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JPH0794989A - Ceramic sheet and production of ceramic package - Google Patents

Ceramic sheet and production of ceramic package

Info

Publication number
JPH0794989A
JPH0794989A JP23931993A JP23931993A JPH0794989A JP H0794989 A JPH0794989 A JP H0794989A JP 23931993 A JP23931993 A JP 23931993A JP 23931993 A JP23931993 A JP 23931993A JP H0794989 A JPH0794989 A JP H0794989A
Authority
JP
Japan
Prior art keywords
thick film
ceramic
sheet
ceramic package
resin sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP23931993A
Other languages
Japanese (ja)
Inventor
Takeshi Yamanaka
剛 山中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP23931993A priority Critical patent/JPH0794989A/en
Publication of JPH0794989A publication Critical patent/JPH0794989A/en
Withdrawn legal-status Critical Current

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  • Producing Shaped Articles From Materials (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To provide a ceramic package manufacturing method capable of simultaneously forming projections on the bottom of a ceramic package by the thermal press-contacting process of plural thick film sheets. CONSTITUTION:Plural square-like ceramic-made thick film sheets 14, 14', 14'' are laminated on a metallic back plate 42 through a resin sheet 44 forming through holes 43 on prescribed positions, these sheets are thermally pressed by thermal pressing from the upper part of the sheets and electrode forming parts on the bottom of the lowermost layer sheet 14 are extruded into the through holes 43 of the resin sheet 44 to form projections 32.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、セラミック材料からな
るセラミックシート及びセラミックパッケージの製造方
法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a ceramic sheet and a ceramic package made of a ceramic material.

【0002】[0002]

【従来の技術】例えば、水晶振動子やSAWフィルタ等
の素子の収納容器としては、図8に示すように、セラミ
ックシートであるベース(1)とキャップ(2)とを具
備したセラミックパッケージ(3)がある。
2. Description of the Related Art For example, as an accommodating container for elements such as a crystal oscillator and a SAW filter, as shown in FIG. 8, a ceramic package (3) having a base (1) which is a ceramic sheet and a cap (2) is used. ).

【0003】上記ベース(1)を製造するに際しては、
図9に示すように、ドクターブレード法が用いられ、先
ず供給用ドラム(6)に巻装したプラスチック材料から
なる長尺なキャリアテープ(7)を順次矢印方向に送り
つつ、その表面(8)に、筒体(9)のブレード状開口
(10)からセラミック材料又はセラミックとガラス混合
材料からなるスラリー状材料(11)を供給して刷りきり
状に塗布し、キャリアテープ(7)上に一定厚さに材料
(11)を成膜した後、乾燥炉(12)を通過させて半乾燥
により溶剤を乾燥させ、厚膜のセラミック生シート(1
3)を形成し、その後、図10(a)に示すように、上記
生シート(13)を方形状に裁断して形成した3枚の厚膜
シート(14)(14')(14'')を一組として、その内の
2枚の厚膜シート(14')(14'')の各中央部を小大寸
法にて打ち抜いて相異なる小大形開口を有する方形枠体
を形成する。そして、図10(b)に示すように、それら
を他方の厚膜シート(14)上に順次、3段に積層した
後、上方から熱プレスにより押圧して熱圧着した後、焼
成して、中間内壁面に段部(15)を持つ階段壁面の横断
面方形状収納用2段凹部(16)を設ける。キャップ
(2)も同じ要領で形成される。
When manufacturing the base (1),
As shown in FIG. 9, a doctor blade method is used. First, a long carrier tape (7) made of a plastic material wound around a supply drum (6) is sequentially fed in the direction of the arrow while its surface (8) is being fed. , A slurry-like material (11) made of a ceramic material or a mixed material of ceramic and glass is supplied from the blade-like opening (10) of the cylindrical body (9) and applied in a form of a final impression, and is fixed on the carrier tape (7). After the material (11) is deposited to a thickness, it is passed through a drying oven (12) to dry the solvent by semi-drying, and the thick ceramic raw sheet (1
3), and then, as shown in FIG. 10 (a), three thick film sheets (14) (14 ') (14'') formed by cutting the raw sheet (13) into a rectangular shape. ) As a set, two central thick film sheets (14 ') and (14'') are punched out in small and large sizes to form a rectangular frame body having different small and large openings. . Then, as shown in FIG. 10 (b), they are sequentially laminated on the other thick film sheet (14) in three layers, and then pressed by a hot press from above to be thermocompression bonded, followed by firing, A two-step recess (16) for storing a rectangular cross section of a staircase wall having a step (15) on the intermediate inner wall surface is provided. The cap (2) is formed in the same manner.

