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JPH0770735A - 加工物表面の耐摩耗性の向上方法及びこれにより処理された加工物 - Google Patents

加工物表面の耐摩耗性の向上方法及びこれにより処理された加工物

Info

Publication number
JPH0770735A
JPH0770735A JP11525894A JP11525894A JPH0770735A JP H0770735 A JPH0770735 A JP H0770735A JP 11525894 A JP11525894 A JP 11525894A JP 11525894 A JP11525894 A JP 11525894A JP H0770735 A JPH0770735 A JP H0770735A
Authority
JP
Japan
Prior art keywords
workpiece
layer
heat treatment
hard material
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11525894A
Other languages
English (en)
Japanese (ja)
Inventor
Norbert M Dingremont
マリー ダングルモント ノルベール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH01599/93A external-priority patent/CH687880A5/de
Application filed by Balzers AG filed Critical Balzers AG
Publication of JPH0770735A publication Critical patent/JPH0770735A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP11525894A 1993-05-27 1994-05-27 加工物表面の耐摩耗性の向上方法及びこれにより処理された加工物 Pending JPH0770735A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CH01599/93A CH687880A5 (de) 1993-05-27 1993-05-27 Verfahren zur Erhoehung der Verschleissfestigkeit von Werkstueckoberflaechen und nach diesem behandetes Werkstueck.
US08/093,361 US5595612A (en) 1993-05-27 1993-07-19 Workpiece with wear resistance coating
US093361 1993-07-19
US01599/93-0 1993-07-19

Publications (1)

Publication Number Publication Date
JPH0770735A true JPH0770735A (ja) 1995-03-14

Family

ID=25688122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11525894A Pending JPH0770735A (ja) 1993-05-27 1994-05-27 加工物表面の耐摩耗性の向上方法及びこれにより処理された加工物

Country Status (3)

Country Link
JP (1) JPH0770735A (de)
DE (1) DE4416525B4 (de)
FR (1) FR2705692B1 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001089856A (ja) * 1999-09-17 2001-04-03 Nippon Coating Center Kk 表面被覆超硬合金およびその製造方法
JP2002020773A (ja) * 2000-07-10 2002-01-23 Japan Science & Technology Corp 自己潤滑機能をもつ表面改質構造およびその製造方法
US6752332B1 (en) 1999-08-06 2004-06-22 Hitachi, Ltd. Electronic fuel injection valve
KR100734404B1 (ko) * 2006-03-06 2007-07-03 (주) 디오브이 유기전계 발광소자 전처리 챔버용 진공장치
CN108300997A (zh) * 2018-03-30 2018-07-20 镇江东艺机械有限公司 一种基于pvd技术的高速切削刀具及制造方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19505258C2 (de) * 1995-02-16 1998-08-06 Samsung Electronics Co Ltd Beschichtungsvorrichtung
DE19544584A1 (de) * 1995-11-30 1997-06-05 Leybold Ag Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material
DE19953598A1 (de) * 1999-11-08 2001-06-07 Bubenzer Gerhard Bremsen Mechanische Bremsvorrichtung
DE102008033977A1 (de) * 2008-07-21 2010-02-04 Iplas Innovative Plasma Systems Gmbh Verfahren zur Oberflächenbeschichtung mit Schichtmaterialien

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI63783C (fi) * 1981-09-30 1983-08-10 Kymin Oy Kymmene Ab Foerfarande foer nitrering vid laogt tryck med hjaelp av glimurladdning
JPS5864377A (ja) * 1981-10-12 1983-04-16 Nachi Fujikoshi Corp 表面被覆工具およびその製造方法
FR2525636A1 (fr) * 1982-04-23 1983-10-28 Creusot Loire Methode et dispositif de nitruration ionique d'orifices allonges de petits diametres de pieces en aciers
CH658545A5 (de) * 1982-09-10 1986-11-14 Balzers Hochvakuum Verfahren zum gleichmaessigen erwaermen von heizgut in einem vakuumrezipienten.
JPS5983761A (ja) * 1982-11-04 1984-05-15 Kawasaki Heavy Ind Ltd 耐摩耗性鉄鋼製品
DE3406953C2 (de) * 1983-04-19 1986-03-13 Balzers Hochvakuum Gmbh, 6200 Wiesbaden Verfahren zum Erwärmen von Heizgut in einem Vakuumrezipienten
CH671407A5 (de) * 1986-06-13 1989-08-31 Balzers Hochvakuum
JP2689146B2 (ja) * 1988-10-31 1997-12-10 新日本製鐵株式会社 硬質炭素膜のコーティング方法
JPH03232957A (ja) * 1990-02-09 1991-10-16 Nippon Steel Corp 耐摩耗部材の製造方法
FR2682125A1 (fr) * 1991-10-07 1993-04-09 Nitruvid Procede de traitement pour deposer une couche de carbone en phase vapeur sur la surface d'une piece metallique et piece ainsi obtenue.
US5176760A (en) * 1991-11-22 1993-01-05 Albert Young Steel article and method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6752332B1 (en) 1999-08-06 2004-06-22 Hitachi, Ltd. Electronic fuel injection valve
JP2001089856A (ja) * 1999-09-17 2001-04-03 Nippon Coating Center Kk 表面被覆超硬合金およびその製造方法
JP2002020773A (ja) * 2000-07-10 2002-01-23 Japan Science & Technology Corp 自己潤滑機能をもつ表面改質構造およびその製造方法
KR100734404B1 (ko) * 2006-03-06 2007-07-03 (주) 디오브이 유기전계 발광소자 전처리 챔버용 진공장치
CN108300997A (zh) * 2018-03-30 2018-07-20 镇江东艺机械有限公司 一种基于pvd技术的高速切削刀具及制造方法

Also Published As

Publication number Publication date
DE4416525B4 (de) 2008-06-05
FR2705692A1 (fr) 1994-12-02
DE4416525A1 (de) 1994-12-01
FR2705692B1 (fr) 1997-08-29

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