JPH09125241A - Magnetron electrode - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetron electrode capable of remarkably improving the utilizing rate of a target and furthermore to uniformize the coating thickness distribution in the formed coating by uniformly applying a magnetic field needed for magnetron discharge in the wide region in the target. SOLUTION: This magnetron electrode is the one in which a magnetic circuit 10 is constituted of a yoke 1 and permanent magnets 2 and 3, the outside diameter of the yoke 1 and permanent magnet 3 is made smaller than that of a target 4, and the yoke 1 is driven rotatably to the center axis of the target 4 while it straightly reciprocates in the radial direction of the target 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetron electrode for a sputtering apparatus for producing a thin film.

[0002]

2. Description of the Related Art As shown in FIG. 2, a cylindrical permanent magnet 2 magnetized in the thickness direction is adhered and fixed to a central portion of a circular yoke 1 on a magnetron electrode of a conventional sputtering apparatus.
Further, an annular permanent magnet 3 magnetized in the opposite direction to the permanent magnet 2 is fixedly adhered to the outer peripheral portion of the yoke 1,
As shown in FIG. 3, pole pieces 12a, 12 are provided on the outer and inner circumferences of the annular permanent magnet 11 magnetized in the radial direction.
There is a device in which b is arranged and these are bonded and fixed to the non-magnetic base plate 13.

When an electric field is applied to such an electrode, a magnetic field line 7 generated by a magnetic circuit creates a space near the target 4 where the electric field and the magnetic field are orthogonal to each other, and the portion of the sputtering region 5 is sputtered by magnetron discharge.

[0004]

However, in this type of magnetron electrode, since the distribution of the magnetic field by the magnetic circuit is constant, the sputtering area 5 of the target is fixed and the target utilization rate is low.

In order to improve this point, a method of making the shape of the magnetic circuit into an elliptical shape as shown in FIG. 4 and rotating it has been proposed, but it is difficult to make the peak value of the magnetic field uniform. However, there is a problem that the sputtering area of the target cannot be made too wide.

Therefore, the technical problem of the present invention is to solve the above-mentioned drawbacks, to uniformly apply the magnetic field required for magnetron discharge in a wide area of the target, and to significantly improve the utilization factor of the target. The purpose is to provide a magnetron electrode having a uniform film thickness distribution.

[0007]

That is, according to the present invention,
In a magnetron electrode having a magnetic circuit with a permanent magnet fixed on the yoke, the outer diameter of the magnetic circuit is made smaller than the outer diameter of the target, and the magnetic circuit reciprocates linearly in the radial direction of the target with respect to the center axis of the target. A magnetron electrode is obtained which is characterized by being configured to rotate.

According to the present invention, the magnetron electrode is obtained in which the magnetic circuit reciprocates in the radial direction of the target and at the same time the target rotates.

(Operation) The magnetic circuit in the magnetron electrode of the present invention comprises a yoke, a cylindrical permanent magnet magnetized in the thickness direction, which is adhered to the central portion of the yoke, and an outer peripheral portion of which is adhered. It is composed of a permanent magnet and an annular permanent magnet magnetized in the opposite direction. With this magnetic circuit, a magnetic field having a uniform distribution on the concentric circles can be obtained.

The outer diameter of the magnetic circuit is smaller than the outer diameter of the target so that the reciprocating linear motion can be performed in the radial direction of the target. Therefore, a uniform magnetic field can be applied to the target on the round trip line.

Further, by rotating the linear motion system with respect to the center axis of the target, a uniform magnetic field can be applied over almost the entire area of the target, thereby expanding the sputtering area and increasing the utilization rate of the target. Is improved.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a sectional view of the magnetron electrode of the present invention. In FIG. 1, a columnar permanent magnet 2 magnetized in the thickness direction is bonded and fixed to the central portion of a circular yoke 1,
Further, an annular permanent magnet 3 magnetized in the opposite direction to the permanent magnet 2 is bonded and fixed on the outer peripheral portion of the yoke 1 in a concentric circle. The convex portion 9 of the yoke 1 is fitted in the guide concave groove 8 provided on the rotary table 6.

The outer diameter of the yoke 1 is smaller than that of the target 4, and the yoke 1 can reciprocate linearly in the radial direction of the target 4. Further, the table 6 can be rotated with respect to the center axis of the target. Further, since the permanent magnets 2 and 3 are arranged concentrically, the magnetic field distribution is uniform.

When an electric field is applied to the target 4,
The magnetic field lines 7 generated from the magnetic circuit cause the sputtering region 5 of the target 4 to be sputtered by the magnetron discharge phenomenon.

In this state, when the yoke is linearly moved on the table 6 in the radial direction of the target 4, the sputter region 5 also moves in the radial direction.

Further, the yoke is linearly moved back and forth, and further, the table 6 is rotationally moved with respect to the central axis of the target 4, so that a uniform magnetic field is applied over almost the entire area of the target 4, thereby expanding the sputter region 5. Then, the utilization rate of the target 4 is significantly improved.

With respect to the rotational movement, the same effect can be obtained by fixing the table 6 and rotating the target 4, so that it can be appropriately selected in practical use.

Even if the magnetic circuit shown in FIG. 3 is operated in the same manner as described above, the utilization rate of the target 4 is greatly expanded.

[0020]

As described above, in the magnetron electrode of the present invention, the yoke and the permanent magnet forming the magnetic circuit having a uniform magnetic field peak value reciprocate linearly in the radial direction of the target while the central axis of the target is being moved. Because of the rotational movement, the magnetic field required for magnetron discharge can be uniformly applied in a wide area of the target, the target utilization rate can be greatly improved, and the film thickness distribution of the film can be made more uniform.

[Brief description of the drawings]

FIG. 1 is a sectional view of a magnetron electrode of the present invention.

FIG. 2 is a perspective view of a conventional magnetron electrode.

FIG. 3 is a perspective view of another conventional magnetron electrode.

FIG. 4 is a perspective view of a conventional elliptical magnetron electrode.

[Explanation of symbols]

 1 (Circular) Yoke 2,3,11 Permanent Magnet 4 Target 5 Sputtering Area 6 (Rotation) Table 7 Magnetic Field Line 8 Groove 9 Groove 10 Magnetic Circuit 12a, 12b Pole Piece 13 Base Plate

Claims (2)

[Claims] 1. In a magnetron electrode having a magnetic circuit in which a permanent magnet is fixed on a yoke, the outer diameter of the magnetic circuit is made smaller than the outer diameter of the target so that the magnetic circuit reciprocates linearly in the radial direction of the target. A magnetron electrode characterized by being configured to rotate about a central axis. 2. The magnetron electrode according to claim 1, wherein the magnetic circuit reciprocates in the radial direction of the target and at the same time the target rotates.