【0004】そして、図8に示すように、上記ベース
(1)の段部(15)に導電性接着剤、例えば、銀ペース
ト(20)を介して水晶振動子等の素子(21)の周端部を
固着して振動自在に収納・保持すると共に、上記ベース
(1)の表面に、端子リード部(22)を形成し、底面
(23)の電極形成部(24)(25)に外部電極(26)(2
7)を形成し、この外部電極(26)(27)を上記端子リ
ード部(22)及び銀ペースト(20)を介して素子(21)
の一対の電極(28)(29)に夫々接続した後、ベース
(1)の上面に封止剤(30)を介してキャップ(2)を
封着する。
Then, as shown in FIG. 8, the periphery of the element (21) such as a crystal unit is attached to the step (15) of the base (1) through a conductive adhesive, for example, a silver paste (20). The ends are fixed and stored and held so that they can vibrate freely, and the terminal leads (22) are formed on the surface of the base (1), and externally formed on the electrode forming parts (24) (25) of the bottom surface (23). Electrode (26) (2
7) is formed, and the external electrodes (26) and (27) are connected to the element lead (22) and the silver paste (20) through the element (21).
After connecting to the pair of electrodes (28) and (29) respectively, the cap (2) is sealed on the upper surface of the base (1) via the sealant (30).

【0005】上記構成のセラミックパッケージ(3)
は、プリント基板等の表面に直接半田付け等によって所
謂表面実装される。ところが、プリント基板上に上記セ
ラミックパッケージ(3)を載置すると、セラミックパ
ッケージ(3)の底面とプリント基板の上面との間に、
外部電極(26)(27)の突出寸法(約20μm厚)と略同
一寸法の僅かな隙間が形成され、このため半田に含まれ
る導電性を有するフラックスが、毛細管現象により上記
隙間内に奥深く進入して短絡するおそれがある。
Ceramic package (3) having the above structure
Are so-called surface-mounted by soldering or the like directly on the surface of a printed circuit board or the like. However, when the ceramic package (3) is placed on the printed circuit board, a space between the bottom surface of the ceramic package (3) and the upper surface of the printed circuit board is
A small gap is formed that is approximately the same size as the protruding size (about 20 μm thickness) of the external electrodes (26) (27). Therefore, the conductive flux contained in the solder penetrates deeply into the gap due to the capillary phenomenon. May cause a short circuit.

【0006】そこで、表面実装時に毛細管現象が発生す
るのを防止するため、セラミックパッケージ(3)の底
面(23)とプリント基板との間の隙間が広くなるよう
に、セラミックパッケージ(1)の底面(23)に所定突
出寸法(約300μm厚)の突起を形成している。従来
は、セラミックパッケージ(3)の製造工程の後工程に
突起形成工程を設け、この突起形成工程において、上記
外部電極(26)(27)に金等をバンピングしたり、上記
外部電極(26)(27)に導電材を複数層に塗布したり、
あるいは、セラミックパッケージ(3)の底面に部分的
にセラミック材料等により厚膜印刷したりして、セラミ
ックパッケージ(3)の底面に突起を形成していた。
Therefore, in order to prevent the capillary phenomenon from occurring during surface mounting, the bottom surface of the ceramic package (1) should be widened so that the gap between the bottom surface (23) of the ceramic package (3) and the printed circuit board becomes wide. A protrusion having a predetermined protrusion size (thickness of about 300 μm) is formed on (23). Conventionally, a protrusion forming step is provided after the manufacturing process of the ceramic package (3), and gold or the like is bumped to the external electrodes (26) (27) or the external electrode (26) is formed in the protrusion forming step. Apply multiple layers of conductive material to (27),
Alternatively, the bottom surface of the ceramic package (3) is partially thick-film printed with a ceramic material or the like to form protrusions on the bottom surface of the ceramic package (3).

