JPH0233978U - - Google Patents
Info
- Publication number
- JPH0233978U JPH0233978U JP11224688U JP11224688U JPH0233978U JP H0233978 U JPH0233978 U JP H0233978U JP 11224688 U JP11224688 U JP 11224688U JP 11224688 U JP11224688 U JP 11224688U JP H0233978 U JPH0233978 U JP H0233978U
- Authority
- JP
- Japan
- Prior art keywords
- piezo stack
- control valve
- valve
- supported
- valve body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Description
第１図及び第２図は本考案の一実施例を示し、
第１図は本考案に係る制御弁を組み込んだノルマ
ルオープンタイプのマスフローコントローラを示
す縦断面図、第２図はピエゾスタツクの保持構造
の一例を示す部分断面図である。第３図はピエゾ
スタツクの保持構造の他の実施例を示す部分断面
図である。第４図はピエゾスタツクの下部可動部
と弁体との結合構造の他の実施例を示す部分断面
図である。第５図は本考案に係る制御弁を組み込
んだノルマルクローズタイプのマスフローコント
ローラを示す縦断面図である。第６図は従来例を
示す断面図である。
６……制御弁（流量制御部）、１２……弁口、
１６……弁体、２１……ピエゾスタツク、２３…
…上部固定部、２７……下部可動部、３１……球
面軸受部。
1 and 2 show an embodiment of the present invention,
FIG. 1 is a vertical sectional view showing a normally open type mass flow controller incorporating a control valve according to the present invention, and FIG. 2 is a partial sectional view showing an example of a piezo stack holding structure. FIG. 3 is a partial sectional view showing another embodiment of the piezo stack holding structure. FIG. 4 is a partial sectional view showing another embodiment of the coupling structure between the lower movable part of the piezo stack and the valve body. FIG. 5 is a vertical sectional view showing a normally closed type mass flow controller incorporating the control valve according to the present invention. FIG. 6 is a sectional view showing a conventional example. 6... Control valve (flow control section), 12... Valve port,
16...Valve body, 21...Piezo stack, 23...
...Upper fixed part, 27...Lower movable part, 31...Spherical bearing part.
Claims (1)
より押圧駆動するようにした制御弁において、前
記ピエゾスタツクの上部固定部をリング状のテー
パ面または球面で支持し、前記ピエゾスタツクの
下部可動部を球面軸受部を介して弁体に結合した
ことを特徴とする制御弁。 In a control valve in which a valve body for opening and closing a valve port is pressed and driven by strain force of a piezo stack, an upper fixed part of the piezo stack is supported by a ring-shaped tapered surface or a spherical surface, and a lower movable part of the piezo stack is supported by a spherical bearing. A control valve characterized in that the control valve is connected to a valve body through a portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988112246U JP2516824Y2 (en) | 1988-08-27 | 1988-08-27 | Control valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988112246U JP2516824Y2 (en) | 1988-08-27 | 1988-08-27 | Control valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0233978U true JPH0233978U (en) | 1990-03-05 |
| JP2516824Y2 JP2516824Y2 (en) | 1996-11-13 |
Family
ID=31351010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988112246U Expired - Fee Related JP2516824Y2 (en) | 1988-08-27 | 1988-08-27 | Control valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2516824Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010230159A (en) * | 2009-03-27 | 2010-10-14 | Horiba Stec Co Ltd | Flow control valve |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4603207B2 (en) * | 2001-08-08 | 2010-12-22 | 株式会社堀場製作所 | Gas dilution system |
| JP5943549B2 (en) * | 2011-02-24 | 2016-07-05 | 株式会社不二工機 | Motorized valve |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5965491A (en) * | 1982-10-06 | 1984-04-13 | Hitachi Ltd | Piezo-electric fine displacement device |
| JPS61127983A (en) * | 1984-11-27 | 1986-06-16 | Esutetsuku:Kk | Fluid control valve |
| JPS62124373A (en) * | 1985-11-21 | 1987-06-05 | Yamada Mie | Controller |
| JPS62215177A (en) * | 1986-03-14 | 1987-09-21 | Nok Corp | Three-way valve |
| JPS63140179A (en) * | 1986-12-01 | 1988-06-11 | Esutetsuku:Kk | Minute flow control valve |
-
1988
- 1988-08-27 JP JP1988112246U patent/JP2516824Y2/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5965491A (en) * | 1982-10-06 | 1984-04-13 | Hitachi Ltd | Piezo-electric fine displacement device |
| JPS61127983A (en) * | 1984-11-27 | 1986-06-16 | Esutetsuku:Kk | Fluid control valve |
| JPS62124373A (en) * | 1985-11-21 | 1987-06-05 | Yamada Mie | Controller |
| JPS62215177A (en) * | 1986-03-14 | 1987-09-21 | Nok Corp | Three-way valve |
| JPS63140179A (en) * | 1986-12-01 | 1988-06-11 | Esutetsuku:Kk | Minute flow control valve |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010230159A (en) * | 2009-03-27 | 2010-10-14 | Horiba Stec Co Ltd | Flow control valve |
| US8844901B2 (en) | 2009-03-27 | 2014-09-30 | Horiba Stec, Co., Ltd. | Flow control valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2516824Y2 (en) | 1996-11-13 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |