spectrometry And Color Measurement (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は回折格子による分光スペクトルの回折
次数による波長分布を示すグラフ、第2図は本考
案の一実施例装置の平面図、第3図、第4図は本
考案において用いられるフイルタの相異る実施例
の特性を示すグラフである。 1……入射スリツト、2……コリメータ鏡、3
……平面回折格子、4……カメラ鏡、5……フイ
ルタ、6……一次元的撮像素子。
Fig. 1 is a graph showing the wavelength distribution according to the diffraction order of the spectrum by the diffraction grating, Fig. 2 is a plan view of an embodiment of the device of the present invention, and Figs. 3 and 4 are the phases of the filter used in the present invention. 5 is a graph showing characteristics of different examples. 1...Incidence slit, 2...Collimator mirror, 3
...Plane diffraction grating, 4...Camera mirror, 5...Filter, 6...One-dimensional imaging device.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 回折格子による測定しようとする回折次数の光
の測定しようとする、短波長端波長の2倍以上に
設定された波長範囲のスペクトル像面に一次元的
撮像素子を配置し、この撮像素子の受光面の前に
、上記スペクトル像の各位置において、上記測定
しようとする回折次数の光を含む或る波長範囲の
光を透過し、その位置における測定しよとする次
数以外の次数の回折光は遮断するよう、一枚の基
板上でスペクトル像の長波長側と短波長側とで透
過特性が異り、短波長側の方が長波長側より透過
波長が短いように場所により異る透過特性を持た
せたフイルタを配置したことを特徴とする多波長
分光器。
A one-dimensional image sensor is placed on a spectral image plane of a wavelength range set to more than twice the short wavelength end wavelength to be measured by the diffraction order of light to be measured by the diffraction grating, and the light received by this image sensor is In front of the surface, at each position of the spectral image, light in a certain wavelength range that includes the light of the diffraction order to be measured is transmitted, and diffracted light of orders other than the order to be measured at that position is transmitted. The transmission characteristics differ depending on the location, such that the long wavelength side and short wavelength side of the spectral image have different transmission characteristics on a single substrate, and the transmission wavelength on the short wavelength side is shorter than the long wavelength side. A multi-wavelength spectrometer characterized by having a filter arranged therein.
JP11562190U 1990-11-01 1990-11-01 Pending JPH0370330U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11562190U JPH0370330U (en) 1990-11-01 1990-11-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11562190U JPH0370330U (en) 1990-11-01 1990-11-01

Publications (1)

Publication Number Publication Date
JPH0370330U true JPH0370330U (en) 1991-07-15

Family

ID=31663948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11562190U Pending JPH0370330U (en) 1990-11-01 1990-11-01

Country Status (1)

Country Link
JP (1) JPH0370330U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011033514A (en) * 2009-08-04 2011-02-17 Nikon Corp Spectrometry device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5339784A (en) * 1976-09-23 1978-04-11 Ibm Spectrophotometer
JPS5439650A (en) * 1977-09-04 1979-03-27 Ritsuo Hasumi Wide band light wave analyzer
JPS54141149A (en) * 1978-04-24 1979-11-02 Nec Corp Interference filter

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5339784A (en) * 1976-09-23 1978-04-11 Ibm Spectrophotometer
JPS5439650A (en) * 1977-09-04 1979-03-27 Ritsuo Hasumi Wide band light wave analyzer
JPS54141149A (en) * 1978-04-24 1979-11-02 Nec Corp Interference filter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011033514A (en) * 2009-08-04 2011-02-17 Nikon Corp Spectrometry device

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