【0007】[0007]

【発明が解決しようとする課題】従来のセラミックパッ
ケージ(3)の製造方法によれば、セラミックパッケー
ジの表面実装時に、毛細管現象が発生するのを防止する
ため、セラミックパッケージの製造工程の後工程に突起
形成工程を設け、この突起形成工程で突起を形成してい
たので、上記突起を形成するための特別の工程及び装置
が別途に必要となり、それだけ製造に時間がかかって作
業性が悪くなると共に、製造コストが高くつくという問
題があった。
According to the conventional method for manufacturing a ceramic package (3), in order to prevent the capillary phenomenon from occurring during surface mounting of the ceramic package, it is necessary to perform a subsequent step of the manufacturing process of the ceramic package. Since the projection forming step is provided and the projection is formed in this projection forming step, a special step and apparatus for forming the projection are separately required, and it takes much time to manufacture and workability deteriorates. However, there was a problem that the manufacturing cost was high.

【0008】本発明は、上記問題点に鑑み提案されたも
ので、複数枚の厚膜シートの熱圧着工程で同時に突起を
形成することができるセラミックシート及びセラミック
パッケージの製造方法を提供することを目的としてい
る。
The present invention has been proposed in view of the above problems, and it is an object of the present invention to provide a method for manufacturing a ceramic sheet and a ceramic package, which can simultaneously form protrusions in a thermocompression bonding process of a plurality of thick film sheets. Has an aim.

【0009】[0009]

【課題を解決するための手段】本発明は、上記目的を達
成するため、複数枚の方形状のセラミック製厚膜シート
を、所定部位に透孔を形成した樹脂シートを介して金属
製のバックプレート上に積層載置し、この厚膜シートを
上方から熱プレスにより押圧して熱圧着すると同時に、
最下層の厚膜シートの一部を樹脂シートの透孔内に押出
成形してセラミックシートの底面に突起を形成するよう
にしたものである。
In order to achieve the above object, the present invention provides a plurality of rectangular ceramic thick film sheets made of metal through a resin sheet having through holes formed at predetermined positions. Laminate it on the plate, press this thick film sheet from above with a hot press to perform thermocompression bonding, and at the same time,
A portion of the bottom thick film sheet is extruded into the through holes of the resin sheet to form protrusions on the bottom surface of the ceramic sheet.

【0010】また、同じ要領で、セラミックパッケージ
の最下層の厚膜シートの電極形成部に突起を形成しても
よく、あるいは、最下層の厚膜シートの略中央部に突起
を形成してもよい。
Further, in the same manner, a protrusion may be formed on the electrode forming portion of the lowermost thick film sheet of the ceramic package, or a protrusion may be formed substantially at the center of the lowermost thick film sheet. Good.

【0011】[0011]

【作用】複数枚の厚膜シートの熱圧着と同時に、最下層
の厚膜シートの底面に突起を形成することができる。
Function: At the same time as thermocompression bonding of a plurality of thick film sheets, a projection can be formed on the bottom surface of the lowermost thick film sheet.

【0012】[0012]

【実施例】以下本発明に係る製造方法の実施例を図1乃
至図7を参照しながら説明する。尚、図8乃至図10に示
したものと同一物には同一符号を付して説明を省略す
る。
Embodiments of the manufacturing method according to the present invention will be described below with reference to FIGS. The same parts as those shown in FIGS. 8 to 10 are designated by the same reference numerals, and the description thereof will be omitted.

