JPH0752567Y2 - Distance measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a distance measuring device for measuring a distance between two points,
In particular, the present invention relates to a distance measuring device in which a distance measuring mechanism is added to a two-system microscope in which two microscope lens barrels are installed in one housing.

[Conventional technology]

Conventionally, in this type of distance measuring device, a stage moving distance measuring mechanism is provided on the sample stage, and the microscope barrel is one.

[Problems to be Solved by the Invention] Since the conventional distance measuring device described above has only one microscope lens barrel, when measuring the distance between two points longer than the microscope field of view, There was a drawback that the measurement locations could not be seen in the microscope field at the same time.

An object of the present invention is to provide a distance measuring device that solves the above problems.

[Means for solving problems]

The distance measuring device according to the present invention has a housing, two microscope lens barrels, a first measuring mechanism, and a second measuring mechanism, and the housing carries a sample to be measured. One, two
The microscope barrel of the stand is attached to the housing, one microscope barrel is fixed at a fixed position, and the other microscope barrel is movably supported with respect to the fixed one microscope barrel. The first measurement mechanism is for observing a measurement point of a sample through an objective lens of a lens barrel, and the first measurement mechanism is the other microscope with respect to a reference line provided in the field of view of the eyepiece tube portion of one fixed microscope barrel. The distance to the reference line provided in the field of view of the eyepiece tube portion of the lens barrel is measured as the distance between the objective lenses of the two microscope lens barrels, and the second measurement mechanism is for each microscope lens barrel. It is characterized in that the distance to the measurement point of the sample with respect to the reference line provided in the field of view of the eyepiece tube portion is measured.

〔Example〕

 Next, the present invention will be described with reference to the drawings.

(Embodiment 1) FIG. 1 is a distance measuring device in which a distance measuring function is added to a two-system microscope in which two microscope lens barrels are installed in one casing for explaining a first embodiment of the present invention. It is a block diagram of.

As shown in FIG. 1, two microscope barrels 5, a stage 3, and a stage moving mechanism 2 are installed in a housing 1 to form a two-system microscope, and a distance measuring sample 4 is mounted on the stage 3. Set up. The epi-illumination method is adopted as the illumination method of the microscope used in this case, and the light source 7 is installed in the lens barrel 5 portion between the objective lens 6 and the eyepiece lens 8.

A lens barrel moving mechanism 9 is installed between the lens barrel 5 and the housing 1, and a linear scale 10 is mounted on the housing 1 to measure the moving distance of the lens barrel 5.
Install. In this case, the linear scale is 0 with a vernier scale.
The one that can be read up to 1 mm was used.

On the other hand, a micrometer 11 is installed in each of the two lens barrels 5 at the eyepiece 8 and the distance from a predetermined place in the visual field is measured.

In the field of view of the micrometer 11, as shown in FIG. 3, a reference line 11 fixed at the center of the field of view, a scale 112 intersecting the reference line 111 at a right angle, and a reference for adjusting to a predetermined position in the field of view A moving line 113 that moves in parallel with the line 111 is provided.

Next, the operation of distance measurement using this device will be described.

First, the sample 4 is placed on the sample table 3, and the sample 4 is placed in the sample while watching the visual field image of the eyepiece 8 of the fixed micrometer 11.
The sample stage moving mechanism 2 is operated so that one of the upper two measurement points is located. Next, the knob of the lens barrel moving mechanism 9 is turned so that the other measurement point falls within the field of view of the eyepiece 8 of the other micrometer 11. Thus, as the first measuring mechanism, the distance between the reference lines 111 of the two micrometers 11 becomes the distance between the objective lenses 6 (the so-called linear scale 10 distance). Let this distance be Lc.

Then, in the micrometer 11 on the right side, turn the knob to align the moving line 113 with the measurement point. Then, the distance from the reference line 111 is read by the scale 112. This distance is La
And

Similarly, turn the knob on the left micrometer 11 to align the moving line 113 with the target measurement point, and move the scale 112.
The distance from the reference line 111 is read by. This distance is Lb
And In this way, the distance to the measurement point with respect to the reference line is measured as the second measurement mechanism.

Thus, the distance X between the two measurement points on the sample 4 is X = Lc + La + Lb. However, La and Lb have a positive or negative sign depending on whether the moving line 113 is on the other side of the micrometer or on the opposite side with respect to the reference line 111. For example, Lc = 31.2 mm, La = 0.2 mm, Lb = 0.3 mm, and both micrometers
If the 11 moving lines 113 are both on the left side of the reference line 111, the measurement result of X = 31.2 mm−0.2 mm + 0.3 mm = 31.3 mm is obtained.

(Embodiment 2) FIG. 2 is a configuration diagram for explaining the configuration of Embodiment 2 of the present invention.

In this two-system microscope, a TV camera 12 is installed at the eyepiece 8 of the two-system microscope of the first embodiment, and
The image signal from the TV camera 12 is connected to the display device 13 having a built-in video scale to measure the distance within the field of view, and the linear scale 10 is replaced with a pulse generation sensor corresponding to the moving distance of the lens barrel 5, The moving distance of the tube 5 is displayed on the digital counter 14, and the distance between the predetermined places of the sample is measured by the same method as in the first embodiment.

In this embodiment, both fields of view can be viewed on the TV screen at the same time, and the total accuracy is 0.1 mm in the first embodiment.
In this embodiment, there is an advantage that the overall accuracy can be improved to 0.0001 mm by improving the accuracy of the linear scale 10.

[Effect of device]

As described above, according to the present invention, in a two-system microscope in which two microscopes are installed in one housing, a mechanism for moving the lens barrel and a mechanism for measuring the distance between the objective lenses of the two microscopes are connected. When a distance between two points longer than the microscope visual field is measured by having a mechanism for measuring the distance within the visual field, which is arranged in the spectacle cylinder, the distance measurement is performed while simultaneously viewing the measurement location between the two points within the visual field. There is an effect that can be done.

[Brief description of drawings]

FIG. 1 is a block diagram showing a first embodiment of the present invention, FIG. 2 is a block diagram showing a second embodiment of the present invention, and FIG. 3 is a micrometer 11.
FIG. 3 is a schematic view in the visual field of FIG. DESCRIPTION OF SYMBOLS 1 ... Housing, 2 ... Sample stand moving mechanism 3 ... Sample stand, 4 ... Sample 5 ... Lens barrel, 6 ... Objective lens 7 ... Light source, 8 ... Eyepiece 9 ... Lens barrel moving mechanism, 10 ... Linear scale 11 ... Measurement Subtotal, 12 ... TV camera 13 ... Image display device, 14 ... Digital counter

Claims (1)

[Scope of utility model registration request] 1. A distance measuring device having a housing, two microscope lens barrels, a first measuring mechanism, and a second measuring mechanism, wherein the housing carries a sample to be measured. The two microscope lens barrels are attached to the housing, one microscope lens barrel is fixed at a fixed position, and the other microscope lens barrel is fixed to one fixed microscope lens barrel. Movably supported,
The first measurement mechanism is for observing a measurement point of a sample through an objective lens of a microscope lens barrel, and the first measurement mechanism is for a reference line provided in the field of view of the eyepiece tube portion of one fixed microscope lens barrel. The distance to the reference line provided in the field of view of the eyepiece tube portion of the microscope lens barrel is measured as the distance between the objective lenses of the two microscope lens barrels. A distance measuring device for measuring the distance to the measurement point of the sample with respect to the reference line provided in the field of view of the eyepiece tube section.