【0013】[実施例1]図2に示すように、セラミッ
クパッケージ(31)の底面(23)の長手方向両側縁に
は、外部電極(26)(27)が形成される電極形成部(2
4)(25)に突起(32)が一体に突設されている。この
突起(32)の突出寸法は、プリント基板(33)への表面
実装時、毛細管現象の発生防止可能な寸法、すなわち、
半田に含まれる導電性を有するフラックスが毛細管現象
により、プリント基板(33)の表面(34)とセラミック
パッケージ(31)の底面(23)との間に進入するおそれ
のない寸法、例えば、約300μm厚に設定されている。
[Embodiment 1] As shown in FIG. 2, external electrodes (26) and (27) are formed on both sides of the bottom surface (23) of the ceramic package (31) in the longitudinal direction.
4) The projection (32) is integrally formed on the (25). The protrusion size of the protrusion (32) is a size capable of preventing the occurrence of a capillary phenomenon during surface mounting on the printed circuit board (33), that is,
The conductive flux contained in the solder has a dimension such that it may not enter between the surface (34) of the printed board (33) and the bottom surface (23) of the ceramic package (31) due to the capillary phenomenon, for example, about 300 μm. It is set to thick.

【0014】上記セラミックパッケージ(31)の突起
(32)は、次の要領で形成される。先ず、図1に示すよ
うに、上面(41)が平坦な金属製のバックプレート(4
2)上に、上記セラミックパッケージ(31)の電極形成
部(24)(25)に対応させて透孔(43)を形成した突起
高さと略同一厚さ寸法の樹脂シート(44)を設置し、こ
の樹脂シート(44)上に、順次、3枚の厚膜シート(1
4)(14')(14'')を積層載置する。その後、80〜1
20°Cの加熱雰囲気下で、プレス(図示省略)により
厚膜シート(14)(14')(14'')を上方から押圧す
る。この押圧により、厚膜シート(14)(14')(1
4'')が熱圧着されると同時に、最下層の厚膜シート(1
4)の底面(23)の透孔対向部分が上記樹脂シート(4
4)の各透孔(43)内に押出されて、電極形成部(24)
(25)に突起(32)が夫々形成される。厚膜シート(1
4)(14')(14'')が熱圧着され、最下層の厚膜シート
(14)の底面(23)に突起(32)が形成されると、10
00°C程度で焼成し、図3及び図4に示すように、セ
ラミックシートであるベース(1)を形成する。 こう
して形成したベース(1)の段部(15)に、従来と同じ
ように、導電性接着剤、例えば、銀ペースト(20)を介
して水晶振動子等の素子(22)の周端部を固着して振動
自在に収納・保持すると共に、上記ベース(1)の上端
面及び側面には端子リード部(22)を形成し、又ベース
(1)の底面(23)の電極形成部(24)(25)には、突
起(32)を囲繞するようにして外部電極(26)(27)を
形成し、この外部電極(26)(27)を端子リード部(2
2)及び銀ペースト(20)を介して素子(22)の一対の
電極(28)(29)に夫々接続した後、ベース(1)の上
面に封止剤(30)を介してキャップ(2)を封着する。
The protrusions (32) of the ceramic package (31) are formed in the following manner. First, as shown in FIG. 1, a metal back plate (4
2) On top of this, install a resin sheet (44) of approximately the same thickness as the height of the protrusions in which the through holes (43) are formed in correspondence with the electrode forming portions (24) (25) of the ceramic package (31). , Three thick film sheets (1
4) Lay down (14 ') and (14''). Then 80-1
The thick film sheets (14), (14 ') and (14'') are pressed from above by a press (not shown) in a heating atmosphere of 20 ° C. By this pressing, the thick film sheet (14) (14 ') (1
4 '') is thermocompression bonded and at the same time the bottom thick film sheet (1
The portion of the bottom surface (23) of the (4) facing the through hole is the resin sheet (4
4) Extruded into each through hole (43) of 4) to form the electrode forming part (24)
Protrusions (32) are formed on (25), respectively. Thick film sheet (1
4) When the protrusions (32) are formed on the bottom surface (23) of the bottom thick film sheet (14) by thermocompression bonding of (14 ') and (14''), 10
The base (1), which is a ceramic sheet, is formed by firing at about 00 ° C, as shown in FIGS. 3 and 4. On the stepped portion (15) of the base (1) thus formed, the peripheral end portion of the element (22) such as a crystal resonator is attached via a conductive adhesive, for example, a silver paste (20) as in the conventional case. The base (1) is firmly fixed and vibratably accommodated and held, and terminal lead portions (22) are formed on the upper and side surfaces of the base (1), and the electrode forming portion (24) of the bottom surface (23) of the base (1) is formed. ) (25), the external electrodes (26) (27) are formed so as to surround the projection (32), and these external electrodes (26) (27) are connected to the terminal lead portion (2).
2) and a pair of electrodes (28) (29) of the element (22) via silver paste (20) respectively, and then cap (2) on the upper surface of the base (1) via a sealant (30). ) Is sealed.

【0015】そして、上記構成のセラミックパッケージ
(31)を表面実装する場合は、セラミックパッケージ
(31)を、図5に示すように、プリント基板(33)の表
面(34)に載置し、その外部電極(26)(27)を、プリ
ント基板(33)の表面に半田(45)により半田付けす
る。このときセラミックパッケージ(31)の底面(23)
とプリント基板(33)の表面(34)との間には、突起
(32)により、毛細管現象の発生するおそれのない間隔
寸法の隙間(46)が形成されるので、半田(45)に含ま
れている溶融したフラックスが上記隙間(46)に奥深く
進入することがなく、短絡が防止される。
When the ceramic package (31) having the above structure is surface-mounted, the ceramic package (31) is placed on the surface (34) of the printed circuit board (33) as shown in FIG. The external electrodes (26) (27) are soldered to the surface of the printed board (33) with solder (45). At this time, the bottom surface (23) of the ceramic package (31)
Between the surface of the printed circuit board (33) and the surface (34) of the printed board (33), the projection (32) forms a gap (46) having a space dimension that does not cause capillary action, and thus is included in the solder (45). The melted flux does not penetrate deeply into the gap (46) and a short circuit is prevented.

【0016】[実施例2]実施例1で説明した本発明の
方法により、図6及び図7に示すように、セラミックパ
ッケージ(31)を構成するベース(1)の底面(23)の
略中央部に突起(51)を形成してもよい。この場合は樹
脂シート(44)の略中央部に透孔を形成する。
[Embodiment 2] By the method of the present invention described in Embodiment 1, as shown in FIGS. 6 and 7, substantially the center of the bottom surface (23) of the base (1) constituting the ceramic package (31). You may form a protrusion (51) in a part. In this case, a through hole is formed in the resin sheet (44) at a substantially central portion.

【0017】[0017]

【発明の効果】本発明によれば、プレスによる複数枚の
厚膜シートの熱圧着と同時に、積層された厚膜シートの
最下層の厚膜シートの底面に突起を形成することが可能
となり、従来のように、突起を形成するための突起形成
工程及び装置を特別に設ける必要がなく、それだけセラ
ミックパッケージの製造の時間を短縮することができ、
作業性が向上すると共に、製造コストが安くなる。
According to the present invention, it is possible to form a protrusion on the bottom surface of the lowermost thick film sheet of the stacked thick film sheets at the same time as the thermocompression bonding of the plurality of thick film sheets by pressing. Unlike the conventional case, it is not necessary to specially provide a protrusion forming step and a device for forming a protrusion, and thus it is possible to shorten the manufacturing time of the ceramic package accordingly.
Workability is improved and manufacturing cost is reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る製造方法の実施例を示す断面説明
図。
FIG. 1 is a sectional explanatory view showing an embodiment of a manufacturing method according to the present invention.

【図2】本発明方法により製造したセラミックパッケー
ジの縦断面図。
FIG. 2 is a vertical cross-sectional view of a ceramic package manufactured by the method of the present invention.

【図3】電極形成部に突起を形成したベースの底面図。FIG. 3 is a bottom view of a base having a projection formed on an electrode forming portion.

【図4】図3の側面図。FIG. 4 is a side view of FIG.

【図5】セラミックパッケージの表面実装の要領を示す
正面図。
FIG. 5 is a front view showing a surface mounting procedure of a ceramic package.

【図6】本発明方法により製造したベースの他の具体例
を示す底面図。
FIG. 6 is a bottom view showing another specific example of the base manufactured by the method of the present invention.

【図7】図6の側面図。FIG. 7 is a side view of FIG.

【図8】従来のセラミックパッケージの一例を示す概略
側断面図。
FIG. 8 is a schematic side sectional view showing an example of a conventional ceramic package.

【図9】セラミックパッケージの製造方法の一例を示す
ドクターブレード法の概略側面図。
FIG. 9 is a schematic side view of a doctor blade method showing an example of a method for manufacturing a ceramic package.

【図10】(a)(b)は図9に示すドクターブレード法
によって形成した厚膜シートからセラミックパッケージ
を形成する工程を示す各斜視図。
10A and 10B are perspective views showing steps of forming a ceramic package from a thick film sheet formed by the doctor blade method shown in FIG. 9.

【符号の説明】[Explanation of symbols]

14、14'、14'' 厚膜シート 24、25 電極形成部 32 突起 42 バックプレート 43 透孔 44 樹脂シート 14, 14 ', 14' 'Thick film sheet 24, 25 Electrode forming part 32 Protrusion 42 Back plate 43 Through hole 44 Resin sheet

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 複数枚の方形状のセラミック製厚膜シー
トを、所定部位に透孔を形成した樹脂シートを介して金
属製のバックプレート上に積層載置し、この厚膜シート
を上方から熱プレスにより押圧して熱圧着すると同時
に、最下層の厚膜シートの一部を樹脂シートの透孔内に
押出成形して突起を形成することを特徴とするセラミッ
クシートの製造方法。
1. A plurality of square-shaped ceramic thick film sheets are stacked and mounted on a metal back plate through a resin sheet having through holes formed at predetermined portions, and the thick film sheets are placed from above. A method for producing a ceramic sheet, comprising pressing by a hot press to perform thermocompression bonding, and at the same time, a part of the bottom thick film sheet is extruded into the through holes of the resin sheet to form protrusions.
【請求項2】 複数枚の方形状のセラミック製厚膜シー
トを、所定部位に透孔を形成した樹脂シートを介して金
属製のバックプレート上に積層載置し、この厚膜シート
を上方から熱プレスにより押圧して熱圧着すると同時
に、最下層の厚膜シートの底面の電極形成部を樹脂シー
トの透孔内に押出成形して突起を形成することを特徴と
するセラミックパッケージの製造方法。
2. A plurality of rectangular ceramic thick film sheets are stacked and mounted on a metal back plate through a resin sheet having through holes formed at predetermined portions, and the thick film sheets are placed from above. A method of manufacturing a ceramic package, comprising pressing by a hot press to perform thermocompression bonding, and at the same time, forming an protrusion by extruding an electrode forming portion on a bottom surface of a lowermost thick film sheet into a through hole of a resin sheet.
【請求項3】 複数枚の方形状のセラミック製厚膜シー
トを、略中央部に透孔を形成した樹脂シートを介して金
属製のバックプレート上に積層載置し、この厚膜シート
を上方からの熱プレスにより押圧して熱圧着すると同時
に、最下層の厚膜シートの中央部を樹脂シートの透孔内
に押出形成して突起を形成することを特徴とするセラミ
ックパッケージの製造方法。
3. A plurality of square-shaped ceramic thick film sheets are stacked and mounted on a metal back plate via a resin sheet having a through hole formed at a substantially central portion thereof, and the thick film sheets are placed upward. A method for manufacturing a ceramic package, characterized in that the central portion of the thick film sheet of the lowermost layer is extruded and formed into the through hole of the resin sheet to form a protrusion while being pressed by a heat press from the above to perform thermocompression bonding.
JP23931993A 1993-09-27 1993-09-27 Ceramic sheet and production of ceramic package Withdrawn JPH0794989A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23931993A JPH0794989A (en) 1993-09-27 1993-09-27 Ceramic sheet and production of ceramic package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23931993A JPH0794989A (en) 1993-09-27 1993-09-27 Ceramic sheet and production of ceramic package

Publications (1)

Publication Number Publication Date
JPH0794989A true JPH0794989A (en) 1995-04-07

Family

ID=17042952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23931993A Withdrawn JPH0794989A (en) 1993-09-27 1993-09-27 Ceramic sheet and production of ceramic package

Country Status (1)

Country Link
JP (1) JPH0794989A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5706219A (en) * 1995-01-30 1998-01-06 Sony Magnescale Inc. Interpolation device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5706219A (en) * 1995-01-30 1998-01-06 Sony Magnescale Inc. Interpolation device

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